JPH04175646A - X-ray mapping device - Google Patents

Abstract

PURPOSE:To simplify an image process by using one and the same sensor for detecting a distribution of an element contained in a sample through irradiation of fluorescent X-rays and an optical image of the sample through irradiation of visible light. CONSTITUTION:In the case of measurement of a distribution of an element contained in a sample 4, a primary X-ray beam (x) is uniformly irradiated over the entire surface of a sample 4 on a sample stage 3 so that fluorescent X-rays K are generated. The X-rays K may be detected by a detector 13 which can detect not only X-rays but also visible light, by way of a collimator 12. In the case of observing an optical image of the sample 4, visible light S from a light source is irradiated uniformly over the entire surface of the sample 4, and the reflecting light thereof is detected by the detector 13 by way of the collimator 12, similar to the measurement of the X-rays K as mentioned above. An output from the detector 13 is delivered through an interface 14 and a computer 7 to an image processor 8 for processing the output.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to an X-ray manipulating device.

[Conventional technology]

FIG. 2 shows a conventional X-ray mapping device. In the figure, incident X-rays from an X-ray tube 1 are irradiated onto a part of a sample 4 on a sample stage 3 through a collimator 2, and fluorescence
Generate a line. For example, this fluorescent X-ray is detected by a semiconductor detector (
It is detected by an X-ray detector 5 consisting of an SSD. The output from the X-ray detector 5 is processed by a pulse processor 6 to determine the elements contained in the sample and their intensities. Thereafter, the signal from this pulse processor 6 is input to the computer 7, and the image is displayed in the image processing device 8. In order to perform measurement over the entire sample stage 4, the measurement points are divided and set within a predetermined mapping area including the sample stage 4, and a signal from the computer 7 is sent to the stage controller 9 which moves the sample stage 3 in a predetermined direction. Specimen stage 3 by inputting
, and each measurement point is moved to a position where the X-rays from the X-ray tube 1 are irradiated. Fluorescent X-rays are then detected at each measurement point, and the distribution of elements contained in the entire sample 4 is measured from the type and intensity of the fluorescent X-rays at each measurement point.

In addition, the image processing is performed by irradiating the sample 4 with visible light (not shown), capturing the optical image with a television camera 10 provided above the sample 4, and displaying it on the television monitor 11. By making the distribution of the contained elements of the sample 4 displayed as an image by the device 8 correspond to the optical image of the sample 4 displayed on the television monitor 11, it is possible to accurately obtain positional information of the contained elements in the sample 4. .

[Problem to be solved by the invention]

However, in the above measurement method, it is necessary to carry out measurements over a very long period of time because measurements are taken at a large number of minute measurement points within the mapping area. Since a television camera 10 and a television monitor 11 for capturing and displaying the optical image of No. 4 are also required, there is a drawback that the entire apparatus becomes large-scale.

Furthermore, in order to make the distribution of elements contained in the sample 4 correspond to the optical image of the sample 4, the position information on the television monitor 11 and the position information of the sample 4 (i.e., the position information from the sample stage 3) are accurately matched. This was necessary and a very time-consuming task.

The present invention has been made with the above-mentioned considerations in mind, and an object thereof is to provide an X-ray mapping device that enables miniaturization of the device and simplification of image processing.

[Means to solve the problem]

In order to achieve the above object, the X-ray mapping device according to the present invention uses a detector capable of detecting visible light as a detector for detecting fluorescent X-rays, and inputs a signal from this detector to a computer. , image processing is performed based on the output from this computer.

[Function] According to the above-described characteristic structure, image processing is simplified because the distribution of elements contained in the sample by fluorescent X-rays and the optical image of the sample by visible light irradiation are detected by the same sensor. Also,
Since a stage controller for moving the sample stage, a television camera, and a television monitor are not required, the apparatus can be downsized.

(Example〕 Embodiments of the present invention will be described below based on the drawings.

FIG. 1 shows an example of an X-ray mapping apparatus according to the present invention, and in this figure, the same reference numerals as those shown in FIG. 2 indicate the same or equivalent parts.

In this X-ray mapping device, when first measuring the distribution of elements contained in the sample 4, the primary Xv from the X-ray tube 1 is
Fluorescence XwIIK is generated by irradiating AX uniformly so as to cover the entire sample 4 on the sample stage 3. The fluorescent X-rays are detected via a collimator 12 by a detector 13 (such as a CCD image sensor) capable of detecting not only X-rays but also visible light.

Note that since this collimator 12 is constructed on the principle of a pinhole camera, the magnification of the image can be changed by moving the collimator 12 up and down, and the resolution can be changed by changing the inner diameter of the collimator 12.

Fluorescent light XI incident on each element in the detector 13! In this process, the energy of each fluorescent light X@ is converted into a different electrical signal, and the contained element is determined in the interface 14 including a pulse processor, and the intensity of the element is determined by the number of counts of the electrical signal. You can know. This information is processed by the computer 7 together with the position information of each element of the detector 13, and the distribution of elements contained in the sample 4 is displayed on the image processing device 8.

Next, when observing the optical image of the sample 4, visible light S from a light source (not shown) is uniformly irradiated so as to cover the entire sample 4, and the reflected light is the fluorescent X-ray Similarly,
It is detected by the same detector 13 via a collimator 12. Then, like the output from the detector 13, an optical image of the sample 4 is displayed in the image processing device 8 via the interface 14 and the computer 7 in the same positional relationship as the distribution state of the contained elements.

In this case, since the intensity of fluorescent X-rays is much lower than that of visible light S, there is no effect whether the primary XvAx from the X-ray tube 1 is cut or not.

Furthermore, in the case of measuring the distribution of elements contained in sample 4 by -order X @ There is no need to cut off the visible light S because it is transmitted.

In the above example, a CCD image sensor was used as a detector for detecting X-rays and visible light. However, instead of this CCD image sensor, Csl or Na1 (
A detector capable of detecting both X-rays and visible light may be used by attaching a detector (Tffi) and converting fluorescence XmK into light.

〔Effect of the invention〕

As described above, according to the present invention, image processing is simplified because the distribution of elements contained in a sample by fluorescent X-rays and the optical image of the sample by visible light irradiation are detected by the same sensor. Furthermore, since the entire sample can be measured at once, the time required for measurement can be significantly reduced. Furthermore, since there is no need for a stage controller for moving the sample stage, a television camera, or a television monitor, it is possible to downsize the apparatus.

[Brief explanation of drawings]

FIG. 1 is an overall configuration diagram of an X-ray mapping apparatus showing an embodiment of the present invention. FIG. 2 is an overall configuration diagram showing a conventional X-ray mapping device. 1... X-ray tube, 4... Sample, 7... Computer, 13... Detector, X... (-th order) X-ray, K...
Fluorescence XM, S...Visible light. Applicant: Horiba Ltd. Agent: Patent Attorney: Hideo Fujimoto

Claims (1)

[Claims] Detecting the fluorescent X-rays in an X-ray mapping device that measures the distribution of elements contained in the sample based on the fluorescent X-rays generated by irradiating the sample with X-rays from an X-ray tube. An X-ray mapping device that uses a detector that can also detect visible light, inputs signals from the detector to a computer, and processes images based on the output from the computer.