KR101185786B1 - X-ray microscopy system for tomography - Google Patents

Abstract

PURPOSE: An X-ray microscope system for a tomography is provided to photograph an enlarged tomography image about a movable sample by simultaneously emitting X-rays to the sample in various directions to obtain a tomography image in real time. CONSTITUTION: X-ray generating units(150) are separated around a sample(126) and are radially fixed. An X-ray detecting unit(160) obtains the enlarged image data of the sample. A light source(152) emits X-rays in all directions. A mirror reflects a part of the X-rays to make parallel light with constant thickness and width. A reflection filter forms a short wavelength by reflecting the X-rays.

Description

X-ray microscopy system for tomography

The present invention relates to an X-ray microscopy system, and in particular, real-time tomography imaging of a moving sample can be performed, the amount of X-ray exposure can be greatly reduced, and even inexpensive light sources emitting X-rays in all directions can induce parallel light. The present invention relates to a tomography X-ray microscope system capable of obtaining a clear tomographic image of a sample at a low cost.

Microscopes in which a sample can be enlarged to observe a minute portion generally include an electron microscope and an optical microscope. Among these, electron microscopy requires physical / chemical pretreatment before measuring a sample, so it is impossible to observe biological samples such as cells of living organisms. In addition, since the optical microscope uses visible light as a light source, only the surface of the sample can be observed.

Recently, X-ray microscopy using X-ray wavelength range has emerged. X-ray microscopy has the advantage that the inside of the biological sample can be observed by the transmission properties of the X-ray.

However, such an X-ray microscope has a limitation that can observe the shape of the two-dimensional plane of the sample. For example, it is impossible to acquire a tomographic image of a sample by a general X-ray microscope, and in order to improve this, it takes a long time to obtain a tomographic image to observe X-rays while rotating in a multi-angle direction in the sample. In other words, since acquiring a tomography image of a sample is not real time, magnification of an accurate tomography image is difficult for a sample such as moving microorganisms.

The present inventors have been able to take a tomographic image of a moving sample, reduce the exposure of X-rays, and have researched to obtain clear tomographic image data of a sample. As a result, the inventors have obtained image data of a moving sample simultaneously in different directions. A tomography image can be obtained, and a tomography image can be obtained by a single X-ray irradiation, thereby reducing the amount of X-ray exposure to a sample, and obtaining a high resolution tomography image by guiding X-rays radiating in all directions to parallel light. The technical configuration of the X-ray microscope system can be developed to complete the present invention.

Accordingly, it is an object of the present invention to provide an X-ray microscope system capable of observing a magnified tomographic image of a moving sample in real time by acquiring a tomographic image of a sample in real time.

In addition, another object of the present invention is to provide an X-ray microscope system that can significantly reduce the X-ray exposure to the sample.

In addition, another object of the present invention is to obtain a high-resolution tomographic image without interference of X-rays irradiated from a plurality of X-ray generators by inducing a low-cost light source radiating X-rays in all directions to the parallel light to irradiate the sample An X-ray microscope system can be provided.

The objects of the present invention are not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the present invention provides a plurality of X-ray generating unit which is fixed radially spaced from each other around the sample; And the sample interposed therebetween and fixed to face the X-ray generators in a number corresponding to the number of the X-ray generators, and receiving only X-rays emitted from the X-ray generators facing each other and passing through the sample. And X-ray detectors for acquiring enlarged image data of the sample in different directions, wherein the X-ray generators and the X-ray detectors are fixed without rotation, at the same time, at the same time. Acquiring image data of a sample, wherein the X-ray generators include: a light source that emits X-rays in all directions; A mirror provided in front of the light source and reflecting some of the X-rays to be parallel light having a predetermined thickness and width; And a reflection filter reflecting the X-rays passing through the mirror to a short wavelength, wherein the X-ray microscope system for tomography is included.

In a preferred embodiment, the data processing apparatus for receiving the image data to generate tomographic image data of the sample; And a display unit configured to display the tomography image data as a tomography image.

In an exemplary embodiment, the data processing apparatus includes: a data storage unit configured to receive the image data from the X-ray detectors and to store the image data; A data interpolator for estimating image data at positions between the X-ray generators based on the image data; And an image processor for generating tomographic image data of the sample from the image data of the data storage unit and the data interpolator.

In an exemplary embodiment, the data interpolator estimates image data at positions between the X-ray generators by arithmetically averaging image data of the adjacent X-ray detectors.

In a preferred embodiment, the mirrors are arranged such that the X-rays are irradiated on at least one surface and spaced apart from each other by a predetermined distance, and the plurality of mirrors are laminated to each other to induce parallel light having a constant thickness and width. It consists of two mirrors.

In a preferred embodiment, it further comprises a focusing mirror provided between the light source and the mirror, to guide the path of the X-rays so that the X-rays are concentrated to the mirror.

In an exemplary embodiment, the X-ray detection unit may include: a detection film on which the X-rays passing through the sample are projected; And a transmission filter disposed between the sample and the detection film and formed of a metal film in a mesh form.

In an exemplary embodiment, the X-ray detection unit may include: a transmission filter made of a metal film in a mesh form that suppresses scattering and interference of the X-rays passing through the sample; A scintillator for detecting the X-rays via the transmission filter; An optical lens for enlarging an image of the siltilator; And an image pickup device for picking up an image enlarged by the optical lens.

The present invention has the following excellent effects.

First, according to the tomography X-ray microscope system of the present invention can obtain a tomography image in real time by irradiating X-rays to the sample at the same time in different directions, it is possible to take an enlarged tomography image even for a moving sample It works.

In addition, according to the tomography X-ray microscope system of the present invention, it is possible to obtain a tomographic image of the sample by only one X-ray irradiation in different directions, it is possible to significantly reduce the X-ray exposure to the sample.

In addition, according to the tomography X-ray microscopy system of the present invention, by inducing a low-cost light source radiating X-rays in all directions to the parallel light to irradiate the sample, each X-ray detector is generated from other X-ray generators that do not face It is to provide an X-ray microscope system capable of acquiring high-resolution tomographic images without X-ray interference.

1 is a view showing an X-ray microscope system according to the present invention.
2 is a diagram showing an X-ray generator and a detector according to the first embodiment.
3 and 4 are views illustrating an X-ray generator and a detector according to another embodiment.
5 shows a data processing apparatus;
6 to 8 are diagrams for explaining a data interpolation method.

Although the terms used in the present invention have been selected as general terms that are widely used at present, there are some terms selected arbitrarily by the applicant in a specific case. In this case, the meaning described or used in the detailed description part of the invention The meaning must be grasped.

Hereinafter, the technical structure of the present invention will be described in detail with reference to preferred embodiments shown in the accompanying drawings.

However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Like reference numerals designate like elements throughout the specification.

1 is a view showing a tomography X-ray microscope system according to a first embodiment of the present invention.

Referring to FIG. 1, the tomography X-ray microscope system according to the first exemplary embodiment of the present invention is spaced apart from each other about a sample 126, and includes a plurality of X-ray generating units 150 and the X-rays disposed radially. And a plurality of X-ray detectors 160 fixed to the generators 150.

That is, the X-ray generators 150 are fixed toward the sample 126 in different directions, and the X-ray detectors 160 are provided in the same number as the number of the X-ray generators 150. In this case, the sample 126 is interposed and fixed to the X-ray generators 150.

The X-ray generators 150 may operate simultaneously in the process of irradiating X-rays for the inspection of the sample 126. That is, to inspect the sample 126, the X-ray microscope system according to the present invention irradiates X-rays from multiple angles simultaneously using a plurality of X-ray generators 150. The X-ray generators 150 may be disposed at the same interval as the sample 126 in order to obtain image data of a region having a uniform angle with respect to the sample 126. The distance between the X-ray generators 150 and the sample 126 may be set in consideration of the number of X-ray generators 150. For example, when the number of X-ray generators 150 is increased to increase the accuracy of an image, the distance r between the X-ray generators 150 and the sample 126 may be increased. That is, by increasing the distance r between the sample 126 and the X-ray generators 150, more X-ray generators 150 may be disposed. In addition, the intervals between the respective X-ray generators 150 may be set identically. That is, the internal angles θ formed by the adjacent X-ray generators 150 and the sample 126 may be set to be the same. For example, when six X-ray generators 150 are used as shown in FIG. 1, the internal angle θ formed by the adjacent X-ray generators 150 and the sample 126 may be set to 30 °.

The X-ray detection unit 160 detects the X-rays transmitted through the sample 126 and outputs the electrical signal as an image to the display device. The number of X-ray detectors 160 corresponding to the X-ray generator 150 is disposed. The X-ray detectors 160 are disposed at positions facing the X-ray generator 150 with the sample 126 therebetween.

Each image data extracted through the X-ray detection unit 160 is transmitted to the data processing device 140. The data processing device 140 stores the data extracted by the X-ray detection unit 160, converts the extracted data into tomographic image data for the sample 126, and displays the data on the display unit 132. The input unit 130 may be a user's means for controlling the operation of the X-ray microscope system.

A pair of arrangements of the X-ray generator 150 and the X-ray detector 160 illustrated in FIG. 1 will be described in more detail with reference to FIG. 2 as follows.

Referring to FIG. 2, the X-ray generators 150 according to the first embodiment of the present invention include a light source 152 and a parallel light guide unit 159. The parallel light inducing unit 159 generates a parallel short wavelength X-ray and includes a mirror 157 and a reflection filter 158. The X-ray generators 150 may prevent scattering and scattering of X-rays and generate parallel X-rays having short wavelengths.

On the other hand, the light source 152 is a general low-cost light source that emits X-rays to generate X-rays, the X-rays emitted from the light source 152 is partially due to the separation distance of the mirror 157 The incident light into the space is reflected on the reflective surface and proceeds to the reflective filter 158. In this case, the disposition angle of the mirror 157 may be set such that the X-rays emitted from the light source 152 exhibit a reflectance of 70% or more. To set the reflectivity, parabolic equations and geometric conventions of the mirror 157 may be used.

That is, the mirror 157 reflects some of the X-rays radiated in all directions and outputs parallel X-rays. In addition, the mirror 157 may be manufactured by stacking two different metal materials on a substrate. In addition, the reflective filter 158 converts and outputs parallel X-rays induced by the mirror 157 into short X-ray parallel X-rays, and may have a structure in which different metal thin films are stacked on a substrate. have.

In addition, the mirror 157 may be composed of a plurality of mirrors spaced apart from each other by a predetermined interval in the vertical direction, each surface reflects X-rays, and the reflected X-rays are stacked and output.

That is, when the mirror 157 is composed of a plurality of mirrors, the thickness of the parallel X-rays may be adjusted by changing the distance between the mirrors and the geometric shape (degree of bending).

The X-ray detector 160 may include a transmission filter 162 and a detection film 164. The transmission filter 162 is disposed between the sample 126 and the detection film 164 to improve scattering and interference of X-rays. The permeable filter 162 may be configured of a mesh-type membrane made of a metal material. Or it may be composed of a porous thin film made of a metal material.

The detection film 164 is for acquiring image data transmitted through the sample 126, and the image data obtained by the detection film 164 is transmitted to the data processing device 140. The data processing device 140 receiving the image data from the detection layer 164 may digitally enlarge the image data and transmit the image data to the display unit 132.

On the other hand, since the X-rays irradiated from the X-ray generator 150 are parallel lights, the X-ray detectors 160 may receive only X-rays irradiated from the X-ray generators facing each other. Accordingly, each of the X-ray detectors 160 may obtain clear image data of the sample 160 without being affected by the X-rays irradiated from the X-ray generator that does not face each other.

In addition, the present invention includes a data processing unit 140 for reconstructing a tomography image based on the image data extracted by the X-ray detection unit 160, and a display unit 132 for displaying a tomography image of the sample 126. do.

3 is a diagram illustrating an X-ray generator 150 and an X-ray detector 260 according to a second embodiment of the present invention. In the second embodiment, the same reference numerals are used for the same components as those of the above-described embodiment, and detailed descriptions thereof will be omitted.

Referring to FIG. 3, the X-ray detector 260 according to the second exemplary embodiment includes a transmission filter 262 and a scintillator 264 for detecting X-rays via the transmission filter 262. . And an optical lens 266 for enlarging an image formed on the scintillator 264 and an image pickup device 268 for detecting an image enlarged by the optical lens 266.

In addition, the imaging device 268 may use a CCD device.

As described above, the X-ray detection unit 260 according to the second embodiment may observe the sample 126 by enlarging the image formed on the scintillator 264 using the optical lens 266.

4 is a view showing an X-ray generator 350 and an X-ray detector according to the third embodiment. In the third embodiment, the same components as in the above-described embodiments will be denoted by the same reference numerals, and detailed description thereof will be omitted.

Referring to FIG. 4, the X-ray generator 350 according to the third exemplary embodiment may provide a focusing mirror 151 for guiding an optical path such that the X-rays emitted from the light source 152 are collected at the entrance of the mirror 157. It may be provided with more.

Data extracted through the X-ray detector through the sample 126 by the X-ray generator and the X-ray detectors represented in the above-described embodiments is transmitted to the data processing device 140. The data processor 140 stores the data extracted by the X-ray detector 160, converts the data extracted into the tomographic image data, and displays the data on a display unit (not shown). In order to display the extracted data as a tomographic image of the sample, the data processing apparatus includes a data storage unit 142, a data interpolation unit 144, and an image processing unit 146 as shown in FIG. 5.

The data storage unit 142 stores the data extracted from the X-ray detection unit 160. The data interpolator 144 estimates data between the X-ray generators 150 based on the data of the data storage unit 142. The image processor 146 converts the data of the data storage unit 142 and the data interpolator 144 into tomographic image data.

In this case, the data interpolation method of the data interpolator 144 will be described in more detail as follows. FIG. 6 is a diagram illustrating the arrangement of the X-ray generator 150 and the X-ray detector 160 illustrated in FIG. 1. In FIG. 6, S1 to S6 represent first to sixth X-ray generators 150 arranged around the sample 126, and D1 to D6 represent first to sixth X-ray generators 150 corresponding to the respective X-ray generators 150. The sixth X-ray detector 160 is shown. In addition, C1 to C5 correspond to intermediate positions between the respective X-ray generators 150 and indicate positions for extracting virtual image data through data interpolation.

For example, when imaging is performed by using six X-ray generators 150 as shown in FIG. 7, an internal angle between the X-ray generators 150 and the sample 126 is formed every 30 °.

That is, one surface of the sample 126 is measured every 30 ° using the respective X-ray generators 150. The data directly photographed and obtained are stored in the data storage unit 142.

On the other hand, it is not possible to obtain direct photographing data with respect to positions between the respective X-ray generators 150. The data interpolator 144 estimates data on an area that cannot be measured by the X-ray generators 150.

For example, the method of estimating the data of the sample 126 for the area located between the respective X-ray generators 150 is as follows. A data interpolation method of C1 to C5, which is a virtual measurement area located in the middle of the first to sixth X-ray generators 150, may be estimated using an arithmetic mean of data of adjacent X-ray generators 150. have. For example, as shown in FIG. 7, the images through the data acquired using the first and second X-ray generators S1 and S2 are set to (A) and (B), respectively, and used at the C1 position. The method of estimating the image a is as follows.

Among the data extracted by the first and second X-ray generators S1 and S2, the coordinates of the two points P1 and P2 located at the same position in the sample and the intensity of the image are respectively (x1, y1, I1). , (x2, y2, I2), the coordinate and image intensity data at C1 can be obtained using the arithmetic mean of the data of P1 and P2. That is, the coordinates and the image intensity of P _C1 at _C1 are as follows.

The above-described embodiment shows estimating one data between adjacent X-ray generators 150. You can also use this method to estimate two or more pieces of data.

8 is a diagram illustrating a case where n pieces of data are estimated in an area between the first to second X-ray generators S1 and S2. In this way, when estimating n data between two intervals, the two regions are divided into (n + 1). That is, when each section is equally divided, the data deviation between the sections may be estimated by dividing the data deviation from S1 to S2 by (n + 1). Therefore, the coordinates and the image intensity of P _C1 , P _C2 , ..., P _Cn of C1, C2, ... Cn are as follows. The x-coordinate of P _C1 of _C1 is equal to the sum of (x2-x1) / (n + 1), which is the value of the x-coordinate of S1 and S2 divided by (n + 1) from the x-coordinate of S1. Similarly, the x coordinate at P _C2 of _C2 is equal to the sum of 2 * (x2-x1) / (n + 1) at the x coordinate of S1. In this way, the x-coordinate of P _Cj of the j th Cj is generalized to x1 + j (x2-x1) / (n + 1) = {(n-j + 1) x1 + jx2} / (n + 1) You can.

And y coordinates in the P _Cj j-th Cj may be generalized as y1 + j (y2-y1) / (n + 1) = {(n-j + 1) y1 + jy2} / (n + 1) .

Similarly, the image intensity at P _Cj of the j th Cj can be generalized as I1 + j (I2-I1) / (n + 1) = {(n-j + 1) I1 + jI2} / (n + 1) have.

In other words, when the data of S1 and S2 are divided into n, the data for a specific point P (x, y, I) in the j-th region is as follows.

In this way, more detailed image data can be obtained by interpolating the inter-values using adjacent data.

The above-described methods are merely one embodiment of a method of interpolating data between adjacent X-ray generators. In other words, a known technique for smoothing image data may be used for the operation of the data interpolator. In addition, by increasing the number of X-ray generators and detectors, the accuracy of image data obtained through interpolation can be improved.

As described above, in the CT imaging apparatus of the present invention, since a plurality of X-ray generators simultaneously photograph a sample, tomography of the sample may be performed in real time. Accordingly, the tomography of the sample can be taken as a video using X-rays. The conventional system, which takes a long time for tomography, can improve the difficulty of taking moving samples.

In addition, since the X-ray microscope system according to the present invention includes a parallel light induction part in the X-ray generation part, it is possible to prevent a decrease in image sensitivity due to X-ray interference generated in a plurality of X-ray generation parts. If the number of existing X-ray generators in which X-rays are radiated is increased, the sensitivity of the data extracted from each X-ray detector may be drastically reduced due to phase shift and interference of adjacent X-rays. However, the X-ray microscope system according to the present invention can solve this problem by generating parallel X-rays of short wavelength through the parallel light induction part to improve image sensitivity.

Embodiments of the present invention described above have been described based on the arrangement and configuration of the X-ray generator and the X-ray detector. In addition, the overall housing and other general configuration of the components of the X-ray microscope is easy to implement for those skilled in the art based on the prior art, detailed description thereof will be omitted.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation in the present invention. Various changes and modifications will be possible.

150, 350: X-ray generator 160, 260: X-ray detector
140: data processing apparatus 162, 262: transmission filter

Claims (8)

A plurality of X-ray generating units spaced apart from each other about the sample and fixed radially; And
The sample is interposed, and fixed to face the X-ray generators in a number corresponding to the number of the X-ray generators, and receives only X-rays emitted from the X-ray generators facing each other and passed through the sample And X-ray detectors for obtaining magnified image data of the sample in different directions.
The X-ray generators and the X-ray detectors are fixed without being rotated during X-ray imaging, so as to acquire image data of the sample at the same time.
The X-ray generators: respectively
A light source emitting X-rays in all directions;
A mirror provided in front of the light source and reflecting some of the X-rays to be parallel light having a predetermined thickness and width; And
And a reflection filter reflecting the X-rays passing through the mirror to a short wavelength, wherein the X-ray microscope system for tomography is included.
The method of claim 1,
A data processing device receiving the image data and generating tomographic image data of the sample; And
And a display unit for displaying the tomography image data as a tomography image.
The method of claim 2,
The data processing device:
A data storage unit which receives the image data from the X-ray detectors and stores the image data;
A data interpolator for estimating image data at positions between the X-ray generators based on the image data; And
And an image processing unit for generating tomographic image data of the sample from the image data of the data storage unit and the data interpolation unit.
The method of claim 3, wherein
And the data interpolator estimates image data at positions between the X-ray generators by arithmetically averaging image data of adjacent X-ray detectors.
The method of claim 1,
The mirrors are arranged to be spaced apart from each other by a predetermined interval and the X-rays irradiate at least one surface, and each of the mirrors is composed of a plurality of mirrors to induce the parallel light having a predetermined thickness and width stacked on each other X-ray microscope system for tomography, characterized in that.
The method of claim 1,
And a focusing mirror provided between the light source and the mirror, the focusing mirror guiding the path of the x-ray to concentrate the x-ray onto the mirror.
7. The method according to any one of claims 1 to 6,
The X-ray detector:
A detection film on which the X-rays passing through the sample are projected; And
And a transmission filter disposed between the sample and the detection membrane and formed of a metal film in the form of a mesh.
7. The method according to any one of claims 1 to 6,
The X-ray detector:
A transmission filter made of a metal film in a mesh form to suppress scattering and interference of the X-rays passing through the sample;
A scintillator for detecting the X-rays via the transmission filter;
An optical lens for enlarging an image of the scintillator; And
And an imaging device for capturing an image enlarged by the optical lens.

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