JPH0417552Y2 - - Google Patents

Info

Publication number
JPH0417552Y2
JPH0417552Y2 JP8953185U JP8953185U JPH0417552Y2 JP H0417552 Y2 JPH0417552 Y2 JP H0417552Y2 JP 8953185 U JP8953185 U JP 8953185U JP 8953185 U JP8953185 U JP 8953185U JP H0417552 Y2 JPH0417552 Y2 JP H0417552Y2
Authority
JP
Japan
Prior art keywords
plasma processing
processing chamber
plasma
chamber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8953185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61206650U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8953185U priority Critical patent/JPH0417552Y2/ja
Publication of JPS61206650U publication Critical patent/JPS61206650U/ja
Application granted granted Critical
Publication of JPH0417552Y2 publication Critical patent/JPH0417552Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP8953185U 1985-06-13 1985-06-13 Expired JPH0417552Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8953185U JPH0417552Y2 (cs) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8953185U JPH0417552Y2 (cs) 1985-06-13 1985-06-13

Publications (2)

Publication Number Publication Date
JPS61206650U JPS61206650U (cs) 1986-12-27
JPH0417552Y2 true JPH0417552Y2 (cs) 1992-04-20

Family

ID=30643696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8953185U Expired JPH0417552Y2 (cs) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPH0417552Y2 (cs)

Also Published As

Publication number Publication date
JPS61206650U (cs) 1986-12-27

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