JPH0348194Y2 - - Google Patents

Info

Publication number
JPH0348194Y2
JPH0348194Y2 JP1985065651U JP6565185U JPH0348194Y2 JP H0348194 Y2 JPH0348194 Y2 JP H0348194Y2 JP 1985065651 U JP1985065651 U JP 1985065651U JP 6565185 U JP6565185 U JP 6565185U JP H0348194 Y2 JPH0348194 Y2 JP H0348194Y2
Authority
JP
Japan
Prior art keywords
wall
plasma
cylindrical
opening
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985065651U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61180140U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985065651U priority Critical patent/JPH0348194Y2/ja
Publication of JPS61180140U publication Critical patent/JPS61180140U/ja
Application granted granted Critical
Publication of JPH0348194Y2 publication Critical patent/JPH0348194Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP1985065651U 1985-04-30 1985-04-30 Expired JPH0348194Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985065651U JPH0348194Y2 (cs) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985065651U JPH0348194Y2 (cs) 1985-04-30 1985-04-30

Publications (2)

Publication Number Publication Date
JPS61180140U JPS61180140U (cs) 1986-11-10
JPH0348194Y2 true JPH0348194Y2 (cs) 1991-10-15

Family

ID=30597834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985065651U Expired JPH0348194Y2 (cs) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPH0348194Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928535U (ja) * 1982-08-12 1984-02-22 トヨタ自動車株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
JPS61180140U (cs) 1986-11-10

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