JPH04174995A - Light-emitting element - Google Patents

Light-emitting element

Info

Publication number
JPH04174995A
JPH04174995A JP2307175A JP30717590A JPH04174995A JP H04174995 A JPH04174995 A JP H04174995A JP 2307175 A JP2307175 A JP 2307175A JP 30717590 A JP30717590 A JP 30717590A JP H04174995 A JPH04174995 A JP H04174995A
Authority
JP
Japan
Prior art keywords
layer
thin film
phosphor
fluorescent material
conductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2307175A
Other languages
Japanese (ja)
Inventor
Koji Deguchi
浩司 出口
Hidekazu Ota
英一 太田
Yukio Ide
由紀雄 井手
Itaru Fujimura
藤村 格
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Publication of JPH04174995A publication Critical patent/JPH04174995A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To realize a stable element having reproducibility and enhance the emission intensity of the element by employing a combination of voltages applied to predeter mined layers of conductive material when each layer of fluorescent material emits light. CONSTITUTION:A thin film of Al is formed as a layer 5 of a conductive material on a base 1 and an organic fluorescent material is formed into a layer 6 of fluorescent material using deposition method. Next, another thin film of Al is formed as a layer 7 of conductive material and a layer of films of a naturally oxidized surface is formed as a layer 8 of insulating material and a film of Au is formed as a layer 9 of conductive material and an organic fluorescent material is formed into a layer 10 of fluorescent material using deposition method and another thin film of Al is formed as a layer 11 of conductive material. In this element, the thin film 7 is used as reference potential for excitation of the layer 6 and positive and negative potentials are applied to the films 5,9, respectively. Next, the film 9 is used as reference potential for excitation of the layer 10 and negative and positive potentials are applied to the films 7,11, respectively. This voltage applications are alternately carried out at a fixed cycle whereby good light emission of the organic fluorescent material is obtained.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は発光素子、特にMIMと螢光体を利用する発光
素子に関し、フラットパネルデイスプレィ等発光素子の
応用分野にはすべて利用できるものである。
[Detailed Description of the Invention] [Industrial Application Fields] The present invention relates to light emitting devices, particularly light emitting devices that utilize MIM and phosphors, and can be used in all application fields of light emitting devices such as flat panel displays. be.

[従来の技術] 従来MIM構造の発光素子が知られている。[Conventional technology] 2. Description of the Related Art Light emitting elements having an MIM structure are conventionally known.

この構造を第2図に示す。基板上にAI等の第1の金属
層を形成し、この表面に絶縁体層を形成し、更にこの表
面に形成したAu等の第2の金属層から構成され、第1
の金属層と第2の金属層との間に電圧を印加することに
よって発光が得られる。
This structure is shown in FIG. A first metal layer such as AI is formed on the substrate, an insulating layer is formed on this surface, and a second metal layer such as Au is further formed on this surface.
Light emission is obtained by applying a voltage between the metal layer and the second metal layer.

しかし、この発光素子の発光スペクトルは400−10
00nmの範囲を示す非常にブロードな発光であり、そ
のため輝度の大きい3原色の素子が必要とされるデイス
プレィ装置等にこの発光素子を用いることができなかっ
た。このような問題点を解決する方法として、特開昭6
3−232295がある。これによれば第1図に示すよ
うに螢光体層を第2電極と絶縁体層の間に挿入すること
で、螢光体により決まる特定の波長が発光すると同時に
、絶縁体層をトンネルした電子によっても直接励起され
て強い発光が生じるとある。
However, the emission spectrum of this light emitting element is 400-10
This light-emitting element emits very broad light in the range of 00 nm, and therefore cannot be used in display devices and the like that require elements of three primary colors with high brightness. As a way to solve these problems,
There is 3-232295. According to this, by inserting a phosphor layer between the second electrode and the insulator layer as shown in Figure 1, a specific wavelength determined by the phosphor is emitted and at the same time tunnels through the insulator layer. It is said that it can also be directly excited by electrons, producing strong light emission.

しかし、この構成では形成された絶縁体層の膜厚が20
〜30Xと非常に薄いため、螢光体層形成時の損傷が無
視できず、結果として素子の安定性や再現性に問題があ
る。又、螢光体層の膜厚も10−20スと非常に薄く、
螢光体として十分な特性を得るためには、粒径が数μ園
必要であることを考えれば、この膜厚では十分な発光強
度は得られない事が予想できる。更にトンネルした電子
による励起を考えたとき、電子のエネルギーは印加した
電圧によって決まり、一方、トンネルした電子は数eV
程度であることから、用いる螢光体材料の特性によって
は発光しないことが考えられる。
However, in this configuration, the thickness of the formed insulator layer is 20
Since it is extremely thin at ~30X, damage during formation of the phosphor layer cannot be ignored, resulting in problems with the stability and reproducibility of the device. Also, the thickness of the phosphor layer is very thin at 10-20s.
Considering that in order to obtain sufficient properties as a phosphor, the particle size must be on the order of several microns, it can be predicted that sufficient luminous intensity will not be obtained with this film thickness. Furthermore, when considering excitation by tunneled electrons, the energy of the electrons is determined by the applied voltage; on the other hand, the energy of tunneled electrons is several eV.
Therefore, depending on the characteristics of the phosphor material used, it may not emit light.

[発明が解決しようとする課題〕 本発明は高輝度でしかも安定で再現性よく作製できる発
光素子を提供しようとするものである。
[Problems to be Solved by the Invention] An object of the present invention is to provide a light emitting element that has high luminance and can be produced stably and with good reproducibility.

[課題を解決するための手段] 上記課題を解決するための本発明の構成は、特許請求の
範囲に記載のとおりの発光素子である。
[Means for Solving the Problems] The structure of the present invention for solving the above problems is a light emitting device as described in the claims.

第1図に本発明による素子の構造を示す。本発明では図
に示すような位置に螢光体層を形成することで、従来技
術の欠点であった絶縁体層への損傷を回避し、安定でし
かも再現性のある素子が実現でき、かつ発光強度も向上
する。又、各螢光体層の組み合わせによって、各螢光体
の発光色の加色混合や、各螢光体の発光強度を印加電圧
によって調整することで、電圧制御による多色発光素子
が実現できる。
FIG. 1 shows the structure of a device according to the present invention. In the present invention, by forming the phosphor layer in the position shown in the figure, damage to the insulator layer, which was a drawback of the conventional technology, can be avoided, and a stable and reproducible device can be realized. Emission intensity also improves. In addition, by combining each phosphor layer, a multicolor light emitting device can be realized by controlling the voltage by additively mixing the emission colors of each phosphor and adjusting the emission intensity of each phosphor by applying voltage. .

本発明による素子の駆動については基本的には第1の螢
光体層を発光させるときには、第1.2及び3の導体層
に電圧を印加し、第2の螢光体層を発光させるときには
、第2.3及び4の導体層に電圧を印加するという組み
合わせを用いる。
Basically, when driving the device according to the present invention, when the first phosphor layer is made to emit light, a voltage is applied to the first, second and third conductor layers, and when the second phosphor layer is made to emit light, a voltage is applied to the first, second and third conductor layers. , 2. A combination of applying a voltage to the third and fourth conductor layers is used.

螢光体の励起についてはMIM素子からの発光による励
起とトンネル電子による励起の2通りが考えられるが、
各螢光体層をトンネル電子で励起するためには、絶縁体
層、第1.2の導電体層それぞれの膜厚が非常に薄い必
要がある。
There are two possible ways to excite the phosphor: excitation by light emission from the MIM element and excitation by tunnel electrons.
In order to excite each phosphor layer with tunneling electrons, each of the insulator layer and the first and second conductor layers must be extremely thin.

特に絶縁体層は電子がトンネルする必要があることから
、膜厚は数人から数百人、望ましくは20から 200
人、最適には20から 100五程度が望ましい。更に
上記範囲の膜厚で、絶縁性を示す必要があることはいう
までもない。又、同時に各層それぞれが透光性を有する
必要がある。
In particular, since electrons need to tunnel through the insulator layer, the film thickness ranges from several to several hundred layers, preferably from 20 to 200 mm.
For humans, the optimal number is between 20 and 100. Furthermore, it goes without saying that it is necessary to exhibit insulation properties with a film thickness within the above range. Furthermore, each layer must also have translucency.

更に本発明では第1の螢光体層に対して第1の導電体層
を、又、第2に螢光体層に対して第4の導電体層を設け
、それぞれの螢光体層をトンネル電子で励起するときに
各導電体層に十のバイアスを印加することで、トンネル
した電子が加速され、螢光体の励起強度が上がり、発光
強度が向上する。しかも、螢光体表面での電子の帯電が
回避される。加速電圧については特に制限はないが、実
用性を考えたとき数+V程度が望ましい。
Furthermore, in the present invention, a first conductor layer is provided for the first phosphor layer, and a fourth conductor layer is provided for the second phosphor layer, and each phosphor layer is By applying a bias of 10 to each conductive layer when excited by tunneling electrons, the tunneled electrons are accelerated, the excitation intensity of the phosphor is increased, and the emission intensity is improved. Furthermore, charging of electrons on the surface of the phosphor is avoided. There is no particular restriction on the accelerating voltage, but in consideration of practicality, it is desirable to set it to about several +V.

有機材料螢光体については特に制限はないが、有機薄膜
エレクトロルミネッセンスの発光層材料に用いることが
できる螢光体が望ましい。
There are no particular restrictions on the organic material phosphor, but a phosphor that can be used as a material for the light-emitting layer of organic thin film electroluminescence is desirable.

第1の螢光体層の作製方法としては、特に制限はないが
、有機螢光体材料自身への損傷が少ない方法が望ましい
。すなわち、蒸着法やLB法や塗布法が望ましい。
There are no particular restrictions on the method for producing the first phosphor layer, but a method that causes little damage to the organic phosphor material itself is desirable. That is, a vapor deposition method, an LB method, or a coating method is preferable.

又、第2の螢光体層の作製方法としては、下地への損傷
が小さい方が望ましく、そのため塗布法もしくは真空蒸
着法などが望ましい。
Further, as a method for producing the second phosphor layer, it is desirable that damage to the underlying layer is small, and therefore a coating method or a vacuum evaporation method is preferable.

第2.4の導電体層の材料や作製方法については、特に
制限はないが、下地となる螢光体層に損傷をあまり与え
ないような作製方法が好ましい。
There are no particular restrictions on the material or manufacturing method for the 2.4th conductor layer, but a manufacturing method that does not cause much damage to the underlying phosphor layer is preferred.

基板については特に制限はないが、発光の取り出し方向
を基板側とした場合、透光性を有する必要がある。その
際は第1の導電体層及び第1の螢光体層も、それぞれ透
光性を有する必要かある。又、膜形成側から発光を取り
出す場合、第2の螢光体層及び第4の導体層がそれぞれ
透光性を有する必要がある。
There are no particular restrictions on the substrate, but if the direction in which light is extracted is from the substrate side, it must be translucent. In this case, it is necessary that the first conductor layer and the first phosphor layer each have translucency. Furthermore, when emitting light from the film forming side, the second phosphor layer and the fourth conductor layer each need to have light-transmitting properties.

[実施例] 以下、本発明を実施例によって、具体的に説明する。[Example] Hereinafter, the present invention will be specifically explained with reference to Examples.

実施例1 ここでは第1図に示すような素子構造を有する発光素子
を作製した。基板1には、ガラス基板を用いた。基板の
上に第1の導電体層5としてA1薄膜を約1μ11抵抗
線加熱により形成した。次に第1の螢光体層6として、
下記に示すような構造をもつ有機螢光体材料を蒸着法に
より形成した。
Example 1 Here, a light emitting device having a device structure as shown in FIG. 1 was manufactured. As the substrate 1, a glass substrate was used. An A1 thin film was formed as the first conductor layer 5 on the substrate by heating with a resistance wire of about 1μ11. Next, as the first phosphor layer 6,
An organic phosphor material having the structure shown below was formed by vapor deposition.

H3 次に第2の導電体層7としてAl薄膜を約100A%抵
抗線加熱により形成した。次に絶縁体層8として空気中
に約10日間放置して、約50λ程度の表面自然酸化膜
層を形成した。更に第3の導電体層9としてAu薄膜を
約100人、抵抗線加熱により形成した。そして、第2
の螢光体層lOとして、第1の螢光体層と同様の有機材
料螢光体を蒸着法により形成した。最後に第4の導電体
層llとして、Al薄膜を約1μ■、抵抗線加熱により
形成した。
H3 Next, an Al thin film was formed as the second conductive layer 7 by heating with a resistance wire of about 100 A%. Next, the insulator layer 8 was left in the air for about 10 days to form a surface natural oxide film layer of about 50λ. Furthermore, about 100 people formed an Au thin film as the third conductor layer 9 by heating with a resistance wire. And the second
As the phosphor layer IO, an organic phosphor similar to that of the first phosphor layer was formed by vapor deposition. Finally, as a fourth conductor layer 11, a thin Al film of about 1 μm was formed by heating with a resistance wire.

このようにして作製した素子を、まず第1の螢光体層に
対する励起として、第2の電極であるAl薄膜を基準電
位とし、第1電極のAl薄膜に正電位を、第3電極のA
u薄膜に負電位をそれぞれ印加し、次に第2の螢光体層
に対する励起として、第3の電極であるAu薄膜を基準
電位とし、第2電極のAl薄膜に負電位を、第4電極の
Al薄膜に正電位をそれぞれ印加した。
In the device thus manufactured, first, the first phosphor layer is excited by applying a positive potential to the Al thin film serving as the second electrode, using the Al thin film serving as the second electrode as a reference potential, and applying a positive potential to the Al thin film serving as the third electrode.
A negative potential is applied to each of the U thin films, and then, to excite the second phosphor layer, the third electrode, the Au thin film, is set as a reference potential, the second electrode, the Al thin film, is applied with a negative potential, and the fourth electrode is applied with a negative potential. A positive potential was applied to each of the Al thin films.

この電圧印加を交互にある一定の周期で行うことで、こ
の周期に基づく、良好な有機材料螢光体の発光が得られ
た。
By applying this voltage alternately at a certain period, good luminescence of the organic material phosphor was obtained based on this period.

なお、本発明による効果は、本実施例に用いた有機螢光
体材料に限らず、他の有機螢光体材料でも同様な効果が
得られた。
Note that the effects of the present invention are not limited to the organic phosphor material used in this example, but similar effects were obtained with other organic phosphor materials.

実施例2 この場合も第1図に示すような素子構造を有する発光素
子を作製した。基板lにはガラス基板を用いた。基板の
上に第1の導電体層5としてA1薄膜を約1μ目、抵抗
線加熱により形成した。次に第1の螢光体層6として、
低速電子線用螢光体材料であるZnO: Znを塗布法
により形成した。次に第2の導電体層7としてA1薄膜
を約1002、抵抗線加熱により形成した。
Example 2 In this case as well, a light emitting device having the device structure shown in FIG. 1 was manufactured. A glass substrate was used as the substrate l. An A1 thin film was formed as the first conductor layer 5 on the substrate to a thickness of approximately 1 μm by heating with a resistance wire. Next, as the first phosphor layer 6,
ZnO: Zn, which is a phosphor material for low-speed electron beams, was formed by a coating method. Next, as the second conductive layer 7, an A1 thin film having a thickness of approximately 100 mm was formed by heating with a resistance wire.

次に絶縁体層8として空気中で約150−200 ”C
140分間加熱を行い、AIの表面に約3O−5OAの
表面酸化層を形成した。更に第3の導電体層9としてA
u薄膜を約100X、抵抗線加熱により形成した。そし
て第2の螢光体層1oとして、第1の螢光体層と同様に
ZnO: Znを形成し、最後に第4の導電体層11と
して、Al薄膜を約1μm1抵抗線加熱により形成した
Next, as an insulator layer 8, the temperature is about 150-200"C in air.
Heating was performed for 140 minutes to form a surface oxide layer of approximately 30-5OA on the surface of AI. Further, as the third conductor layer 9, A
A u thin film was formed by resistance wire heating at about 100X. Then, as the second phosphor layer 1o, ZnO:Zn was formed in the same manner as the first phosphor layer, and finally, as the fourth conductor layer 11, an Al thin film of about 1 μm was formed by resistance wire heating. .

このようにして作製した素子を、まず第1の く螢光体
層に対する励起として、第2の電極であるA1薄膜を基
準電位とし、第1電極のA1薄膜に正電位を、第3電極
のAu薄膜に負電位をそれぞれ印加し、次に第2の螢光
体層に対する励起として、第3の電極であるAu薄膜を
基準電位とし、第2電極のAl薄膜に負電位を、第4電
極のAl薄膜に正電位をそれぞれ印加した。
The device thus prepared was first excited by applying a positive potential to the A1 thin film of the first electrode, and applying a positive potential to the A1 thin film of the third electrode, with the A1 thin film serving as the second electrode as a reference potential. A negative potential is applied to each of the Au thin films, and then to excite the second phosphor layer, the Au thin film that is the third electrode is set as a reference potential, the negative potential is applied to the Al thin film that is the second electrode, and the negative potential is applied to the Al thin film that is the second electrode. A positive potential was applied to each of the Al thin films.

この電圧印加を交互に、ある一定の周期で行うことで、
この周期に基づく、良好なZnO:Zn螢光体の発光が
得られた。
By applying this voltage alternately at a certain period,
Based on this period, good luminescence of the ZnO:Zn phosphor was obtained.

なお、本実施例では、絶縁体層の材料として第2の導電
体層であるA1薄膜の表面酸化であるAl2O3を用い
たが、本発明の効果は、これらに制限はされず、他の材
料や作製方法でも同様な効果は得られた。
In this example, Al2O3, which is the surface oxidation of the A1 thin film that is the second conductor layer, was used as the material for the insulator layer, but the effects of the present invention are not limited to these, and other materials may be used. Similar effects were obtained using different manufacturing methods.

[発明の効果] 以上、説明したように、本発明の発光素子は安定で再現
性が良く、輝度の高い発光をすることができる。
[Effects of the Invention] As described above, the light emitting element of the present invention is stable, has good reproducibility, and can emit light with high brightness.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の発光素子の構成を示す断面の模式図、 第2図は、従来のMIM構造の発光素子の構成を示す断
面の模式図である。 1・・・基板、2・・・第1の金属層、3・・・絶縁体
層、4・・・第2の金属層、5・・・第1の導電体層、
6・・・第1の螢光体層、7・・・第2の導電体層、8
・・・絶縁体層、9・・・第3の導電体層、lOo・・
・第2の螢光体層、11・・・第4の導電体層。
FIG. 1 is a schematic cross-sectional view showing the structure of a light-emitting element of the present invention, and FIG. 2 is a schematic cross-sectional view showing the structure of a light-emitting element having a conventional MIM structure. DESCRIPTION OF SYMBOLS 1... Substrate, 2... First metal layer, 3... Insulator layer, 4... Second metal layer, 5... First conductor layer,
6... First phosphor layer, 7... Second conductor layer, 8
...Insulator layer, 9...Third conductor layer, lOo...
- Second phosphor layer, 11... fourth conductor layer.

Claims (2)

【特許請求の範囲】[Claims] (1)基板上に第1の導電体層を有し、その表面に第1
の有機材料螢光体層を有し、その表面に第2の導電体層
とその表面に形成した絶縁体層と、更に絶縁体層の表面
に第3の導電体層を有し、更にその表面に、第2の有機
材料螢光体層を有し、最後に第4の導電体層を有し、前
記各導電体層に電圧を印加するようにしたことを特徴と
する発光素子。
(1) A first conductor layer is provided on the substrate, and a first conductor layer is provided on the surface of the substrate.
a phosphor layer of an organic material, a second conductor layer on the surface thereof, an insulator layer formed on the surface of the second conductor layer, a third conductor layer on the surface of the insulator layer, and a third conductor layer formed on the surface of the insulator layer; 1. A light-emitting device, characterized in that it has a second organic material phosphor layer on its surface, and finally a fourth conductive layer, and a voltage is applied to each of the conductive layers.
(2)基板上に第1の導電体層を有し、その表面に第1
の螢光体層を有し、その表面に第2の導電体層とその表
面に形成した無機材料からなる絶縁体層と、更に前記絶
縁体層の表面に第3の導電体層を有し、更にその表面に
第2の螢光体層を有し、最後に第4の導電体層を有し、
前記各導電体層に電圧を印加するようにしたことを特徴
とする発光素子。
(2) Having a first conductor layer on the substrate, and having a first conductor layer on the surface thereof.
a phosphor layer, a second conductor layer on the surface thereof, an insulator layer made of an inorganic material formed on the surface thereof, and a third conductor layer on the surface of the insulator layer. , further having a second phosphor layer on its surface, and finally a fourth conductor layer,
A light emitting device characterized in that a voltage is applied to each of the conductor layers.
JP2307175A 1990-08-01 1990-11-15 Light-emitting element Pending JPH04174995A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2-202430 1990-08-01
JP20243090 1990-08-01

Publications (1)

Publication Number Publication Date
JPH04174995A true JPH04174995A (en) 1992-06-23

Family

ID=16457387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2307175A Pending JPH04174995A (en) 1990-08-01 1990-11-15 Light-emitting element

Country Status (1)

Country Link
JP (1) JPH04174995A (en)

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