JPS598040B2 - Thin film EL element - Google Patents

Thin film EL element

Info

Publication number
JPS598040B2
JPS598040B2 JP54158789A JP15878979A JPS598040B2 JP S598040 B2 JPS598040 B2 JP S598040B2 JP 54158789 A JP54158789 A JP 54158789A JP 15878979 A JP15878979 A JP 15878979A JP S598040 B2 JPS598040 B2 JP S598040B2
Authority
JP
Japan
Prior art keywords
light
thin film
light emitting
emitting layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54158789A
Other languages
Japanese (ja)
Other versions
JPS5682598A (en
Inventor
勝 吉田
敏夫 猪口
良亘 柿原
卓郎 山下
浩司 谷口
康一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP54158789A priority Critical patent/JPS598040B2/en
Publication of JPS5682598A publication Critical patent/JPS5682598A/en
Publication of JPS598040B2 publication Critical patent/JPS598040B2/en
Expired legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps

Description

【発明の詳細な説明】 本発明は交流電界の印加に依つてEL(Ele−ctr
oLuminescene)発光を呈する薄膜EL素子
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention utilizes EL (Ele-ctr) by applying an alternating electric field.
This invention relates to a thin film EL element that emits light (oluminescene).

従来、交流動作の薄膜EL素子に関して、発光層に規則
的に高い電界(106V、/(り72程度)を印加し、
絶縁耐圧、発光効率及び動作の安定性等を高めるために
、0.1〜2.0wを%のMn(あるいはCu、Aι、
Br等)をドープしたZnS、Zn−Be等の半導体発
光層をY203、TiO2等の誘電体薄膜でサンドイッ
チした三層構造ZnS■Mn(又はZnSe:Mn)E
L素子が開発され、発光諸特性の向上が確かめられてい
る。
Conventionally, for AC-operated thin-film EL elements, a high electric field (about 106V, /(about 72V)) is regularly applied to the light emitting layer.
In order to improve the dielectric strength, luminous efficiency, and stability of operation, 0.1 to 2.0 w was added with % Mn (or Cu, Aι,
ZnS Mn (or ZnSe:Mn)E is a three-layer structure in which a semiconductor light emitting layer such as ZnS or Zn-Be doped with Br (Br, etc.) is sandwiched between dielectric thin films such as Y203 or TiO2.
L elements have been developed, and improvements in various light emitting characteristics have been confirmed.

この薄膜EL素子は数KHつ交流電界印加によつて高輝
度発光し、しかも長寿命命であるという特徴を有してい
る。またこの薄膜EL素子の発光に関しては印加電圧を
昇圧していく過程と高電圧側より降圧していく過程で、
同じ印加電圧に対して発光輝度が異なるといつたヒステ
リシス特性を有していることが発見され、そしてこのヒ
ステリシス特性を有する薄膜EL素子に印加電圧を昇圧
する過程に於いて、光、電界、熱等が付与されると薄膜
EL素子はその強度に対応した発光輝度の状態に励起さ
れ、光、電界、熱等を除去して元の状態に戻しても発光
輝度は高くなつだ状態で維持される、いわゆるメモリー
現象が表示技術の新たな利用分野を開拓するに到つた。
薄膜EL素子の1例としてZnS:Mn薄膜EL素子の
基本的構造を第1図に示す。
This thin film EL element emits light with high brightness when an alternating current electric field of several kilohertz is applied, and is characterized by a long life. In addition, regarding the light emission of this thin film EL element, there are two processes: increasing the applied voltage and decreasing it from the high voltage side.
It was discovered that the thin-film EL element has a hysteresis characteristic in which the luminance differs for the same applied voltage, and in the process of increasing the applied voltage to a thin-film EL element with this hysteresis characteristic, light, electric field, and heat When the light, electric field, heat, etc. are removed and the element returns to its original state, the thin film EL element is excited to a state of luminance corresponding to the intensity, and the luminance remains high even if the light, electric field, heat, etc. are removed and the element returns to its original state. The so-called memory phenomenon has opened up new fields of use for display technology.
FIG. 1 shows the basic structure of a ZnS:Mn thin film EL device as an example of a thin film EL device.

第1図に基いて薄膜FL素子の構造を具体的に説明する
と、ガラス基板1上にIn2o3、sn■02等の透明
電極2、さらにその上に積層してY203、TiO2、
Aι203、Si3N4、SiO2等からなる第1の誘
電体層3がスパッタあるいは電子ビーム蒸着法等により
重畳形成されている。
The structure of the thin film FL element will be explained in detail based on FIG.
A first dielectric layer 3 made of Aι203, Si3N4, SiO2, etc. is formed in an overlapping manner by sputtering, electron beam evaporation, or the like.

第1の誘電体層3上はZnS:Mn焼結ベレツトを電子
ビーム蒸着することにより得られるZnS発光層4が形
成されている。この時蒸着用のZnS:Mn焼結ペレツ
トには活性物質となるMnが目的に応じた濃度に設定さ
れたペレツトが使用される。ZnS発光層4上には第1
の誘電体層3と同様の材質から成る第2の誘電体層5が
積層され、更にその上にAt等から成る背面電極6力蒸
着形成されている。透明電極2と背面電極6は交流電源
7に接続され、薄膜EL素子が駆動される。電極2,6
間にAC電圧を印加すると、ZnS発光層4の両側の誘
電体層3,5間に上記AC電圧が誘記されることになり
、従つてZnS発光層4内に発生した電界によつて伝導
帯に励起されかつ加速されて充分なエネルギーを得た電
子が、直接Mn発光センターを励起し、励起されたMn
発光センターが基底状態に戻る際に黄色の発光を行なう
A ZnS light emitting layer 4 is formed on the first dielectric layer 3 by electron beam evaporation of a ZnS:Mn sintered beret. At this time, the ZnS:Mn sintered pellets used for vapor deposition are pellets in which the concentration of Mn, which is an active substance, is set to suit the purpose. On the ZnS light emitting layer 4, a first
A second dielectric layer 5 made of the same material as the dielectric layer 3 is laminated, and a back electrode made of At or the like is formed by vapor deposition thereon. The transparent electrode 2 and the back electrode 6 are connected to an AC power source 7, and the thin film EL element is driven. electrodes 2, 6
When an AC voltage is applied between them, the AC voltage is induced between the dielectric layers 3 and 5 on both sides of the ZnS light emitting layer 4, and therefore the electric field generated within the ZnS light emitting layer 4 causes conduction. Electrons that are excited and accelerated by the band and have obtained sufficient energy directly excite the Mn emission center, and the excited Mn
When the luminescent center returns to its ground state, it emits yellow light.

即ち高電界で加速された電子がZnS発光層4中の発光
センターであるZnサイトに入つたMn原子の電子を励
起し、基底状態に落ちる時、時々5850λをピークに
幅広い波長領域で、強い発光を呈する。上記の如き構造
を有する薄膜EL素子はスペース・フアクタの利点を生
かした平面薄型デイスプレイ・デバイスとして、文字及
び図形を含むコンピ3−タ一の出力表示端末機器その他
種々の表示装置に文字、記号、静止画像、動画像等の表
示手段として利用することができる。
That is, when electrons accelerated in a high electric field excite the electrons of Mn atoms that enter the Zn site, which is the luminescent center in the ZnS luminescent layer 4, and fall to the ground state, strong luminescence occurs in a wide wavelength range, sometimes peaking at 5850λ. exhibits. The thin film EL element having the above structure can be used as a flat thin display device that takes advantage of the space factor, and can be used for computer output display terminal equipment and various other display devices containing characters and figures. It can be used as a display means for still images, moving images, etc.

平面薄型表示装置としての薄膜ELパネルは従来のブラ
ウン管(CRT)と比較して動作電圧が低く、同じ平面
型デイスプレイ・デバソスであるプラズマデイスプレイ
パネル(PDP)と比較すれば重量や強度面で優れてお
り、液晶(LCD)に比べて動作可能渦度範囲が広く、
応答速度が速い等多くの利点を有している。また純固定
マトリツクス型パネルとして使用できるため動作寿命が
長く、そのアドレスの正確さとともにコンピユータ一等
の入出力表示手段として非常に有効なものである。上記
従来の薄膜EL素子は黄色発光を行なうものであるが、
黄色発光以外の発光色を得るための技術開発も試みられ
ている。
Thin-film EL panels as flat flat display devices have a lower operating voltage than conventional cathode ray tubes (CRTs), and are superior in terms of weight and strength compared to plasma display panels (PDPs), which are also flat display devices. The operable vorticity range is wider than that of a liquid crystal display (LCD).
It has many advantages such as fast response speed. In addition, since it can be used as a pure fixed matrix type panel, it has a long operating life, and its address accuracy makes it very effective as an input/output display means for computers and the like. The conventional thin film EL device described above emits yellow light, but
Attempts are also being made to develop technologies to obtain luminescent colors other than yellow luminescence.

しかしながら同一発光層中に複数個の発光センターを導
入し、それぞれの発光センター個有の発光を得るととも
にこれらの発光を混合させ、混色発光を得ることは非常
に困難であつた。従つて任意の発光色特に白色に発光す
る薄膜EL素子を単純な構造で実現することのできる技
術の開発が従来より切望されていた。本発明は、希土類
元素のジスプロシウム(4)y)を発光センターとして
ドープした発光層とツリウム(Tm)を発光センターと
してドープした発光層を積層した2層構造の発光層を用
いることにより白色発光を得るとともに各発光層間の膜
厚比を変化させることにより色温度を制御可能とした新
規有用な薄膜EL素子を提供することを目的とし、従来
よりの要望に応えたものである。以下、本発明を実施例
に従つて製造工程順に詳説する。
However, it has been extremely difficult to introduce a plurality of luminescent centers into the same luminescent layer, to obtain the unique luminescence of each luminescent center, and to mix these luminescent lights to obtain mixed color luminescence. Therefore, there has been a long desire to develop a technology that can realize a thin film EL element that emits light of any desired color, particularly white light, with a simple structure. The present invention emits white light by using a two-layer structure of a light emitting layer in which a light emitting layer doped with the rare earth element dysprosium(4)y) as a light emitting center and a light emitting layer doped with thulium (Tm) as a light emitting center are laminated. The object of the present invention is to provide a new and useful thin-film EL device in which the color temperature can be controlled by changing the film thickness ratio between each light-emitting layer. Hereinafter, the present invention will be explained in detail in the order of manufacturing steps according to Examples.

第2図は本発明の1実施例を示す薄膜EL素子の構成断
面図である。
FIG. 2 is a cross-sectional view of a thin film EL device showing one embodiment of the present invention.

第2図に於いて、ガラス基板1上にTn2O3等の透明
電極2を形成し、透明電極2上にSiO2,Si3N4
系の誘電体層3を層厚約2000X程度形成する。
In FIG. 2, a transparent electrode 2 made of Tn2O3 or the like is formed on a glass substrate 1, and SiO2, Si3N4 or the like is formed on the transparent electrode 2.
A dielectric layer 3 is formed to have a thickness of about 2000×.

更に誘電体層3上に第1発光層4aとしてZnS:Dy
F3を層厚約0〜10,000λ程度蒸着し、第1発光
層4aに積層してZnS:TmF3から成る第2発光層
4bを層厚約1,000〜10,000人程度蒸着する
Furthermore, ZnS:Dy is formed on the dielectric layer 3 as a first light emitting layer 4a.
F3 is deposited to a thickness of about 0 to 10,000 λ and laminated on the first light emitting layer 4a, and a second light emitting layer 4b made of ZnS:TmF3 is deposited to a thickness of about 1,000 to 10,000.

次に第2発光層4b上にSl3N4,At2O3?の導
電体層5を層厚約2000λ程度形成し、更に背面電極
6としてAtを蒸着形成する。以上の工程を介して製作
された薄膜発光素子は電源7より交流電圧を印加すると
白色に発光する。
Next, on the second light emitting layer 4b, Sl3N4, At2O3? A conductor layer 5 having a thickness of approximately 2000λ is formed, and At is further formed as a back electrode 6 by vapor deposition. The thin film light emitting device manufactured through the above steps emits white light when an alternating current voltage is applied from the power source 7.

この発光色を色座標上に示すと第3図の如くとなる。第
3図は国際標準色度図であり、上記実施例の薄膜発光素
子の発光色位置とともに発光層がZnS:TmF3層及
びZnS:DyF3層それぞれ単体で構成された薄膜E
L素子の発光色位置も同時に示してある。上記実施例に
於いて、第1発光層4aと第2発光層4bの膜厚比を変
化させると発光色は第3図のTmの点とDyの点を結ぶ
直線上を移動する。
The color of this emitted light is shown on color coordinates as shown in FIG. FIG. 3 is an international standard chromaticity diagram, showing the positions of the emitted light colors of the thin film light emitting device of the above example and the thin film E where the light emitting layer is composed of three layers of ZnS:TmF and three layers of ZnS:DyF.
The position of the emitted light color of the L element is also shown at the same time. In the above embodiment, when the film thickness ratio of the first light emitting layer 4a and the second light emitting layer 4b is changed, the emitted light color moves on a straight line connecting the point Tm and the point Dy in FIG. 3.

即ち、第1発光層4a(ZnS:DyF3)に対して第
2発光層4b(ZnS:TmF3)の膜厚を増加すると
発光色はTmの点に向つて図中に矢印で示す如く移動す
る。ところで、完全黒体の温度即ち色温度に対応する色
座標上の点を示すと第3図の曲線の如くとなる。このこ
とより明らかな如く、色温度曲線は第1発光層4aと第
2発光層4bの膜厚変化に対応する発光色変化の軌跡と
近似している。従つて第1発光層4aと第2発光層4b
の膜厚比を変化させることにより得られる薄膜EL素子
の発光色の色温度を制御することができ、薄膜EL素子
として個有のEL発光色が決定される。以上詳説した如
く、本発明によれば容易に白色発光を得ることができ、
また発光色の色温度を制御することも可能である。
That is, when the thickness of the second light emitting layer 4b (ZnS:TmF3) is increased relative to the first light emitting layer 4a (ZnS:DyF3), the emitted light color moves toward the point Tm as shown by the arrow in the figure. By the way, the points on the color coordinates corresponding to the temperature of a perfect black body, that is, the color temperature, are shown as a curve in FIG. 3. As is clear from this, the color temperature curve is similar to the locus of the change in luminescent color corresponding to the change in the film thickness of the first light emitting layer 4a and the second light emitting layer 4b. Therefore, the first light emitting layer 4a and the second light emitting layer 4b
The color temperature of the emitted light color of the obtained thin film EL element can be controlled by changing the film thickness ratio of , and the unique EL emitted color of the thin film EL element is determined. As explained in detail above, according to the present invention, white light emission can be easily obtained,
It is also possible to control the color temperature of the emitted light.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の薄膜EL素子の構造を説明する構成図で
ある。 第2図は本発明の1実施例を示す薄膜EL素子の構成図
である。第3図は本発明の1実施例に係る薄膜EL素子
の発光色を説明する国際標準色度図である。3,5・・
・誘電体層、4a・・・第1発光層、4b・・・第2発
光層。
FIG. 1 is a block diagram illustrating the structure of a conventional thin film EL element. FIG. 2 is a configuration diagram of a thin film EL device showing one embodiment of the present invention. FIG. 3 is an international standard chromaticity diagram illustrating the emission color of a thin film EL device according to one embodiment of the present invention. 3,5...
- Dielectric layer, 4a...first light emitting layer, 4b...second light emitting layer.

Claims (1)

【特許請求の範囲】[Claims] 1 透明電極と背面電極間に発光層を介設して成り、電
圧印加によりEL発光を呈する薄膜EL素子に於いて、
前記発光層を発光センターとしてジスプロシウムを含む
層とツリウムを含む層とを重畳した少なくとも2層構造
で構成し、該2層構造の各層の層厚に対応して混成され
るEL発光色の色温度を制御設定したことを特徴とする
薄膜EL素子。
1. In a thin film EL element that has a light emitting layer interposed between a transparent electrode and a back electrode and emits EL light upon application of a voltage,
The color temperature of the EL emitted light color is composed of at least a two-layer structure in which a layer containing dysprosium and a layer containing thulium are superimposed with the light-emitting layer as a light-emitting center, and the color temperature of the EL emission color is mixed in accordance with the layer thickness of each layer of the two-layer structure. A thin film EL device characterized by controlling and setting the following.
JP54158789A 1979-12-06 1979-12-06 Thin film EL element Expired JPS598040B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54158789A JPS598040B2 (en) 1979-12-06 1979-12-06 Thin film EL element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54158789A JPS598040B2 (en) 1979-12-06 1979-12-06 Thin film EL element

Publications (2)

Publication Number Publication Date
JPS5682598A JPS5682598A (en) 1981-07-06
JPS598040B2 true JPS598040B2 (en) 1984-02-22

Family

ID=15679367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54158789A Expired JPS598040B2 (en) 1979-12-06 1979-12-06 Thin film EL element

Country Status (1)

Country Link
JP (1) JPS598040B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH086086B2 (en) * 1985-09-30 1996-01-24 株式会社リコー White electroluminescent device
JP2671301B2 (en) * 1987-03-03 1997-10-29 株式会社日本自動車部品総合研究所 Thin film light emitting device

Also Published As

Publication number Publication date
JPS5682598A (en) 1981-07-06

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