JPH04164245A - Manufacture of oxygen concentration sensor - Google Patents
Manufacture of oxygen concentration sensorInfo
- Publication number
- JPH04164245A JPH04164245A JP2291232A JP29123290A JPH04164245A JP H04164245 A JPH04164245 A JP H04164245A JP 2291232 A JP2291232 A JP 2291232A JP 29123290 A JP29123290 A JP 29123290A JP H04164245 A JPH04164245 A JP H04164245A
- Authority
- JP
- Japan
- Prior art keywords
- parts
- sensor element
- sensor
- oxygen concentration
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 239000001301 oxygen Substances 0.000 title claims abstract description 28
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000843 powder Substances 0.000 claims abstract description 23
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000011230 binding agent Substances 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 239000004014 plasticizer Substances 0.000 claims abstract description 7
- 238000007650 screen-printing Methods 0.000 claims abstract description 6
- 239000002904 solvent Substances 0.000 claims abstract description 6
- 238000010304 firing Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 26
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 24
- 230000004043 responsiveness Effects 0.000 abstract description 9
- 239000010410 layer Substances 0.000 description 33
- 238000010586 diagram Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 3
- BAECOWNUKCLBPZ-HIUWNOOHSA-N Triolein Natural products O([C@H](OCC(=O)CCCCCCC/C=C\CCCCCCCC)COC(=O)CCCCCCC/C=C\CCCCCCCC)C(=O)CCCCCCC/C=C\CCCCCCCC BAECOWNUKCLBPZ-HIUWNOOHSA-N 0.000 description 2
- PHYFQTYBJUILEZ-UHFFFAOYSA-N Trioleoylglycerol Natural products CCCCCCCCC=CCCCCCCCC(=O)OCC(OC(=O)CCCCCCCC=CCCCCCCCC)COC(=O)CCCCCCCC=CCCCCCCCC PHYFQTYBJUILEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- PHYFQTYBJUILEZ-IUPFWZBJSA-N triolein Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OCC(OC(=O)CCCCCCC\C=C/CCCCCCCC)COC(=O)CCCCCCC\C=C/CCCCCCCC PHYFQTYBJUILEZ-IUPFWZBJSA-N 0.000 description 2
- 229940117972 triolein Drugs 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は酸素濃度センサの製造方法、更に詳しくはセン
サ素子表面に電極を形成する工程が改良された酸素濃度
センサの製造方法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing an oxygen concentration sensor, and more particularly to a method for manufacturing an oxygen concentration sensor in which the process of forming an electrode on the surface of a sensor element is improved. .
酸素濃度センサを用いて自動車排気中の酸素濃度を検出
し、この値に基づいてエンジンに供給する空気と燃料の
比を制御することが広（行われている。酸素濃度センサ
には多（の種類が有るが、何れの種類においてもセンサ
素子は高温の排気に晒される。それ故、センサ素子は耐
熱性の高いセラミックで作られ且っセンサ素子の表面に
は、電気信号を取り出すための耐熱金属からなる電極が
設けられる。It is widely used to detect the oxygen concentration in automobile exhaust using an oxygen concentration sensor, and to control the ratio of air and fuel supplied to the engine based on this value. There are different types, but in all types, the sensor element is exposed to high-temperature exhaust gas.Therefore, the sensor element is made of highly heat-resistant ceramic, and the surface of the sensor element has a heat-resistant layer to extract electrical signals. An electrode made of metal is provided.
ところで、酸素濃度センサのセンサ素子表面に電極を形
成する方法としては、（１）化学メツキによる電極形成
方法、又は（２）導電性ペーストをスクリーン印刷した
後焼成することによる電極形成方法が主流である。（２
）の方法においては種々の性状の導電性ペーストが提案
されており、例えば特開昭６３−１２０４８２号公報に
はセンサ素子を構成するセラミック成分に対して融剤作
用のある成分を加えてなる組成を有するセラミック材料
を含有している導電性ペーストを用いる電極形成方法が
開示されている。By the way, the mainstream methods for forming electrodes on the sensor element surface of oxygen concentration sensors are (1) electrode forming method by chemical plating, or (2) electrode forming method by screen printing a conductive paste and then baking it. be. (2
), conductive pastes with various properties have been proposed; for example, Japanese Patent Laid-Open No. 63-120482 discloses a composition in which a fluxing component is added to the ceramic component constituting the sensor element. Disclosed is a method of forming an electrode using a conductive paste containing a ceramic material having .
前記の２種類の電極形成方法にはそれぞれ特徴がある。 The two types of electrode formation methods described above each have their own characteristics.
すなわち、製造−ｒ−１程の−にからは、（１）の方法
は電極を厚くするのに時間が掛かる（例えば厚さ１μｍ
の電極を得るのに２４時間掛かる）という欠点がある。That is, from the manufacturing point of r-1, method (1) takes time to thicken the electrode (for example, 1 μm thick).
The disadvantage is that it takes 24 hours to obtain an electrode.
又、（２）の方法は印刷技術上及び導電性ペースト製造
」−の困難性により５μｍ以下の電極を得ることが難し
いという欠点がある。更に、センサ特性の−１−からは
、（１）の方法により製造したセンサ素子の電極（メツ
キ電極）は応答性は良いが耐熱性が低く、反対に（２）
の方法により製造したセンサ素子の電極（ペースト電極
）は応答性は悪いが耐熱性が良い。これらをまとめると
第５図及び第６図の様になる。Furthermore, method (2) has the disadvantage that it is difficult to obtain electrodes of 5 μm or less due to printing technology and difficulties in producing conductive paste. Furthermore, from the sensor characteristic -1-, the electrode (metallic electrode) of the sensor element manufactured by the method (1) has good responsiveness but low heat resistance, and on the contrary, (2)
The sensor element electrode (paste electrode) manufactured by the above method has poor responsiveness but good heat resistance. These are summarized as shown in FIGS. 5 and 6.
第５図に電極の厚さとセンサの応答性との関係及び電極
の厚さと電極の耐熱性との関係を示す。又、第６図にセ
ンサ出力の時間変動を示す。FIG. 5 shows the relationship between the thickness of the electrode and the responsiveness of the sensor, and the relationship between the thickness of the electrode and the heat resistance of the electrode. Further, FIG. 6 shows the temporal fluctuation of the sensor output.
第６図から、センサの応答性か良い場合は排気中の酸素
濃度の変動にセンサ出力は正確に追従するが、センサの
応答性が悪い場合は排気中の酸素濃度の変動にセンサ出
力が追従せず、正確な酸素濃度の検出ができないことが
分かる。From Figure 6, if the sensor response is good, the sensor output will accurately follow the fluctuations in the oxygen concentration in the exhaust gas, but if the sensor response is poor, the sensor output will follow the fluctuations in the oxygen concentration in the exhaust gas. It can be seen that the oxygen concentration cannot be detected accurately.
それ故、実用上充分な耐熱性が得られるならば、電極の
厚さは薄いほうが良い。第５図から明らかな如く、電極
の厚さが１〜５μｍの範囲ではセンサの応答性の応答性
と電極の耐熱性とが釣り合うので、最適な電極の厚さは
この範囲に有ることか予想される。しかしながら、従来
の方法では厚さが１〜５μｍの範囲の電極を容易に且つ
生産性良くセンサ素子を形成すべきセラミック体の表面
に形成することかできなかった。Therefore, if practically sufficient heat resistance can be obtained, the thinner the electrode is, the better. As is clear from Figure 5, when the electrode thickness is in the range of 1 to 5 μm, the responsiveness of the sensor and the heat resistance of the electrode are balanced, so it is expected that the optimal electrode thickness will be within this range. be done. However, with conventional methods, electrodes having a thickness in the range of 1 to 5 μm cannot be easily and productively formed on the surface of a ceramic body on which a sensor element is to be formed.
本発明は前記従来技術の問題点を解決するだめのもので
ある。本発明の目的は、センサ素子表面に電極を形成す
る工程を改良することにより性能の優れた酸素濃度セン
サを容易に且つ生産性良く得ることかできる方法を提供
することにある。The present invention is intended to solve the problems of the prior art. An object of the present invention is to provide a method for easily and efficiently obtaining an oxygen concentration sensor with excellent performance by improving the process of forming electrodes on the surface of a sensor element.
本発明の酸素濃度センサの製造方法は、酸素濃度センサ
を製造する際のセンサ素子表面に電極を形成する工程が
、
重量比で導電性金属粉末１００部に対して、バインダー
６０部、溶剤５０部、可塑剤５部、解膠剤３部及びセラ
ミック粉末１２．５部からなる組成の導電性ペーストを
センサ素子を形成すべきセラミック体の表面にスクリー
ン印刷により塗布する工程と、
次いで前記センサ素子を焼成して表面に厚さ２〜３μｍ
の電極層を形成する工程とからなることを特徴とする。In the method for manufacturing an oxygen concentration sensor of the present invention, the step of forming an electrode on the surface of a sensor element when manufacturing an oxygen concentration sensor includes 60 parts of binder and 50 parts of solvent based on 100 parts of conductive metal powder by weight. , applying a conductive paste having a composition of 5 parts of plasticizer, 3 parts of peptizer, and 12.5 parts of ceramic powder to the surface of the ceramic body in which the sensor element is to be formed by screen printing; After firing, the surface has a thickness of 2 to 3 μm.
The method is characterized by comprising a step of forming an electrode layer.
導電性金属粉末としては、所定の平均粒径の貴金属例え
ば白金、ロジウム、イリジウム等を単独又は組み合わせ
て使用することができる。As the conductive metal powder, noble metals such as platinum, rhodium, iridium, etc. having a predetermined average particle size can be used alone or in combination.
バインダー、溶剤、可塑剤及び解膠剤は、この分野にお
いて慣用のものから適宜選択する。The binder, solvent, plasticizer and deflocculant are appropriately selected from those commonly used in this field.
セラミック粉末は、焼成後に電極層がセンサ素子に強固
に結合するような種類のセラミックからなる粉末を選択
する。それ故、センサ素子を構成するセラミックと同種
のセラミックからなる粉末が好ましい。具体的には、セ
ンサ素子を構成するセラミックとし７てジルコニアやチ
タニアを使用する場合には、セラミック粉末としてジル
コニア粉末やチタニア粉末を使用するのが好ましい。The ceramic powder is selected to be of a type such that the electrode layer is firmly bonded to the sensor element after firing. Therefore, it is preferable to use a powder made of the same type of ceramic as the ceramic constituting the sensor element. Specifically, when zirconia or titania is used as the ceramic 7 constituting the sensor element, it is preferable to use zirconia powder or titania powder as the ceramic powder.
センサ素子の大きさや形状は、本発明の方法を適用し得
る限り特に限定されない。センサ素子の形状は、例えば
板状、一端が閉じた筒状などであってよい。The size and shape of the sensor element are not particularly limited as long as the method of the present invention can be applied. The shape of the sensor element may be, for example, plate-like or cylindrical with one end closed.
スクリーン印刷により、後の焼成で厚さ２〜３μｍの電
極層を形成し得るような厚さの導電性ペースト層をセン
サ素子表面に塗布する。By screen printing, a layer of conductive paste is applied to the surface of the sensor element in such a thickness that an electrode layer with a thickness of 2 to 3 μm can be formed by subsequent firing.
本発明の方法においては、導電性ペースト層の組成を最
適に選択することにより、センサ素子の表面に厚さ２〜
３μｍの電極層を形成することができる。In the method of the present invention, by optimally selecting the composition of the conductive paste layer, the surface of the sensor element can be coated with a thickness of 2 to 2.
An electrode layer of 3 μm can be formed.
又、導電性ペーストの一成分としてセラミック粉末を用
いることにより、電極層をセンサ素子と一体に焼成・成
形することができる。Furthermore, by using ceramic powder as a component of the conductive paste, the electrode layer can be fired and molded integrally with the sensor element.
以下に本発明の詳細な説明する。 The present invention will be explained in detail below.
１、導電性ペースト組成の検討
導電性金属粉末として白金（Ｐｔ）粉末を、バインダー
としてポリビニルブチラール（ＰＶＢ）を、溶剤として
ブタノール（ＢＮ）を、可塑剤としてジオクチルフタレ
ート（ＤＯＰ）を、解膠剤としてトリオレイン（ＴＯ）
を、セラミック粉末としてジルコニア粉末を各々使用し
、組成比を変えて導電性ペーストを製造した。次いでこ
れをジルコニアグリーンシート」−にスクリーン印刷し
、所定条件で焼成して電極層を形成した時の状態を観察
した。結果を下記第１表に示す。1. Study of conductive paste composition Platinum (Pt) powder as conductive metal powder, polyvinyl butyral (PVB) as binder, butanol (BN) as solvent, dioctyl phthalate (DOP) as plasticizer, peptizer as triolein (TO)
Conductive pastes were manufactured using zirconia powder as the ceramic powder and varying the composition ratio. This was then screen printed on a zirconia green sheet and fired under predetermined conditions to form an electrode layer.The state of the electrode layer was observed. The results are shown in Table 1 below.
第１表 導電性ペースト組成の検討
第１表から明らかな如く、ポリビニルブチラール（ＰＶ
Ｂ） Ｃバインダー〕及びジオクチルフタレート（Ｄ
ＯＰ） （可塑剤〕の電極層の形成における影響は太
き（、各々適量を逸脱すると印刷後にニジミ及び焼成後
にワレを生ずる。それ故、導電性ペーストの組成は第１
表の評価Ｈの組成に定めた。Table 1 Examination of conductive paste composition As is clear from Table 1, polyvinyl butyral (PV
B) C binder] and dioctyl phthalate (D
OP) (Plasticizer) has a large influence on the formation of the electrode layer (if the appropriate amount of each is exceeded, it will cause bleeding after printing and cracking after baking. Therefore, the composition of the conductive paste should be
The composition was determined to be rated H in the table.
■、電極層の形成
重量比でジルコニア粉末１００部に対して、バインダー
１１部、溶剤７０部、可塑剤５部、解膠剤３部を混合し
、ボールミルで５０時間攪拌した後ドクターブレード装
置により厚さ２００μｍのシート状に成形して、第１図
（ａ−１）［斜視図］及び第１図（ｂ−１）［断面図］
に示すジルコニアグリーンシート１を得た。次いで、ジ
ルコニアグリーンシート１の表面に導電性ペーストをス
クリーン印刷して、第１図（ａ−２）及び第１図（ｂ−
２）に示す厚さ５μｍの導電性ペースト層２を形成した
。(2) Formation of electrode layer: 100 parts of zirconia powder, 11 parts of binder, 70 parts of solvent, 5 parts of plasticizer, and 3 parts of deflocculant were mixed in a weight ratio, and after stirring in a ball mill for 50 hours, a doctor blade was used to form the electrode layer. It was molded into a sheet with a thickness of 200 μm, and FIG. 1 (a-1) [perspective view] and FIG. 1 (b-1) [cross-sectional view]
A zirconia green sheet 1 shown in Figure 1 was obtained. Next, a conductive paste is screen printed on the surface of the zirconia green sheet 1 to obtain the results shown in FIG. 1(a-2) and FIG. 1(b-2).
A conductive paste layer 2 having a thickness of 5 μm as shown in 2) was formed.
ここで導電性ペーストは、前記■の評価■の組成のもの
を使用した。導電性ペーストは、粘度が１００００〜２
００００ｃｐｓＯものが好ましい。又、ｐｔ粉末の代わ
りに例えばＰｔ−Ｒｂ粉末を用いてもよい。第２図に、
導電性金属粉末に対するバインダーの比率（重量％）と
印刷厚に対する焼成厚の比率（重量％）との関係を示す
。これより、バインダーの比率を６０重量％とすると、
導電性ペースト層２の焼成後の厚さは印刷時の厚さの４
０％となることが分かる。Here, the conductive paste used had a composition of evaluation (2) above. The conductive paste has a viscosity of 10,000 to 2
0000 cpsO is preferable. Further, for example, Pt-Rb powder may be used instead of PT powder. In Figure 2,
The relationship between the ratio of binder to conductive metal powder (weight %) and the ratio of firing thickness to printing thickness (weight %) is shown. From this, if the binder ratio is 60% by weight,
The thickness of the conductive paste layer 2 after firing is 4 times the thickness at the time of printing.
It can be seen that it is 0%.
表面に導電性ペーストを形成したジルコニアグリーンシ
ート１を最高４２０℃まで昇温しで脱脂し、次いで１４
００℃で１時間焼成すると、第１図（ｂ−２’ ）に矢
印で示す如く導電性ペースト層２中の多量のバインダー
が消失して収縮部分２“の厚さだけ厚さが減少し、第１
図（ａ−３）及び第１図（ｂ−３）に示す厚さ２μｍの
電極層３を得る。A zirconia green sheet 1 with a conductive paste formed on its surface was heated to a maximum of 420°C to degrease it, and then heated to a temperature of 14°C.
When baked at 00°C for 1 hour, a large amount of the binder in the conductive paste layer 2 disappears and the thickness decreases by the thickness of the contracted portion 2'', as shown by the arrow in Figure 1 (b-2'). 1st
An electrode layer 3 having a thickness of 2 μm as shown in FIG. 1(a-3) and FIG. 1(b-3) is obtained.
同様にして、ジルコニアグリーンシート１の他の表面に
も電極層３と表裏で一対となった電極層３′ （図示せ
ず）を形成する。Similarly, on the other surface of the zirconia green sheet 1, an electrode layer 3' (not shown), which is paired with the electrode layer 3 on the front and back sides, is formed.
■、酸素濃度センサの製造
第３図に、表面に電極層３，３′を形成したジルコニア
グリーンシート１を用いて製造した酸素濃度センサのセ
ンサ素子の一実施例の概略構成図を示す。このセンサ素
子はＭ層型であり、図中、４は保護層、５は大気ダクト
層、６は下端層である。(2) Manufacture of oxygen concentration sensor FIG. 3 shows a schematic diagram of an embodiment of a sensor element of an oxygen concentration sensor manufactured using a zirconia green sheet 1 having electrode layers 3, 3' formed on its surface. This sensor element is of M-layer type, and in the figure, 4 is a protective layer, 5 is an atmospheric duct layer, and 6 is a bottom layer.
第４図に、本発明の方法により製造した酸素濃度センサ
（本発明品、電極層の厚さ２μｍ）と従来の方法により
製造した酸素濃度センサ（従来品、ペースト電極、電極
層の厚さ５μｍ以上）のセンサ出力の時間変動を示す。Figure 4 shows an oxygen concentration sensor manufactured by the method of the present invention (invention product, electrode layer thickness 2 μm) and an oxygen concentration sensor manufactured by the conventional method (conventional product, paste electrode, electrode layer thickness 5 μm). (above) shows the time fluctuation of the sensor output.
本発明品は従来品に比べて電極層の厚さが最適に選択さ
れているため、応答性が良い。又、本発明品は電極層が
ジルコニアグリーンシートと一体に焼成・成形されてい
るので、従来品に比べて電極層の耐熱性も高い。The product of the present invention has an optimally selected thickness of the electrode layer compared to conventional products, so it has better responsiveness. Furthermore, since the electrode layer of the product of the present invention is fired and molded integrally with the zirconia green sheet, the electrode layer has higher heat resistance than conventional products.
（発明の効果）
本発明の酸素濃度センサの製造方法は、組成を最適に選
択した導電性ペーストをセンサ索ｒ−を形成すべきセラ
ミック体の表面にスクリーン印刷により塗布し、次いで
このセンサ素子を焼成して表面に厚さ２〜３μｍの電極
層を形成するので、応答性が良く且つ耐熱性か高い酸素
濃度センサを容易に得ることかできる。(Effects of the Invention) In the method for manufacturing an oxygen concentration sensor of the present invention, a conductive paste with an optimally selected composition is applied by screen printing to the surface of a ceramic body in which a sensor cable is to be formed, and then this sensor element is Since an electrode layer with a thickness of 2 to 3 μm is formed on the surface by firing, an oxygen concentration sensor with good responsiveness and high heat resistance can be easily obtained.
又、本発明の方法は少ない工程で薄い電極を製造し得る
ので、生産性が向上するとともに、高価な貴金属の使用
量が少なくて済むので製造コストの低減に効果がある。Furthermore, since the method of the present invention can manufacture thin electrodes with fewer steps, productivity is improved, and the amount of expensive precious metals used can be reduced, which is effective in reducing manufacturing costs.
更に、本発明の方法は積層型、一端が閉じた筒状型等の
種々の型のセンサ素Ｐを用いた限界電流型、半導体型等
の種々の型の酸素濃度センサの製造に広く応用すること
かできる。Furthermore, the method of the present invention can be widely applied to the production of various types of oxygen concentration sensors such as limiting current type and semiconductor type using sensor elements P of various types such as laminated type and cylindrical type with one end closed. I can do it.
第１図は本発明の酸素濃度センサの製造方法におけるセ
ンサ素子表面に電極を形成する工程の説明図、
第２図は導電性金属粉末に対するバインダーの比率と印
刷厚に対する焼成厚の比率との関係を示す図、
第３図は本発明の方法により製造した酸素濃度センサの
センサ素子の一実施例の概略構成図、第４図は本発明の
方法により製造した酸素濃度センサと従来の方法ににり
製造した酸素濃度センサのセンサ出力の時間変動を示す
図、第５図は酸素濃度センサにおける電極の厚さとセン
サの応答性との関係及び電極の厚さと電極の耐熱性との
関係を示す図、
第６図はペースト電極及びメツキ電極を有する酸素濃度
センサのセンサ出力の時間変動を示す図である。
図中、
１− ンルコニアグリーンシーＩ・
２−導電性ペースト層 ２゛・−収縮部分３．３
′ −電極層 ４−保護層５−大気ダクト層
６−・・下端層特許出願人 ト
ヨタ自動車株式会社代理人 弁理士 萼 優美
（ほか２名）第１図
第３図
第２図
導も伯名り属粉末１こ対するハイツタ２０上ヒ牟 （’
／、）第４図
時間（Ｓ）Figure 1 is an explanatory diagram of the step of forming an electrode on the surface of a sensor element in the method for manufacturing an oxygen concentration sensor of the present invention. Figure 2 is the relationship between the ratio of binder to conductive metal powder and the ratio of firing thickness to printing thickness. 3 is a schematic configuration diagram of an embodiment of a sensor element of an oxygen concentration sensor manufactured by the method of the present invention, and FIG. 4 is a diagram showing the configuration of an oxygen concentration sensor manufactured by the method of the present invention and a conventional method. Fig. 5 is a diagram showing the relationship between the thickness of the electrode and the responsiveness of the sensor in the oxygen concentration sensor, and the relationship between the thickness of the electrode and the heat resistance of the electrode. , FIG. 6 is a diagram showing temporal fluctuations in sensor output of an oxygen concentration sensor having a paste electrode and a plating electrode. In the figure, 1 - Luconia green sea I, 2 - conductive paste layer 2 - contracted part 3.3
′ - Electrode layer 4 - Protective layer 5 - Atmospheric duct layer 6 - Lower end layer Patent applicant Toyota Motor Corporation agent Patent attorney Yumi Kaly (and 2 others) Figure 1 Figure 3 Figure 2 Guidance is also by Hakumei 20 vines per 1 vine powder ('
/,) Figure 4 Time (S)
Claims (1)
形成する工程が、 重量比で導電性金属粉末１００部に対して、バインダー
６０部、溶剤５０部、可塑剤５部、解膠剤３部及びセラ
ミック粉末１２．５部からなる組成の導電性ペーストを
センサ素子を形成すべきセラミック体の表面にスクリー
ン印刷により塗布する工程と、 次いで前記センサ素子を焼成して表面に厚さ２〜３μｍ
の電極層を形成する工程とからなることを特徴とする酸
素濃度センサの製造方法。[Claims] The step of forming an electrode on the surface of a sensor element when manufacturing an oxygen concentration sensor is performed using 60 parts of binder, 50 parts of solvent, and 5 parts of plasticizer based on 100 parts of conductive metal powder by weight. , applying a conductive paste having a composition of 3 parts of deflocculant and 12.5 parts of ceramic powder to the surface of the ceramic body on which the sensor element is to be formed by screen printing; and then firing the sensor element to coat the surface of the ceramic body. Thickness 2-3μm
1. A method of manufacturing an oxygen concentration sensor, comprising the steps of: forming an electrode layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2291232A JP2745805B2 (en) | 1990-10-29 | 1990-10-29 | Manufacturing method of oxygen concentration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2291232A JP2745805B2 (en) | 1990-10-29 | 1990-10-29 | Manufacturing method of oxygen concentration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04164245A true JPH04164245A (en) | 1992-06-09 |
| JP2745805B2 JP2745805B2 (en) | 1998-04-28 |
Family
ID=17766188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2291232A Expired - Fee Related JP2745805B2 (en) | 1990-10-29 | 1990-10-29 | Manufacturing method of oxygen concentration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2745805B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258281A (en) * | 1993-03-09 | 1994-09-16 | Fujikura Ltd | Manufacture of ion conductor device |
| US6548023B1 (en) | 1998-06-18 | 2003-04-15 | Ngk Spark Plug Co., Ltd. | Gas sensor |
-
1990
- 1990-10-29 JP JP2291232A patent/JP2745805B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06258281A (en) * | 1993-03-09 | 1994-09-16 | Fujikura Ltd | Manufacture of ion conductor device |
| US6548023B1 (en) | 1998-06-18 | 2003-04-15 | Ngk Spark Plug Co., Ltd. | Gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2745805B2 (en) | 1998-04-28 |
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