JPH0416232A - Device for grading and drying powdery green sheet material - Google Patents
Device for grading and drying powdery green sheet materialInfo
- Publication number
- JPH0416232A JPH0416232A JP2120936A JP12093690A JPH0416232A JP H0416232 A JPH0416232 A JP H0416232A JP 2120936 A JP2120936 A JP 2120936A JP 12093690 A JP12093690 A JP 12093690A JP H0416232 A JPH0416232 A JP H0416232A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- heating tube
- slurry
- heating pipe
- green sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims abstract description 19
- 239000000463 material Substances 0.000 title claims abstract description 5
- 239000000843 powder Substances 0.000 claims abstract description 61
- 238000010438 heat treatment Methods 0.000 claims abstract description 58
- 239000002002 slurry Substances 0.000 claims abstract description 26
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 7
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 7
- 239000000057 synthetic resin Substances 0.000 claims abstract description 7
- 239000002994 raw material Substances 0.000 claims description 13
- 238000004513 sizing Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 5
- 239000012535 impurity Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005086 pumping Methods 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 21
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 16
- 239000000919 ceramic Substances 0.000 description 15
- 239000004809 Teflon Substances 0.000 description 9
- 229920006362 Teflon® Polymers 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000010304 firing Methods 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007652 sheet-forming process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Glanulating (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
グリーンシートの原料である整粒された粉末を含むスラ
リーを加熱管を通して乾燥させる装置に関し、
セラミックプリント配線板の誘電体に関する品質の向上
を可能とすることを目的とし、グリーンシートの原料で
ある粉末を湿式整粒してなるスラリーを送り出すポンプ
と、加熱状態にあり、該ポンプによって上記スラリーを
送り込まれる加熱管と、該加熱管の他端か接続されてお
り減圧状態の粉末補集室とを存し、上記スラリーか上記
加熱管内を加熱されつつ高速度で流れ、上記粉末を乾燥
した状態で上記粉末補集室内に回収する構成のグリーン
シート原料整粒粉末乾燥装置において、
上記加熱管を、耐熱性を有する合成樹脂製の加熱管本体
と、該加熱管本体に密着して巻回された補強用巻回体と
より構成する。[Detailed Description of the Invention] [Summary] The present invention relates to a device that dries a slurry containing sized powder, which is a raw material for green sheets, through a heating tube, and is capable of improving the quality of dielectric materials of ceramic printed wiring boards. The other end of the heating tube is connected to a pump that sends out a slurry made by wet sizing powder, which is the raw material for green sheets, and a heating tube that is in a heated state and into which the slurry is fed by the pump. and a powder collecting chamber in a reduced pressure state, the slurry flows at high speed while being heated in the heating tube, and the powder is collected in a dry state in the powder collecting chamber. In the powder drying apparatus, the heating tube includes a heating tube main body made of a heat-resistant synthetic resin and a reinforcing wound body tightly wound around the heating tube main body.
本発明はグリーンシートの原料である整粒された粉末を
含むスラリーを加熱管を通して乾燥させる装置に関する
。The present invention relates to an apparatus for drying a slurry containing sized powder, which is a raw material for green sheets, through a heating tube.
一般に、セラミックプリント配線板は、第４図に示すよ
うに、まずグリーンシートを成形し、この後これを積層
し、焼成して製造される。In general, a ceramic printed wiring board is manufactured by first forming green sheets, then laminating them and firing them, as shown in FIG.
最初に、−アルミナ粉末を湿式整粒する（工程１）。First, alumina powder is wet-sized (step 1).
湿式整粒は、第５図に示すようにボールミル１１を使用
し、アルミナ粉末１２と溶剤であるアセトン１３とをド
ラム１４内に入れ、ドラム１４を数１０時間に亘って回
転させることにより行う。Wet sizing is performed by using a ball mill 11 as shown in FIG. 5, placing alumina powder 12 and acetone 13 as a solvent in a drum 14, and rotating the drum 14 for several tens of hours.
これにより、アルミナ粉末１２の粒径が均一化され、粒
径が均一化されたアルミナ粉末１２ａが符号１５て示す
スラリー状態て得られる。As a result, the particle size of the alumina powder 12 is made uniform, and alumina powder 12a having a uniform particle size is obtained in the form of a slurry indicated by reference numeral 15.
次に、このスラリー１５を後述する乾燥装置により乾燥
させ（工程２）、アルミナ整粒粉末１２ａを得る。Next, this slurry 15 is dried using a drying device to be described later (Step 2) to obtain sized alumina powder 12a.
このアルミナ整粒粉末をガラス整粒粉末と混練させ（工
程３）、これを原料としてグリーンシートを形成する（
工程４）。This sized alumina powder is kneaded with sized glass powder (step 3), and this is used as a raw material to form a green sheet (
Step 4).
次に、このグリーンシートにバイヤ及び導体パターンを
形成する（工程５）。Next, vias and conductor patterns are formed on this green sheet (step 5).
次に、このグリーンシートを積層しく工程６）、この積
層体を焼成しく工程７）、表面層導体を形成して（工程
８）、セラミックプリント配線板か完成する。Next, the green sheets are laminated (Step 6), the laminate is fired (Step 7), and a surface layer conductor is formed (Step 8), thereby completing a ceramic printed wiring board.
完成したセラミックプリント配線板の電機的特性は、基
板であるセラミックシートの誘電率により影響される。The electrical properties of a completed ceramic printed wiring board are influenced by the dielectric constant of the ceramic sheet that is the substrate.
セラミックシートの誘電率はグリーンシートの原料であ
るアルミナ整粒粉末の純度と関連する。The dielectric constant of the ceramic sheet is related to the purity of the sized alumina powder that is the raw material for the green sheet.
このため、高品質のセラミックプリント配線板を製造す
るためには、高純度のアルミナ整粒粉末を得る必要があ
る。Therefore, in order to manufacture high quality ceramic printed wiring boards, it is necessary to obtain highly purified alumina sized powder.
第６図は、上記のスラリー乾燥工程２に使用される乾燥
装置（高速ジェット乾燥装置）２０を示す。 ２■はス
テンレス製の加熱管であり、蒸気ジャケット２２内に、
ジグザグ状に屈曲して設けてあり、全長は約１０ｍであ
る。FIG. 6 shows a drying device (high-speed jet drying device) 20 used in the slurry drying process 2 described above. 2■ is a stainless steel heating tube, inside the steam jacket 22,
It is bent in a zigzag shape and has a total length of about 10 m.
蒸気ジャケット２２内には、加熱蒸気が送り込まれてお
り、加熱管２１は１３０°Ｃ程度に加熱されている。Heated steam is fed into the steam jacket 22, and the heating tube 21 is heated to about 130°C.
２３はポンプであり、加熱管２１の入口側２４に接続し
て設けてあり、スラリーを加熱管２Ｉ内に定量的且つ連
続的に送り込む。A pump 23 is connected to the inlet side 24 of the heating tube 21, and feeds the slurry quantitatively and continuously into the heating tube 2I.
２５は粉体補集室であり、加熱管２１の出口側２６に接
続して設けてあり、真空ポンプ２７により６０ａａＨｇ
程度の減圧状態とされている。25 is a powder collecting chamber, which is connected to the outlet side 26 of the heating tube 21, and is heated to 60 aaHg by a vacuum pump 27.
It is said to be in a state of reduced pressure.
２８はコンデンサ、２９は溶剤回収タンクである。28 is a condenser, and 29 is a solvent recovery tank.
第５図のスラリー１５はタンク３０内に入れられ、ポン
プ２３により定量的且つ連続的に加熱管２１内に送り込
まれる。The slurry 15 shown in FIG. 5 is placed in a tank 30 and is quantitatively and continuously fed into the heating tube 21 by the pump 23.
スラリー１５は、第６図に示すように状態を変化させつ
つ加熱管２１内を進んでいく。The slurry 15 advances through the heating tube 21 while changing its state as shown in FIG.
■ まず、加熱されつつ移動する予熱流４０となる。(2) First, it becomes a preheated flow 40 that moves while being heated.
■ アセトンの沸点に達すると、アセトンか沸騰して気
泡か混入した気泡流４１となる。- When the boiling point of acetone is reached, the acetone boils and becomes a bubble stream 41 containing air bubbles.
■ アセトンの沸騰により、流速か急速に増し、乱流４
２となる。■ Due to the boiling of acetone, the flow rate increases rapidly and becomes turbulent 4.
It becomes 2.
■ 出口側２６に近づくにつれて、加熱管２１内の圧力
が低下し、アセトンの蒸発か更に進むと共に蒸発したア
セトンの蒸気は更に加熱され過熱蒸気となり、音速に近
い噴霧流４３となる。(2) As it approaches the outlet side 26, the pressure inside the heating tube 21 decreases, and as the acetone evaporates further, the evaporated acetone vapor is further heated and becomes superheated vapor, forming a spray stream 43 close to the speed of sound.
粉体補集室２５内にはこの噴霧流４３の状態て噴出し、
このときの急激な膨張により、アルミナ整粒粉末に残存
しているアセトンは完全に蒸発され、乾燥状態のアルミ
ナ整粒粉末１２ａか室２５内に溜まる。This spray stream 43 is ejected into the powder collection chamber 25,
Due to the rapid expansion at this time, the acetone remaining in the sized alumina powder is completely evaporated, and the dry sized alumina powder 12a accumulates in the chamber 25.
一方、アセトンの過熱蒸気３１は、コンデンサ２８で冷
却されて液化され、タンク２９内に回収される。On the other hand, the superheated acetone vapor 31 is cooled and liquefied by the condenser 28 and collected into the tank 29 .
アルミナ整粒粉末１２ａは、弁３２を開くことにより、
取り出される。By opening the valve 32, the alumina sized powder 12a is
taken out.
〔発明が解決しようとする課題〕
上記のようにスラリー１５は非常に高速で加熱管２１内
を流れるため、スラリー１５内のアルミナ整粒粉末１２
ａによってステンレス製加熱管２１の内壁か磨耗され、
極く微量ではあるけれどもステンレスの粉か発生する。[Problems to be Solved by the Invention] As described above, since the slurry 15 flows through the heating tube 21 at a very high speed, the sized alumina powder 12 in the slurry 15
The inner wall of the stainless steel heating tube 21 is worn out by a.
Although it is a very small amount, stainless steel powder is generated.
磨耗により発生したステンレスの粉は回収されたアルミ
ナ整粒粉末１２ａ内に混じり込み、アルミナ整粒粉末１
２ａの純度がその分低下してしまう。Stainless steel powder generated due to wear is mixed into the collected alumina sized powder 12a, and the alumina sized powder 1
The purity of 2a decreases accordingly.
この混り込んだステンレスの粉末は、第４図中の焼成工
程７のときにも消滅せず、最後まで残り、完成品である
セラミックプリント配線板の誘電率を低下させるように
作用してしまう。This mixed stainless steel powder does not disappear even during the firing process 7 in Figure 4, and remains until the end, acting to reduce the dielectric constant of the finished ceramic printed wiring board. .
本発明はセラミックプリント配線板の誘電率に関する品
質の向上を可能としたグリーンシート原料整粒粉末乾燥
装置を提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a green sheet raw material sized powder drying device that enables improvement in quality regarding the dielectric constant of ceramic printed wiring boards.
本発明は、グリーンシートの原料である粉末を湿式整粒
してなるスラリーを送り出すポンプと、加熱状態にあり
、該ポンプによって上記スラリーを送り込まれる加熱管
と、該加熱管の他端か接続されており減圧状態の粉末補
集室とを有し、上記スラリーが上記加熱管内を加熱され
つつ高速度で流れ、上記粉末を乾燥した状態で上記粉末
補集室内に回収する構成のグリーンシート原料整粒粉末
乾燥装置において、
上記加熱管を、
耐熱性を有する合成樹脂製の加熱管本体と、該加熱管本
体に密着して巻回された補強用巻回体とよりなる構成と
してなる。The present invention provides a pump for delivering a slurry formed by wet sizing of powder that is a raw material for green sheets, a heating tube that is in a heated state and into which the slurry is fed by the pump, and the other end of the heating tube is connected to the pump. and a powder collecting chamber in a reduced pressure state, the slurry flows at high speed while being heated in the heating tube, and the powder is collected in a dry state in the powder collecting chamber. In the granular powder drying apparatus, the heating tube is configured to include a heating tube main body made of a heat-resistant synthetic resin and a reinforcing wound body tightly wound around the heating tube main body.
耐熱性を有する合成樹脂製の加熱管本体は、発生させる
削り粉末を合成樹脂製の粉末とする。The heating tube body is made of heat-resistant synthetic resin, and the shaving powder generated is made of synthetic resin.
この粉末は、グリーンシート内には混入するけれどもセ
ラミック焼成時に焼失して消滅する。Although this powder is mixed into the green sheet, it is burnt out and disappears during ceramic firing.
補強用巻回体は、加熱管本体か潰れることを防止する。The reinforcing roll prevents the heating tube body from being crushed.
第１図は本発明の一実施例になるアルミナ整粒粉末乾燥
装置５０を示す。FIG. 1 shows a sized alumina powder drying apparatus 50 according to an embodiment of the present invention.
この乾燥装置５０は、加熱管の構成を除いて、第６図に
示す乾燥装置２０と同してあり、対応する部分には同一
符号を付す。This drying device 50 is the same as the drying device 20 shown in FIG. 6 except for the configuration of the heating tube, and corresponding parts are given the same reference numerals.
加熱管５１は、第２図及び第３図に併せて示すように、
径ｄ、か１０〜２０ｍｍ、厚さｔか２ｍｍのテフロン（
商品名）製の加熱管本体５２に、径ｄ２か１ｍｍのステ
ンレス製のワイヤ５３を、加熱管本体５１の外周面に密
着させて螺旋状に巻き付けてなる構成である。As shown in FIGS. 2 and 3, the heating tube 51 is
Teflon with diameter d or 10 to 20 mm and thickness t or 2 mm (
It has a structure in which a stainless steel wire 53 having a diameter d2 or 1 mm is wound spirally around the heating tube body 52 made by the manufacturer (trade name) in close contact with the outer peripheral surface of the heating tube body 51.
ステンレス製ワイヤ５３の巻回体５４は、テフロン（商
品名）製布熱管本体５２を補強している。The wound body 54 of the stainless steel wire 53 reinforces the cloth heating tube body 52 made of Teflon (trade name).
即ち、加熱管５１のうち、出口側２６の圧力は６０ｏｎ
Ｈｇ前後に減圧され、加熱管本体５２には潰れる方向の
力か作用する。テフロン製の加熱管本体５２か潰れるた
めには、潰される以外の部分か外方に拡がるように変形
することが必要となる。That is, the pressure on the outlet side 26 of the heating tube 51 is 60 on.
The pressure is reduced to about Hg, and a force in the direction of crushing is applied to the heating tube main body 52. In order for the heating tube body 52 made of Teflon to collapse, it is necessary that the portion other than the portion that is crushed be deformed so as to expand outward.
この外方への拡がる変形をステンレス製ワイヤ５３が制
限することにより、加熱管本体５２は潰れる方向への変
形か制限される。By restricting this outward expanding deformation by the stainless steel wire 53, the heating tube main body 52 is restricted from deforming in the direction of collapse.
また、テフロンは１３０°Ｃ程度の高温に対して十分な
耐熱性を有し、加熱管本体５２か熱によって損傷するこ
とも無い。Furthermore, Teflon has sufficient heat resistance against high temperatures of about 130° C., and the heating tube main body 52 will not be damaged by heat.
スラリー１５はポンプ２３により加熱管５Ｉ内に定量的
且つ連続的に送り込まれ、加熱管５１内を前記と同様に
高速で流れ、粉体補集室２５内にアルミナ整粒粉末１２
ａか回収される。The slurry 15 is quantitatively and continuously fed into the heating tube 5I by the pump 23, flows through the heating tube 51 at high speed as described above, and the sized alumina powder 12 is introduced into the powder collection chamber 25.
A is collected.
スラリー１５が加熱管５１内を勢い良く流れるときに、
テフロン製加熱管本体５２の内壁を削り、テフロン粉が
生じ、これかアルミナ整粒粉末１２ａ内に混入する。When the slurry 15 flows vigorously inside the heating tube 51,
The inner wall of the Teflon heating tube main body 52 is scraped to produce Teflon powder, which is mixed into the sized alumina powder 12a.
しかし、このテフロン粉は、第４図中の焼成工程７にお
いて焼失して消滅する。However, this Teflon powder is burned out and disappears in the firing step 7 in FIG.
これにより、従来に比べて不純物の混入が少なく、純度
か高く、誘電率か高く、高品質のセラミックプリント配
線板を製造することが出来る。As a result, it is possible to manufacture a high-quality ceramic printed wiring board with less contamination of impurities, higher purity, and higher dielectric constant than in the past.
また、加熱管本体の材質は、耐熱性を存し、且つセラミ
ック焼成温度で焼失するものであればよく、テフロンに
限るものではない。Further, the material of the heating tube body is not limited to Teflon, as long as it has heat resistance and is burnt out at the ceramic firing temperature.
以上説明した様に、本発明によれば、グリーンシート原
料整粒粉末に混入される不純物は、セラミックプリント
配線板の焼成工程て焼失してしまう削り粉であるため、
最終製品のセラミックプリント配線板としては上記不純
物による影響を受けない高品質のものを製造することか
出来る。As explained above, according to the present invention, the impurities mixed into the green sheet raw material sized powder are shavings that are burned away during the firing process of the ceramic printed wiring board.
It is possible to manufacture a high quality ceramic printed wiring board as a final product that is not affected by the above impurities.
また、補強用巻回体を設けたことにより、加熱管は合成
樹脂製であっても潰れてしまうことを確実に防止出来る
。Furthermore, by providing the reinforcing roll, the heating tube can be reliably prevented from being crushed even if it is made of synthetic resin.
第１図は本発明のグリーンシート原料整粒粉末乾燥装置
の一実施例を示す図、
第２図は第１図中加熱管の一部を示す図、第３図は第２
図中矢印■方向より見た図、第４図はセラミックプリン
ト配線板の製造工程を示す図、
第５図は第４図中のアルミナ粉末湿式整粒を説明する図
、
第６図は従来のグリーンシート原料整粒粉末乾燥装置の
一例を示す図である。
図において、
１はアルミナ粉末湿式整粒工程、
２はスラリー乾燥工程、
４はグリーンシート形成工程、
７は焼成工程、
１２はアルミナ粉末、
１２ａはアルミナ整粒粉末、
１５はスラリー
２２は蒸気ジャケット、
２３はポンプ、
２５は粉体補集室、
２７は真空ポンプ、
４０は予熱流、
４１は気泡流、
４２は乱流、
４３は噴霧流、
５０は乾燥装置、
５１は加熱管、
５２はテフロン製加熱管本体、
５３はステンレス製ワイヤ、
５４はステンレスワイヤ製巻回体
を示す。
＃１画甲子〜慰管の一部１示す図
第２図
特許出願人 富 士 通 株式会社
第３図
第４図
第５図Figure 1 is a diagram showing an embodiment of the green sheet raw material sized powder drying apparatus of the present invention, Figure 2 is a diagram showing a part of the heating tube in Figure 1, and Figure 3 is a diagram showing a part of the heating tube in Figure 1.
Figure 4 is a diagram showing the manufacturing process of a ceramic printed wiring board, Figure 5 is a diagram explaining the wet sizing of alumina powder in Figure 4, Figure 6 is a diagram of the conventional It is a diagram showing an example of a green sheet raw material sized powder drying device. In the figure, 1 is an alumina powder wet sizing process, 2 is a slurry drying process, 4 is a green sheet forming process, 7 is a firing process, 12 is alumina powder, 12a is alumina sized powder, 15 is a slurry 22 is a steam jacket, 23 is a pump, 25 is a powder collection chamber, 27 is a vacuum pump, 40 is a preheating flow, 41 is a bubble flow, 42 is a turbulent flow, 43 is a spray flow, 50 is a drying device, 51 is a heating tube, 52 is Teflon 53 is a stainless steel wire, and 54 is a stainless wire wound body. #1 Figure Koshi - Part 1 of the consolation pipe Figure 2 Patent applicant Fujitsu Ltd. Figure 3 Figure 4 Figure 5
Claims (1)
ラリー（１５）を送り出すポンプ（２３）と、加熱状態
にあり、該ポンプによって上記スラリーを送り込まれる
加熱管（５１）と、該加熱管の他端が接続されており減
圧状態の粉末補集室（２５）とを有し、上記スラリーが
上記加熱管内を加熱されつつ高速度で流れ、上記粉末を
乾燥した状態で上記粉末補集室内に回収する構成のグリ
ーンシート原料整粒粉末乾燥装置において、上記加熱管
を、耐熱性を有する合成樹脂製の加熱管本体（５２）と
、 該加熱管本体に密着して巻回された補強用巻回体（５４
）とよりなる構成としたことを特徴とするグリーンシー
ト原料整粒粉末乾燥装置。[Scope of Claims] A pump (23) that sends out a slurry (15) made by wet-sizing the powder that is the raw material for green sheets, and a heating tube (51) that is in a heated state and into which the slurry is fed by the pump. and a powder collecting chamber (25) which is connected to the other end of the heating tube and is under reduced pressure, and the slurry flows at a high speed while being heated in the heating tube, and the powder is dried. In the green sheet raw material sized powder drying device configured to collect the green sheet material in the powder collection chamber, the heating tube is wrapped tightly around a heating tube body (52) made of a heat-resistant synthetic resin. The rolled reinforcing roll (54
) A green sheet raw material sized powder drying device characterized by having a configuration consisting of the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2120936A JPH0741155B2 (en) | 1990-05-10 | 1990-05-10 | Green sheet raw material sizing powder dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2120936A JPH0741155B2 (en) | 1990-05-10 | 1990-05-10 | Green sheet raw material sizing powder dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0416232A true JPH0416232A (en) | 1992-01-21 |
| JPH0741155B2 JPH0741155B2 (en) | 1995-05-10 |
Family
ID=14798635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2120936A Expired - Lifetime JPH0741155B2 (en) | 1990-05-10 | 1990-05-10 | Green sheet raw material sizing powder dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0741155B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011064435A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
| JP2011064433A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
| JP2011062672A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method for manufacturing powder |
| JP2011064434A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106588017B (en) * | 2016-12-09 | 2020-02-14 | 吉林炭素有限公司 | Heating system and heating method for preheating dry materials |
-
1990
- 1990-05-10 JP JP2120936A patent/JPH0741155B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011064435A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
| JP2011064433A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
| JP2011062672A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method for manufacturing powder |
| JP2011064434A (en) * | 2009-09-18 | 2011-03-31 | Nippon Shokubai Co Ltd | Method of producing powder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0741155B2 (en) | 1995-05-10 |
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