JPH0416037Y2 - - Google Patents

Info

Publication number
JPH0416037Y2
JPH0416037Y2 JP5862686U JP5862686U JPH0416037Y2 JP H0416037 Y2 JPH0416037 Y2 JP H0416037Y2 JP 5862686 U JP5862686 U JP 5862686U JP 5862686 U JP5862686 U JP 5862686U JP H0416037 Y2 JPH0416037 Y2 JP H0416037Y2
Authority
JP
Japan
Prior art keywords
valve
diaphragm
piston
valve stem
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5862686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62170881U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5862686U priority Critical patent/JPH0416037Y2/ja
Publication of JPS62170881U publication Critical patent/JPS62170881U/ja
Application granted granted Critical
Publication of JPH0416037Y2 publication Critical patent/JPH0416037Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
JP5862686U 1986-04-18 1986-04-18 Expired JPH0416037Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5862686U JPH0416037Y2 (enrdf_load_html_response) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5862686U JPH0416037Y2 (enrdf_load_html_response) 1986-04-18 1986-04-18

Publications (2)

Publication Number Publication Date
JPS62170881U JPS62170881U (enrdf_load_html_response) 1987-10-29
JPH0416037Y2 true JPH0416037Y2 (enrdf_load_html_response) 1992-04-10

Family

ID=30889371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5862686U Expired JPH0416037Y2 (enrdf_load_html_response) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPH0416037Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS62170881U (enrdf_load_html_response) 1987-10-29

Similar Documents

Publication Publication Date Title
US2057150A (en) Two-stage pressure regulator
CA1291105C (en) Inverted bellows valve
AU653908B2 (en) Valve having rocker valve member and isolation diaphragm
JP3703971B2 (ja) 洩れ検出付きダイアフラムバルブ
CN103511658B (zh) 双向阀
JPS6053227B2 (ja) 逆止め弁
US20090212248A1 (en) Solenoid-actuated diaphragm valve
US20060266962A1 (en) Vacuum regulating valve
JP4310532B2 (ja) 流量調整弁
US6749173B2 (en) Valve arrangement and method of directing fluid flow
JP4247567B2 (ja) ２ポート弁
JPH0461993B2 (enrdf_load_html_response)
JP4189711B2 (ja) ２ポート弁
JPWO2020021911A1 (ja) バルブ装置、流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
US6357339B1 (en) Multi-stage piston actuator
CN212429770U (zh) 阀组件及控制阀组件
US2812777A (en) Diaphragm mounting in valve body
JPH0416037Y2 (enrdf_load_html_response)
JPH0875017A (ja) ダイヤフラム弁
US20030155541A1 (en) Pressure enhanced diaphragm valve
JPH1054365A (ja) プロセスポンプ
JPS6216545Y2 (enrdf_load_html_response)
CN213575625U (zh) 一节式阀杆双填料平衡气动针阀
JPH0211984A (ja) 流体作動形弁アクチュエータ及び弁
JPH059575Y2 (enrdf_load_html_response)