JPH04157399A - Shaking device of mirror in sor light apparatus - Google Patents

Abstract

PURPOSE:To dispose a bearing for shaking outside a light takeout line and thereby to enable supply of a lubricant thereto and to prevent engagement of the-bearing by a method wherein a mirror chamber itself having an oblique incidence mirror fixed inside is shaken through the intermediary of bellows on the opposite sides. CONSTITUTION:A mirror chamber 37 is supported shakably in the vertical direction on a rotation fulcrum 34 of the fore end part of a six-axis alignment device 51 fixed to a fixing part 49, and the position and angle thereof are adjusted. A bearing used for the fulcrum 34 is disposed outside a light takeout line 26. Therefore no problem of production of gas takes place and also smooth shaking can be attained since a lubricant can be employed. Besides, a rod 38 of a mirror shaking mechanism 36 is made to operate in the vertical direction by the rotation of a cam 42 driven by a motor 40 and shakes vertically the chamber 37 together with an oblique incidence mirror 30 through the intermediary of double bellows 35 and 39. Thereby a synchrotron radiation light (SOR light) 29 is shaken in the vertical direction and a necessary area for exposure is ensured. Since a bearing for the rod 38 and a connecting part 31 is also disposed outside the line, no problem of production of gas occurs, the lubricant can be used and thus the smooth shaking can be attained.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a mirror swinging device for vertically swinging an oblique incidence mirror in a light extraction line of an SOR light (synchrotron radiation) device. , a bearing for swinging is not placed inside the light extraction line to achieve smooth swinging.

[Conventional technology]

In recent years, synchrotron devices, as SOR optical devices, are expected to be applied to various fields such as creation of ultra-super LS1 circuits, diagnosis in the medical field, molecular analysis, and structural analysis.

Figure 2 shows an overview of the SOR optical device. In the SOR optical device 1, an electron beam generated by an electron generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, deflected by a deflection electromagnet 16 of a beam transport section 14, and then sent to an inflector 18. into the storage ring 22 of the synchrotron. The electron beam incident on the storage ring 22 is energized by the high frequency acceleration cavity 21, focused by the focusing electromagnet 23, deflected by the deflection electromagnet 24, and continues to circulate within the vacuum duct 22.

The SOROR beam 9 generated when deflected by the deflecting electromagnet 24 is emitted through an extraction line 26, and is sent to, for example, an exposure device 28, where it is used as a light source for creating an ultra-super LS1 circuit.

The structure of a conventional light extraction line 26 is shown in a vertical cross-sectional view in FIG. An oblique incidence mirror 30 is disposed in the middle of the light extraction line 26.

The grazing incidence mirror 30 is composed of a plane mirror or a curved mirror made of oxygen-free copper, 3iC, Au, PT, etc., and the SOROR light is combined with the light beam 9 and is emitted from the window 32 made of a thin plate of beryllium or the like at the end of the light extraction line 26. Make it emit.

The oblique incidence mirror 30 is supported so as to be swingable in the vertical direction about a shaft 34 as a fulcrum. End portion 31 of grazing incidence mirror 30
A rod 38 of a mirror swinging mechanism 36 is attached to. The rod 38 moves vertically by rotation of a cam 42 driven by a motor 40, swings the oblique incidence mirror 30 vertically, and swings the SOROR beam 9 downward.

Although the SOROR light beam 9 emitted from the storage ring 22 (FIG. 2) has a small spread in the vertical direction, it is expanded in the vertical direction by the swinging of the oblique incidence mirror 30, thereby securing an exposure area for LSI exposure. .

[F to be solved by the invention] In the mirror rocking device shown in FIG. 3, the rotation fulcrum 3 of the mirror
4 and the rod 38 and the connecting part 31 of the oblique incidence mirror 30, but since these are located in the light extraction line, lubricating oil can be used to prevent gas generation in high vacuum. Can not. As a result, there was a risk that the bearings would become engaged and become unable to swing.

The present invention solves the problems in the conventional technology, and prevents a bearing for swinging the mirror from entering the light extraction line, thereby preventing the mirror from being unable to swing due to the engagement of the bearings. The present invention aims to provide a mirror rocking device for SOR optical mounting.

[Means to solve the problem]

This invention includes a mirror chamber inserted in the middle of a light extraction line of an SOR optical device in communication with the light extraction line, and a mirror chamber fixed within the mirror chamber to reflect the SOR light passing through the light extraction line. and an oblique incidence mirror that guides the light to the end of the light extraction line, and are inserted into the light extraction lines on both sides of the mirror chamber, and connect the mirror chamber so as to be swingable in the vertical direction with respect to the light extraction line. The device includes a bellows and a swinging device that swings the mirror chamber in the vertical direction.

[For production]

According to this invention, an oblique incidence mirror is fixed in a mirror chamber inserted in communication with a light extraction line,
Since the mirror chamber itself is made to swing via the bellows on both sides thereof, the bearing for swinging can be disposed outside the light extraction line. Therefore, the problem of gas generation in a high vacuum is eliminated, and lubricating oil can be used for the bearings, which prevents the bearings from meshing and allows smooth rocking.

〔Example〕

An embodiment of a light extraction line to which the present invention is applied is shown in a vertical cross-sectional view in FIG. Storage ring 22 of SOR optical device
SOR radiated tangentially from the deflection position of (Figure 1)
Fixed duct 33 of the OR light combination 9 light extraction line 26, double bellows 35 for swinging the mirror chamber, mirror chamber 37, double bellows 39 for swinging the mirror chamber,
The light is emitted through the fixed duct 41, the double bellows 76 for swinging the window portion, and the window portion 48, and is irradiated onto the semiconductor wafer 45 via the photomask substrate 43 to perform exposure. 2
The heavy bellows 35, 39.76, the fixed duct 33.41 and the mirror chamber 37 are removably connected via flanges. A gate valve 70 is inserted into each of these connecting portions, and the bellows 35.3 (J, 76) can be replaced while the light extraction line 26 is vacuum-sealed.

The double bellows 35 is constructed by concentrically arranging two cylindrical bellows 78, 80 with different diameters, and airtightly attaching each end to a flange 72, 74. The inner circumferential surface of the bellows 78 on the inner circumferential side faces into the light extraction line 26, through which the SOROR beam 9 passes. The outer peripheral surface of the outer peripheral side bellows 80 faces the atmosphere. Inner bellows 7
8 and the outer bellows 80, there is a light extraction line 2.
An air layer 82 is formed which is isolated from both the air and the atmosphere. The inside of the air layer 82 is sealed at a pressure slightly higher than the pressure of the light extraction line 26 (high vacuum). A port 84 is provided in communication with this air layer 82, and a vacuum gauge 86 is connected to this port 84 as a pressure detector to constantly monitor the pressure of the air layer 82.

When there is no crack or other damage to either the inner or outer bellows 78, 80, the air space 82 is sealed at a pressure slightly higher than the pressure (high vacuum) in the light extraction line 26. Therefore, this pressure value is measured by the vacuum gauge 86.
Detected in

If the inner bellows 78 is damaged due to repeated rocking, the gas in the air layer 82 leaks into the light extraction line 26, resulting in a decrease in pressure.

Furthermore, if the bellows 80 on the outer circumferential side is damaged, the outside air will infiltrate into the air layer 82, resulting in an increase in pressure. Therefore, depending on whether the pressure in the air layer 82 has decreased or increased from the initial set value, the bellows 78.80 on the inner and outer peripheries
You can tell which one is damaged.

If damage to any of the bellows 78.80 is detected,
The gate valves 70 on both sides are closed, the double bellows 35 is removed from the fixed duct 33 and the mirror chamber 37, and replaced. In this way, even if the bellows 78 or 80 is damaged, it can be detected and repaired or replaced before the vacuum breaks in the light extraction line 26.

An oblique incidence mirror 30 is fixedly disposed within the mirror chamber 37 . Grazing incidence mirror 30 is made of oxygen-free copper, SiC
It is composed of a plane mirror or a curved mirror such as
The ROR beam is combined with nine beams and guided to the end of the pre-extraction line 26.

The mirror chamber 37 is supported by a rotation fulcrum 34 at the tip of a six-axis alignment device 51 fixed to a fixed part 49 so as to be swingable in the vertical direction.

The 6-axis alignment device is X, Y, Z and θX.

The position and angle of the mirror chamber 37 are adjusted in each direction of θY and θ2. A bearing is used for the rotation fulcrum 34. Since this bearing is disposed outside the light extraction line 26, there is no problem of gas generation and lubricating oil can be used, allowing smooth rocking.

A rod 38 of a mirror swinging mechanism 36 is attached to an end of the mirror chamber 37. The rod 38 moves vertically by the rotation of a cam 42 driven by a motor 40, swings the mirror chamber 37 together with the oblique incidence mirror 30 in the vertical direction, swings the SOROR light beam 9 downward, and rotates the mirror chamber 37 in the vertical direction. Secure the necessary exposure area. Bearings are also provided on the rod 38 and the connecting portion 31, but since these bearings are arranged outside the light extraction line 26, there is no problem of gas generation and lubricating oil can be used, so smooth oscillation can be achieved. movement becomes possible.

A double bellows 53 is attached to the bottom of the mirror chamber 37 via a gate valve 70. A vacuum pump 55 is connected to the lower end of the double bellows 35 via a gas valve 70 to evacuate the inside of the light extraction line 26. The double bellows 53 is constructed in the same manner as the double bellows 35, and is constantly monitored for damage using a vacuum gauge 86. If damage occurs, the gate valve 70 is closed and the double bellows 53 is replaced.

The double bellows 39 between the mirror chamber 37 and the fixed duct 41 is constructed similarly to the double bellows 35, and is constantly monitored for damage with a vacuum gauge 86. double bellows 35
．． 39, the mirror chamber 37 is swingably connected to the light extraction line 26.

The double bellows 76 for swinging the window is also constructed in the same manner as the double bellows 35, and is constantly monitored for damage with a vacuum gauge 86. A window plate 50 is attached to the right end flang of the double bellows 76.
is installed.

A window 44 is attached to the center of the window plate 50. The window 44 is made of a thin plate made of beryllium or the like, and allows the SOROR light to be combined while blocking the high vacuum inside the light extraction line 26 and the low sky outside.

The window 44 swings in synchronization with the SOROR light combination 9 movement and the SO
Make 9 ROR beams. Therefore, the width of the window 44 in the vertical direction corresponds to the SOROR exposure range (that is, the entire exposure range).
Since it can be formed narrower, the area can be reduced, and therefore, even if it is formed thinner, sufficient mechanical strength can be ensured, and the transmittance of the SOR light 29 can be increased accordingly.

A cylindrical container 90 is attached to the outside of the window plate 50, and the open end of the cylindrical container 90 is sealed with a window plate 92 to form a cavity 94 inside the cylindrical container 90 that is isolated from the atmosphere outside. is formed. This cavity 94 contains X as an inert gas at atmospheric pressure or at a reduced pressure.
Helium gas 100 having a high radiation transmittance is flowed from the pipe 101 to protect the beryllium window 44 from corrosion due to contact with the atmosphere and to cool it.

An X-ray mask membrane window 96 is provided in the center of the window plate 92. The X-ray mask membrane window 96 is made of a non-corrosive (or non-corrosive) X-ray mask substrate material, such as silicon nitride, boron nitride, SiC, polyimide, etc., and has a thickness that is as thick as necessary to seal in helium gas. All that is required is a thickness, which can be, for example, about 1 μm.

The SOROR beam that has passed through the cavity 94 is emitted from the 9-ray mask membrane window 96 and placed in the atmosphere.
The semiconductor wafer 45 is irradiated through the line mask 43,
Exposure is performed.

The X-ray membrane window 96, like the beryllium window 44,
The width in the vertical direction is narrower than the SOROR light combination nine movement range (that is, the entire exposure range).

The double bellows 76 has a rod 54 of the window swing mechanism 52.
is installed. The rod 54 moves up and down by the rotation of a cam 58 driven by a motor 56, and
8 is swung vertically via a double bellows 76.

The rotational position of the cam 42 of the mirror rocking aiwt36 is
It is detected by a position detector 60 such as a pulse encoder. Further, the rotational position of the cam 58 of the window swing mechanism 52 is detected by a position detector 62 such as a pulse encoder.

The swing control means 64 controls the motors 40 and 5 via the servo amplifiers 66 and 68 based on the detection of the position detectors 60 and 62.
By driving the mirrors 6 synchronously, the oblique incidence mirror 30 and the window portion 48 are interlocked. As a result, SOROR light beam 9
The windows 44 and 96 move at the same time, and the SOROR beams are combined.

The operations of the mirror swing mechanism 36 and the window swing mechanism 52 are shown in FIG. When the right side of the oblique incidence mirror 30 is swinging upward together with the mirror chamber 37 as shown in (a), the window 48 is also swinging upward, and the SO
The light is emitted from the ROR beam combination 944°96. Also, (b)
As shown in the figure, the right side of the oblique incidence mirror 30 is the mirror chamber 3.
When the SOROR light combination 944.7 is swinging downward, the window portion 48 is also swinging downward, and the SOROR light combination 944.7 is swinging downward.
It emits from 96.

[Modification 1] In the above embodiment, the case where a double bellows is used has been described, but it is also possible to use a single bellows or three or more bellows.

[Modification Example 2] As shown in FIG. 5, a fin (inner sleeve) is provided between the inner bellows 78 and the outer bellows 80, which are made of cylindrical thin plates so that they do not come into contact with each other. 20o can also be arranged, for example, by fixing one end to the inner circumferential surface of the outer bellows 80.

〔Effect of the invention〕

As described above, according to the present invention, an oblique incidence mirror is fixed in a mirror chamber inserted in communication with a light extraction line, and the mirror chamber itself is swung through bellows on both sides of the mirror chamber. Therefore, the bearing for swinging can be disposed outside the light extraction line. Therefore, the problem of gas generation in high vacuum is eliminated, and lubricating oil can be used for the bearings, which prevents the bearings from meshing and allows smooth rocking.

[Brief explanation of drawings]

FIG. 1 is a longitudinal cross-sectional view of a light extraction line and a block diagram showing a control system of a swing mechanism, showing an embodiment of this invention. FIG. vs2 is a plan view showing an outline of the SOR optical device. FIG. 3 is a longitudinal sectional view showing the structure of a conventional light extraction line. FIG. 4 is a longitudinal sectional view showing the swinging operation of the swinging mechanism shown in tJ1. FIG. 5 is a longitudinal sectional view showing a modification of this invention. 1... SOR optical device, 26... Light extraction line,
29... SOR light, 30... Oblique incidence mirror, 36.
... Mirror rocking mechanism (swinging device), 64 ... Rocking control means, 70 ... Gate valve, 35.39 ... 2 lightning bellows, 37 ... Mirror chamber. Applicant: Ishikawajima T, Itma Heavy Industries Co., Ltd. 762 Heavy Roast Figure 5

Claims (1)

[Claims] A mirror chamber inserted in the middle of a light extraction line of an SOR optical device in communication with the light extraction line; and a mirror chamber fixed within the mirror chamber to direct the SOR light passing through the light extraction line. An oblique incidence mirror that reflects the light and guides it to the end of the light extraction line, and is inserted into the light extraction line on both sides of the mirror chamber, so that the mirror chamber can be vertically swung with respect to the light extraction line. A mirror rocking device for an SOR optical device, comprising: a bellows for coupling; and a rocking device for vertically rocking the mirror chamber.