JPH04125500A - Sor beam emission window for sor beam device - Google Patents

Abstract

PURPOSE:To prevent corrosion without a metallic window's contact to the atmosphere, to enable light exposure in the atmosphere and to intend improvement of efficiency of exposure work by forming a cavity outside the metallic window to filled by inert gas. CONSTITUTION:A metallic window 44, a beryllium window, for instance, is arranged at a beam bringing-out line of an SOR beam (synchrotron orbital radiation beam) device, in order to vacuum-seal the line and bring out the SOR beam, and also a cavity 74 is arranged outside the window 44, inside which an inert gas is filled out to shut off an outer side surface of the window 44 from the atmosphere. Moreover, an X-ray masking membrane window 76 is made of materials to be used for X-ray masking base plate and is arranged at a part of the cavity 74 to project the SOR beam passing through the window 76, to the atmosphere. The SOR beam is projected out to the atmosphere from the window 44 through the cavity 74 and the window 76, and by forming the cavity 74 outside the window 44 to be filled by inert gas, the window 44 does not contact to the atmosphere, corrosion is thus prevented and structural strength is kept long time. Accordingly, light exposure can be well conducted in the atmosphere and efficiency of exposure work is much improved.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention makes it possible to expose an exposure target such as an LSI board in the atmosphere in an SOR light (synchrotron radiation) device, thereby improving exposure work efficiency. It is an enhanced version of

[Conventional technology]

In recent years, synchrotron devices, as SOR optical devices, are expected to be applied to various fields such as creation of ultra-super LS1 circuits, diagnosis in the medical field, molecular analysis, and structural analysis.

Figure 2 shows an overview of the SOR optical device. In the SOR optical device 1, an electron beam generated by an electron generator (electron gun, etc.) 10 is accelerated to near the speed of light by a linear accelerator (linac) 12, is deflected by a deflection electromagnet 16 of a beam transport section 14, and is deflected by an inflector 18. into the storage ring 22 of the synchrotron. The electron beam incident on the storage ring 22 is energized by the high frequency acceleration cavity 21, focused by the focusing electromagnet 23, deflected by the deflection electromagnet 24, and continues to circulate within the vacuum duct 22.

The SOROR optical beam 9 generated when deflected by the deflecting electromagnet 24 is emitted through the extraction line 26, sent to the exposure device 28, and used as a light source for creating an ultra-super LS1 circuit.

The structure of a conventional light extraction line 26 is shown in FIG. In the middle of the light extraction line 26, there is an oblique incidence mirror 3.
0 is placed. The oblique incidence mirror 30 is made of oxygen-free copper S.
It is composed of a plane mirror made of iC, Au, Pt, etc., and the SOROR beam 9 is emitted and output from a metal window 32 attached to the center of a window plate 31 at the end of the light extraction line 26.

The oblique incidence mirror 30 is supported so as to be swingable in the vertical direction about a shaft 34 as a fulcrum. A rod 38 of a mirror swinging mechanism 36 is attached to the end of the oblique incidence mirror 30. The rod 38 moves vertically by rotation of a cam 42 driven by a motor 40, swings the oblique incidence mirror 30 vertically, and swings the SOROR optical beam 9 downward.

Although the vertical spread of the SOROR light beam 9 emitted from the storage ring 22 (Fig. 2) is small, it is expanded in the vertical direction by the swinging of the oblique incidence mirror 30, thereby securing an exposure area for LSI exposure, etc. be done.

The metal window 32 has the function of blocking the high vacuum inside the light extraction line 26 and the low vacuum outside and transmitting the SOROR beam 9, and has a high pass rate of the SOROR beam 9 and a high mechanical strength. It is usually constructed from thin sheets of strong beryllium. As shown in FIG. 4, its front shape has an area corresponding to the entire exposure range.

Since the beryllium window 32 is heated by the SOROR beam 9, it has the disadvantage that if it is exposed to the atmosphere, it will corrode and its strength will weaken. Therefore, as shown in Figure 1,
Beryllium window 32 and exposure target (LSI board, etc.) 35
Sealed container 3 entirely filled with inert gas such as helium
The beryllium window 32 was housed in the window 32 and exposed to light therein to prevent corrosion of the beryllium window 32.

[Problem to be solved by the invention]

In the conventional apparatus, since the exposure object 35 must be placed in the closed container 33 and exposed, it takes time and effort to take the exposure object 35 into and out of the closed container 33, resulting in poor exposure work efficiency.

This invention solves the drawbacks in the conventional techniques, and
SOR enables exposure in the atmosphere and increases exposure efficiency
The present invention aims to provide a window device for SOR light emission in an optical device.

[Means to solve the problem]

This invention provides a metal window made of beryllium or the like that is disposed on a light extraction line of an SOR optical device and vacuum-seals this light extraction line to extract SOR light, and a window made of metal such as beryllium that is disposed outside of this metal window. There is a cavity filled with inert gas inside that blocks the outside surface of this metal window from the atmosphere, and a cavity is installed in a part of this cavity to emit the SOR light that has passed through this cavity into the atmosphere. and an X-ray mask substrate window made of an X-ray mask substrate material thinner than the metal window.

[For production]

According to the invention, SOR light is emitted from the metal window into the atmosphere through the cavity and the X-ray mask substrate window.

According to this invention, a cavity is formed on the outside of the metal window and filled with inert gas, so the metal window is not exposed to the atmosphere, is prevented from corrosion, and can maintain its strength for a long time. . Therefore, it is no longer necessary to house the metal window and the exposure object in a closed container as in the conventional apparatus, and exposure can be performed in the atmosphere, improving the efficiency of the exposure operation.

In addition, the X-ray mask substrate window is made of a thin plate of an X-ray mask substrate material such as silicon nitride or boron nitride. There is no problem. In addition, the X-ray mask substrate material has lower X-ray transmittance per unit thickness and weaker strength than metal windows such as beryllum, but the inside of the cavity is filled with inert gas and is not a vacuum. , the X-ray mask substrate window is thin (for example, 1/10 of the beryllium window).
), and the attenuation of the SOR light can be suppressed to a low level.

In addition, if the metal window and the subsequent parts are made to swing via bellows in conjunction with the swing of the SOR light,
Since the metal window and the X-ray mask substrate window can be formed in a small area relative to the swing range of the SOR light, sufficient strength can be ensured even if the metal window and the X-ray mask substrate window are made thin. This allows the transmittance of SOR light to be further increased.

Furthermore, if a flow path is formed in the cavity to allow inert gas to flow from the outside, the metal window can be cooled.

〔Example〕

An embodiment of this invention is shown in FIG. An oblique incidence mirror 30 is disposed in the middle of the light extraction line 26.

The oblique incidence mirror 30 is composed of a plane mirror made of oxygen-free copper SiC, Au, Pt, etc., and directs the SOROR beam 9 toward the window 44 at the end of the light extraction line 26.

The oblique incidence mirror 30 is supported so as to be swingable in the vertical direction about a shaft 34 as a fulcrum. A rod 38 of a mirror swinging mechanism 36 is attached to the end of the oblique incidence mirror 30. The rod 38 moves vertically by the rotation of a cam 42 driven by a motor 40, swings the oblique incidence mirror 30 vertically, swings the SOROR optical beam 9 downward, and performs the necessary exposure in the vertical direction. Secure the area. A window portion 48 is provided at the end of the light extraction line 26 via a bellows 46 . The rod 5 of the window swing mechanism 52 is attached to the window 48.
4 is installed. The rod 54 moves vertically by the rotation of a cam 58 driven by a motor 56, causing the window 48 to swing vertically via the bellows 46.

A window plate 50 is attached to the flange 48a of the window portion 48 to vacuum-seal the light extraction line 26. window board 50
A beryllium window 44 is provided as a metal window in the center of the window. The beryllium window 44 is made of a thin beryllium plate (for example, 10 μm thick), and allows the SOROR light beam 9 to exit while the light extraction line 26 is vacuum-sealed.

As shown in the front view of FIG. 5, the beryllium window 44 has a width in the vertical direction that is narrower than the SOROR optical scanning range (that is, the entire exposure range).

Therefore, since the area is smaller than the conventional one (Fig. 4), strength can be ensured even when formed thinly, and SOR
The OR optical beam pass rate can be increased.

In FIG. 1, a cylindrical container 70 is attached to the outside of the window plate 50, and the open end of the cylindrical container 70 is sealed with a window plate 72, so that the outside atmosphere 82 is inside the cylindrical container 70. A cavity 74 is formed. Inside this cavity 74, there is a helium gas 80 having high X-ray transmittance as an inert gas at atmospheric pressure or at a pressure reduced from atmospheric pressure.
is flowed from the pipe 81 to cool the beryllium window 44.

An X-ray mask substrate window 76 is provided in the center of the window plate 72. The X-ray mask substrate window 76 is made of an X-ray mask substrate material that does not or does not corrode, such as silicon nitride or boron nitride, and its thickness only needs to be as thick as necessary to seal in helium gas. , for example, about 1 μm. SO passing through cavity 74
The ROR light beam is emitted from the 9-line mask substrate window 76 and enters the atmosphere 8.
An exposure target (such as an LSI board) 78 placed in the light beam is irradiated with light to perform exposure.

As shown in the front view in FIG. 6, the X-ray substrate window 76 has a width in the vertical direction that is narrower than the SOROR optical scanning range (that is, the pre-exposure range).

In FIG. 1, the rotational position of the cam 42 of the mirror swing mechanism 36 is detected by a position detector 60 such as a pulse encoder. Further, the rotational position of the cam 58 of the window swing mechanism 52 is
It is detected by a position detector 62 such as a pulse encoder.

The swing control means 64 controls the motors 40 and 5 via the servo amplifiers 66 and 68 based on the detection of the position detectors 60 and 62.
By driving the mirrors 6 synchronously, the oblique incidence mirror 30 and the window portion 48 are interlocked. As a result, the SOROR light beam 9
The window 44.degree. 76 is moved to the moving position, and the SOROR light beam is irradiated.

The operations of the mirror swing mechanism 36 and the window swing mechanism 52 are shown in FIG. When the right side of the oblique incidence mirror 30 is swinging upward as shown in (a), the window portion 48 is also swinging upward, and the SOROR optical beam 944.76 is swinging upward. The upper part of the exposure target 78 is exposed. Also,(
When the right side of the oblique incidence mirror 30 swings downward as shown in b), the window part 48 also swings downward, and the SOROR optical beam 944.76 swings downward. The light is emitted to expose the lower part of the exposure target 78. In this way, SOR
Using a window 44.76 smaller than the OR optical path 9 dynamic width,
The entire exposure target 78 can be exposed by 9 SOROR light beams.

According to such a configuration, the beryllium window 44 is exposed to the atmosphere 82.
Therefore, even if the SOROR optical beam is heated, it will not corrode. Therefore, unlike the conventional apparatus shown in FIG. 3, there is no need to seal the entire device in an airtight container 33 for exposure, and exposure can be performed in the atmosphere, resulting in good exposure work efficiency and increased productivity. Also, window 44.76
Since the area of the window 44 can be made small, sufficient mechanical strength can be ensured even if the thickness of the window 44 is made thinner, and the SOROR optical beam pass rate can be increased and the output intensity can be increased.

[Example of change]

In the embodiment described above, the bellows 46 is arranged in one stage, but if the bellows 46 are arranged in two or more stages, a larger swinging distance can be secured.

Furthermore, in the embodiment described above, the mirror swing mechanism 36 and the window swing mechanism 52 are synchronized by electrical control.
It is also possible to mechanically interlock and synchronize using the same drive source.

Further, in the above embodiment, the swinging of the window portion 48 is a rotational movement in the vertical direction, but it may also be a parallel movement in the vertical direction.

In addition, in the above embodiment, the present invention is
Although the case where the present invention is applied to OR optical fluctuation has been described, it can also be applied to SOR optical fluctuation due to fluctuation of an electron beam in a storage ring.

Further, in the above embodiment, a case was explained in which beryllium is used for the metal window 44, but it can be sealed in a vacuum, transmits SOR light, and corrodes when SOR light is irradiated in the atmosphere. The present invention can also be applied to cases where various metal materials such as the above are used for metal windows.

〔Effect of the invention〕

As explained above, according to the present invention, a cavity is formed on the outside of the metal window and filled with inert gas.
Metal windows are not exposed to the atmosphere, prevent corrosion, and maintain their strength for a long time. Therefore, it is no longer necessary to house the metal window and the exposure object in a closed container as in the conventional apparatus, and exposure can be performed in the atmosphere, improving the efficiency of the exposure operation.

Furthermore, if the metal window and the subsequent parts are made to swing via bellows in conjunction with the swing of the SOR light,
Since the metal window and the X-ray mask substrate window can be formed in a small area relative to the swing range of the SOR light, sufficient strength can be ensured even if the metal window and the X-ray mask substrate window are made thin. This allows the transmittance of SOR light to be further increased.

Furthermore, if a flow path is formed in the cavity to allow inert gas to flow from the outside, the metal window can be cooled.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of a light extraction line and a block diagram showing a control system of a swing mechanism, showing an embodiment of the present invention. FIG. 2 is a plan view showing an outline of the SOR optical device. FIG. 3 is a longitudinal sectional view showing the structure of a conventional light extraction line. FIG. 4 is a front view showing the shape of the window 32 in FIG. 3. FIG. FIG. 5 is a front view showing the shape of the beryllium window 44 of FIG. 1. FIG. 6 is a front view showing the shape of the X-ray mask substrate window 76 of FIG. FIG. 7 is a longitudinal sectional view showing the swinging operation of the swinging mechanism shown in FIG. 1. FIG. 1... SOR optical device, 26... Light extraction line,
29... SOR light, 30... Oblique incidence mirror, 36.
... Mirror swing mechanism, 44 ... Beryllium window (metal window), 46 ... Bellows, 48 ... Window section, 52 ...
- Window swinging mechanism, 64... swinging control means, 74...
Cavity, 76... X-ray mask substrate window, 78...
Exposure target, 80... Helium gas (inert gas), 8
2...Atmosphere. Applicant Ishikawajima-Harima Heavy Industries Co., Ltd. No. 5 Figure 72: Window board Figure 6 Procedures Takeshosho 2000 28゜ Year of existence -! F@1 piece

Claims (2)

[Claims] (1) A metal window disposed on the light extraction line of the SOR optical device to vacuum-seal the light extraction line and extract SOR light; and a metal window disposed outside the metal window. a cavity filled with an inert gas inside that blocks the outside surface of the window from the atmosphere; and the metal window that is disposed in a part of this cavity and emits the SOR light that has passed through the cavity into the atmosphere. A window device for SOR light emission in an SOR optical device, comprising an X-ray mask substrate window made of an X-ray mask substrate material thinner than the X-ray mask substrate material. (2) The light extraction line is provided with a bellows at a portion in front of the metal window, and the portion after the metal window is swung vertically in synchronization with the vertical oscillation of the SOR light. A window device for SOR light emission in an SOR optical device according to claim 1.