JPH04152254A - Surface state inspection device - Google Patents
Surface state inspection deviceInfo
- Publication number
- JPH04152254A JPH04152254A JP2278290A JP27829090A JPH04152254A JP H04152254 A JPH04152254 A JP H04152254A JP 2278290 A JP2278290 A JP 2278290A JP 27829090 A JP27829090 A JP 27829090A JP H04152254 A JPH04152254 A JP H04152254A
- Authority
- JP
- Japan
- Prior art keywords
- distribution
- surface condition
- inspected
- image data
- average value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 13
- 230000002902 bimodal effect Effects 0.000 claims abstract description 11
- 238000012360 testing method Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000012795 verification Methods 0.000 claims description 11
- 230000002950 deficient Effects 0.000 claims description 5
- 230000005856 abnormality Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
- Closed-Circuit Television Systems (AREA)
- Image Analysis (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、表面に存在するキズ、ごみ、ざらつき、色む
ら(色調のS淡)等、表面状態を検査する表面状態検査
装置に間する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to a surface condition inspection device that inspects surface conditions such as scratches, dust, roughness, and color unevenness (S-light color tone) existing on the surface. .
[従来の技術]
従来、表面に存在する異常を検出する装置としては、H
e−Neレーザー光を表面に照射し、これかキズ、ゴミ
等の存在によって任意方向に散乱されることを利用し、
その散乱光を読み取ることにて表面の異常を検出するよ
うにしたものがある。[Prior art] Conventionally, H
By irradiating the surface with e-Ne laser light and utilizing the fact that it is scattered in any direction by the presence of scratches, dust, etc.,
Some devices detect abnormalities on the surface by reading the scattered light.
[発明が解決しようとする1ill[]然しなから、上
述の従来技術には下記■〜■の問題点がある。[1 ill to be solved by the invention] However, the above-mentioned prior art has the following problems (1) to (3).
■光学系か複雑であり、装置が大型となる。■The optical system is complicated and the device is large.
■表面の凹凸を伴わない色むら等の表面状態が検出でき
ない。■ Surface conditions such as color unevenness that are not accompanied by surface irregularities cannot be detected.
■検出結果と、人間の目てとらえた感覚が必ずしも一致
しない。■Detection results and the sense perceived by the human eye do not necessarily match.
本発明は、コンパクトな装置構成により、表面の凹凸を
伴わない色むら等も含めた表面状態を、高精度に確実に
検査することを目的とする。An object of the present invention is to use a compact device configuration to reliably inspect the surface condition, including color unevenness without surface irregularities, with high precision.
[課題を解決するための手段]
本発明は、被検査体の表面を撮像する撮像装置と、撮像
装置の撮像結果に基づいて被検査体の表面状態を検定す
る検定装置と、検定装置の検定結果を出力する出力装置
とを有して構成される表面状態検査装置であって、検定
装置は、撮像装置が撮像した画像データに対する濃度ヒ
ストグラムn (k)を求め、多数の良品サンプルのそ
れぞれから求めておいた各濃度ヒストグラムの平均値と
標準偏差それぞれの平均値μu、σuをもつ正規分布に
従う理論度数g (k)と、今回の濃度ヒストグラムn
(k)との差に相当する適合係数Fを求め、この適合
係数Fを求める演算動作を撮像装置から次々と入力され
る各被検査体の画像データについて行なうことにて多数
の適合係数Fを得てその度数分布を作成し、上記適合係
数の度数分布か双峰性であれば、その谷をしきい値とし
て各被検査体の表面状態を検定し、双峰性でなければ、
その度数分布の平均値Fμを求め、該平均値Fμを今回
検定対象としての表面状態に対応して予め設定しておい
たしきい値Tと比較することにより、各被検査体の表面
状態を検定するようにしたものである。[Means for Solving the Problems] The present invention provides an imaging device that images the surface of an object to be inspected, a verification device that verifies the surface state of the object to be inspected based on the imaging result of the imaging device, and a verification device for the verification device. The inspection device is a surface condition inspection device comprising an output device for outputting a result, and the verification device calculates a density histogram n(k) for image data captured by the imaging device, and calculates a density histogram n(k) from each of a large number of non-defective samples. The theoretical frequency g (k) that follows a normal distribution with the mean value and standard deviation of each density histogram obtained previously, μu and σu, and the current density histogram n
A large number of compatibility coefficients F can be obtained by calculating a compatibility coefficient F corresponding to the difference between If the frequency distribution of the above-mentioned compatibility coefficient is bimodal, use the valley as a threshold to test the surface condition of each inspected object, and if it is not bimodal,
The surface condition of each object to be inspected is verified by determining the average value Fμ of the frequency distribution and comparing the average value Fμ with a threshold T set in advance corresponding to the surface condition to be tested this time. It was designed to do so.
[作用コ 本発明によれば、下記■〜■の作用がある。[Action Co. According to the present invention, the following effects (1) to (4) are achieved.
■テレビカメラ等の汎用性のある撮像装置を用いて表面
状態を検出てき、装置構成をコンパクトにできる。■The surface condition can be detected using a versatile imaging device such as a television camera, and the device configuration can be made compact.
■表面の濃度分布状態により表面状態を検出するもので
あるため1表面の凹凸を伴わない色むら等も含めた表面
状態を人間に近い感覚で検出できる。(2) Since the surface condition is detected based on the concentration distribution state of the surface, it is possible to detect the surface condition, including color unevenness without surface irregularities, with a sense similar to that of humans.
■多数の良品サンプルのそれぞれから求めておいた各濃
度ヒストグラムの平均値と標準偏差それぞれの平均値μ
u、σuをもつ正規分布に従う理論度数g (k)と今
回の濃度ヒストグラムn (k)との差に相当する適合
係数Fを求め、適合係数Fの度数分布が双峰性であれば
、その谷をしきい値として各被検査体の表面状態を検定
し、双峰性でなければ、その度数分布の平均値Fμを求
め、該平均値Fμを今回検定対象としての表面状態に対
応して予め設定しておいたしきい値Tと比較することに
より、各被検査体の表面状態を検定することとした。こ
れにより、被検査体の良否を確実に分離し、検定精度を
向上できる。■The average value and standard deviation of each density histogram obtained from each of a large number of non-defective samples μ
Find the fitness coefficient F corresponding to the difference between the theoretical frequency g (k) that follows a normal distribution with u and σu and the current concentration histogram n (k), and if the frequency distribution of the fitness coefficient F is bimodal, then The surface condition of each object to be inspected is tested using the valley as a threshold value, and if it is not bimodal, the average value Fμ of the frequency distribution is determined, and the average value Fμ is determined according to the surface condition to be tested this time. The surface condition of each object to be inspected was tested by comparing it with a threshold value T set in advance. Thereby, it is possible to reliably separate whether the object to be inspected is good or bad, and to improve the accuracy of the test.
[実施例]
第1図は本発明の検査装置の一例を示すブロック図、第
2図は画像データを示す模式図、第3図は本発明による
検査手順を示す流れ図、第4図は適合係数の分布図であ
る。[Example] Fig. 1 is a block diagram showing an example of the inspection device of the present invention, Fig. 2 is a schematic diagram showing image data, Fig. 3 is a flowchart showing the inspection procedure according to the present invention, and Fig. 4 is a compatibility coefficient. It is a distribution map of
表面状態検査装置1は、テレビカメラ10(撮像装置)
と、検定装置20と、出力装置3oとを有し、被検査体
である例えば熱可塑性発泡体シートの表面の異常の有無
を検査する。The surface condition inspection device 1 includes a television camera 10 (imaging device)
, a verification device 20, and an output device 3o, and inspects the surface of an object to be inspected, such as a thermoplastic foam sheet, for abnormalities.
表面状態検査装置1の基本的動作は下記(1)〜(4)
である。The basic operations of the surface condition inspection device 1 are as follows (1) to (4)
It is.
【1)テレビカメラ10により、発泡体シートの表面を
撮像する。(1) The surface of the foam sheet is imaged by the television camera 10.
テレビカメラ10は、画素単位でサンプリングした多値
画像を検定装置20に転送する。The television camera 10 transfers a multivalued image sampled pixel by pixel to the verification device 20.
(2)検定装置20は、テレビカメラ10の撮像データ
をA/D変換器21で例えば8ビツト(256階調)に
て量子化し、MXN画素のデジタル画像を作り、これを
画像メモリ22に入力する。(2) The verification device 20 quantizes the image data of the television camera 10 with an A/D converter 21, for example, at 8 bits (256 gradations), creates a digital image of MXN pixels, and inputs this into the image memory 22. do.
(3)検定装置20は、画像メモリ22に入力された画
像に基づいて、CPU23により表面の異常の有無を検
定する。(3) Based on the image input to the image memory 22, the testing device 20 uses the CPU 23 to test whether there is any abnormality on the surface.
(4)出力装置30は、検定装置20の検定結果を表示
し、必要により警報を発生せしめる。(4) The output device 30 displays the test results of the test device 20 and generates an alarm if necessary.
尚、撮像装置(10)としては、テレビカメラの代わり
に、M個の空間分解能を持つラインセンサを用いても良
く、この場合には、ラインセンサと被検査体とを相対移
動させ、得られるN個群のデータを画像メモリに蓄える
。Note that as the imaging device (10), a line sensor having M spatial resolution may be used instead of the television camera. In this case, the line sensor and the object to be inspected are moved relative to each other, N groups of data are stored in the image memory.
検定装置20は、必ずしも画像メモリ22を用いず、A
/D変換器21の出力データを直接的にCPU23に入
力しても良い。The verification device 20 does not necessarily use the image memory 22, and the
The output data of the /D converter 21 may be input directly to the CPU 23.
然るに、上記検定袋3!20による検定動作は以下の如
くなされる。However, the testing operation using the testing bag 3!20 is performed as follows.
■MXN画素の画像データに対して、濃度ヒストグラム
n (k)を求める(k:濃度値、n:度数)。(2) Obtain a density histogram n (k) for the image data of MXN pixels (k: density value, n: frequency).
この濃度ヒストグラムn (k)の作成に際しては、被
検査体において予め予想される異常部分の大きさ、或い
はテレビカメラ10によるサンプリング密度によっては
、検定装置2oに入力されたMXN画素全てを使わなく
とも、その中のmXn(n5M、n≦N)画素(第2図
(A)参照)や、また例えばNが偶数の画素(第2図(
B)参照)のようにMXN画素の一部を用いても良い。When creating this density histogram n (k), depending on the size of the abnormal part predicted in advance in the test object or the sampling density by the television camera 10, it may not be necessary to use all MXN pixels input to the verification device 2o. , among which mXn (n5M, n≦N) pixels (see Figure 2 (A)), or for example, pixels where N is an even number (see Figure 2 (A)).
A part of the MXN pixels may be used as in (see B).
■ヒストグラムを滑らかにするため各濃度値を隣同士て
平均化する0例えば、濃度値にの度数n ’ (k)を
n ’ (k) = [n (k−2) + 2 n
(k−1)+ 3 n (k) + 2 n (k+1
)+ n (k+2) コ / 9
・・・ (1)で置き換える。■To make the histogram smooth, each density value is averaged next to each other.
(k-1) + 3 n (k) + 2 n (k+1
) + n (k+2) / 9
...Replace with (1).
■多数の良品サンプルから求めておいた理論度数g (
k)と今回の濃度ヒストグラムn ’ (k)との差に
相当する適合係数Fを下記(2)式又は(3)式により
求める。但し、この適合係数Fは、g (k)≠0の濃
度値について求め、また(2)式と(3)式においてρ
ビット量子化ならばL= 2β−1である。■Theoretical frequency g (
A compatibility coefficient F corresponding to the difference between the density histogram n' (k) and the current density histogram n' (k) is calculated using the following equation (2) or (3). However, this compatibility coefficient F is obtained for the concentration value of g (k)≠0, and in equations (2) and (3), ρ
For bit quantization, L=2β-1.
ここて、上述の理論度数g (k)は、(a)多数の良
品サンプルのそれぞれについて、前記■、■と同一のス
テップを経ることにて、各濃度ヒストグラムn ’ (
k)の平均値μ、標準偏差σを下記(4)式、(5)式
にて求め、
Σに−n’(k)
(b)それら平均値μと標準偏差σそれぞれの平均値μ
u、σuをもつ正規分布に従って求めたものである。Here, the above-mentioned theoretical frequency g (k) can be obtained by (a) each density histogram n' (
Find the average value μ and standard deviation σ of k) using equations (4) and (5) below, and calculate Σ by −n'(k) (b) The average value μ of each of the average value μ and standard deviation σ
It is obtained according to a normal distribution with u and σu.
■上言己■の適合係数Fを求める演算動作をテレビカメ
ラ10から次々と入力される各被検査体の画像データに
ついて行なうことにて多数の適合係数Fを得てその度数
分布を作成する。(2) The arithmetic operation for obtaining the above-mentioned conformity coefficients F is performed on the image data of each object to be inspected that is input one after another from the television camera 10, thereby obtaining a large number of conformity coefficients F and creating a frequency distribution thereof.
■上記■で得た適合係数Fの度数分布が第4図に示す如
くの双峰性であれば、その谷をしきい値として各被検査
体の表面状態を検定する。(2) If the frequency distribution of the conformity coefficient F obtained in (2) above is bimodal as shown in FIG. 4, the surface condition of each object to be inspected is tested using the valley as a threshold.
他方、双峰性てなければ、更に以下の処理を実施する。On the other hand, if there is no bimodality, the following processing is further performed.
■上記■で得た適合係数Fの度数分布の平均値Fμを求
め、該平均値Fμを今回検定対象としての表面状態に対
応して予め設定しておいたしきい値Tと比較し、
Fμ≦T :全て良品
Fμ〉T :全て不良品 ・・・(6)と判定
し、結果を出力する。■Find the average value Fμ of the frequency distribution of the conformity coefficient F obtained in the above ■, compare the average value Fμ with the threshold value T set in advance corresponding to the surface condition to be tested this time, and find that Fμ≦ T: All good products Fμ>T: All defective products... (6) is determined and the result is output.
この時、しきい値データTは、同種表面状態の等級区分
(正常/異常)に応じて1つ存在するものであっても良
いが、等級区分(良/可/不可)に応じて2つ存在する
ものてあっても良い。At this time, there may be one threshold data T depending on the grade classification (normal/abnormal) of the same type of surface condition, but there may be two threshold data T depending on the grade classification (good/fair/poor). There may be something that exists.
また、しきい値Tは、異常の種類(P)と同数存在する
ので、
T1≦T、≦・・・≦Tp ・・・(7)な
らば、今回検出した異常に合わせて
T=Ti(i=1.、・・・、P) ・・・(8
)と設定すれば良い。そして、各種異常を同時に検出し
ようとする場合には、今回検出したい各種異常に対応す
る各種Tムのうちの最小のT1を採用すれば足りる。In addition, since there are the same number of thresholds T as the types of abnormalities (P), if T1≦T, ≦...≦Tp (7), then T=Ti( i=1.,...,P)...(8
). If various abnormalities are to be detected at the same time, it is sufficient to adopt the smallest T1 among the various Tms corresponding to the various abnormalities to be detected this time.
次に、上記実施例の作用について説明する。Next, the operation of the above embodiment will be explained.
■テレビカメラ10等の汎用性のある撮像装置を用いて
表面状態を検出でき、装置構成をコンパクトにてきる。- Surface conditions can be detected using a versatile imaging device such as the television camera 10, and the device configuration can be made compact.
また、処理内容か単純であって、表面状態を短時間て検
定でき被検査体の搬送ライン上ても検査を完了てきる。Further, the processing content is simple, the surface condition can be verified in a short time, and the inspection can be completed even on the conveyance line of the object to be inspected.
■表面の濃度分布状態により表面状態を検出するもので
あるため、色むら等も含めた表面状態を、人間に近い感
覚で検出てきる。■Since the surface condition is detected based on the surface concentration distribution, it is possible to detect the surface condition, including color unevenness, with a sense similar to that of humans.
■多数の良品サンプルのそれぞれから求めておいた各濃
度ヒストグラムの平均値と標準偏差それぞれの平均値μ
u、σuをもつ正規分布に従う理論度数g (k)と今
回の濃度ヒストグラムn (k)との差に相当する適合
係数Fを求め、適合係数Fの度数分布か双峰性であれば
、その谷をしきい値として各被検査体の表面状態を検定
し、双峰性でなければ、その度数分布の平均値Fμを求
め、該平均値Fμを今回検定対象としての表面状態に対
応して予め設定しておいたしきい値Tと比較することに
より、各被検査体の表面状態を検定することとした。こ
れにより、被検査体の良否を確実に分離し、検定精度を
向上できる。■The average value and standard deviation of each density histogram obtained from each of a large number of non-defective samples μ
Find the fitness coefficient F corresponding to the difference between the theoretical frequency g (k) that follows a normal distribution with u and σu and the current concentration histogram n (k), and if the frequency distribution of the fitness coefficient F is bimodal, The surface condition of each object to be inspected is tested using the valley as a threshold value, and if it is not bimodal, the average value Fμ of the frequency distribution is determined, and the average value Fμ is determined according to the surface condition to be tested this time. The surface condition of each object to be inspected was tested by comparing it with a threshold value T set in advance. Thereby, it is possible to reliably separate whether the object to be inspected is good or bad, and to improve the accuracy of the test.
[発明の効果]
以上のように本発明によれば、コンパクトな装置構成に
より、表面の凹凸を伴わない色むら等も含めた表面状態
を、高精度に確実に検査てきる。[Effects of the Invention] As described above, according to the present invention, the surface condition including color unevenness without surface irregularities can be reliably inspected with high precision using a compact device configuration.
第1図は本発明の検査装置の一例を示すブロック図、第
2図は画像データを示す模式図、第3図は本発明による
検査手順を示す流れ図、第4図は適合係数の分布図であ
る。
10・・・撮像装置、
20・・・検定装置、
30・・・出力装置。
特許出願人 積水化学工業株式会社
代表者 廣 1) 馨
第2図
(A)
(B)
度数分布
適合係数Fig. 1 is a block diagram showing an example of the inspection device of the present invention, Fig. 2 is a schematic diagram showing image data, Fig. 3 is a flowchart showing the inspection procedure according to the invention, and Fig. 4 is a distribution diagram of the conformity coefficient. be. 10... Imaging device, 20... Verification device, 30... Output device. Patent applicant: Sekisui Chemical Co., Ltd. Representative Hiroshi 1) Kaoru Figure 2 (A) (B) Frequency distribution conformity coefficient
Claims (1)
の撮像結果に基づいて被検査体の表面状態を検定する検
定装置と、検定装置の検定結果を出力する出力装置とを
有して構成される表面状態検査装置であって、検定装置
は、撮像装置が撮像した画像データに対する濃度ヒスト
グラムn(k)を求め、多数の良品サンプルのそれぞれ
から求めておいた各濃度ヒストグラムの平均値と標準偏
差それぞれの平均値μu、σuをもつ正規分布に従う理
論度数g(k)と、今回の濃度ヒストグラムn(k)と
の差に相当する適合係数Fを求め、この適合係数Fを求
める演算動作を撮像装置から次々と入力される各被検査
体の画像データについて行なうことにて多数の適合係数
Fを得てその度数分布を作成し、上記適合係数の度数分
布が双峰性であれば、その谷をしきい値として各被検査
体の表面状態を検定し、双峰性でなければ、その度数分
布の平均値Fμを求め、該平均値Fμを今回検定対象と
しての表面状態に対応して予め設定しておいたしきい値
Tと比較することにより、各被検査体の表面状態を検定
するものである表面状態検査装置。(1) It has an imaging device that images the surface of the object to be inspected, a test device that tests the surface condition of the test object based on the imaging results of the imaging device, and an output device that outputs the test results of the test device. The verification device calculates a density histogram n(k) for the image data captured by the imaging device, and calculates the average value of each density histogram obtained from each of a large number of non-defective samples. Calculate the compatibility coefficient F corresponding to the difference between the theoretical frequency g(k) that follows a normal distribution with average values μu and σu of standard deviation and the current concentration histogram n(k), and calculate the compatibility coefficient F. By performing the operation on the image data of each inspected object that is input one after another from the imaging device, a large number of compatibility coefficients F are obtained and a frequency distribution thereof is created, and if the frequency distribution of the compatibility coefficients is bimodal, then , the surface condition of each object to be inspected is tested using the valley as a threshold, and if it is not bimodal, the average value Fμ of the frequency distribution is determined, and the average value Fμ corresponds to the surface condition to be tested this time. A surface condition inspection device that verifies the surface condition of each object to be inspected by comparing it with a preset threshold value T.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2278290A JPH04152254A (en) | 1990-10-16 | 1990-10-16 | Surface state inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2278290A JPH04152254A (en) | 1990-10-16 | 1990-10-16 | Surface state inspection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04152254A true JPH04152254A (en) | 1992-05-26 |
Family
ID=17595292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2278290A Pending JPH04152254A (en) | 1990-10-16 | 1990-10-16 | Surface state inspection device |
Country Status (1)
Country | Link |
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JP (1) | JPH04152254A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007071847A (en) * | 2005-09-09 | 2007-03-22 | Nagaoka Univ Of Technology | Method for detecting abnormal measurement value in surface roughness measurement |
JP2013257219A (en) * | 2012-06-13 | 2013-12-26 | Nisshin Seifun Group Inc | Surface shape measuring device and method |
-
1990
- 1990-10-16 JP JP2278290A patent/JPH04152254A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007071847A (en) * | 2005-09-09 | 2007-03-22 | Nagaoka Univ Of Technology | Method for detecting abnormal measurement value in surface roughness measurement |
JP2013257219A (en) * | 2012-06-13 | 2013-12-26 | Nisshin Seifun Group Inc | Surface shape measuring device and method |
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