JPH0415033U - - Google Patents
Info
- Publication number
- JPH0415033U JPH0415033U JP5501390U JP5501390U JPH0415033U JP H0415033 U JPH0415033 U JP H0415033U JP 5501390 U JP5501390 U JP 5501390U JP 5501390 U JP5501390 U JP 5501390U JP H0415033 U JPH0415033 U JP H0415033U
- Authority
- JP
- Japan
- Prior art keywords
- metal diaphragm
- diaphragm
- pressure sensor
- stop ring
- contact surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図および第２図はこの考案による圧力セン
サの実施例を示し、第１図は全体を示す概略断面
図、第２図は第１図に示すものの部分拡大断面図
、第３図および第４図は従来の圧力センサを示し
、第３図は全体を示す概略断面図、第４図は第３
図に示すものの部分拡大断面図である。
１，２１……ボデイ、２，２２……金属ダイア
フラム、２ａ……凹所、２ｂ……薄肉部、３，２
３……ダイアフラム素子（歪みゲージ）、４，２
４……回路部材、５，２５……バツクアツプリン
グ、６，１１，２６……Ｏリング、７，２７……
ストツプリング、８，９，２８，２９……フレキ
シブルサーキツト、１０，３０……端子、１２…
…蓋部材、１３，１４，１５，１９……絶縁皮膜
、１６……小径孔、１７……中径孔、１８……大
径孔。
1 and 2 show an embodiment of the pressure sensor according to this invention, FIG. 1 is a schematic sectional view showing the whole, FIG. 2 is a partially enlarged sectional view of the one shown in FIG. 1, and FIGS. Fig. 4 shows a conventional pressure sensor, Fig. 3 is a schematic sectional view showing the whole, and Fig. 4 shows a conventional pressure sensor.
FIG. 3 is a partially enlarged cross-sectional view of what is shown in the figure. 1, 21... Body, 2, 22... Metal diaphragm, 2a... Recess, 2b... Thin wall portion, 3, 2
3...Diaphragm element (strain gauge), 4,2
4... Circuit member, 5, 25... Backup spring, 6, 11, 26... O ring, 7, 27...
Stop ring, 8, 9, 28, 29...Flexible circuit, 10, 30...Terminal, 12...
... Lid member, 13, 14, 15, 19 ... Insulating film, 16 ... Small diameter hole, 17 ... Medium diameter hole, 18 ... Large diameter hole.
Claims (1)
けられ、圧力の作用によつて変位する金属ダイア
フラム２と、該金属ダイアフラム２に設けられ、
該金属ダイアフラム２の変位によつて抵抗値を変
化させるダイアフラム素子３と、前記ボデイ１に
設けられ、前記ダイアフラム素子３の抵抗値の変
化量を外部に出力する回路部材４とを具えた圧力
センサにおいて、前記ボデイ１の前記金属ダイア
フラム２との接触面に絶縁皮膜１３を設けたこと
を特徴とする圧力センセ。 (2) 前記金属ダイアフラム２は前記ボデイ１内
にストツプリング７によつて固定され、このスト
ツプリング７とボデイ１との接触面は少なくとも
一方には絶縁皮膜１４，１５，１９が設けられて
いる請求項１記載の圧力センサ。[Claims for Utility Model Registration] (1) A cylindrical body 1, a metal diaphragm 2 provided in the body 1 and displaceable by the action of pressure, and a metal diaphragm 2 provided in the metal diaphragm 2,
A pressure sensor comprising a diaphragm element 3 whose resistance value is changed by displacement of the metal diaphragm 2, and a circuit member 4 provided on the body 1 and which outputs the amount of change in the resistance value of the diaphragm element 3 to the outside. A pressure sensor characterized in that an insulating film 13 is provided on the contact surface of the body 1 with the metal diaphragm 2. (2) The metal diaphragm 2 is fixed within the body 1 by a stop ring 7, and at least one contact surface between the stop ring 7 and the body 1 is provided with an insulating coating 14, 15, 19. 1. The pressure sensor according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5501390U JPH0415033U (en) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5501390U JPH0415033U (en) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415033U true JPH0415033U (en) | 1992-02-06 |
Family
ID=31577588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5501390U Pending JPH0415033U (en) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415033U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59139815U (en) * | 1983-03-05 | 1984-09-18 | 杉原 和江 | Stove aid |
| JPH07115954A (en) * | 1993-10-26 | 1995-05-09 | Komine Kikai Kk | Drawing conveyer in food washer |
-
1990
- 1990-05-25 JP JP5501390U patent/JPH0415033U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59139815U (en) * | 1983-03-05 | 1984-09-18 | 杉原 和江 | Stove aid |
| JPH07115954A (en) * | 1993-10-26 | 1995-05-09 | Komine Kikai Kk | Drawing conveyer in food washer |