JPH0418334U

JPH0418334U -

Info

Publication number: JPH0418334U
Application number: JP5907790U
Authority: JP
Priority date: 1990-06-04
Filing date: 1990-06-04
Publication date: 1992-02-17

Description

[Brief explanation of drawings]

第１図、第２図、第３図ａおよび第３図ｂはこ
の考案による圧力センサの第１の実施例を示し、
第１図は全体を示す概略断面図、第２図は第１図
に示すものの部分拡大断面図、第３図ａは第１図
に示すものの部分拡大図、第３図ｂは第３図ａに
示すものの側面図、第４図、第５図および第６図
はこの考案による圧力センサの第２の実施例を示
し、第４図は全体を示す概略断面図、第５図は第
４図に示すものの部分拡大断面図、第６図は第４
図に示すものの部分拡大図、第７図および第８図
はこの考案による圧力センサの第３の実施例を示
し、第７図は全体を示す概略断面図、第８図は第
７図に示すものの部分拡大断面図、第９図および
第１０図はこの考案による圧力センサの第４の実
施例を示し、第９図は部分平面図、第１０図は第
９図に示すもののＡ−Ａ線断面図、第１１図はこ
の考案による圧力センサの第５の実施例を示す部
分平面図、第１２図は従来の圧力センサを示す概
略断面図である。１，２１……ボデイ、２，２２……ダイアフラ
ム、２ａ……凹所、２ｂ……薄肉部、３，２３…
…ダイアフラム素子（歪みゲージ）、４，２４…
…回路部材、５，２５……回路基板、６，２６…
…コンデンサプレート、７，２７……貫通コンデ
ンサ、８，２８……接続部材、６ａ，６ｂ，８ａ
，８ｂ……ばね部、９，２９……スリーブ、１０
，３０……フレキシブルサーキツト、１１，３１
……コネクタ、１２……圧力導入孔、１３……空
所、１６……付勢部材。 1, 2, 3a and 3b show a first embodiment of the pressure sensor according to this invention,
Fig. 1 is a schematic sectional view showing the whole, Fig. 2 is a partially enlarged sectional view of what is shown in Fig. 1, Fig. 3a is a partially enlarged view of what is shown in Fig. 1, and Fig. 3b is a partially enlarged sectional view of what is shown in Fig. 3a. 4, 5 and 6 show a second embodiment of the pressure sensor according to this invention, FIG. 4 is a schematic sectional view showing the whole, and FIG. 5 is a side view of the pressure sensor shown in FIG. Figure 6 is a partially enlarged sectional view of the one shown in Figure 4.
7 and 8 show a third embodiment of the pressure sensor according to this invention, FIG. 7 is a schematic sectional view showing the whole, and FIG. 8 is shown in FIG. 7. 9 and 10 show a fourth embodiment of the pressure sensor according to this invention, FIG. 9 is a partial plan view, and FIG. 10 is a view taken along line A-A of the thing shown in FIG. 11 is a partial plan view showing a fifth embodiment of the pressure sensor according to this invention, and FIG. 12 is a schematic sectional view showing a conventional pressure sensor. 1, 21... Body, 2, 22... Diaphragm, 2a... Recess, 2b... Thin wall portion, 3, 23...
...Diaphragm element (strain gauge), 4, 24...
...Circuit member, 5, 25...Circuit board, 6, 26...
... Capacitor plate, 7, 27 ... Feedthrough capacitor, 8, 28 ... Connection member, 6a, 6b, 8a
, 8b... Spring part, 9, 29... Sleeve, 10
, 30...Flexible circuit, 11, 31
... Connector, 12 ... Pressure introduction hole, 13 ... Hole, 16 ... Biasing member.

Claims

[Claims for Utility Model Registration] (1) A diaphragm 2 that is displaceable by the action of pressure is provided in a cylindrical body 1, and
The diaphragm 2 is provided with a diaphragm element 3 that changes the resistance value according to the displacement of the diaphragm 2, and further includes a circuit board 5 in the body 1 that detects a change in the resistance value of the diaphragm element 3.
A circuit member 4 consisting of a capacitor plate 6 and a connecting member 8 connecting the circuit board 5 and the capacitor plate 6 is provided, and when the circuit board 5 constituting the circuit member 4 is displaced, the circuit member 4 is A pressure sensor characterized in that the connecting member 8 is displaced in accordance with . (2) A portion of the connecting member 8 has spring portions 8a, 8.
The pressure sensor according to claim 1, further comprising: b. (3) A diaphragm 2 that is displaced by the action of pressure is provided in the cylindrical body 1, and
The diaphragm 2 is provided with a diaphragm element 3 whose resistance value is changed by displacement of the diaphragm 2, and further a circuit board 5 is provided in the body 1 to detect a change in the resistance value of the diaphragm element 3; 5 through a connecting member 8 and a capacitor plate 6 which is biased against the body 1 by a biasing member 16. (4) A diaphragm 2 that is displaced by the action of pressure is provided in the cylindrical body 1, and
The diaphragm 2 is provided with a diaphragm element 3 whose resistance value is changed by displacement of the diaphragm 2, and further a circuit board 5 is provided in the body 1 to detect a change in the resistance value of the diaphragm element 3; 5. A pressure sensor characterized in that a circuit member 4 is provided, which is connected to a capacitor plate 6 by a connecting member 8 and has a capacitor plate 6 partially formed with spring portions 6a and 6b.