JPH0414879Y2 - - Google Patents
Info
- Publication number
- JPH0414879Y2 JPH0414879Y2 JP1984136037U JP13603784U JPH0414879Y2 JP H0414879 Y2 JPH0414879 Y2 JP H0414879Y2 JP 1984136037 U JP1984136037 U JP 1984136037U JP 13603784 U JP13603784 U JP 13603784U JP H0414879 Y2 JPH0414879 Y2 JP H0414879Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- planar heating
- mounting base
- frame
- top plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 44
- 239000000463 material Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 239000011810 insulating material Substances 0.000 claims description 10
- 238000005485 electric heating Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 claims description 2
- 239000010425 asbestos Substances 0.000 description 4
- 238000010411 cooking Methods 0.000 description 4
- 229910052895 riebeckite Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000011226 reinforced ceramic Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Electric Stoves And Ranges (AREA)
- Surface Heating Bodies (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984136037U JPH0414879Y2 (fi) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984136037U JPH0414879Y2 (fi) | 1984-09-07 | 1984-09-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6152111U JPS6152111U (fi) | 1986-04-08 |
JPH0414879Y2 true JPH0414879Y2 (fi) | 1992-04-03 |
Family
ID=30694514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984136037U Expired JPH0414879Y2 (fi) | 1984-09-07 | 1984-09-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0414879Y2 (fi) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002025756A (ja) * | 2000-07-04 | 2002-01-25 | Ibiden Co Ltd | 半導体製造・検査装置用ホットプレート |
WO2001084623A1 (fr) * | 2000-05-01 | 2001-11-08 | Ibiden Co., Ltd. | Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132438A (en) * | 1976-04-23 | 1977-11-07 | Toshiba Corp | Exothermic device |
-
1984
- 1984-09-07 JP JP1984136037U patent/JPH0414879Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132438A (en) * | 1976-04-23 | 1977-11-07 | Toshiba Corp | Exothermic device |
Also Published As
Publication number | Publication date |
---|---|
JPS6152111U (fi) | 1986-04-08 |
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