JPH04145602A - Laser trimming device - Google Patents

Abstract

PURPOSE:To enable precision trimming by attaching a slider to a sliding resistor of a trimming substrate for sliding and by carrying out trimming while detecting a position. CONSTITUTION:A control part 101 designates a rotation angle of a slider 109 to a position detection part 108 and rotates the slider 109 to an electrode position 301. Then, a beam scanner control part 103 is commanded to position a beam scanner optical system 104 to a trimming starting position. The control part commands a laser oscillator 102 and trims a resistor 311 until an aimed value is detected by a resistance measurement part 105 while driving the optical system 104. When a plurality of cuttings are formed to rotation of a slider, an aimed value to a present rotation angle and an aimed value to a rotation angle immediately before are divided proportionally by the cutting number, and the value is used as an aimed value and trimming is carried out by positioning at the proportionally divided trimming starting place.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a laser trimming device that adjusts resistance value using a laser beam, and particularly relates to a laser trimming device that adjusts sliding resistance.

[Conventional technology]

The conventional laser trimming device, as shown in Fig. 2,
A laser oscillator 102, a beam scanner optical system 104 that deflects the laser beam from the laser oscillator 102, a beam scanner control unit 103 that drives the beam scanner optical system 104, and an arbitrary part of the sliding resistor 10 on the substrate to be trimmed. A large number of probes 110 that touch the position and a target probe are selected from the large number of probes 110 and the resistance measuring unit 1
05, a resistance measuring section 105 that measures the resistance between the probes selected by the measuring terminal switching section 201, a laser oscillator 102, a beam scanner control section 103, a measuring terminal switching section 201, and a resistance measuring section 105 that measures the resistance between the probes selected by the measuring terminal switching section 201. Measuring section 10
5 and a control section 101 that drives and controls the control section 5. In such a laser trimming device, a probe is placed on the electrode 310 at a position where the target value of the sliding resistance portion (FIG. 3B) on the substrate to be trimmed is set, and the target value is reached at that position. By trimming the resistor 311 of the sliding resistance part formed on the trimming board 106,
The sliding resistance was being adjusted.

[Problem to be solved by the invention]

In the conventional laser trimming device for adjusting the sliding resistance described above, a target value is determined for the angle of the sliding resistance portion and trimming is performed. However, when the substrate to be trimmed is assembled with the slider, due to the error caused by the difference between the angle of the rotation axis and the angle of the slider, the resistance obtained when the substrate is slid as shown in Figure 3A. The values (b) and (c) are not the target value (a) set for the angle of the sliding resistance portion.

In addition, when the slider slides, the contact area and pressure between the electrode of the sliding resistance part and the slider are different from when trimming by applying the probe to the electrode of the sliding resistance part, so when trimming The drawback is that the accuracy cannot be used to improve the accuracy when commercialized.

[Means to solve the problem]

A laser trimming device of the present invention includes a laser oscillator, a beam scanner optical system that positions a laser beam at a trimming start point and moves it over a resistor on a substrate to be trimmed, and a beam scanner that drives the beam scanner optical system.
A control unit that rotates a slider attached to a substrate to be trimmed to a specified position, a rotational position detection unit, a resistance measurement unit that has a function of measuring resistance value, and a program for the above-mentioned component units. It has a control section 101 for controlling.

〔Example〕

The present invention will be explained with reference to the drawings.

FIG. 1 is a schematic configuration diagram of an embodiment of the present invention. As can be seen from FIG. 0, the configuration is almost the same as the conventional one, and the differences from the conventional one are: (1) There are two probes 110.

(2) A slider 109 was attached to the trimming board 106.

(3) There is no measurement terminal switching section.

(4) A slider rotation drive section 107 was provided.

(5) The slider rotational position detection section 108 is provided.

In this embodiment, the rotation drive unit 107 is composed of a reduction gear and a motor, and the rotation detection unit 108 is composed of a potentiometer, but other configurations, such as a rotation detection unit using an encoder, may be used. What is available is available.

First, the control unit 101 stores in advance a target value for the sliding angle of the slider 109.

The control unit includes a rotation drive unit 107, rotation position! The rotation angle of the slider 109 is specified to the detection unit 108, and the slider 109 is rotated to the electrode position 301 (FIG. 3B).

Next, the control unit 101 issues a command to the beam scanner control unit 103 to position the beam scanner optical system 104 at the trimming start position. The control unit issues a command to the laser oscillator 102, and while driving the beam scanner optical system 104, the resistor 311 (
For the rotation of the slider that performs the trimming in Figure 3B),
When making multiple cuts, set the target value for the current rotation angle and the target value for the previous rotation angle for the number of cuts.
Proportional division is performed, the resulting value is set as a target value, the position is positioned at the proportional division trimming start position, and trimming is performed.

The above operation is carried out by increasing the rotation angle of the slider to the rotation position 30.
Trimming is performed by changing the number from 2 to 305 one after another.

In the present invention, trimming is performed with the slider set, so when using the conventional trimming method, the slider attachment is subject to positional errors (Figure 3A, broken line (b)) and probe position errors. Errors due to sliding position, contact area, and pressure (
The target value for the rotation angle of the slider (Fig. 3A, solid line (a)) is removed by removing the influence of the - dashed line (C) in Fig.
) can be printed directly on the product.

〔Effect of the invention〕

As explained above, when adjusting the sliding resistance, the laser trimming device according to the present invention attaches the slider to the sliding resistor, which is the substrate to be trimmed, slides it, and performs trimming while detecting its position. This has the effect of realizing highly accurate trimming of the sliding resistance, allowing the accuracy during trimming to be utilized as accuracy when commercialized.6

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of a laser trimming device of the present invention,
FIG. 2 is a schematic configuration diagram of a laser trimming device according to the prior art, and FIGS. 3A and 3B are graphs of resistance values versus rotation angles and diagrams of sliding resistors. 101... Control unit, 102... Laser oscillator, 10
3... Beam scanner control section, 104... Beam scanner optical system, 105... Resistance measurement section, 106...
Substrate to be trimmed, 107... Slider rotation drive unit, 1
08...Slider rotation position detection unit, 109...Slider, 110...Probe, 201...Measurement end switching control unit, 310...Electrode, 311...Resistor.

Claims (1)

[Claims] A laser oscillator that oscillates a laser beam, a beam scanner optical system that positions the laser beam and moves it over a resistor on the substrate to be trimmed, a beam scanner control unit that controls the beam scanner optical system, and a beam scanner control unit that is attached to the substrate to be trimmed. a rotary drive unit that rotates the slider to a specified position;
A laser trimming apparatus comprising: a rotation detection section for detecting a rotational position of a slider; a resistance measurement section for measuring a resistance value; and a program control section for each of the constituent units.