JPH04140627A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH04140627A JPH04140627A JP26305090A JP26305090A JPH04140627A JP H04140627 A JPH04140627 A JP H04140627A JP 26305090 A JP26305090 A JP 26305090A JP 26305090 A JP26305090 A JP 26305090A JP H04140627 A JPH04140627 A JP H04140627A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure transfer
- temperature
- sensor
- volume
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 26
- 239000012530 fluid Substances 0.000 claims description 15
- 238000002485 combustion reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧力検知部とダイアフラムとの間の圧力伝
達室に圧力伝達液が封入された圧力センサに関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pressure sensor in which a pressure transmission fluid is sealed in a pressure transmission chamber between a pressure sensing portion and a diaphragm.
第２図は従来エンジンの燃焼室内の圧力を検出するため
に用いられた圧力センサの一例を示す縦断面図であり、
１はエンジンに取り付けられたケース、２はケース１内
に設けられた半導体ストレンゲージからなる圧力検知部
、３は圧力検知部２に先端部が接続された信号線、４は
ケース１を密閉するためのプラグ、５はケース１の下端
部に設けられたダイアフラム、６はダイアフラム５と圧
力検知部２との間に形成された圧力伝達室７内に封入さ
れた高沸点のシリコンオイルからなる圧力伝達液である
。FIG. 2 is a longitudinal sectional view showing an example of a pressure sensor conventionally used to detect the pressure inside the combustion chamber of an engine.
1 is a case attached to the engine, 2 is a pressure detection section consisting of a semiconductor strain gauge provided in the case 1, 3 is a signal line whose tip is connected to the pressure detection section 2, and 4 seals the case 1. 5 is a diaphragm provided at the lower end of the case 1; 6 is a plug made of high boiling point silicone oil sealed in a pressure transmission chamber 7 formed between the diaphragm 5 and the pressure sensing part 2; It is a transmission fluid.
上記のように構成された圧力センサにおいては、燃焼室
内の圧力上昇によりダイアフラム５が変形し、その変形
に伴い圧力伝達液６内の圧力が上昇し、その上昇圧力を
圧力検知部２が検知する。この検知結果から、燃焼室内
の燃焼状態が検知され、この情報から例えば点火プラグ
の点火時期が制御される。In the pressure sensor configured as described above, the diaphragm 5 deforms due to an increase in pressure within the combustion chamber, and the pressure within the pressure transmission fluid 6 increases due to the deformation, and the pressure detection unit 2 detects the increased pressure. . Based on this detection result, the combustion state within the combustion chamber is detected, and based on this information, for example, the ignition timing of the spark plug is controlled.
上記のように構成された従来の圧力センサにおいては、
圧力センサの周囲の温度変（ヒに応じて圧力伝達液６の
体積が変動するとともに圧力伝達液６の圧力が変動し、
その結果圧力検知部２が燃焼室内の圧力変動として検知
してしまうといった問題点があった。In the conventional pressure sensor configured as above,
Depending on the temperature change around the pressure sensor (H), the volume of the pressure transmission fluid 6 changes and the pressure of the pressure transmission fluid 6 changes,
As a result, there is a problem in that the pressure detection section 2 detects pressure fluctuations within the combustion chamber.
この発明は、かかる問題点を解消するためになされたも
ので、周囲の温度変化により影響を受けにくく誤検知を
防止てきる圧力センサを得ることを目的とする。The present invention was made to solve this problem, and an object of the present invention is to provide a pressure sensor that is less susceptible to changes in ambient temperature and can prevent false detection.
この発明に係る圧力センサは、ケースに設けられたダイ
アフラムと、前記ケース内に設けられ圧力を検知する圧
力検知部と、この圧力検知部と前記ダイアフラムとの間
に形成され圧力伝達液が封入された圧力伝達室と、この
圧力伝達室内に設けられ前記圧入伝達液の温度を検知す
る温度センサと、前記圧入伝達室内に設けられ前記温度
センサからの信号により変形する静電型アクチュエータ
とを備えたものである。The pressure sensor according to the present invention includes a diaphragm provided in a case, a pressure detection section provided in the case for detecting pressure, and a pressure transmission fluid sealed between the pressure detection section and the diaphragm. a pressure transmission chamber, a temperature sensor provided in the pressure transmission chamber to detect the temperature of the press-fit transfer fluid, and an electrostatic actuator provided in the press-fit transfer chamber and deformed by a signal from the temperature sensor. It is something.
この発明においては、圧力センサの周囲の温度変動に応
じて圧力伝達液の体積が変動した場合、その変動量は静
電型アクチュエータの変形で吸収される。In this invention, when the volume of the pressure transmission liquid changes in response to temperature changes around the pressure sensor, the amount of the change is absorbed by the deformation of the electrostatic actuator.
以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例を示すもので、第２図と同
一または相当部分は同一符号を付し、その説明は省略す
る。FIG. 1 shows an embodiment of the present invention, and the same or corresponding parts as in FIG. 2 are designated by the same reference numerals, and the explanation thereof will be omitted.
図において、１０は圧力伝達室７内に設けられ圧力伝達
液６の温度を検知する温度センサ、１１は圧力伝達室７
内に設けられ温度センサ１０がらの信号により変形する
静電型アクチュエータでる。In the figure, 10 is a temperature sensor provided in the pressure transmission chamber 7 to detect the temperature of the pressure transmission liquid 6, and 11 is a temperature sensor provided in the pressure transmission chamber 7.
This is an electrostatic actuator that deforms in response to a signal from the temperature sensor 10 installed inside the sensor.
このように構成された圧力センナにおいては、圧力セン
サの周囲の温度上昇に応じて圧力伝達液６の体積が上昇
する。一方、温度センサ１０はその温度を検知し、そこ
からの信号により静電型アクチュエータ１１は駆動され
、圧力伝達液６の体積増加分だけ縮小変形（第２図では
δ）される、その結果、圧力伝達液６の体積増加がある
ものの、圧力（云達室７内には圧力上昇は生じない。In the pressure sensor configured in this way, the volume of the pressure transmission fluid 6 increases in accordance with the rise in temperature around the pressure sensor. On the other hand, the temperature sensor 10 detects the temperature, and the electrostatic actuator 11 is driven by the signal from there, and is reduced and deformed by the volume increase of the pressure transmission fluid 6 (δ in FIG. 2). As a result, Although there is an increase in the volume of the pressure transmission fluid 6, no pressure rise occurs in the pressure transmission chamber 7.
なお、上記実施例ではエンジンの燃焼室内の圧力を検知
するための圧力センサについて説明したが、この発明の
圧力センサはその他にも適用することができることは勿
論である。また、上記実施例では圧力検知部として半導
体ストレンゲージを用いた場合について説明したが、他
にも例えば圧電素子を用いてもよい、さらに、圧力伝達
液６としてシリコンオイルを用いたが、高沸点の他の液
体であってもよい、さらにまた、静電型アクチュエータ
１１を駆動させる温度センサ出力処理回路と駆動回路と
は圧力センサ１０と別体であってもよい。In the above embodiment, a pressure sensor for detecting the pressure inside the combustion chamber of an engine has been described, but it goes without saying that the pressure sensor of the present invention can be applied to other applications. Further, in the above embodiment, the case where a semiconductor strain gauge is used as the pressure detection section has been explained, but other methods such as a piezoelectric element may also be used.Furthermore, although silicone oil is used as the pressure transmission fluid 6, it has a high boiling point. Furthermore, the temperature sensor output processing circuit and drive circuit that drive the electrostatic actuator 11 may be separate from the pressure sensor 10.
また、温度センサ１０は圧力検知部２と同一チップ構成
でもよい。Furthermore, the temperature sensor 10 may have the same chip configuration as the pressure detection section 2.
以上説明したように、この発明の圧力センサによれば、
周囲の温度変動に応じて圧力伝達液の体積が変動した場
合、その圧力伝達液の体積変動量は静電型アクチュエー
タで吸収されるようになっているので、周囲の温度変動
による圧力伝達液の体積変動による影響を受けにくくな
り、より正確に圧力が検知されるという効果がある。As explained above, according to the pressure sensor of the present invention,
When the volume of the pressure transmission fluid fluctuates in response to ambient temperature fluctuations, the volume fluctuation of the pressure transmission fluid is absorbed by the electrostatic actuator. This has the effect of being less susceptible to volume fluctuations and allowing more accurate pressure detection.
第１図はこの発明の一実施例を示すＩＢＩｒ！ｆｒ面図
、第２図は従来の圧力センサの一例を示す縦断面図であ
る。
図において、１はケース、２は圧力検知部、５はダイア
フラム、６は圧力伝達液、７は圧力伝達室、１０は温度
センサ、１１は静電型アクチュエータである。
なお、各図中、同一符号は同一または相当部分を示すも
のである。FIG. 1 shows an embodiment of the present invention. FIG. 2 is a vertical sectional view showing an example of a conventional pressure sensor. In the figure, 1 is a case, 2 is a pressure detection section, 5 is a diaphragm, 6 is a pressure transmission fluid, 7 is a pressure transmission chamber, 10 is a temperature sensor, and 11 is an electrostatic actuator. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
設けられ圧力を検知する圧力検知部と、この圧力検知部
と前記ダイアフラムとの間に形成され圧力伝達液が封入
された圧力伝達室と、この圧力伝達室内に設けられ前記
圧力伝達液の温度を検知する温度センサと、前記圧力伝
達室内に設けられ前記温度センサからの信号により変形
する静電型アクチュエータとを備え、前記圧力伝達液の
温度変動による体積変動分は前記静電型アクチュエータ
の変形により吸収されるようになっていることを特徴と
する圧力センサ。A diaphragm provided in a case, a pressure detection part provided in the case to detect pressure, a pressure transmission chamber formed between this pressure detection part and the diaphragm and filled with pressure transmission fluid, and this pressure A temperature sensor provided in a transmission chamber detects the temperature of the pressure transfer liquid, and an electrostatic actuator provided in the pressure transfer chamber and deformed by a signal from the temperature sensor. A pressure sensor characterized in that volume variation is absorbed by deformation of the electrostatic actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26305090A JPH04140627A (en) | 1990-10-02 | 1990-10-02 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26305090A JPH04140627A (en) | 1990-10-02 | 1990-10-02 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04140627A true JPH04140627A (en) | 1992-05-14 |
Family
ID=17384165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26305090A Pending JPH04140627A (en) | 1990-10-02 | 1990-10-02 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04140627A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012093212A (en) * | 2010-10-27 | 2012-05-17 | Kyocera Corp | Package for pressure detection device for combustor |
-
1990
- 1990-10-02 JP JP26305090A patent/JPH04140627A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012093212A (en) * | 2010-10-27 | 2012-05-17 | Kyocera Corp | Package for pressure detection device for combustor |
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