JPH03134530A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPH03134530A
JPH03134530A JP27030489A JP27030489A JPH03134530A JP H03134530 A JPH03134530 A JP H03134530A JP 27030489 A JP27030489 A JP 27030489A JP 27030489 A JP27030489 A JP 27030489A JP H03134530 A JPH03134530 A JP H03134530A
Authority
JP
Japan
Prior art keywords
pressure
heat sensitive
change
volume
sensitive part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27030489A
Other languages
Japanese (ja)
Inventor
Seiki Kodama
誠樹 児玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27030489A priority Critical patent/JPH03134530A/en
Publication of JPH03134530A publication Critical patent/JPH03134530A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To make it possible to detect pressure accurately by constituting a heat sensitive part so that the heat sensitive part is deformed by temperature change in order to absorb the fluctuation of the volume of pressure transfer liquid due to temperature change. CONSTITUTION:In a case 1, a heat sensitive part 10 for forming a pressure adjusting chamber 11 is provided s that the heat sensitive part is partitioned from a pressure transfer chamber 7. The heat sensitive part 10 comprises shape memory alloy. The part 10 is formed so that it is deformed in conformity with the change in volume which is fluctuated with the temperature change of a pressure transfer liquid 6. When the volume of the pressure transfer liquid 6 is fluctuated in response to the change in temperature around a pressure sensor, the heat sensitive part 10 is deformed in response to the fluctuating amount. For example, when the temperature of the transfer liquid 6 is increased and the volume of the transfer liquid 6 is expanded, the heat sensitive part 10 is made to protrude into the pressure adjusting chamber 11 and deformed. The pressure in the heat transfer chamber 7 before and after the increase in temperature of the transfer liquid 6 is equal. Therefore, even if the volume of the transfer liquid 6 is fluctuated in response to the change in temperature around the pressure sensor, a pressure detecting part 2 does not detect the pressure fluctuation.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、圧力検知部とダイアフラムとの間に設けら
れた圧力伝達室に圧力伝達液が封入された圧力センサに
関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a pressure sensor in which a pressure transmission fluid is sealed in a pressure transmission chamber provided between a pressure sensing portion and a diaphragm.

〔従来の技術〕[Conventional technology]

第3図はエンジンの燃焼室内の圧力を検出すために用い
られた従来の圧力センサの一例を示す縦断面図であり、
1はエンジンに取り付けられたケース、2はケース1内
に設けられた半導体ストレンゲージからなる圧力検知部
、3は圧力検知部2に先端部が接続された信号線、4は
ケース1を密閉するためのプラグ、5はケース1の下端
部に設けられたダイアフラム、6はダイアフラム5と圧
力検知部2との間に形成された圧力伝達室7内に封入さ
れた高沸点のシリコンオイルからなる圧力伝達液である
FIG. 3 is a longitudinal sectional view showing an example of a conventional pressure sensor used to detect the pressure inside the combustion chamber of an engine.
1 is a case attached to the engine, 2 is a pressure detection section consisting of a semiconductor strain gauge provided in the case 1, 3 is a signal line whose tip is connected to the pressure detection section 2, and 4 seals the case 1. 5 is a diaphragm provided at the lower end of the case 1; 6 is a plug made of high boiling point silicone oil sealed in a pressure transmission chamber 7 formed between the diaphragm 5 and the pressure sensing part 2; It is a transmission fluid.

上記のように構成された圧力センサにおいては、燃焼室
内の圧力上昇によりダイアフラム5が変形し、その変形
に伴い圧力伝達液6内の圧力が上昇し、その上昇圧力を
圧力検知部2が検知する。この検知結果から、燃焼室内
の燃焼状態が検知され、この情報から例えば点火プラグ
の点火時期が制御される。
In the pressure sensor configured as described above, the diaphragm 5 deforms due to an increase in pressure within the combustion chamber, and the pressure within the pressure transmission fluid 6 increases due to the deformation, and the pressure detection unit 2 detects the increased pressure. . Based on this detection result, the combustion state within the combustion chamber is detected, and based on this information, for example, the ignition timing of the spark plug is controlled.

〔発明が解決しようとする課厘〕[The problem that the invention aims to solve]

上記のように構成された従来の圧力センサにおいては、
圧力センサの周囲の温度変fヒに応じて圧力伝達液6の
体積が変動するとともに圧力伝達液6の圧力が変動し、
その結果圧力検知部2が燃焼室内の圧力変動として検知
してしまうといった問題点があった。
In the conventional pressure sensor configured as above,
The volume of the pressure transmission liquid 6 changes in accordance with the temperature change around the pressure sensor, and the pressure of the pressure transmission liquid 6 changes,
As a result, there is a problem in that the pressure detection section 2 detects pressure fluctuations within the combustion chamber.

この発明は、かかる問題点を解消するためになされたも
ので、周囲の温度変化により影響を受けにくく、より正
確に圧力を検知する圧力センサを得ることを目的とする
The present invention was made to solve these problems, and an object of the present invention is to provide a pressure sensor that is less susceptible to changes in ambient temperature and can more accurately detect pressure.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係る圧力センサは、ケースに設けられたダイ
アフラムと、前記ケース内に設けられ圧力を検知する圧
力検知部と、この圧力検知部と前記ダイアフラムとの間
に形成され圧力伝達液が封入された圧力伝達室と、前記
ケース内に設けられ前記圧力伝達室と画成して圧力調整
室を形成する熱感応部とを備えたものである。
The pressure sensor according to the present invention includes a diaphragm provided in a case, a pressure detection section provided in the case for detecting pressure, and a pressure transmission fluid sealed between the pressure detection section and the diaphragm. The pressure transmitting chamber is provided within the case and is defined from the pressure transmitting chamber to form a pressure adjusting chamber.

〔作用〕[Effect]

この発明においては、圧力センサの周囲の温度変化に応
じて圧力伝達液の体積が変動した場合、その変動量は熱
感応部の変形により吸収される。
In this invention, when the volume of the pressure transmission liquid changes in response to a change in the temperature around the pressure sensor, the amount of the change is absorbed by the deformation of the heat sensitive part.

〔実施例〕〔Example〕

以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図はこの発明の一実施例を示すもので、第3図と同
一または相当部分は同一符号を付し、その説明は省略す
る。
FIG. 1 shows an embodiment of the present invention, and the same or corresponding parts as in FIG. 3 are given the same reference numerals, and the explanation thereof will be omitted.

図において、10はケース1内に設けられ圧力伝達室7
と画成して圧力調整室11を形成する熱感応部で、形状
記憶合金からなる熱感応部10は圧力伝達液6の温度変
化により変動する体積変化に合わせて変形するようにな
っている。
In the figure, 10 is a pressure transmission chamber 7 provided in the case 1.
The heat sensitive part 10 is made of a shape memory alloy and deforms in accordance with the volume change that changes due to the temperature change of the pressure transfer liquid 6.

上記のように構成された圧力センサにおいては、圧力セ
ンサの周囲の温度変化に応じて圧力伝達液6の体積が変
動した場合、その変動量に応じて熱感応部10が変形す
る9例えば、圧力伝達液6の温度が上昇し、圧力伝達液
6の体積が膨張した場合には、熱感応部6は第2図に示
すように圧力rA整室11内に突出変形し、熱伝達液6
の温度上昇前後において熱伝達室7内の圧力は等しく、
従って圧力センサの周囲の温度変化に応じて圧力伝達液
6の体積が変動した場合でも、圧力検知部2が圧力変動
を検知するようなことはない。
In the pressure sensor configured as described above, when the volume of the pressure transmission liquid 6 changes in response to a change in the temperature around the pressure sensor, the heat sensitive portion 10 deforms in accordance with the amount of change 9. When the temperature of the transfer liquid 6 rises and the volume of the pressure transfer liquid 6 expands, the heat sensitive part 6 is deformed protruding into the pressure rA adjustment chamber 11 as shown in FIG.
The pressure inside the heat transfer chamber 7 is the same before and after the temperature rise,
Therefore, even if the volume of the pressure transmission fluid 6 fluctuates in response to a change in the temperature around the pressure sensor, the pressure sensing section 2 will not detect the pressure fluctuation.

なお、上記実施例ではエンジンの燃焼室を検知するため
の圧力センサについて説明したが、この発明の圧力セン
サはその他にも適用することができることは勿論である
。また、上記実施例では圧力検知部として半導体ストレ
ンゲージを用いた場合について説明したが、他にも例え
ば圧電素子を用いてもよい。さらに、圧力伝達液6とし
てシリコンオイルを用いたが、高沸点の他の液体であっ
てもよい、さらにまた、熱感応部10として形状記憶合
金からなるものについて説明したが、圧力伝達液6の温
度変化による体積変化を吸収するように変形するもので
あればこれに限定されない、また、上記実施例では、熱
感応部10は圧力伝達液6の温度変化による体積変化を
完全に吸収し、温度変化に対して圧力伝達液6の圧力が
一定に保たれた場合について説明したが、圧力伝達液6
の温度変化による体積変化が部分的にしか吸収されず、
その結果圧力伝達液6に多少の圧力変動が生じる場合も
有り得ることは勿論である。
In the above embodiment, a pressure sensor for detecting the combustion chamber of an engine has been described, but it goes without saying that the pressure sensor of the present invention can be applied to other applications. Furthermore, in the above embodiments, a semiconductor strain gauge is used as the pressure detection section, but a piezoelectric element, for example, may also be used. Further, although silicone oil is used as the pressure transmission fluid 6, other liquids with a high boiling point may be used.Furthermore, although the heat sensitive portion 10 is made of a shape memory alloy, the pressure transmission fluid 6 The heat sensitive section 10 is not limited to this as long as it deforms so as to absorb a change in volume due to a change in temperature. In the above embodiment, the heat sensitive section 10 completely absorbs a change in volume due to a change in temperature of the pressure transfer fluid 6, and Although we have explained the case where the pressure of the pressure transmission fluid 6 is kept constant against changes, the pressure transmission fluid 6
The volume change due to temperature change is only partially absorbed,
As a result, it is of course possible that some pressure fluctuations may occur in the pressure transmission fluid 6.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、この発明の圧力センサによれば、
周囲の温度変化に応じて圧力伝達液の体積が変動した場
合、その変動量は熱感応部で吸収されるようになってい
るので、周囲の温度変化による影響を受けにくくなり、
より正確に圧力が検知されるという効果がある。
As explained above, according to the pressure sensor of the present invention,
When the volume of the pressure transfer fluid changes in response to changes in the surrounding temperature, the amount of change is absorbed by the heat sensitive part, making it less susceptible to changes in the surrounding temperature.
This has the effect that pressure can be detected more accurately.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を示す縦断面図、第2図は
第1図の熱感応部が変形した状態を示す断面図、第3図
は従来の圧′カセンサの一例を示す縦断面図である6 図において、1はケース、2は圧力検知部、5はダイア
フラム、6は圧力伝達液、7は圧力伝達室、10は熱感
応部である。 なお、各図中、同一符号は同一または相当部分を示すも
のである。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view showing a deformed state of the heat sensitive portion of FIG. 1, and FIG. 3 is a longitudinal sectional view showing an example of a conventional pressure sensor. In FIG. 6, which is a plan view, 1 is a case, 2 is a pressure sensing section, 5 is a diaphragm, 6 is a pressure transmission fluid, 7 is a pressure transmission chamber, and 10 is a heat sensitive section. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] ケースに設けられたダイアフラムと、前記ケース内に設
けられ圧力を検知する圧力検知部と、この圧力検知部と
前記ダイアフラムとの間に形成され圧力伝達液が封入さ
れた圧力伝達室と、前記ケース内に設けられ前記圧力伝
達室と画成して圧力調整室を形成する熱感応部とを備え
、前記熱感応部は前記圧力伝達液の温度変化による体積
変動を吸収するために温度変化により変形するようにな
っていることを特徴とする圧力センサ。
A diaphragm provided in a case, a pressure detection part provided in the case to detect pressure, a pressure transmission chamber formed between the pressure detection part and the diaphragm and filled with a pressure transmission fluid, and the case. a heat sensitive part provided within the pressure transmission chamber and defining a pressure adjustment chamber, the heat sensitive part being deformed by a temperature change in order to absorb a volume change due to a temperature change of the pressure transmission liquid. A pressure sensor characterized by being adapted to:
JP27030489A 1989-10-19 1989-10-19 Pressure sensor Pending JPH03134530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27030489A JPH03134530A (en) 1989-10-19 1989-10-19 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27030489A JPH03134530A (en) 1989-10-19 1989-10-19 Pressure sensor

Publications (1)

Publication Number Publication Date
JPH03134530A true JPH03134530A (en) 1991-06-07

Family

ID=17484410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27030489A Pending JPH03134530A (en) 1989-10-19 1989-10-19 Pressure sensor

Country Status (1)

Country Link
JP (1) JPH03134530A (en)

Similar Documents

Publication Publication Date Title
US7555957B2 (en) Pressure sensor equipped with pressure sensing diaphragm
KR930011091B1 (en) Pressure sensor
US4802370A (en) Transducer and sensor apparatus and method
US4507973A (en) Housing for capacitive pressure sensor
US4712430A (en) Pressure transducer
US5161415A (en) Pressure sensor
US3349623A (en) Fluid filled pressure transducer
JP2008002809A (en) Combustion pressure sensor
US4936147A (en) Transducer and sensor apparatus and method
US6487898B1 (en) Engine cylinder pressure sensor with thermal compensation element
JPS6348296B2 (en)
KR930007637B1 (en) Pressure sensor
JPH03134530A (en) Pressure sensor
JPH1194671A (en) Pressure sensor
JPH03134531A (en) Pressure sensor
JPH04132923A (en) Pressure sensor
JPH03130635A (en) Pressure sensor
JPH04140627A (en) Pressure sensor
GB2217846A (en) Pressure sensor
US3273400A (en) Pressure cell
JPH04140628A (en) Pressure sensor
JP2005227001A (en) Pressure sensor
JPH03130634A (en) Pressure sensor
JPH04131728A (en) Pressure sensor
JPS5918345Y2 (en) Spark plug with pressure sensitive element