JPH03130634A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH03130634A JPH03130634A JP26816089A JP26816089A JPH03130634A JP H03130634 A JPH03130634 A JP H03130634A JP 26816089 A JP26816089 A JP 26816089A JP 26816089 A JP26816089 A JP 26816089A JP H03130634 A JPH03130634 A JP H03130634A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- fluctuation
- sub
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 230000005540 biological transmission Effects 0.000 claims description 23
- 239000012530 fluid Substances 0.000 claims description 12
- 238000002485 combustion reaction Methods 0.000 abstract description 12
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000012546 transfer Methods 0.000 abstract 5
- 229920000136 polysorbate Polymers 0.000 abstract 1
- 238000009835 boiling Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧力検知部とダイアフラムとの間の圧力伝
達室に圧力伝達液が封入された圧力センサに関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pressure sensor in which a pressure transmission fluid is sealed in a pressure transmission chamber between a pressure sensing portion and a diaphragm.
第２図は従来エンジンの燃焼室内の圧力を検出するため
に用いられた圧力センナの一例を示す縦断面図であり、
１はエンジンに取り付けられたケース、２はケース１内
に設けられた半導体ストレンゲージからなる圧力検知部
、３は圧力検知部２に先端部が接続された信号線、４は
ケース１を密閉するためのプラグ、５はケース１の下端
部に設けられたダイアフラム、６はダイアフラム５と圧
力検知部２との間に形成された圧力伝達室７内に封入さ
れた高沸点のシリコンオイルからなる圧力伝達液である
。FIG. 2 is a longitudinal cross-sectional view showing an example of a pressure sensor conventionally used to detect the pressure inside the combustion chamber of an engine.
1 is a case attached to the engine, 2 is a pressure detection section consisting of a semiconductor strain gauge provided in the case 1, 3 is a signal line whose tip is connected to the pressure detection section 2, and 4 seals the case 1. 5 is a diaphragm provided at the lower end of the case 1; 6 is a plug made of high boiling point silicone oil sealed in a pressure transmission chamber 7 formed between the diaphragm 5 and the pressure sensing part 2; It is a transmission fluid.
上記のように構成された圧力センサにおいては、燃焼室
内の圧力上昇によりダイアフラム５が変形し、その変形
に伴い圧力伝達液６内の圧力が上昇し、その上昇圧力を
圧力検知部２が検知する。この検知結果から、燃焼室内
の燃焼状態が検知され、この情報から例えば点火プラグ
の点火時期が制御される。In the pressure sensor configured as described above, the diaphragm 5 deforms due to an increase in pressure within the combustion chamber, and the pressure within the pressure transmission fluid 6 increases due to the deformation, and the pressure detection unit 2 detects the increased pressure. . Based on this detection result, the combustion state within the combustion chamber is detected, and based on this information, for example, the ignition timing of the spark plug is controlled.
上記のように構成された従来の圧力センナにおいては、
圧力センナの周囲の温度変化に応じて圧力伝達液６の体
積が変動するとともに圧力伝達液６の圧力が変動し、そ
の結果圧力検知部２が燃焼室内の圧力変動として検知し
てしまうといった問題点があった。In the conventional pressure sensor configured as above,
The problem is that the volume of the pressure transmission fluid 6 fluctuates in response to changes in the temperature around the pressure sensor, and the pressure of the pressure transmission fluid 6 also fluctuates, and as a result, the pressure detection unit 2 detects it as a pressure fluctuation within the combustion chamber. was there.
この発明は、かかる問題点を解消するためになされたも
ので、周囲の温度変化により影響を受けることなく正確
に圧力を検知する圧力センナを得ることを目的とする。The present invention was made to solve this problem, and an object of the present invention is to provide a pressure sensor that accurately detects pressure without being affected by changes in ambient temperature.
この発明に係る圧力センサは、ケースに設けられたダイ
アフラムと、前記ケース内に設けられ圧力を検知する圧
力検知部と、この圧力検知部と前記ダイアフラムとの間
に形成され圧力伝達液が封入された圧力伝達室と、前記
ケース内に設けられ外気と導通した圧力調整室と前記圧
力伝達室とを画成したサブダイアフラムと、前記圧力伝
達室内に形成され前記ダイアフラム側と前記サブダイア
フラム側とを連通ずる微小な空隙部とを備えたものであ
る。The pressure sensor according to the present invention includes a diaphragm provided in a case, a pressure detection section provided in the case for detecting pressure, and a pressure transmission fluid sealed between the pressure detection section and the diaphragm. a pressure transmission chamber formed in the case, a subdiaphragm defining a pressure adjustment chamber provided in the case and communicating with outside air, and the pressure transmission chamber; It is equipped with a microscopic cavity that communicates with the air.
この発明においては、圧力センサの周囲の温度変化に応
じて圧力伝達液の体積が変動した場合、その変動量はサ
ブダイアフラムで吸収され、才な、ダイアフラムが急峻
な圧力変動を受けた場合、その圧力変動がサブダイアフ
ラムに伝達されることなく圧力検知部に直接伝達される
。In this invention, when the volume of the pressure transmission fluid fluctuates depending on the temperature change around the pressure sensor, the amount of the fluctuation is absorbed by the subdiaphragm. Pressure fluctuations are directly transmitted to the pressure sensing section without being transmitted to the subdiaphragm.
以下、この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図はこの発明の一実施例を示すもので、第２図と同
一または相当部分は同一符号を付し、その説明は省略す
る。FIG. 1 shows an embodiment of the present invention, and the same or corresponding parts as in FIG. 2 are designated by the same reference numerals, and the explanation thereof will be omitted.
図において、１０はケース１内の下部に設けられたサブ
ケース、１１はサブケース１０内に設けられたサブダイ
アフラム、１２はサブダイアフラム１１の上部空間に形
成された圧力調整室、１３はケース１に形成され先端が
圧力調整室１２に通じた通気孔、１４はサブケース１０
の下部フランジ１０ａとケース１との間に形成された微
小な空隙部である。In the figure, 10 is a subcase provided in the lower part of case 1, 11 is a subdiaphragm provided in subcase 10, 12 is a pressure adjustment chamber formed in the upper space of subdiaphragm 11, and 13 is case 1 A vent hole 14 is formed in the sub case 10 and the tip thereof communicates with the pressure adjustment chamber 12.
This is a minute gap formed between the lower flange 10a and the case 1.
上記のように構成された圧力センナにおいては、圧力セ
ンナの周囲の温度変化に応じて圧力伝達液６の体積が緩
慢に変動した場合、その変動量はサブダイアフラム１１
で吸収され、圧力伝達室７内の圧力伝達液６の圧力は通
気孔１３を通じて外気と同圧に保たれるので、圧力検知
部２が燃焼室内の圧力変動として検知してしまうような
ことは防止される。また、サブダイアフラム１１の手前
に空隙部１４が配設されているので、燃焼室内の急峻な
圧力変動が生じた場合、その圧力変動がサブダイアフラ
ム１１に伝達されることは空隙部１４で阻止され、ダイ
アフラム５に直接伝達され、燃焼室内の圧力は圧力検知
部２で正確に検知される。In the pressure sensor configured as described above, when the volume of the pressure transmission fluid 6 changes slowly in response to a change in the temperature around the pressure sensor, the amount of the change is caused by the subdiaphragm 11.
Since the pressure of the pressure transmission fluid 6 in the pressure transmission chamber 7 is maintained at the same pressure as the outside air through the vent hole 13, the pressure detection unit 2 will not detect it as a pressure fluctuation in the combustion chamber. Prevented. Furthermore, since the cavity 14 is provided in front of the subdiaphragm 11, when a steep pressure fluctuation occurs in the combustion chamber, the cavity 14 prevents the pressure fluctuation from being transmitted to the subdiaphragm 11. , is directly transmitted to the diaphragm 5, and the pressure inside the combustion chamber is accurately detected by the pressure detection unit 2.
なお、上記実施例ではエンジンの燃焼室内の圧力を検知
するための圧力センサについて説明したが、この発明の
圧力センサはその他にも適用することができることは勿
論である。また、上記実施例では圧力検知部として半導
体ストレンゲージを用いた場合について説明したが、他
にも例えば圧電素子を用いてもよい。さらに、圧力伝達
液６としてシリコンオイルを用いたが、高沸点の他の液
体であってもよい。In the above embodiment, a pressure sensor for detecting the pressure inside the combustion chamber of an engine has been described, but it goes without saying that the pressure sensor of the present invention can be applied to other applications. Furthermore, in the above embodiments, a semiconductor strain gauge is used as the pressure detection section, but a piezoelectric element, for example, may also be used. Furthermore, although silicone oil is used as the pressure transmission liquid 6, other liquids with high boiling points may be used.
以上説明したように、この発明の圧力センサによれば、
周囲の温度変化に応じて圧力伝達液の体積が変動した場
合、その変動量はサブダイアフラムで吸収され、また、
ダイアフラムが急峻な圧力変動を受けた場合、その圧力
変動がサブダイアフラムに吸収されることなく圧力検知
部に伝達されるようになっているので、周囲の温度変化
による圧力伝達液の変動による影響を受けることなく正
確に圧力が検知されるという効果がある。As explained above, according to the pressure sensor of the present invention,
If the volume of the pressure transmission fluid fluctuates in response to changes in ambient temperature, the amount of fluctuation is absorbed by the subdiaphragm, and
When the diaphragm experiences steep pressure fluctuations, the pressure fluctuations are transmitted to the pressure sensing section without being absorbed by the sub-diaphragm, which eliminates the effects of fluctuations in the pressure transmission fluid due to changes in ambient temperature. This has the effect of accurately detecting pressure without being affected by pressure.
第１図はこの発明の一実施例を示す縦断面図、第２図は
従来の圧力センサの一例を示す縦断面図である。
図において、１はケース、２は圧力検知部、５はダイア
フラム、６は圧力伝達液、７は圧力伝達室、１１はサブ
ダイアフラム、１２は圧力調整室、１４は空隙部である
。
なお、各図中、同一符号は同一または相当部分を示すも
のである。
トサア５゛イアフラムFIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view showing an example of a conventional pressure sensor. In the figure, 1 is a case, 2 is a pressure detection section, 5 is a diaphragm, 6 is a pressure transmission liquid, 7 is a pressure transmission chamber, 11 is a subdiaphragm, 12 is a pressure adjustment chamber, and 14 is a cavity. In each figure, the same reference numerals indicate the same or corresponding parts. Tosaa 5゛iaphram
Claims (1)
けられ圧力を検知する圧力検知部と、この圧力検知部と
前記ダイアフラムとの間に形成され圧力伝達液が封入さ
れた圧力伝達室と、前記ケース内に設けられ外気と導通
した圧力調整室と前記圧力伝達室とを画成したサブダイ
アフラムと、前記圧力伝達室に形成され前記ダイヤフラ
ム側と前記サブダイアフラム側とを連通する微小な空隙
部とを備えたことを特徴とする圧力センサ。A diaphragm provided in a case, a pressure detection part provided in the case to detect pressure, a pressure transmission chamber formed between the pressure detection part and the diaphragm and filled with a pressure transmission fluid, and the case. A sub-diaphragm defining a pressure adjustment chamber and the pressure transmission chamber provided therein and communicating with the outside air, and a minute cavity formed in the pressure transmission chamber and communicating the diaphragm side and the sub-diaphragm side. A pressure sensor characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26816089A JPH03130634A (en) | 1989-10-17 | 1989-10-17 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26816089A JPH03130634A (en) | 1989-10-17 | 1989-10-17 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03130634A true JPH03130634A (en) | 1991-06-04 |
Family
ID=17454741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26816089A Pending JPH03130634A (en) | 1989-10-17 | 1989-10-17 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03130634A (en) |
-
1989
- 1989-10-17 JP JP26816089A patent/JPH03130634A/en active Pending
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