JPH0522837Y2 - - Google Patents
Info
- Publication number
- JPH0522837Y2 JPH0522837Y2 JP1984023325U JP2332584U JPH0522837Y2 JP H0522837 Y2 JPH0522837 Y2 JP H0522837Y2 JP 1984023325 U JP1984023325 U JP 1984023325U JP 2332584 U JP2332584 U JP 2332584U JP H0522837 Y2 JPH0522837 Y2 JP H0522837Y2
- Authority
- JP
- Japan
- Prior art keywords
- mounting
- pressure
- piezoelectric element
- pressure receiving
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 15
- 238000003780 insertion Methods 0.000 claims description 14
- 230000037431 insertion Effects 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 13
- 230000006866 deterioration Effects 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000000446 fuel Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【考案の詳細な説明】
［産業上の利用分野］
本考案は、被検出圧力流体の圧力変動を検知す
るための圧電センサーに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a piezoelectric sensor for detecting pressure fluctuations in a pressure fluid to be detected.
［従来技術］
この種の圧電センサーとしては、例えばノツキ
ングや燃料の噴出によつて振動を生じるエンジン
のシリンダーブロツク等の振動体の表面に設けて
その振動を検出し、シリンダー内の圧力変動を検
知するもの等がある。このように従来のセンサー
はいづれも被検出圧力流体の変動を、この変動に
よつて影響を受ける振動体等を介して検知するよ
うにしていた。このため、流体の圧力変動を直接
拾うものではないから、その出力が低く、かつ
種々のノイズが発生する欠点があつた。[Prior art] This type of piezoelectric sensor is installed on the surface of a vibrating body such as an engine cylinder block that vibrates due to knocking or fuel injection, and detects the vibration to detect pressure fluctuations inside the cylinder. There are things to do. As described above, all conventional sensors detect fluctuations in the pressure fluid to be detected through a vibrating body or the like that is affected by the fluctuations. Therefore, since it does not directly pick up fluid pressure fluctuations, its output is low and various noises are generated.
そこで、被検出圧力流体を内包する隔壁に取付
孔を設け、該取付孔に、圧電素子を収納する筐体
を装着し、装着室と、該装着室と連通し、かつ被
検出圧力流体の圧力を杆体を介して圧電素子に作
用させて、その圧力変動を検知するようにした構
成が特開昭57−198811号で開示されている。 Therefore, a mounting hole is provided in the partition wall containing the pressure fluid to be detected, and a housing for housing the piezoelectric element is mounted in the mounting hole, communicating with the mounting chamber and the pressure of the pressure fluid to be detected. JP-A-57-198811 discloses a configuration in which the pressure is applied to a piezoelectric element through a rod and its pressure fluctuations are detected.
［考案が解決しようとする課題］
かかる構成にあつて、前記圧電素子に圧力を作
用させる杆体は、移動可能に保持されていなけれ
ばならず、そこでダイヤフラムを介して前記杆体
を支持している。ところでダイヤフラムを用いる
場合には、一般に圧電センサーは内燃機関のシリ
ンダーブロツク等のように、高温雰囲気中で、過
酷な条件下で使用され、薄膜からなるダイヤフラ
ムでは、その形状的伸縮作動により、劣化が早
く、このため、その取換え頻度が高くなる等の問
題点がある。[Problems to be Solved by the Invention] In such a configuration, the rod that applies pressure to the piezoelectric element must be held movably, and the rod is supported there via a diaphragm. By the way, when using a diaphragm, piezoelectric sensors are generally used in high-temperature atmospheres and under harsh conditions, such as in cylinder blocks of internal combustion engines, and diaphragms made of thin films are prone to deterioration due to their geometric expansion and contraction. Therefore, there are problems such as an increase in the frequency of replacement.
本考案は、ダイヤフラムを用いることなく、被
検出圧力流体の圧力変動を検知することが可能で
あると共に、温度変化に対しても、安定した出力
を生じ得る圧電センサーの提供を目的とするもの
である。 The purpose of the present invention is to provide a piezoelectric sensor that is capable of detecting pressure fluctuations in a pressure fluid to be detected without using a diaphragm, and that can generate a stable output even with temperature changes. be.
［課題を解決するための手段］
本考案は、内部に装着室が設けられ、外端に装
着開口が形成された大径の装着部と、被検出圧力
流体を内包する隔壁に形成された取付孔に螺合す
る取付螺子が周設され、かつ内部に前記装着室と
連通し、下面が開口した挿通路が設けられた取付
部とを備え、前記装着室と前記挿通路との間には
係止段が形成された金属製筐体と、
前記金属製筐体の挿通路内に通入する小径の杆
部と、装着室内に収納されて、前記係止段に係止
される鍔部とを連成してなり、鍔部の外端面を踏
圧面とし、杆部の内端面を前記隔壁内に露出する
受圧面とした金属製受圧体と、
前記装着室に配設されて、金属製受圧体の踏圧
面により加圧される圧電素子と
を備えたことを特徴とする圧電センサーである。[Means for Solving the Problems] The present invention includes a large-diameter mounting section that is provided with a mounting chamber inside and a mounting opening formed at the outer end, and a mounting section that is formed on a partition wall that contains the pressure fluid to be detected. a mounting portion having a mounting screw disposed around the hole to be screwed into the hole, and an insertion passage communicating with the mounting chamber and having an open bottom surface; A metal casing in which a locking step is formed, a small diameter rod that passes through an insertion path of the metal casing, and a flange that is housed in a mounting chamber and is locked to the locking step. a metal pressure-receiving body having an outer end surface of the flange as a treading surface and an inner end surface of the rod as a pressure-receiving surface exposed within the partition wall; This is a piezoelectric sensor characterized by comprising a piezoelectric element that is pressurized by a treading surface of a manufactured pressure receiving body.
［作用］
かかる構成にあつては、前記受圧体の受圧面に
よつて圧力変動を直接拾うこととなり、しかも圧
電素子に圧力を伝播する受圧体は退避移動を可能
としていると共に、伸出方向では前記係止段に支
持されてその移動を拘束され、保持されることと
なる。[Function] In such a configuration, pressure fluctuations are directly picked up by the pressure receiving surface of the pressure receiving body, and the pressure receiving body that propagates pressure to the piezoelectric element is capable of retracting movement, and is also capable of retracting in the extending direction. It is supported by the locking stage and its movement is restrained and held.
さらには、適用箇所が高温雰囲気にある場合に
は、金属製受圧体が熱膨張により伸縮するが、主
体部となる挿通路内に通入する杆部の内端面は隔
壁内に非拘束となつており、圧電素子に対する踏
圧力は変化しない。このため、温度変化による出
力変動を可及的に阻止できる。 Furthermore, if the application location is in a high-temperature atmosphere, the metal pressure receiving body expands and contracts due to thermal expansion, but the inner end surface of the rod that passes through the insertion passage, which is the main body, is not constrained within the partition wall. Therefore, the pressing force on the piezoelectric element does not change. Therefore, output fluctuations due to temperature changes can be prevented as much as possible.
一方、金属製筐体の装着部は、隔壁の外側に配
置され、このため、装着室内の圧電素子は、隔壁
が高温となつていても、その影響を緩和される。
従つて、熱衝撃による圧電素子の圧電製の劣化が
阻止される。 On the other hand, the mounting portion of the metal casing is disposed outside the partition wall, so that even if the partition wall is at a high temperature, the influence of the piezoelectric element in the mounting chamber is alleviated.
Therefore, deterioration of the piezoelectric element due to thermal shock is prevented.
［実施例］
本考案の一実施例を、添付図面に従つて説明す
る。[Example] An example of the present invention will be described with reference to the accompanying drawings.
１は内部に装着室３が設けられた大径の装着部
２と、周囲に取付螺子５が形成され、かつ内部に
前記装着室３と連通し、下面が開口した挿通路６
が設けられた小径の取付部４とを連成してなる金
属製筐体である。この取付部４は、後述するよう
に、隔壁３０の取付孔３１に螺着され、装着部２
は隔壁３０に配置される。そして前記装着室３の
外端に形成した装着開口７から金属製受圧体９、
圧電素子１５、絶縁キヤツプ２１等が収納され、
カシメ８によりそれらを脱出不能に固定するよう
にしている。前記挿通路６は装着室３よりも径小
とし、その間に係止段ｓを生じさせている。 Reference numeral 1 denotes a large-diameter mounting portion 2 with a mounting chamber 3 provided therein, and an insertion passage 6 having an opening at the bottom and communicating with the mounting chamber 3, having a mounting screw 5 formed around its periphery.
It is a metal casing that is connected to a small-diameter mounting portion 4 provided with. The mounting portion 4 is screwed into the mounting hole 31 of the partition wall 30, as will be described later.
are arranged on the partition wall 30. Then, from the mounting opening 7 formed at the outer end of the mounting chamber 3, a metal pressure receiving body 9,
A piezoelectric element 15, an insulating cap 21, etc. are housed,
They are fixed by caulking 8 so that they cannot escape. The insertion passage 6 has a diameter smaller than that of the mounting chamber 3, and a locking step s is formed therebetween.
前記筐体１内の各収納物についてさらに詳細に
説明すると、受圧体９は前記挿通路６内に通入し
た小径の杆部１０と、装着室３内に収納される鍔
部１１とを連成してなる。前記杆部１０の端部は
該挿通路６と同径とし、その下面を受圧面１２と
して前記取付部４の下端から露出している。また
鍔部１１は装着室３、挿通路６の間の係止段ｓに
当接し、その上面を踏圧面１３としている。そし
て、前記係止段ｓにより伸出方向への移動を拘束
して支持している。 To explain in more detail each item stored in the housing 1, the pressure receiving body 9 connects the small diameter rod part 10 passed into the insertion passage 6 and the collar part 11 stored in the mounting chamber 3. It will become. The end portion of the rod portion 10 has the same diameter as the insertion passage 6, and its lower surface is exposed from the lower end of the mounting portion 4 as a pressure receiving surface 12. Further, the flange portion 11 abuts on a locking stage s between the mounting chamber 3 and the insertion passage 6, and its upper surface serves as a treading surface 13. The locking step s restrains and supports movement in the extending direction.
前記圧電素子１５は筒状をしていて、前記装着
室３に嵌装された絶縁筒１６内に密嵌状に内装さ
れ、その下面に電極板１７及び絶縁板１８が順次
設けられ、前記絶縁板１８により圧電素子１５
と、鍔部１１とを電気的に絶縁している。また前
記圧電素子１５の上面には、リング状の電極板１
９と、絶縁板２０とが順次設けられている。 The piezoelectric element 15 has a cylindrical shape, and is tightly fitted inside an insulating tube 16 fitted in the mounting chamber 3, and an electrode plate 17 and an insulating plate 18 are sequentially provided on the lower surface of the insulating tube 16. Piezoelectric element 15 by plate 18
and the flange 11 are electrically insulated. Further, a ring-shaped electrode plate 1 is provided on the upper surface of the piezoelectric element 15.
9 and an insulating plate 20 are sequentially provided.
前記絶縁キヤツプ２１は管状をしていて、その
下部の鍔面２２を前記絶縁板２０上面に当接し、
前記カシメ８によつて装着部２に保持されて該装
着部２上方に突出している。絶縁キヤツプ２１内
には、絶縁被覆２３が上下方向に保持され、該絶
縁被覆２３内を通る信号搬送用の導線２４ａが圧
電素子１５内を通つて前記電極板１７に接続し、
同じく導線２４ｂが電極板１９に接続している。 The insulating cap 21 has a tubular shape, and its lower flange surface 22 is in contact with the upper surface of the insulating plate 20,
It is held in the mounting part 2 by the caulking 8 and protrudes above the mounting part 2. An insulating sheath 23 is held in the vertical direction within the insulating cap 21, and a signal carrying wire 24a passing through the insulating sheath 23 passes through the piezoelectric element 15 and connects to the electrode plate 17.
Similarly, a conducting wire 24b is connected to the electrode plate 19.
前記構成からなるセンサーは、被検出圧力流体
を内包するシリンダブロツク等の隔壁３０の、そ
の内周面に雌螺子が形成された取付孔３１に前記
筐体１の取付螺子５を螺着して装着され、これに
より被検出圧力流体内に受圧体９の受圧面１２を
臨ませる。 The sensor constructed as described above is constructed by screwing the mounting screw 5 of the housing 1 into a mounting hole 31 having a female thread formed on the inner peripheral surface of a partition wall 30 such as a cylinder block containing a pressure fluid to be detected. This causes the pressure receiving surface 12 of the pressure receiving body 9 to face the pressure fluid to be detected.
前記圧電センサーの作用を説明すると、隔壁３
０内の流体に圧力変動を生じた場合、例えばエン
ジンのシリンダーに取付けた場合において、該シ
リンダー内に燃料の噴射や、ノツキングが発生し
て圧力波が生じた場合、前記受圧体９は受圧面１
２でこの圧力を受けて踏圧面１３により絶縁板１
８、電極板１７を介して圧電素子１５を加圧す
る。この加圧により圧電素子１５に圧縮歪が生じ
て電位が発生し、これが検出信号として導線２４
ａ，２４ｂ間から取出される。かかる信号は、増
幅器等外部機器によつて増幅、整波等の処理を加
えられ例えばエンジンのシリンダーに取付けた場
合にはそのノツキング、噴射時期等の検知が可能
となる。 To explain the function of the piezoelectric sensor, the partition wall 3
If a pressure fluctuation occurs in the fluid in the 0, for example, when installed in an engine cylinder, if pressure waves are generated due to fuel injection or knocking in the cylinder, the pressure receiving body 9 1
2, receiving this pressure, the treading surface 13 causes the insulating plate 1 to
8. Pressure is applied to the piezoelectric element 15 via the electrode plate 17. This pressurization causes compressive strain in the piezoelectric element 15 and generates a potential, which is sent to the conductor 24 as a detection signal.
It is taken out from between a and 24b. Such a signal is subjected to processing such as amplification and wave rectification by an external device such as an amplifier, and when it is attached to an engine cylinder, for example, it becomes possible to detect knocking, injection timing, etc.
かかる構成にあつては、前記受圧体９の受圧面
１２によつて圧力変動を直接拾うこととなり、し
かも圧電素子１５に圧力を伝播する受圧体９は退
避移動を可能としていると共に、伸出方向では前
記係止段ｓにその自重を支持されて拘束されるこ
ととなる。このため、圧電素子１５の圧力検出に
支障を生ずることなく受圧体９は支持される。 In such a configuration, pressure fluctuations are directly picked up by the pressure receiving surface 12 of the pressure receiving body 9, and the pressure receiving body 9, which propagates pressure to the piezoelectric element 15, is capable of retracting movement and is also capable of moving in the extending direction. Then, the locking stage s supports its own weight and is restrained. Therefore, the pressure receiving body 9 is supported without causing any trouble in detecting the pressure of the piezoelectric element 15.
さらには、適用箇所が高温雰囲気にある場合に
は、金属製受圧体９が熱膨張により伸縮するが、
主体部となる挿通路６内に通入する杆部１０の内
端面は非拘束となつており、圧電素子１５に対す
る踏圧力は変化しない。このため、温度変化によ
る出力変動を可及的に阻止できる。 Furthermore, when the application location is in a high temperature atmosphere, the metal pressure receiving body 9 expands and contracts due to thermal expansion.
The inner end surface of the rod portion 10 that passes into the insertion passage 6 serving as the main body portion is not constrained, and the tread force on the piezoelectric element 15 does not change. Therefore, output fluctuations due to temperature changes can be prevented as much as possible.
前記圧電センサーは、その他の被検出圧力流体
の圧力変動にも適用することができ、例えば液体
容器内の圧力変動を検知するのにも用いることが
できる。 The piezoelectric sensor can also be applied to detect pressure fluctuations in other pressure fluids, for example, to detect pressure fluctuations in a liquid container.
［考案の効果］
本考案は前記の説明によつて明らかにしたよう
に、受圧体９の受圧面１２を被検出圧力流体内に
臨ませ、該受圧体９の踏圧面１３で前記流体の圧
力変動に伴つて圧電素子１５を加圧して信号を発
生するようにしたから、前記受圧面１２によつて
圧力変動を直接拾うことができ、このため安定的
かつ高出力の信号を得ることができて前記圧力変
動の検知に最適となる。また、前記受圧体９は装
着室３、挿通路６間の係止段ｓに鍔部１１を係止
されて支持されるものであつて、ダイヤフラムを
不要としているから、過酷な条件下で経年使用し
ても、その破損が可及的に抑止される。[Effect of the invention] As clarified by the above explanation, the present invention allows the pressure receiving surface 12 of the pressure receiving body 9 to face the pressure fluid to be detected, and the pressure of the fluid is detected by the pressure surface 13 of the pressure receiving body 9. Since the piezoelectric element 15 is pressurized to generate a signal in response to fluctuations, pressure fluctuations can be directly picked up by the pressure receiving surface 12, and a stable and high-output signal can therefore be obtained. This makes it ideal for detecting the pressure fluctuations. In addition, the pressure receiving body 9 is supported by the collar 11 being locked to the locking stage s between the mounting chamber 3 and the insertion passage 6, and does not require a diaphragm. Even if it is used, damage to it is suppressed as much as possible.
また、適用箇所が高温雰囲気にある場合には、
金属製受圧体９が熱膨張により伸縮するが、挿通
路６内に通入する杆部１０の内端面は非拘束とな
つており、圧電素子１５に対する踏圧力は変化し
ない。このため、温度変化による出力変動を可及
的に阻止できる。 In addition, if the application location is in a high temperature atmosphere,
Although the metal pressure-receiving body 9 expands and contracts due to thermal expansion, the inner end surface of the rod portion 10 that passes into the insertion passage 6 is not constrained, and the tread force on the piezoelectric element 15 does not change. Therefore, output fluctuations due to temperature changes can be prevented as much as possible.
さらには、装着室３の外端に形成した装着開口
７から金属製受圧体９、圧電素子１５、絶縁キヤ
ツプ２１等が収納されるから、組み付けが容易で
ある。 Furthermore, since the metal pressure receiving body 9, the piezoelectric element 15, the insulating cap 21, etc. are accommodated through the mounting opening 7 formed at the outer end of the mounting chamber 3, assembly is easy.
そしてさらには、金属製筐体１の装着部２は、
隔壁３０の外側に配置され、このため、装着室３
内の圧電素子１５は、隔壁３０内が高温となつて
いても、その影響を緩和される。従つて、熱衝撃
による圧電素子１５の圧電性の劣化が阻止され
る。 Furthermore, the mounting portion 2 of the metal housing 1 is
It is arranged outside the partition wall 30, and therefore the mounting chamber 3
Even if the inside of the partition wall 30 is at a high temperature, the piezoelectric element 15 inside the partition wall 30 is less affected by the high temperature. Therefore, deterioration of the piezoelectricity of the piezoelectric element 15 due to thermal shock is prevented.
而して、耐久性、耐熱性に優れ、かつ組み付け
容易であり、この種の圧電センサーとして最適と
なる優れた効果がある。 Therefore, it has excellent durability and heat resistance, and is easy to assemble, making it ideal for this type of piezoelectric sensor.
添付図面は本考案の一実施例を示す縦断側面図
である。
１……筐体、２……装着部、３……装着室、４
……取付部、５……取付螺子、７……装着開口、
９……受圧体、１０……杆部、１１……鍔部、１
２……受圧面、１３……踏圧面、１５……圧電素
子、２１……絶縁キヤツプ。
The accompanying drawing is a longitudinal sectional side view showing an embodiment of the present invention. 1... Housing, 2... Mounting section, 3... Mounting chamber, 4
...Mounting part, 5...Mounting screw, 7...Mounting opening,
9... Pressure receiving body, 10... Rod section, 11... Flange section, 1
2...Pressure receiving surface, 13...Tread pressure surface, 15...Piezoelectric element, 21...Insulating cap.
Claims (1)
が形成された大径の装着部２と、被検出圧力流体
を内包する隔壁３０に形成された取付孔３１に螺
合する取付螺子５が周設され、かつ内部に前記装
着室３と連通し、下面が開口した挿通路６が設け
られた取付部４とを備え、前記装着室３と前記挿
通路６との間には係止段ｓが形成された金属製筐
体１と、 前記金属製筐体１の挿通路６内に通入する小径
の杆部１０と、装着室３内に収納されて、前記係
止段に係止される鍔部１１とを連成してなり、鍔
部１１の外端面を踏圧面１３とし、杆部１０の内
端面を前記隔壁３０内に露出する受圧面１２とし
た金属製受圧体９と、 前記装着室３に配設されて、金属製受圧体９の
踏圧面１３により加圧される圧電素子１５と を備えたことを特徴とする圧電センサー。[Scope of claim for utility model registration] A mounting chamber 3 is provided inside, and a mounting opening 7 is provided at the outer end.
A large-diameter mounting portion 2 is formed with a pressure fluid to be detected, and a mounting screw 5 that is screwed into a mounting hole 31 formed in a partition wall 30 that contains the pressure fluid to be detected is provided around the periphery, and the inside communicates with the mounting chamber 3. , a metal housing 1 comprising a mounting portion 4 provided with an insertion passage 6 whose lower surface is open, and a locking step s formed between the mounting chamber 3 and the insertion passage 6; The flange is formed by interconnecting a small-diameter rod portion 10 that passes through the insertion passage 6 of the manufactured housing 1 and a flange portion 11 that is housed in the mounting chamber 3 and is locked to the locking step. A metal pressure receiving body 9 having an outer end surface of the part 11 as a treading surface 13 and an inner end surface of the rod part 10 as a pressure receiving surface 12 exposed inside the partition wall 30; A piezoelectric sensor comprising a piezoelectric element 15 pressurized by a tread surface 13 of a body 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2332584U JPS60135639U (en) | 1984-02-20 | 1984-02-20 | piezoelectric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2332584U JPS60135639U (en) | 1984-02-20 | 1984-02-20 | piezoelectric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60135639U JPS60135639U (en) | 1985-09-09 |
| JPH0522837Y2 true JPH0522837Y2 (en) | 1993-06-11 |
Family
ID=30516457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2332584U Granted JPS60135639U (en) | 1984-02-20 | 1984-02-20 | piezoelectric sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60135639U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009019834A1 (en) * | 2007-08-09 | 2009-02-12 | Meiji University | Pressure sensor and method for manufacturing the same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5594541B2 (en) * | 2012-02-09 | 2014-09-24 | Ｓｍｃ株式会社 | Pressure detector |
| JP5853837B2 (en) * | 2012-04-13 | 2016-02-09 | 株式会社豊田中央研究所 | Pressure sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57122334A (en) * | 1981-01-22 | 1982-07-30 | Nippon Soken Inc | Pressure sensor |
| JPS57198811A (en) * | 1981-05-20 | 1982-12-06 | List Hans | Measuring sensor with piezo-electric detecting element |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5768537U (en) * | 1980-10-14 | 1982-04-24 |
-
1984
- 1984-02-20 JP JP2332584U patent/JPS60135639U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57122334A (en) * | 1981-01-22 | 1982-07-30 | Nippon Soken Inc | Pressure sensor |
| JPS57198811A (en) * | 1981-05-20 | 1982-12-06 | List Hans | Measuring sensor with piezo-electric detecting element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009019834A1 (en) * | 2007-08-09 | 2009-02-12 | Meiji University | Pressure sensor and method for manufacturing the same |
| JP2009042073A (en) * | 2007-08-09 | 2009-02-26 | Meiji Univ | Pressure sensor and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60135639U (en) | 1985-09-09 |
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