WO2009019834A1 - Pressure sensor and method for manufacturing the same - Google Patents

Pressure sensor and method for manufacturing the same Download PDF

Info

Publication number
WO2009019834A1
WO2009019834A1 PCT/JP2008/002053 JP2008002053W WO2009019834A1 WO 2009019834 A1 WO2009019834 A1 WO 2009019834A1 JP 2008002053 W JP2008002053 W JP 2008002053W WO 2009019834 A1 WO2009019834 A1 WO 2009019834A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
piezoelectric member
pressure sensor
accordance
manufacturing
Prior art date
Application number
PCT/JP2008/002053
Other languages
French (fr)
Japanese (ja)
Inventor
Kazuo Tsuchiya
Original Assignee
Meiji University
Kyocera Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meiji University, Kyocera Corporation filed Critical Meiji University
Publication of WO2009019834A1 publication Critical patent/WO2009019834A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Provided is a pressure sensor having improved measurement accuracy. The pressure sensor is provided with a pressure receiving means having a displacement section which is displaced in accordance with pressure applied to the pressure receiving section; a piezoelectric member which receives pressure in accordance with displacement of the displacement section and generates charges in accordance with the perceived pressure; and an electrode, which is brought into contact with the piezoelectric member and takes out the charges generated by the piezoelectric member. In a space where the piezoelectric member is stored, an insulating member covering at least a part of the periphery of the piezoelectric member is arranged without having other member in between.
PCT/JP2008/002053 2007-08-09 2008-07-31 Pressure sensor and method for manufacturing the same WO2009019834A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007207457A JP2009042073A (en) 2007-08-09 2007-08-09 Pressure sensor and method for manufacturing the same
JP2007-207457 2007-08-09

Publications (1)

Publication Number Publication Date
WO2009019834A1 true WO2009019834A1 (en) 2009-02-12

Family

ID=40341078

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002053 WO2009019834A1 (en) 2007-08-09 2008-07-31 Pressure sensor and method for manufacturing the same

Country Status (2)

Country Link
JP (1) JP2009042073A (en)
WO (1) WO2009019834A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012105514A1 (en) * 2011-01-31 2012-08-09 株式会社ミクニ Pressure sensor element

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0233337U (en) * 1988-08-27 1990-03-02
JPH0522837Y2 (en) * 1984-02-20 1993-06-11
JPH0594742U (en) * 1992-05-26 1993-12-24 日本電子機器株式会社 Pressure sensor
JPH07113714A (en) * 1993-10-14 1995-05-02 Matsushita Electric Ind Co Ltd Piezoelectric pressure sensor
WO2004015385A1 (en) * 2002-08-09 2004-02-19 Bosch Automotive Systems Corporation Pressure sensor, method of producing the sensor, and in-cylinder pressure detection structure of internal combustion engine
JP2005181184A (en) * 2003-12-22 2005-07-07 Mitsubishi Materials Corp Pressure-measuring sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522837Y2 (en) * 1984-02-20 1993-06-11
JPH0233337U (en) * 1988-08-27 1990-03-02
JPH0594742U (en) * 1992-05-26 1993-12-24 日本電子機器株式会社 Pressure sensor
JPH07113714A (en) * 1993-10-14 1995-05-02 Matsushita Electric Ind Co Ltd Piezoelectric pressure sensor
WO2004015385A1 (en) * 2002-08-09 2004-02-19 Bosch Automotive Systems Corporation Pressure sensor, method of producing the sensor, and in-cylinder pressure detection structure of internal combustion engine
JP2005181184A (en) * 2003-12-22 2005-07-07 Mitsubishi Materials Corp Pressure-measuring sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012105514A1 (en) * 2011-01-31 2012-08-09 株式会社ミクニ Pressure sensor element
JP2012159374A (en) * 2011-01-31 2012-08-23 Iwate Industrial Research Center Pressure sensor element

Also Published As

Publication number Publication date
JP2009042073A (en) 2009-02-26

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