JPH0413868B2 - - Google Patents

Info

Publication number
JPH0413868B2
JPH0413868B2 JP61257977A JP25797786A JPH0413868B2 JP H0413868 B2 JPH0413868 B2 JP H0413868B2 JP 61257977 A JP61257977 A JP 61257977A JP 25797786 A JP25797786 A JP 25797786A JP H0413868 B2 JPH0413868 B2 JP H0413868B2
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconductor pressure
diaphragm
wafer
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61257977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63110672A (ja
Inventor
Katsunori Nishiguchi
Ichiro Sogawa
Katsuyoshi Sunago
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP61257977A priority Critical patent/JPS63110672A/ja
Priority to EP87115355A priority patent/EP0265816B1/en
Priority to DE8787115355T priority patent/DE3772514D1/de
Priority to US07/110,863 priority patent/US4825684A/en
Priority to KR1019870011773A priority patent/KR910001249B1/ko
Priority to AU80186/87A priority patent/AU595945B2/en
Priority to CA000550325A priority patent/CA1308933C/en
Publication of JPS63110672A publication Critical patent/JPS63110672A/ja
Publication of JPH0413868B2 publication Critical patent/JPH0413868B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP61257977A 1986-10-28 1986-10-28 半導体圧力センサの測定方法 Granted JPS63110672A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP61257977A JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法
EP87115355A EP0265816B1 (en) 1986-10-28 1987-10-20 Method of measuring semiconductor pressure sensor
DE8787115355T DE3772514D1 (de) 1986-10-28 1987-10-20 Messverfahren fuer einen halbleiter-druckmessfuehler.
US07/110,863 US4825684A (en) 1986-10-28 1987-10-21 Method of testing semiconductor pressure sensor
KR1019870011773A KR910001249B1 (ko) 1986-10-28 1987-10-23 반도체압력센서의 측정방법
AU80186/87A AU595945B2 (en) 1986-10-28 1987-10-27 Method of testing semiconductor pressure sensor
CA000550325A CA1308933C (en) 1986-10-28 1987-10-27 Method of measuring semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61257977A JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法

Publications (2)

Publication Number Publication Date
JPS63110672A JPS63110672A (ja) 1988-05-16
JPH0413868B2 true JPH0413868B2 (en, 2012) 1992-03-11

Family

ID=17313833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61257977A Granted JPS63110672A (ja) 1986-10-28 1986-10-28 半導体圧力センサの測定方法

Country Status (1)

Country Link
JP (1) JPS63110672A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083534A (en) * 1989-04-05 1992-01-28 Mitsubishi Jukogyo Kabushiki Kaisha Spiral spring type starter apparatus for an internal combustion engine
US7525287B2 (en) 2004-10-08 2009-04-28 Husqvarna Zenoah Co., Ltd. Battery pack for driving electric motor of compact engine starting device, engine starting device driven by the battery pack, and manual working machine having the engine starting device
CN101375050A (zh) 2006-02-01 2009-02-25 富世华智诺株式会社 用于具有小型电动机的手工工作机器的发动机起动装置和安装有这种发动机起动装置的手工工作机器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155742A (en) * 1981-03-23 1982-09-25 Hitachi Ltd Wafer prober
JPS61149316A (ja) * 1984-12-24 1986-07-08 株式会社豊田中央研究所 圧力センサウエハの切断方法

Also Published As

Publication number Publication date
JPS63110672A (ja) 1988-05-16

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