JPH04134624A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH04134624A JPH04134624A JP25577590A JP25577590A JPH04134624A JP H04134624 A JPH04134624 A JP H04134624A JP 25577590 A JP25577590 A JP 25577590A JP 25577590 A JP25577590 A JP 25577590A JP H04134624 A JPH04134624 A JP H04134624A
- Authority
- JP
- Japan
- Prior art keywords
- resin layer
- thin film
- film
- hard carbon
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 36
- 239000010408 film Substances 0.000 claims abstract description 40
- 239000011347 resin Substances 0.000 claims abstract description 30
- 229920005989 resin Polymers 0.000 claims abstract description 30
- 239000010409 thin film Substances 0.000 claims abstract description 26
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 24
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 23
- 239000000314 lubricant Substances 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 21
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 8
- 230000006866 deterioration Effects 0.000 abstract description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000004215 Carbon black (E152) Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 229930195733 hydrocarbon Natural products 0.000 description 7
- 150000002430 hydrocarbons Chemical class 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 235000014113 dietary fatty acids Nutrition 0.000 description 4
- 239000000194 fatty acid Substances 0.000 description 4
- 229930195729 fatty acid Natural products 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 238000007611 bar coating method Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 125000004185 ester group Chemical group 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 125000005462 imide group Chemical group 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920001909 styrene-acrylic polymer Polymers 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録媒体に適する強磁性金属薄膜
型磁気記録媒体に関するものであり、詳しくは、磁気テ
ープ、磁気ディスクなど強磁性金属薄膜を磁気記録層と
する磁気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a ferromagnetic metal thin film type magnetic recording medium suitable for high-density magnetic recording media. The present invention relates to a magnetic recording medium having a magnetic recording layer.
従来の技術
磁気記録分野においては、近年デジタル化、小型化、長
時間化などの高性能化が進んでいるが、それに伴って、
高密度磁気記録媒体の要求が高まり、磁気記録層を強磁
性金属薄膜で構成した磁気記録媒体が、短波長記録に極
めて有利なことから、盛んに検討されている。Conventional technology In the field of magnetic recording, high performance such as digitization, miniaturization, and longer recording times has progressed in recent years.
With the increasing demand for high-density magnetic recording media, magnetic recording media in which the magnetic recording layer is made of a ferromagnetic metal thin film are being actively studied because they are extremely advantageous for short wavelength recording.
しかしながら、強磁性金属薄膜型の磁気記録媒体では、
磁性層表面は極めて良好な表面性を持つために、磁気信
号の記録再生過程における、磁気ヘッドとの高速摺動下
での摩擦、摩耗により、耐久性、走行性、耐蝕性などは
大きな影響を受けており、その改善は大きな課題となっ
ている。However, in ferromagnetic metal thin film magnetic recording media,
Because the surface of the magnetic layer has extremely good surface properties, durability, runnability, and corrosion resistance are greatly affected by friction and wear caused by high-speed sliding with the magnetic head during the recording and reproducing process of magnetic signals. Improvement is a major challenge.
そこで、磁性層表面にトップコート層を設け、上記耐久
性や走行性、耐蝕性の改善が試みられている。Therefore, attempts have been made to provide a top coat layer on the surface of the magnetic layer to improve the durability, runnability, and corrosion resistance.
例えば、脂肪酸金属塩の蒸着膜の形成(特開昭54−1
13303号公報)、イミド基を有する高分子のスパッ
タ膜の形成(特開昭57−116771号公報)、高分
子をターゲットとしたスパッタ膜、カーボンやBN、M
O82,S io2などをスパッタや蒸着により薄膜化
、ダイヤモンド状硬質炭素膜の形成(日本応用磁気学会
、第46回研究会資料)、脂肪酸、脂肪酸アミドなどの
潤滑剤層の形成(例えば、特開昭56−30609号公
報)など、数多く試みられている。For example, formation of vapor-deposited film of fatty acid metal salt (JP-A-54-1
13303), formation of sputtered films of polymers having imide groups (JP-A-57-116771), sputtered films targeting polymers, carbon, BN, M
Formation of thin films of O82, Sio2, etc. by sputtering or vapor deposition, formation of diamond-like hard carbon films (Japan Society of Applied Magnetics, 46th research meeting materials), formation of lubricant layers of fatty acids, fatty acid amides, etc. (for example, Many attempts have been made, including Publication No. 56-30609).
しかしながら、上記した例では、耐久性、走行性、耐蝕
性などを十分には、満足することができないため、積層
化して、それぞれの役割を分担する考え方が増加してき
ている。However, in the above-mentioned example, durability, runnability, corrosion resistance, etc. cannot be fully satisfied, so the idea of laminating layers and sharing the roles of each layer is increasing.
脂肪酸金属塩の吸着層上にフルオロカーボン系の潤滑層
の形成(特開昭6i120331号公報)、硬質カーボ
ン層の上に含フツ素潤滑油を配したもの(特開昭61−
126627号公報)、5i−N−○系薄膜上に潤滑層
を形成したちのく特開昭61−131231号公報)な
どがある。Formation of a fluorocarbon-based lubricating layer on an adsorption layer of fatty acid metal salts (Japanese Patent Application Laid-open No. 6-120331), and formation of a fluorine-containing lubricating oil on a hard carbon layer (Japanese Patent Application Laid-Open No. 61-1989)
126627 (Japanese Patent Application Laid-open No. 126627), and Chinoku JP-A-61-131231 (Japanese Unexamined Patent Publication No. 131231/1981) in which a lubricating layer is formed on a 5i-N-○ thin film.
発明が解決しようとする課題
しかしながら、磁気記録媒体の耐久性に関する要求は厳
しく、上記した構成では、十分な特性であるとはいえず
、−層の改善が望まれている。Problems to be Solved by the Invention However, there are strict requirements regarding the durability of magnetic recording media, and the above-described configuration cannot be said to have sufficient characteristics, and improvements in the -layer are desired.
本発明は、上記事情を鑑みてなされたもので、耐久性お
よび耐蝕性に優れ、極めて高い信頼性の磁気記録媒体を
提供するものである。The present invention has been made in view of the above circumstances, and provides a magnetic recording medium that is excellent in durability and corrosion resistance, and has extremely high reliability.
課題を解決するための手段
上記、問題へを解決するために、本発明の磁気記録媒体
は非磁性支持体上に強磁性金属薄膜を形成し、前記強磁
性金属薄膜上に芳香族炭化水素基と極性基を含む樹脂層
を形成し、さらに前記樹脂層上に、硬質炭素膜、潤滑剤
層を順次形成したものである。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention is provided by forming a ferromagnetic metal thin film on a non-magnetic support, and forming an aromatic hydrocarbon group on the ferromagnetic metal thin film. A resin layer containing a polar group is formed, and a hard carbon film and a lubricant layer are sequentially formed on the resin layer.
作用
本発明の磁気記録媒体は、上記した構成により、硬質炭
素膜形成時の強磁性金属薄膜表面へのダメージを樹脂層
を形成することによって防ぐものであり、樹脂層の芳香
族炭化水素基はダメージの防止効果を向上させる働きを
持つものであり、極性基は均一な樹脂層の形成効果を向
上させるものであり、両者の効果によって、強磁性金属
薄膜表面の表面酸化層の変質や減少を防止することがで
き、表面酸化層と硬質炭素膜とが二重の保護膜となり、
走行耐久性、耐蝕性を著しく向上させることができるも
のである。Effect The magnetic recording medium of the present invention has the above-described structure, and prevents damage to the surface of a ferromagnetic metal thin film during the formation of a hard carbon film by forming a resin layer, and the aromatic hydrocarbon group of the resin layer is It has the function of improving the damage prevention effect, and the polar group improves the effect of forming a uniform resin layer. Both effects prevent deterioration and reduction of the surface oxidation layer on the surface of the ferromagnetic metal thin film. The surface oxidation layer and hard carbon film act as a double protective film.
It can significantly improve running durability and corrosion resistance.
実施例
第1図は、磁気テープにおける本発明の実施例の基本構
成を示す断面図です。Embodiment FIG. 1 is a sectional view showing the basic configuration of an embodiment of the present invention in a magnetic tape.
図において、1は基板、2は強磁性金属薄膜、3は芳香
族炭化水素基と極性基を含む樹脂層、4は硬質炭素膜、
5は潤滑剤層である。In the figure, 1 is a substrate, 2 is a ferromagnetic metal thin film, 3 is a resin layer containing an aromatic hydrocarbon group and a polar group, 4 is a hard carbon film,
5 is a lubricant layer.
本発明に用いられる基板は、ポリエチレンテレフタレー
トフィルムがよ(用いられるが、他のポリエステル類、
ポリプロピレンなとのポリオレフィン類、セルロース、
アセテートなどのセルロース誘導体、ポリアミド、ポリ
イミドなどのプラスチックフィルムであってもよいし、
非磁性金属基板であってもよい。The substrate used in the present invention is preferably a polyethylene terephthalate film (although other polyesters,
Polyolefins such as polypropylene, cellulose,
It may be a cellulose derivative such as acetate, a plastic film such as polyamide, polyimide, etc.
A non-magnetic metal substrate may also be used.
また、強磁性金属薄膜としては、電子ビーム蒸着法、ス
パッタリング法、イオンブレーティング法、無電解メツ
キ法で形成した鉄、コバルト。In addition, the ferromagnetic metal thin film is made of iron or cobalt formed by electron beam evaporation, sputtering, ion blating, or electroless plating.
ニッケルまたはそれらを主成分とする合金あるいは、そ
れらの部分酸化膜9部分窒化膜などを用いることができ
る。Nickel or an alloy containing nickel as a main component, or a partially oxidized film or partially nitride film of these may be used.
本発明の芳香族炭化水素基と極性基を含む樹脂としては
、(1)極性基としてエステル基、カルボン酸基、水酸
基を含む芳香族ポリエステル樹脂、例えば、東洋紡(8
)バイロンシリーズ、(2)極性基としてエステル基ま
たはカルボン酸基を含む、スチレン・アクリル共重合樹
脂、(3)エポキシ樹脂、(4)フェノール樹脂などが
ある。As the resin containing an aromatic hydrocarbon group and a polar group of the present invention, (1) an aromatic polyester resin containing an ester group, a carboxylic acid group, or a hydroxyl group as a polar group, such as Toyobo (8)
) Vylon series, (2) styrene-acrylic copolymer resin containing an ester group or carboxylic acid group as a polar group, (3) epoxy resin, (4) phenol resin, etc.
強磁性金属薄膜上に上記組成の樹脂層を形成するには、
上記樹脂を含む溶液をバーコーティング法、グラビアコ
ーティング法などの通常の方法を用いることができる。To form a resin layer with the above composition on a ferromagnetic metal thin film,
Conventional methods such as a bar coating method and a gravure coating method can be used to prepare a solution containing the resin.
樹脂層の膜厚としては、十分な保護作用を示す最小の膜
厚が適当であり、実験的に決めることができる。それよ
りも大きい場合には、十分な保護作用を示すが、その厚
みによるスペーシングロスにより、薄膜型記録媒体の特
長である短波長記録における高出力特性が損なわれ、実
用性の低いものとなる。The appropriate thickness of the resin layer is the minimum thickness that provides sufficient protection, and can be determined experimentally. If it is larger than that, it will provide sufficient protection, but due to the spacing loss due to its thickness, the high output characteristics in short wavelength recording, which is a feature of thin film recording media, will be impaired, making it less practical. .
本発明の硬質炭素膜の形成は、炭化水素ガスのプラズマ
か、カーボンまたはグラファイトを不活性ガスまたは不
活性ガスと炭化水素ガスの雰囲気中でスパッタによって
、行うことができる。The hard carbon film of the present invention can be formed by plasma of a hydrocarbon gas or by sputtering carbon or graphite in an atmosphere of an inert gas or an inert gas and a hydrocarbon gas.
炭化水素カスのプラズマによって形成する場合には、真
空容器中に炭化水素ガス、または炭化水素ガスと不活性
ガスの混合ガスを導入し、0.001〜1Torrの圧
力を保持した状態で、真空容器内部に放電させて、炭化
水素のプラズマを発生させ、基体表面に炭素膜を形成す
る。放電形式としては、外部電極方式、内部電極方式の
何れの方式でもよく、放電周波数については、実験的に
決めることができる。また、基体側の電極にO〜−3K
Vの電圧を印加することによって、膜の硬度の増大およ
び密着性を向上させることができる。In the case of plasma formation using hydrocarbon gas, a hydrocarbon gas or a mixed gas of a hydrocarbon gas and an inert gas is introduced into a vacuum container, and the pressure is maintained at 0.001 to 1 Torr. A discharge is caused inside to generate hydrocarbon plasma and form a carbon film on the surface of the substrate. The discharge type may be either an external electrode type or an internal electrode type, and the discharge frequency can be determined experimentally. Also, the electrode on the substrate side should be O~-3K.
By applying a voltage of V, the hardness and adhesion of the film can be increased.
炭化水素としては、メタン、エタン、プロパン、ブタン
などを用いることができる。As the hydrocarbon, methane, ethane, propane, butane, etc. can be used.
また、硬質膜を形成するには、できるだけ放電エネルギ
ーを大きくすることが好ましい。また、基体の温度もで
きるだけ高くすることが望ましい。Further, in order to form a hard film, it is preferable to increase the discharge energy as much as possible. Furthermore, it is desirable to make the temperature of the substrate as high as possible.
一方、スパッタの方法には、直流スパッタ、交流スパッ
タ、高周波スパッタ、マグネトロンスパッタ、イオンヒ
ームスバッタなどがあるが、何れでもよい。硬質の膜を
形成するには、圧力は0、○I To r r以下が好
ましく、エネルギー密度は高くするのかよく、例えば、
高周波マグネトロンスパッタではターゲット面積当りI
W / c!以上が好ましく、また基体を保持する側
の電極にO〜−3K Vの電圧を印加しつつ、スパッタ
することによって、プラズマと同様に膜の硬度の増大、
および密着性を向上させることができる。On the other hand, sputtering methods include direct current sputtering, alternating current sputtering, high frequency sputtering, magnetron sputtering, ion beam sputtering, etc., and any of them may be used. In order to form a hard film, the pressure is preferably 0 or less, and the energy density is preferably high, for example,
In high frequency magnetron sputtering, I per target area
W/c! The above is preferable, and by sputtering while applying a voltage of O to -3K V to the electrode on the side that holds the substrate, the hardness of the film can be increased like plasma.
And adhesion can be improved.
硬質炭素膜の膜厚としては、50〜300Aが適当であ
り、50Aよりも小さい場合には、均一な膜が形成する
ことができず、強度の低い硬質炭素膜が形成し、耐久性
が低くなる。300人よりも大きい場合には、その厚み
によるスペーシングロスにより、薄膜型記録媒体の特長
である短波長記録における高出力特性が損なわれ、実用
性の低いものとなる。The appropriate thickness of the hard carbon film is 50 to 300A; if it is smaller than 50A, a uniform film cannot be formed, a hard carbon film with low strength is formed, and the durability is low. Become. If the number of recording media exceeds 300, the spacing loss due to the thickness will impair the high output characteristics in short wavelength recording, which is a feature of thin-film recording media, and the recording medium will be less practical.
本発明に用いる潤滑剤としては、含フツ素カルボン酸ま
たはそのエステルおよびパーフルオロポリエーテル類を
単独あるいは混合して用いることができる。As the lubricant used in the present invention, fluorine-containing carboxylic acids or esters thereof and perfluoropolyethers can be used alone or in combination.
これら潤滑剤を硬質炭素膜上に形成する方法としては、
上記潤滑剤を溶解した溶液を、通常のコーティング法に
よるか、もしくは、噴霧するか、あるいは、この溶液中
に浸せき、乾燥することによって得られる。The method for forming these lubricants on a hard carbon film is as follows:
The lubricant can be obtained by a conventional coating method, by spraying, or by dipping into the solution and drying.
また、塗工量としては、0.1〜20■7・′iが好ま
しい。塗工量があまり少なすぎると、摩擦係数の低下、
耐久性、耐摩耗性の向上の効果が現れず、あまり多過ぎ
ると、摺動部材と磁気記録媒体との間ではりつき現象が
起こり、却で走行性が悪(なる。Moreover, the coating amount is preferably 0.1 to 20.7·'i. If the coating amount is too small, the friction coefficient will decrease,
If the amount is too large, a sticking phenomenon will occur between the sliding member and the magnetic recording medium, and the running performance will deteriorate.
以下に本発明を更に具体的に、実施例と比較例とを対比
しながら説明する。The present invention will be described in more detail below while comparing Examples and Comparative Examples.
実施例1
平滑な表面をもつ厚み10μmのポリエチレンテレフタ
レートフィルム上に、酸素分圧5 X 10−5Tor
rの条件で酸素を導入しながら、電子ビーム法で斜め蒸
着し、膜厚:1500AのC。Example 1 Oxygen partial pressure 5 x 10-5 Tor was applied on a 10 μm thick polyethylene terephthalate film with a smooth surface.
C was obliquely evaporated using an electron beam method while introducing oxygen under the conditions of r to a film thickness of 1500A.
Ni−0膜を形成した。次いで、東洋紡■バイロン20
0のメチルエチルケトン溶液をバーコーティング法によ
って塗布し樹脂層を形成した。更にその上に硬質炭素膜
をプラズマ法にて形成した。即ち、CH4/ A rの
混合ガスを0.03Torr、直流電圧750Vを印加
し、電極をプラス、強磁性金属薄膜側をマイナスとして
プラズマ重合を行い、処理速度を調整して、硬質炭素膜
の膜厚を制御した。A Ni-0 film was formed. Next, Toyobo Byron 20
0 methyl ethyl ketone solution was applied by a bar coating method to form a resin layer. Further, a hard carbon film was formed thereon by a plasma method. That is, by applying a CH4/Ar mixed gas of 0.03 Torr and a DC voltage of 750 V, plasma polymerization was performed with the electrode set as positive and the side of the ferromagnetic metal thin film as negative, and the processing speed was adjusted to form a hard carbon film. The thickness was controlled.
次いで、硬質炭素膜の上にバーコーティング法によって
、C7FI5CH2O0C(CH2) 2COOHで表
される含フツ素カルボン酸部分エステルを6■/−の塗
工量に塗工し、81m幅に裁断し、磁気テープ1,2を
作成した。Next, a fluorine-containing carboxylic acid partial ester represented by C7FI5CH2O0C(CH2)2COOH was coated on the hard carbon film by a bar coating method to a coating amount of 6/-, and the film was cut into a width of 81 m and magnetically coated. Tapes 1 and 2 were created.
実施例2
樹脂として、スチレン・アクリル酸の共重合体を塗工し
た以外は、実施例1と同様にして、磁気テープ3.4を
作成した。樹脂はラジカル重合法によりモノマー比3;
1(スチレン:アクリル酸)で溶液重合を行い、分子量
13万を合成した。Example 2 Magnetic tape 3.4 was produced in the same manner as in Example 1, except that a styrene-acrylic acid copolymer was used as the resin. The resin was produced using a radical polymerization method with a monomer ratio of 3;
1 (styrene:acrylic acid) to synthesize a polymer with a molecular weight of 130,000.
実施例3
樹脂として、ビスフェノールA型のエポキシ樹脂を塗工
した以外は、実施例1と同様にして、磁気テープ5,6
を作成した。Example 3 Magnetic tapes 5 and 6 were prepared in the same manner as in Example 1 except that bisphenol A type epoxy resin was applied as the resin.
It was created.
実施例4
樹脂として、フェノール樹脂を塗工した以外は、実施例
1と同様にして、磁気テープ7.8を作成した。Example 4 Magnetic tape 7.8 was produced in the same manner as in Example 1 except that phenol resin was applied as the resin.
比較例1
樹脂層を形成しない以外は、実施例1と同様にして、磁
気テープ9を作成した。Comparative Example 1 A magnetic tape 9 was produced in the same manner as in Example 1 except that the resin layer was not formed.
比較例2
樹脂層および硬質炭素膜を設けない以外は、実施例1と
同様にして、磁気テープ10を作成した。Comparative Example 2 A magnetic tape 10 was produced in the same manner as in Example 1 except that the resin layer and hard carbon film were not provided.
以上より得られた磁気テープを市販の8 wm V T
Rと同等の機能を有する試験機にて、5℃、80%R
Hの環境下で、スチル耐久性試験を行い、再生出力が、
初期より6dB低下するまでの時間を測定した。また、
耐蝕性については、40℃、90%RHの環境下に保存
し、光学顕微鏡100倍の倍率で観察し、錆の発生する
まで日数で評価した。The magnetic tape obtained above was used as a commercially available 8 wm VT.
5℃, 80% R in a testing machine with the same function as R.
A still durability test was conducted under the H environment, and the playback output was
The time required for the temperature to drop by 6 dB from the initial level was measured. Also,
Corrosion resistance was evaluated by storing in an environment of 40° C. and 90% RH, observing with an optical microscope at a magnification of 100 times, and determining the number of days until rust appeared.
その結果を第1表に示す。The results are shown in Table 1.
(以 下 余 白)
第1表かられかるように、本発明の各実施例の磁気テー
プ1〜8において、スチル耐久性試験においては60分
後においても出力低下は6dB以内であり、また、高温
多湿下の保存においても8週間後も錆の発生は見られず
、スチル耐久性、および耐蝕性は、極めて良好であった
。(Margins below) As can be seen from Table 1, in the magnetic tapes 1 to 8 of each example of the present invention, the output drop was within 6 dB even after 60 minutes in the still durability test, and Even after 8 weeks of storage under high temperature and high humidity, no rust was observed, and the still durability and corrosion resistance were extremely good.
これに対して、樹脂層を形成せずに硬質炭素膜を形成し
た比較例1の磁気テープ9は、スチル耐久性試験におい
ては、30分後には出力低下は6dB以上となり、また
、高温多湿下の保存においても、5週間後には、錆の発
生が見られ、スチル耐久性および耐蝕性は低く、実用信
頼性の低いものであった。また、樹脂層および硬質炭素
膜を設けなかった比較例2の磁気テープ10はスチル耐
久性試験においては、10分後には6dB以上の出力低
下が起こり、高温多湿下の保存においては2週間後には
、錆の発生が見られ、スチル耐久性および耐蝕性は低く
、極めて実用信頼性の低いものであった。On the other hand, in the still durability test, the magnetic tape 9 of Comparative Example 1, in which a hard carbon film was formed without forming a resin layer, showed a decrease in output of 6 dB or more after 30 minutes, and was Even in storage, rust was observed after 5 weeks, the still durability and corrosion resistance were low, and the practical reliability was low. In addition, in the still durability test, the magnetic tape 10 of Comparative Example 2, which did not have a resin layer or hard carbon film, showed a decrease in output of 6 dB or more after 10 minutes, and a decrease in output of 6 dB or more after 2 weeks when stored under high temperature and humidity. , rust was observed, the still durability and corrosion resistance were low, and the practical reliability was extremely low.
発明の効果
以上の説明からもわかるように、本発明によって、強磁
性金属薄膜上に芳香族炭化水素基と極性基を含む樹脂層
を形成し、さらに前記樹脂層上に、硬質炭素膜、潤滑剤
層を順次形成した強磁性金属薄膜上に硬質炭素膜を形成
することによって、耐久性及び耐蝕性を飛躍的に向上す
ることができ、強磁性金属薄膜型磁気記録媒体の実用信
頼性を飛躍的に向上することができた。Effects of the Invention As can be seen from the above explanation, according to the present invention, a resin layer containing an aromatic hydrocarbon group and a polar group is formed on a ferromagnetic metal thin film, and a hard carbon film and a lubricating layer are further formed on the resin layer. By forming a hard carbon film on a ferromagnetic metal thin film on which a ferromagnetic metal layer is sequentially formed, durability and corrosion resistance can be dramatically improved, and the practical reliability of ferromagnetic metal thin film magnetic recording media can be dramatically improved. I was able to improve my performance.
第1図は本発明の一実施例として磁気テープの場合の拡
大断面図である。
1・・・・・・基板、2・・・・・・強磁性金属薄膜、
3・・・・・・芳香族炭化水素基と極性基を含む樹脂層
、4・・・・・・硬質炭素膜、5・・・・・・潤滑剤層
。FIG. 1 is an enlarged sectional view of a magnetic tape as an embodiment of the present invention. 1...Substrate, 2...Ferromagnetic metal thin film,
3...Resin layer containing an aromatic hydrocarbon group and a polar group, 4...Hard carbon film, 5...Lubricant layer.
Claims (1)
金属薄膜上に芳香族炭化水素基と極性基を含む樹脂層を
形成し、さらに前記樹脂層上に、硬質炭素膜、潤滑剤層
を順次形成したことを特徴とする磁気記録媒体。A ferromagnetic metal thin film is formed on a non-magnetic support, a resin layer containing an aromatic hydrocarbon group and a polar group is formed on the ferromagnetic metal thin film, and a hard carbon film and a lubricant are further formed on the resin layer. A magnetic recording medium characterized by sequentially forming layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25577590A JPH04134624A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25577590A JPH04134624A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04134624A true JPH04134624A (en) | 1992-05-08 |
Family
ID=17283456
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25577590A Pending JPH04134624A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04134624A (en) |
-
1990
- 1990-09-25 JP JP25577590A patent/JPH04134624A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6040052A (en) | Magnetic recording medium | |
JP2851898B2 (en) | Lubricants and magnetic recording media | |
JP2597684B2 (en) | Magnetic recording media | |
JPH04134624A (en) | Magnetic recording medium | |
US5741593A (en) | Magnetic recording medium | |
JPS61208620A (en) | Magnetic disk | |
JPH03296919A (en) | Magnetic recording medium | |
JPH0411322A (en) | Magnetic recording medium | |
JPH02126418A (en) | Magnetic recording medium | |
JP2000017281A (en) | Lubricant composition, and magnetic recording medium and its production | |
JPH02179917A (en) | Magnetic recording medium | |
JPH0644558A (en) | Magnetic recording medium | |
JPH0312817A (en) | Magnetic recording medium | |
JPH0487019A (en) | Magnetic tape | |
JPS61246915A (en) | Magnetic recording medium | |
JPH04134625A (en) | Magnetic recording medium | |
JPH05282662A (en) | Magnetic recording medium | |
JPS63183607A (en) | Magnetic recording medium | |
JPH0278016A (en) | Magnetic recording medium | |
JPS63113926A (en) | Magnetic recording medium | |
JPS63263626A (en) | Magnetic disk | |
JPS62125524A (en) | Magnetic recording medium | |
JPS62192919A (en) | Production of magnetic recording medium | |
JPS6378330A (en) | Magnetic recording medium | |
JPH04147427A (en) | Magnetic recording medium |