JPH04134625A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH04134625A JPH04134625A JP25577890A JP25577890A JPH04134625A JP H04134625 A JPH04134625 A JP H04134625A JP 25577890 A JP25577890 A JP 25577890A JP 25577890 A JP25577890 A JP 25577890A JP H04134625 A JPH04134625 A JP H04134625A
- Authority
- JP
- Japan
- Prior art keywords
- resin layer
- film
- thin film
- layer
- hard carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 32
- 239000010408 film Substances 0.000 claims abstract description 38
- 229920005989 resin Polymers 0.000 claims abstract description 27
- 239000011347 resin Substances 0.000 claims abstract description 27
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 17
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 abstract description 13
- 238000005260 corrosion Methods 0.000 abstract description 13
- 230000001050 lubricating effect Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 239000000314 lubricant Substances 0.000 description 5
- 239000010702 perfluoropolyether Substances 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- DVMSVWIURPPRBC-UHFFFAOYSA-N 2,3,3-trifluoroprop-2-enoic acid Chemical compound OC(=O)C(F)=C(F)F DVMSVWIURPPRBC-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- LVJZCPNIJXVIAT-UHFFFAOYSA-N 1-ethenyl-2,3,4,5,6-pentafluorobenzene Chemical compound FC1=C(F)C(F)=C(C=C)C(F)=C1F LVJZCPNIJXVIAT-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229920002126 Acrylic acid copolymer Polymers 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910020517 Co—Ti Inorganic materials 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- NHTMVDHEPJAVLT-UHFFFAOYSA-N Isooctane Chemical compound CC(C)CC(C)(C)C NHTMVDHEPJAVLT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- JVSWJIKNEAIKJW-UHFFFAOYSA-N dimethyl-hexane Natural products CCCCCC(C)C JVSWJIKNEAIKJW-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、垂直磁気記録をはじめとする高密度磁気記録
に適した強磁性金属薄膜を磁気記録層とする磁気記録媒
体に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording such as perpendicular magnetic recording.
従来の技術
磁気記録分野においては、近年デジタル化、小型化、長
時間化などの高性能化が進んでいるが、それに伴って、
高密度磁気記録媒体の要求が高まり、磁気記録層が強磁
性金属薄膜で構成した磁気記録媒体が、短波長記録にき
わめて有利なことがら、盛んに検討されている。Conventional technology In the field of magnetic recording, high performance such as digitization, miniaturization, and longer recording times has progressed in recent years.
With the increasing demand for high-density magnetic recording media, magnetic recording media in which the magnetic recording layer is composed of a ferromagnetic metal thin film are being actively studied because they are extremely advantageous for short wavelength recording.
しかしながら、強磁性金属薄膜型の磁気記録媒体では、
磁性層表面は極めて良好な表面性を持つために、磁気信
号の記録再生過程における、磁気ヘッドとの高速摺動下
での摩擦、摩耗により、耐久性、走行性、耐蝕性などは
大きな影響を受けており、その改善は大きな課題となっ
ている。そこで様々な方法により、耐久性、走行性、耐
蝕性の向上が続けられてきた。たとえば、第1に、強磁
性金属薄膜上にカルボン酸系、リン系、パーフルオロポ
リエーテル等の潤滑層を設ける、第2に、同様に非磁性
金属層、プラズマ重合膜、5i02膜等の保護膜を設け
る、第3に、同様に微細な突起を均一に設ける等である
[特開昭61−224128号公報、特開昭61−13
9919号公報、特開昭61−5426号公報等参照〕
。However, in ferromagnetic metal thin film magnetic recording media,
Because the surface of the magnetic layer has extremely good surface properties, durability, runnability, and corrosion resistance are greatly affected by friction and wear caused by high-speed sliding with the magnetic head during the recording and reproducing process of magnetic signals. Improvement is a major challenge. Therefore, various methods have been used to improve durability, runnability, and corrosion resistance. For example, firstly, a lubricating layer of carboxylic acid, phosphorus, perfluoropolyether, etc. is provided on a ferromagnetic metal thin film, and secondly, a non-magnetic metal layer, plasma polymerized film, 5i02 film, etc. is similarly protected. The third method is to uniformly provide fine protrusions [JP-A-61-224128, JP-A-61-13].
9919, JP-A-61-5426, etc.]
.
更に、最近では、硬質炭素膜を保護膜として用いること
も検討されている。Furthermore, recently, consideration has been given to using a hard carbon film as a protective film.
発明が解決しようとする課題
しかしながら、上記した方法では、耐久性、耐触性など
を十分には、満足することができないのが現状であり、
デジタル記録あるいは高密度記録においては、今まで以
上に厳しい要求がされており、より一層の改善が望まれ
ている。Problems to be Solved by the Invention However, at present, the above-mentioned method cannot fully satisfy durability, contact resistance, etc.
Digital recording or high-density recording has stricter requirements than ever before, and further improvements are desired.
本発明は、上記した事情に鑑みなされたもので、耐久性
、耐蝕性に優れ、極めて高い信頼性の磁気記録媒体を提
供するものである。The present invention was devised in view of the above-mentioned circumstances, and provides a magnetic recording medium with excellent durability, corrosion resistance, and extremely high reliability.
課題を解決するための手段
上記した課題を解決するために、本発明の磁気記録媒体
は非磁性基板上に強磁性金属薄膜を形成し、前記強磁性
金属薄膜上にフッ素基と極性基を含む樹脂層を形成し、
さらに前記樹脂層上に、硬質炭素膜を形成したものであ
る。Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention is provided by forming a ferromagnetic metal thin film on a non-magnetic substrate, and including a fluorine group and a polar group on the ferromagnetic metal thin film. Form a resin layer,
Furthermore, a hard carbon film is formed on the resin layer.
作用
本発明の磁気記録媒体は、上記した構成により、硬質炭
素膜形成時の強磁性金属薄膜表面へのダメージを樹脂層
を形成することによって防ぐものであり、樹脂層のフッ
素基はダメージの防止効果を向上させる働きと耐蝕性を
向上させるものであり、極性基は均一な樹脂層を形成さ
せるものである。両者の相乗効果により、強磁性金属薄
膜表面の表面酸化層の変質を防止することができ、表面
酸化層と含フツ素樹脂層と硬質炭素膜とが三重の保護膜
となり、耐久性、耐蝕性を飛躍的に向上させるものであ
る。Effect The magnetic recording medium of the present invention has the above-described structure, and prevents damage to the surface of a ferromagnetic metal thin film during the formation of a hard carbon film by forming a resin layer, and the fluorine groups in the resin layer prevent damage. It works to improve the effect and corrosion resistance, and the polar group forms a uniform resin layer. The synergistic effect of the two can prevent the surface oxidation layer on the surface of the ferromagnetic metal thin film from deteriorating, and the surface oxidation layer, fluorine-containing resin layer, and hard carbon film form a triple protective film, resulting in durability and corrosion resistance. This dramatically improves the
実施例
第1図は、磁気テープにおける本発明の一実施例の基本
構成を示す拡大断面図である。Embodiment FIG. 1 is an enlarged sectional view showing the basic structure of an embodiment of the present invention in a magnetic tape.
図において、1は基板、2は強磁性金属薄膜層、3はフ
ッ素基と極性基を含む樹脂層、4は硬質炭素膜、5は潤
滑層である。In the figure, 1 is a substrate, 2 is a ferromagnetic metal thin film layer, 3 is a resin layer containing a fluorine group and a polar group, 4 is a hard carbon film, and 5 is a lubricating layer.
本発明に用いられる基板は、ポリエチレンテレフタレー
ト、ポリアミド、ポリエーテルケトン。The substrate used in the present invention is polyethylene terephthalate, polyamide, or polyetherketone.
ポリエーテルサルフオン、ポリエチレンナフタレート、
ポリイミド、ポリフェニレンサルファイド等の高分子フ
ィルムであってもよいし、非磁性金属基板であってもよ
い。polyether sulfone, polyethylene naphthalate,
It may be a polymer film such as polyimide or polyphenylene sulfide, or it may be a nonmagnetic metal substrate.
また、強磁性金属薄膜としては、Co−0,C。Further, as the ferromagnetic metal thin film, Co-0, C is used.
Os、Co−Ti、Co−Cr、Co−Mo。Os, Co-Ti, Co-Cr, Co-Mo.
Co−Ru、Co−Ni、Co−N1−P、C。Co-Ru, Co-Ni, Co-N1-P, C.
Ni−0,Co−Cr−Nb、Co−Cr−Nd等を電
子ビーム蒸着法、高周波スパッタリング法、イオンブレ
ーティング法等で形成したものである。Ni-0, Co-Cr-Nb, Co-Cr-Nd, etc. are formed by electron beam evaporation, high frequency sputtering, ion blating, or the like.
また、フッ素基と極性基を含む樹脂として、例えばルミ
フロン(アサヒガラス(資)製)、ペンタフルオロスチ
レンアクリル酸・共重合物、パーフルオロアクリル酸重
合体などがある。Examples of resins containing fluorine groups and polar groups include Lumiflon (manufactured by Asahi Glass Co., Ltd.), pentafluorostyrene acrylic acid copolymer, and perfluoroacrylic acid polymer.
上記樹脂層を形成するには、上記樹脂を含む溶液をグラ
ビアコーティング法、バーコーティング法など周知の方
法を用いることができる。In order to form the resin layer, a well-known method such as a gravure coating method or a bar coating method can be used for a solution containing the resin.
樹脂層の膜厚としては、5〜100Aが適当である。膜
厚が5Aよりも小さい場合には、均一な膜が形成するこ
とができず、硬質炭素膜形成時に十分な保護作用が得ら
れず、強磁性金属薄膜表面の酸化層が変質し、耐久性が
劣化する。また、膜厚が100Aよりも大きい場合には
、十分な保護作用が得られるが、その厚みによるスペー
シングロスが大きくなり、高密度磁気記録における高出
力特性が損なわれ、実用的でない。The appropriate thickness of the resin layer is 5 to 100A. If the film thickness is smaller than 5A, a uniform film cannot be formed, sufficient protection cannot be obtained during the formation of the hard carbon film, and the oxide layer on the surface of the ferromagnetic metal thin film is altered, resulting in poor durability. deteriorates. Furthermore, if the film thickness is greater than 100 A, a sufficient protective effect can be obtained, but the spacing loss due to the thickness becomes large, and the high output characteristics in high-density magnetic recording are impaired, making it impractical.
本発明の硬質炭素膜の形成は、メタン、エタン、プロパ
ン、ブタン、ペンタン、イソオクタン、ヘンゼン等の炭
化水素ガス、または炭化水素ガスと不活性ガスの混合ガ
スのプラズマを発生させて形成するか、カーボンまたは
グラファイトをターゲットにし、不活性ガスまたは炭化
水素ガスと不活性ガスの雰囲気中でスパッタリング等で
形成することができる。The hard carbon film of the present invention can be formed by generating plasma of a hydrocarbon gas such as methane, ethane, propane, butane, pentane, isooctane, or Hensen, or a mixed gas of a hydrocarbon gas and an inert gas, or It can be formed by sputtering or the like using carbon or graphite as a target in an atmosphere of an inert gas or a hydrocarbon gas and an inert gas.
また、硬質炭素膜を形成するには、できるだけ放電エネ
ルギーを大きくすることが好ましい。また、基板の温度
もできるだけ高くすることが望ましく、膜の硬度の増大
、および密着性を向上させることができる。Further, in order to form a hard carbon film, it is preferable to increase the discharge energy as much as possible. It is also desirable to make the temperature of the substrate as high as possible, which can increase the hardness of the film and improve its adhesion.
膜厚としては、50〜300Aが適当であり、膜厚が5
0Aよりも小さい場合には、均一な膜が形成することが
できず、耐久性が低くなる。膜厚が300Aよりも大き
い場合には、その厚みによるスペーシングロスにより、
高密度磁気記録における高出力特性が損なわれ、実用性
が低いものとなる。The appropriate film thickness is 50 to 300A, and the film thickness is 50A to 300A.
When it is smaller than 0A, a uniform film cannot be formed and the durability becomes low. If the film thickness is greater than 300A, due to spacing loss due to the thickness,
The high output characteristics in high-density magnetic recording are impaired, making it less practical.
本発明に用いる潤滑剤は、パーフルオロポリエーテル、
含フツ素エステル、含フツ素カルボン酸などを単独ある
いは混合して用いることができる。The lubricant used in the present invention includes perfluoropolyether,
Fluorine-containing esters, fluorine-containing carboxylic acids, and the like can be used alone or in combination.
これら潤滑剤を用いて潤滑層を形成する方法は、上記潤
滑剤を溶解した溶液を、塗工乾燥する方法あるいは、真
空蒸着法などの周知のコーティング法によって得られる
ものである。The lubricant layer can be formed using these lubricants by coating and drying a solution containing the lubricant, or by a well-known coating method such as vacuum deposition.
以下、本発明を更に具体的に、実施例と比較例とを対比
しながら説明する。Hereinafter, the present invention will be explained in more detail while comparing Examples and Comparative Examples.
実施例1
平滑な表面をもつ厚み10μmのポリエチレンテレフタ
レートのフィルム上に、真空度・6×1O−5Torr
の条件で酸素を導入しながら、電子ビーム法で斜め蒸着
し、膜厚、1800AのC。Example 1 A vacuum level of 6 x 1 O-5 Torr was applied on a polyethylene terephthalate film with a thickness of 10 μm and a smooth surface.
C was obliquely deposited using the electron beam method while introducing oxygen under the following conditions, and the film thickness was 1800A.
−N i−0膜を形成した。そのCo−Ni−0膜上に
、アサヒガラス■のルミフロンを溶液塗布法にて、5〜
100Aの樹脂層を形成した。更にその上に50〜30
0人の硬質炭素膜をCH4/Arの混合ガスを0.04
Torr、直流電圧1000Vのプラズマ法にて形成し
た。膜厚は処理速度で制御した。-N i-0 film was formed. On the Co-Ni-0 film, apply Lumiflon from Asahi Glass ■ for 5 to 50 minutes using a solution coating method.
A resin layer of 100A was formed. Furthermore, 50 to 30
0 hard carbon film with CH4/Ar mixed gas of 0.04
It was formed by a plasma method using Torr and a DC voltage of 1000V. The film thickness was controlled by the processing speed.
次いで潤滑層として、パーフルオロポリエーテルを溶液
塗布法にて40A形成し、8mlの幅に裁断し、磁気テ
ープを作成した。Next, a 40A perfluoropolyether was formed as a lubricating layer by a solution coating method, and the film was cut into a width of 8 ml to prepare a magnetic tape.
実施例2
樹脂層として、パーフルオロアクリル酸重合体を溶液塗
布法で形成した以外は、実施例1と同様にして、磁気テ
ープを作成した。Example 2 A magnetic tape was produced in the same manner as in Example 1, except that a perfluoroacrylic acid polymer was formed as the resin layer by a solution coating method.
実施例3
樹脂層として、ペンタフルオロスチレン・アクリル酸・
共重合体を溶液塗布法で形成した以外は、実施例1と同
様にして、磁気テープを作成した。Example 3 As a resin layer, pentafluorostyrene, acrylic acid,
A magnetic tape was produced in the same manner as in Example 1, except that the copolymer was formed by a solution coating method.
比較例1
樹脂層を形成しない以外は、実施例1と同様にして、磁
気テープを作成した。Comparative Example 1 A magnetic tape was produced in the same manner as in Example 1 except that the resin layer was not formed.
比較例2
Co−Ni−0膜上に、スパッタリング法を用いて、5
i02膜を120A形成し、次いで潤滑層としてパーフ
ルオロポリエーテルを溶液塗布法にて40A形成し、8
mの幅に裁断し、磁気テープを作成した。Comparative Example 2 On the Co-Ni-0 film, using a sputtering method, 5
A 120A i02 film was formed, and then a 40A perfluoropolyether was formed as a lubricant layer by solution coating.
The tape was cut into a width of m to create a magnetic tape.
比較例3
樹脂層および硬質炭素膜を形成しない以外は、実施例1
と同様にして、磁気テープを作成した。Comparative Example 3 Example 1 except that the resin layer and hard carbon film were not formed.
A magnetic tape was made in the same way.
このようにして作成された実施例と比較例1゜2.3の
磁気テープを市販の8ミリビデオデツキ(AV−300
,ソニー■製)を用いて評価した。The magnetic tapes of Example 1 and Comparative Example 1.2.3 thus prepared were placed on a commercially available 8 mm video deck (AV-300
, manufactured by Sony ■).
耐久性は、温度35℃、湿度3%の環境下でスチル再生
を行ない、再生出力が初期より6dB低下するまでの時
間を測定し、耐久性とした。また、耐蝕性については、
温度50℃、湿度90%の環境下で保存し、光学顕微鏡
の100倍の倍率で観察し、錆の発生するまでの日数で
表現した。Durability was determined by performing still playback in an environment with a temperature of 35° C. and a humidity of 3%, and measuring the time until the playback output decreased by 6 dB from the initial level. In addition, regarding corrosion resistance,
It was stored in an environment with a temperature of 50°C and a humidity of 90%, and was observed using an optical microscope at a magnification of 100 times, and was expressed as the number of days until rust appeared.
その結果を表1に示す。The results are shown in Table 1.
(以 下 余 白)
表かられかるように、本発明の各実施例において、耐久
性は120分後も出力低下は6dB以内であり、また、
耐蝕性についても、極めて良好であった。これに対して
、比較例1のテープは、耐蝕性が低(、比較例2,3の
テープでは、耐久性も短く、耐蝕性も低く、実用信頼性
の低いものであった。(Margin below) As can be seen from the table, in each example of the present invention, the durability was such that even after 120 minutes, the output drop was within 6 dB, and
Corrosion resistance was also extremely good. On the other hand, the tape of Comparative Example 1 had low corrosion resistance (the tapes of Comparative Examples 2 and 3 had short durability, low corrosion resistance, and low practical reliability.
発明の効果
以上のように、本発明の強磁性金属薄膜上にフッ素基と
極性基を含む樹脂層を形成し、更に硬質炭素膜、潤滑層
を順次形成することによって、耐久性及び耐蝕性を飛躍
的に向上することができ、高密度磁気記録媒体の実用信
頼性を著しく向上することができた。Effects of the Invention As described above, by forming a resin layer containing a fluorine group and a polar group on the ferromagnetic metal thin film of the present invention, and then sequentially forming a hard carbon film and a lubricating layer, durability and corrosion resistance can be improved. This resulted in a dramatic improvement in the practical reliability of high-density magnetic recording media.
第1図は本発明による磁気記録媒体の概略的な拡大断面
図である。
1・・・・・・基板、2・・・・・・強磁性金属薄膜層
、3・・・・・・フッ素基と極性基を含む樹脂層、4・
・・・・・硬質炭素膜、5・・・・・・潤滑層。FIG. 1 is a schematic enlarged sectional view of a magnetic recording medium according to the present invention. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Ferromagnetic metal thin film layer, 3...Resin layer containing a fluorine group and a polar group, 4...
...Hard carbon film, 5...Lubricating layer.
Claims (1)
金属薄膜上に形成されたフッ素基と極性基を含む樹脂層
と、前記樹脂層上に配された硬質炭素膜とを具備するこ
とを特徴とする磁気記録媒体。A ferromagnetic metal thin film disposed on a non-magnetic substrate, a resin layer containing a fluorine group and a polar group formed on the ferromagnetic metal thin film, and a hard carbon film disposed on the resin layer. A magnetic recording medium characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25577890A JPH04134625A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25577890A JPH04134625A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04134625A true JPH04134625A (en) | 1992-05-08 |
Family
ID=17283500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25577890A Pending JPH04134625A (en) | 1990-09-25 | 1990-09-25 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04134625A (en) |
-
1990
- 1990-09-25 JP JP25577890A patent/JPH04134625A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH04134625A (en) | Magnetic recording medium | |
JP2600297B2 (en) | Magnetic recording media | |
JP2597684B2 (en) | Magnetic recording media | |
JPS60145524A (en) | Magnetic recording medium | |
JPH0711857B2 (en) | Magnetic recording medium | |
JP2583956B2 (en) | Magnetic recording media | |
JPH02179917A (en) | Magnetic recording medium | |
JPH04147427A (en) | Magnetic recording medium | |
JP2543123B2 (en) | Method of manufacturing magnetic recording medium | |
JP3035972B2 (en) | Magnetic recording media | |
JP2553621B2 (en) | Magnetic recording media | |
JPH0354719A (en) | Magnetic recording medium | |
JPH02126418A (en) | Magnetic recording medium | |
JPH05282662A (en) | Magnetic recording medium | |
JPS6145412A (en) | Production of magnetic recording medium | |
JPH04134624A (en) | Magnetic recording medium | |
JP2005129207A (en) | Magnetic recording medium and its manufacturing method | |
JPH04355213A (en) | Magnetic recording medium | |
JPH02281413A (en) | Magnetic recording medium | |
JPS61280021A (en) | Magnetic recording medium | |
JPH01184718A (en) | Magnetic recording medium | |
JPS61236017A (en) | Metallic thin film magnetic recording medium | |
JPH01320619A (en) | Magnetic recording medium | |
JPH02282919A (en) | Magnetic recording medium | |
JPH05258289A (en) | Magnetic recording medium |