JPH0711857B2 - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH0711857B2
JPH0711857B2 JP61090491A JP9049186A JPH0711857B2 JP H0711857 B2 JPH0711857 B2 JP H0711857B2 JP 61090491 A JP61090491 A JP 61090491A JP 9049186 A JP9049186 A JP 9049186A JP H0711857 B2 JPH0711857 B2 JP H0711857B2
Authority
JP
Japan
Prior art keywords
film
magnetic recording
recording medium
carbon
metal thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61090491A
Other languages
Japanese (ja)
Other versions
JPS62246129A (en
Inventor
紘一 篠原
邦男 日比野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61090491A priority Critical patent/JPH0711857B2/en
Publication of JPS62246129A publication Critical patent/JPS62246129A/en
Publication of JPH0711857B2 publication Critical patent/JPH0711857B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適する磁気記録媒体に関す
る。
TECHNICAL FIELD The present invention relates to a magnetic recording medium suitable for high density magnetic recording.

従来の技術 強磁性金属薄膜を磁気記録層とする磁気記録媒体は、通
常、金属もしくは合金などを電子ビーム蒸着,スパッタ
リング等によって基板である高分子フィルムに直接又は
下地薄膜を介して強磁性金属薄膜を蒸着形成することに
より製造され、短波長として記録された信号の再生出力
を大きくできることで、高密度磁気記録の担い手として
期待されている。
2. Description of the Related Art A magnetic recording medium using a ferromagnetic metal thin film as a magnetic recording layer is usually a ferromagnetic metal thin film directly on a polymer film which is a substrate by electron beam evaporation, sputtering or the like or through an underlying thin film. It is expected to be a leading player in high-density magnetic recording because it can increase the reproduction output of signals recorded as short wavelengths.

〔外国論文誌アイイーイーイートランスアクション オ
ン マグネティクス(IEEE Transation on Magnetics)
vol.MAG−21、P.P.1217〜1220(1985)参照〕 一方、磁気記録の高密度化を実現するには、狭ギャップ
長,狭トラックの磁気ヘッドとの直接高速摺動が不可欠
であり、磁気記録層の摩耗や損傷が問題となり、改良の
ため数多くの提案がなされている。
[Foreign papers IEEE Transation on Magnetics]
vol.MAG-21, PP1217 to 1220 (1985)] On the other hand, in order to realize high density magnetic recording, direct high-speed sliding with a narrow gap length, narrow track magnetic head is essential. Abrasion and damage of the layer became a problem, and many proposals have been made for improvement.

例えば強磁性金属薄膜表面上に潤滑剤を塗布する方法
(特公昭39−25246号公報参照)では潤滑剤が磁気ヘッ
ド,走行系等に拭きとられるため永続性に乏しかった。
又、磁気記録層の反対側の面に液状又は半固体状の潤滑
剤及び有機バインダを主成分とするバックコート層を設
ける方法(特公昭57−29769号公報参照)も提案された
がテープ状のものについて効果を奏するが、欠点として
転写量が環境条件で異なる点とスチル状態に対しては効
果がない点およびディスク状媒体に対しては効果がない
点があげられるものであった。
For example, the method of applying a lubricant on the surface of a ferromagnetic metal thin film (see Japanese Patent Publication No. 39-25246) has poor durability because the lubricant is wiped off by the magnetic head, running system and the like.
A method of providing a back coat layer containing a liquid or semi-solid lubricant and an organic binder as a main component on the surface opposite to the magnetic recording layer (see Japanese Patent Publication No. 57-29769) is also proposed, but it is tape-shaped. However, the disadvantages are that the transfer amount differs depending on the environmental conditions, that it has no effect on the still state, and that it has no effect on the disk-shaped medium.

その他、フッ素系有機化合物のプラズマ重合保護層,ケ
イ素系有機化合物のプラズマ重合保護層,粒子を含むポ
リマー塗布層等の保護膜による耐久性向上あるいはこれ
ら該保護膜と潤滑剤の併用等は、強磁性金属薄膜がCo−
Ni−O膜等の表面に酸化層をもつ場合には相当の改良が
確認されている(例えば特開昭58−88828号,特開昭57
−82229号,特開昭58−60427号、特開昭61−11930号公
報参照)。
In addition, improvement of durability by a protective film such as a plasma polymerization protective layer of a fluorine-based organic compound, a plasma polymerization protection layer of a silicon-based organic compound, and a polymer coating layer containing particles, or the combined use of these protective film and a lubricant is strongly recommended. Magnetic metal thin film is Co-
A considerable improvement has been confirmed in the case where an Ni-O film or the like has an oxide layer on its surface (for example, JP-A-58-88828 and JP-A-57).
-82229, JP-A-58-60427, JP-A-61-11930).

発明が解決しようとする問題点 しかしながら、上記した構成では、Co−Cr系垂直磁化膜
等の磁気記録層を充分保護できないため、くり返し記録
再生を行うとエラー率が急増したり、損傷して出力がで
なくなる問題があった。また、Co−Ni−O系の膜であっ
ても、磁気ヘッドが合金で構成されている場合には上記
した問題が湿度の高い環境下で起こるため改良が望まれ
ていた。
Problems to be Solved by the Invention However, in the above-described configuration, the magnetic recording layer such as the Co--Cr system perpendicular magnetization film cannot be sufficiently protected, and therefore the error rate rapidly increases or the output is damaged due to repeated recording and reproduction. There was a problem that was not met. Further, even in the case of a Co-Ni-O-based film, when the magnetic head is made of an alloy, the above-mentioned problems occur in an environment with high humidity, and therefore improvement has been desired.

本発明は上記した事情に鑑みなされたもので、広範囲の
環境条件下での耐久性の改良された磁気記録媒体を提供
するものである。
The present invention has been made in view of the above circumstances, and provides a magnetic recording medium having improved durability under a wide range of environmental conditions.

問題点を解決するための手段 上記した問題点を解決するため、本発明の磁気記録媒体
は、強磁性金属薄膜上にダイヤモンド状炭素と炭素の連
続皮膜を形成したものである。
Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention has a continuous film of diamond-like carbon and carbon formed on a ferromagnetic metal thin film.

作 用 本発明の磁気記録媒体は上記した構成により、ダイアモ
ンド状炭素の硬度と、炭素の固体潤滑作用により、磁気
ヘッドと高速で摺接しても損傷が防止でき、かつ連続皮
膜であることから炭素の潤滑作用の接続性は極めて良好
なものとなり、優れた高密度磁気記録特性を長時間に渡
って与えることができることになる。
Operation The magnetic recording medium of the present invention has the above-described structure, and because of the hardness of diamond-like carbon and the solid lubrication action of carbon, damage can be prevented even when it makes sliding contact with the magnetic head at high speed, and it is a continuous film. The lubricity of the connection property is extremely good, and excellent high density magnetic recording characteristics can be provided for a long time.

実 施 例 以下、図面を参照しながら、本発明の実施例の磁気記録
媒体について説明する。
Examples Hereinafter, magnetic recording media according to examples of the present invention will be described with reference to the drawings.

第1図は本発明の第1の実施例の磁気記録媒体の拡大断
面図である。第1図で1は厚さ21μmのポリエチレンテ
レフタレートフィルムのごとき高分子フィルムで、表面
粗さはピークトウ・バレー値で100Åである。2は高分
子フィルム1の上面に塗布した粒子径300Åの高分子ラ
テックスよりなる粒状突起層で、粒子密度は100万個/mm
2とした(例えば特開昭61−9822号参照)。3は高周波
スパッタリング法で形成した膜厚0.15μmの垂直磁化可
能なCo−Cr(Cr;20wt%)膜である。4は厚さ150Åの保
護膜で、厚み方向に状態が変化した炭素膜である。即ち
Co−Cr膜3の表面に近い方はダイアモンド状硬質炭素で
表面にいくにつれて徐々に炭素に変化するようにしたも
ので、形成方法としてはグラファイトへの水素スパッタ
リングから始めて、水素にArを加えて導入する位置を制
御することにより上記した条件の炭素膜を得るようにす
るものである。
FIG. 1 is an enlarged cross-sectional view of the magnetic recording medium of the first embodiment of the present invention. In FIG. 1, 1 is a polymer film such as a polyethylene terephthalate film having a thickness of 21 μm, and the surface roughness is 100 Å in peak toe valley value. 2 is a granular protrusion layer made of polymer latex having a particle size of 300 liters applied on the upper surface of the polymer film 1, and the particle density is 1 million particles / mm.
2 (see, for example, JP-A-61-9822). Reference numeral 3 is a Co—Cr (Cr; 20 wt%) film having a film thickness of 0.15 μm and formed by high frequency sputtering. Reference numeral 4 is a protective film having a thickness of 150Å, which is a carbon film whose state changes in the thickness direction. I.e.
The one closer to the surface of the Co-Cr film 3 is a diamond-like hard carbon that gradually changes to carbon as it goes to the surface. The forming method is to start with hydrogen sputtering on graphite and add Ar to hydrogen. The carbon film under the above conditions is obtained by controlling the introduction position.

このような本実施例の磁気記録媒体に対して比較例とし
て、水素とArを用いたグラファイトのスパッタリングに
より厚み方向に一定の炭素皮膜を厚さ150Å形成したも
のを準備した。
As a comparative example, such a magnetic recording medium of this example was prepared by sputtering a graphite film using hydrogen and Ar to form a constant carbon film in the thickness direction of 150Å.

この両者を3.5インチディスクとして形成し比較したと
ころ本発明品は0.24μmのビット長の矩形波の再生出力
が3dB低下するまでの時間は、3.5インチディスクの最外
周トラックで2,500万パスであったのに、比較例は447万
パスであった。
As a result of forming both of them as a 3.5-inch disc and comparing them, it was found that the time required for the reproduction output of the rectangular wave having the bit length of 0.24 μm to decrease by 3 dB was 25 million passes in the outermost track of the 3.5-inch disc. However, the comparative example had 4.47 million passes.

第2図は本発明の第2の実施例の磁気記録媒体の拡大断
面図である。第2図に於て、5は厚み10μmのポリエチ
レンテレフタレートフィルムのごとき高分子フィルム、
6は例えば、特開昭58−68224号公報に記載されるよう
に、シリコーン樹脂或いはスチレン,ブタジエンゴムと
水溶性高分子材料とを混合したものをフィルム上に塗布
して連続皮膜を作り、これを延伸してその表面に形成し
たいわゆるミミズ状皮膜で、高さは80Åである。7は直
径1mの円周キャンに沿わせた状態で90度から40度までの
入射角範囲で斜め蒸着により形成した膜厚0.12μmのCo
−Ni−O膜で、保磁力は1100(Oe)、角形比0.78、Co;N
i;Oは原子%比で63;16;21とした。8はグラファイトの
スパッタリング法で形成した炭素膜で、膜厚は140Åと
し厚み方向にダイアモンド状硬質炭素からグラファイト
まで連続的に変化するように、スパッタ雰囲気を水素単
独に近い状態から水素とアルゴンの混合ガス雰囲気が連
続的に変るようにグラファイトターゲットの長手方向に
3ケ所,ガス導入ノズルを設けて最適条件を実験的に求
めて構成した。9は炭素膜8の上に真空蒸着法で形成し
た厚さ30Åのミリステン酸膜、10はバックコート層で、
結合剤のポリエステル樹脂11と、フィラーのCaCO3粒子1
2からなるものである。
FIG. 2 is an enlarged cross-sectional view of the magnetic recording medium of the second embodiment of the present invention. In FIG. 2, 5 is a polymer film such as a polyethylene terephthalate film having a thickness of 10 μm,
No. 6, for example, as described in JP-A-58-68224, a mixture of a silicone resin or styrene or butadiene rubber and a water-soluble polymer material is applied on a film to form a continuous film. Is a so-called earthworm-like film formed on the surface by stretching and has a height of 80Å. 7 is a Co film having a thickness of 0.12 μm formed by oblique vapor deposition in the incident angle range of 90 ° to 40 ° along a circumferential can with a diameter of 1 m.
-Ni-O film with coercive force of 1100 (Oe), squareness ratio of 0.78, Co; N
i; O was set to 63; 16; 21 in terms of atomic percentage. 8 is a carbon film formed by the sputtering method of graphite. The film thickness is 140 Å, and the sputtering atmosphere is mixed from hydrogen to argon so that it continuously changes from diamond-like hard carbon to graphite in the thickness direction. Optimum conditions were experimentally determined and configured by providing gas introduction nozzles at three locations in the longitudinal direction of the graphite target so that the gas atmosphere changes continuously. Reference numeral 9 is a myristic acid film having a thickness of 30Å formed on the carbon film 8 by a vacuum deposition method, and 10 is a back coat layer.
Binder polyester resin 11 and filler CaCO 3 particles 1
It consists of two.

このような本実施例の磁気記録媒体に対して比較例とし
て、水素とアルゴンガスを用いたグラファイトのスパッ
タリングにより厚み方向に一定の炭素皮膜を150Å形成
し、その他の構成は上記実施例と同じ条件で構成したも
のを準備した。
As a comparative example with respect to the magnetic recording medium of the present example, a constant carbon coating is formed in the thickness direction by 150 Å by sputtering of graphite using hydrogen and argon gas, and other configurations are the same as those of the above example. Prepared the one composed of.

この両者を8mm幅の磁気テープとして準備し、ギャップ
長0.29μmのセンダストスパッタ複合型リングヘッドに
より0.75μmの記録波長の信号を記録し、同一トラック
をくり返し再生して出力状態を観測し、ノイズの発生す
るまでの時間を測定した。温度湿度条件は40℃5%RH、
40℃84%RH、0℃46%RHで夫々行たところ、本実施例の
ものは、47分,44分,49分であったのに比し、比較例は16
分,9分,11分であった。
Both of them were prepared as a magnetic tape of 8 mm width, and a signal with a recording wavelength of 0.75 μm was recorded by a sendust sputter composite ring head with a gap length of 0.29 μm, and the same track was repeatedly reproduced to observe the output state, The time to occur was measured. Temperature and humidity conditions are 40 ° C and 5% RH,
When carried out at 40 ° C. 84% RH and 0 ° C. 46% RH, respectively, it was 47 minutes, 44 minutes, 49 minutes in this example, compared with 16 minutes in the comparative example.
Minutes, 9 minutes, and 11 minutes.

なお、上記実施例において高分子フィルムはポリエチレ
ンテレフタレートを用いたが、他にポリイミド,ポリエ
チレンナフタレート,ポリアミドイミド等でもよい。
Although polyethylene terephthalate is used as the polymer film in the above-mentioned examples, other materials such as polyimide, polyethylene naphthalate and polyamide imide may be used.

また強磁性金属薄膜としては、Co−Cr,Co−Ni−Oの他
にCo−O,Co−Pr,Co−Pt,Co−P,Co−Rh,Co−Ru,Co−Bi,C
o−B,Co−Si,Co−Ti,Co−Mo,Co−W,Co−Cr−Nb等でもよ
い。
Further, as the ferromagnetic metal thin film, in addition to Co-Cr, Co-Ni-O, Co-O, Co-Pr, Co-Pt, Co-P, Co-Rh, Co-Ru, Co-Bi, C
It may be o-B, Co-Si, Co-Ti, Co-Mo, Co-W, Co-Cr-Nb or the like.

発明の効果 以上のように本発明によれば、強磁性金属薄膜上に設け
たダイヤモンド状炭素の硬度と、炭素の固体潤滑作用に
よって短波長記録再生での出力低下が多数回のくり返し
使用でもみられず、優れた高密度磁気記録特性を有する
磁気記録媒体を得ることができ、その効果は大である。
EFFECTS OF THE INVENTION As described above, according to the present invention, the hardness of diamond-like carbon provided on the ferromagnetic metal thin film and the solid lubrication effect of carbon cause a decrease in output during short wavelength recording / reproduction even after repeated use. It is possible to obtain a magnetic recording medium having excellent high density magnetic recording characteristics, and the effect is great.

【図面の簡単な説明】[Brief description of drawings]

第1図および第2図はそれぞれ本発明の各実施例の磁気
記録媒体の拡大断面図である。 1,5……高分子フィルム、3,7……強磁性金属薄膜、4,8
……炭素皮膜。
1 and 2 are enlarged cross-sectional views of the magnetic recording medium of each embodiment of the present invention. 1,5 …… Polymer film, 3,7 …… Ferromagnetic metal thin film, 4,8
...... Carbon film.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】強磁性金属薄膜上にダイアモンド状炭素と
炭素よりなる連続皮膜を形成してなることを特徴とする
磁気記録媒体。
1. A magnetic recording medium comprising a ferromagnetic metal thin film on which a continuous coating of diamond-like carbon and carbon is formed.
【請求項2】連続皮膜は厚さ方向に炭素とダイヤモンド
状炭素との構成比を変えてなる特許請求の範囲第1項記
載の磁気記録媒体。
2. The magnetic recording medium according to claim 1, wherein the continuous film is formed by changing the composition ratio of carbon and diamond-like carbon in the thickness direction.
JP61090491A 1986-04-18 1986-04-18 Magnetic recording medium Expired - Lifetime JPH0711857B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61090491A JPH0711857B2 (en) 1986-04-18 1986-04-18 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61090491A JPH0711857B2 (en) 1986-04-18 1986-04-18 Magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS62246129A JPS62246129A (en) 1987-10-27
JPH0711857B2 true JPH0711857B2 (en) 1995-02-08

Family

ID=13999998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61090491A Expired - Lifetime JPH0711857B2 (en) 1986-04-18 1986-04-18 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0711857B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02161612A (en) * 1988-12-14 1990-06-21 Fujitsu Ltd Magnetic disk medium
JPH03130919A (en) * 1989-07-07 1991-06-04 Matsushita Electric Ind Co Ltd Magnetic recording medium
US6245417B1 (en) * 1997-07-10 2001-06-12 Seagate Technology Llc Magnetic recording medium comprising multilayered carbon-containing protective overcoats
US6403194B1 (en) 1998-09-03 2002-06-11 Hitachi, Ltd. Magnetic recording medium, process for producing same and magnetic disc apparatus
JP4199913B2 (en) 2000-09-28 2008-12-24 株式会社日立グローバルストレージテクノロジーズ Method for manufacturing magnetic recording medium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023406B2 (en) * 1977-05-18 1985-06-07 日本電気株式会社 magnetic disk
JPS6154036A (en) * 1984-08-24 1986-03-18 Nec Corp Magnetic recording medium and its manufacture

Also Published As

Publication number Publication date
JPS62246129A (en) 1987-10-27

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