JPH0413083Y2 - - Google Patents
Info
- Publication number
- JPH0413083Y2 JPH0413083Y2 JP1985066699U JP6669985U JPH0413083Y2 JP H0413083 Y2 JPH0413083 Y2 JP H0413083Y2 JP 1985066699 U JP1985066699 U JP 1985066699U JP 6669985 U JP6669985 U JP 6669985U JP H0413083 Y2 JPH0413083 Y2 JP H0413083Y2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- correction
- lap
- plate
- lapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012937 correction Methods 0.000 claims description 51
- 239000003795 chemical substances by application Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985066699U JPH0413083Y2 (ko) | 1985-05-04 | 1985-05-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985066699U JPH0413083Y2 (ko) | 1985-05-04 | 1985-05-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61181655U JPS61181655U (ko) | 1986-11-12 |
JPH0413083Y2 true JPH0413083Y2 (ko) | 1992-03-27 |
Family
ID=30599842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985066699U Expired JPH0413083Y2 (ko) | 1985-05-04 | 1985-05-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0413083Y2 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0645329Y2 (ja) * | 1989-12-29 | 1994-11-24 | 千代田株式会社 | 研磨パッド用ドレッサー |
-
1985
- 1985-05-04 JP JP1985066699U patent/JPH0413083Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61181655U (ko) | 1986-11-12 |
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