JPH04129604A - Surface covering cutting tool having excellent adhesion to gas phase synthetic diamond covering layer - Google Patents
Surface covering cutting tool having excellent adhesion to gas phase synthetic diamond covering layerInfo
- Publication number
- JPH04129604A JPH04129604A JP24793190A JP24793190A JPH04129604A JP H04129604 A JPH04129604 A JP H04129604A JP 24793190 A JP24793190 A JP 24793190A JP 24793190 A JP24793190 A JP 24793190A JP H04129604 A JPH04129604 A JP H04129604A
- Authority
- JP
- Japan
- Prior art keywords
- covering layer
- phase synthetic
- gas phase
- coating layer
- synthetic diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 39
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 39
- 238000005520 cutting process Methods 0.000 title claims abstract description 37
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 229910052742 iron Inorganic materials 0.000 claims abstract description 4
- 239000011247 coating layer Substances 0.000 claims description 31
- 239000012808 vapor phase Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000011195 cermet Substances 0.000 claims description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 238000003786 synthesis reaction Methods 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract 1
- 229910000601 superalloy Inorganic materials 0.000 abstract 1
- 238000010189 synthetic method Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 10
- 238000009826 distribution Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- -1 various cermets Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、気相合成ダイヤモンド被覆層の基体表面に
対する付着性にすぐれた表面被覆切削工具に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a surface-coated cutting tool with excellent adhesion of a vapor-phase synthetic diamond coating layer to a substrate surface.
従来、一般に、炭化タングステン（以下、ＷＣで示す）
基超硬合金や、例えば炭窒化チタン（以下、Ｔ１ＣＮで
示す）基サーメット、さらに例えば窒化けい素（以下、
５１３Ｎ４で示す）基セラミックスなどからなる基体の
表面に、耐摩耗性を向上させる目的で、特開昭５８−９
１１００号公報に記載される熱フイラメント法や、特開
昭５８−１３５１１７号公報に記載される直流または交
流プラズマ法、さらに特開昭５８−１１０４９４号公報
に記載されるマイクロ波プラズマ法などの気相合成法を
用いて、通常１〜１０ｔａの範囲内の所定厚さでダイヤ
モンド被覆層を形成してなる表面被覆切削工具が知られ
ている。Conventionally, tungsten carbide (hereinafter referred to as WC) is generally used.
Based on cemented carbide, for example, titanium carbonitride (hereinafter referred to as T1CN)-based cermet, and furthermore, for example, silicon nitride (hereinafter referred to as T1CN),
513N4) was coated with JP-A-58-9 to improve wear resistance.
1100, the direct current or alternating current plasma method described in JP-A-58-135117, and the microwave plasma method described in JP-A-58-110494. Surface-coated cutting tools are known in which a diamond coating layer is formed using a phase synthesis method to a predetermined thickness, usually within a range of 1 to 10 ta.
また、上記の従来表面被覆切削工具において、気相合成
ダイヤモンド被覆層の基体表面に対する付着強度を向上
させる目的で、これら両者間に中間層として、特開昭５
８−１２６９７２号公報に記載される通り、ＴｉＣやＴ
ｉＮ、あるいはＡｇ２Ｏ３などの化合物層を介在させた
表面被覆切削工具や、同じく特開昭５９−１８４７９２
号公報に記載される通り、ＷやＮｂなどの金属層を介在
させた表面被覆切削工具が提案されている。In addition, in the above-mentioned conventional surface-coated cutting tool, in order to improve the adhesion strength of the vapor-phase synthetic diamond coating layer to the substrate surface, an intermediate layer between the two is added.
As described in Publication No. 8-126972, TiC and T
A surface-coated cutting tool with a compound layer such as iN or Ag2O3 interposed therein, and also disclosed in JP-A-59-184792.
As described in the above publication, a surface-coated cutting tool with a metal layer such as W or Nb interposed therein has been proposed.
一方、近年の切削機械の高性能化はめざましく、省力化
および省エネルギー化と相まって、より一層の高速切削
や、高送りおよび高切込みなどの重切削が強られる傾向
にあり、これに伴ない切削工具も一段と苛酷な条件下で
の使用を予儀なくされるようになっているが、上記の従
来表面被覆切削工具においては、付着性向上の目的で中
間層を介在させた表面被覆切削工具であっても、気相合
成ダイヤモンド被覆層の基体表面に対する付着性が未だ
十分でないために、特に苛酷な条件下での実用に際して
は剥離か発生し易く、きわめて短かい使用寿命しか示さ
ないのが現状である。On the other hand, the performance of cutting machines has improved dramatically in recent years, and coupled with efforts to save labor and energy, there is a trend toward higher-speed cutting and heavy-duty cutting such as high feed and high depth of cut. However, the conventional surface-coated cutting tools mentioned above are surface-coated cutting tools with an intermediate layer interposed in order to improve adhesion. However, because the adhesion of the vapor phase synthesized diamond coating layer to the substrate surface is still insufficient, it is easy to peel off when used under particularly harsh conditions, and the service life is extremely short. be.
そこで、本発明者等は、上述のような観点から、表面被
覆切削工具における気相合成ダイヤモンド被覆層の基体
表面に対する付着性のより一段の向上をはかるべく研究
を行なった結果、
ＷＣＣ超超硬合金、各種のサーメットおよびセラミック
スからなる基体の表面に気相合成ダイヤモンド被覆層を
形成するに先だって、前記基体表面にきわめて薄い厚さ
、すなわち０．００１〜１訊の範囲内の厚さで、Ｆｅ、
Ｎｉ、およびＣｏ、並びにこれらの２種以上合金のうち
の１種以上で構成された鉄族金属層を形成しておき、こ
の状態で気相合成法によるダイヤモンド被覆層の形成を
行なうと、ダイヤモンドの合成が前記鉄族金属を取り込
みなから行なわれるため、形成された気相合成ダイヤモ
ンド被覆層は、基体表面との界面部に０．００１〜１ｗ
ａの範囲内の所定厚さに亘って鉄族金属が分布したもの
となり、この鉄族金属が分布した界面部の基体表面に対
する付着強度は著しく高く、したがって、これをより一
段の高速切削や重切削などの苛酷な条件下での切削に使
用してもダイヤモンド被覆層に剥離が発生することが抑
制されるようになり、著しく長期に亘ってすぐれた切削
性能を発揮するという研究結果を得たのである。Therefore, from the above-mentioned viewpoint, the present inventors conducted research to further improve the adhesion of the vapor-phase synthetic diamond coating layer to the substrate surface in surface-coated cutting tools. Prior to forming a vapor-phase synthetic diamond coating layer on the surface of a substrate made of alloys, various cermets, and ceramics, Fe is applied to the surface of the substrate to a very thin thickness, that is, within the range of 0.001 to 1 thick. ,
If an iron group metal layer composed of Ni, Co, and one or more of these two or more alloys is formed, and a diamond coating layer is formed by vapor phase synthesis in this state, diamond Since the synthesis is performed without incorporating the iron group metal, the formed vapor-phase synthetic diamond coating layer has a concentration of 0.001 to 1 w at the interface with the substrate surface.
The iron group metal is distributed over a predetermined thickness within the range of a, and the adhesion strength to the substrate surface at the interface where the iron group metal is distributed is extremely high. Research has shown that even when used for cutting under harsh conditions, the occurrence of peeling of the diamond coating layer is suppressed, and the diamond coating exhibits excellent cutting performance over an extremely long period of time. It is.
この発明は、上記研究結果にもとづいてなされたもので
あって、ＷＣＣ超超硬合金サーメット、あるいはセラミ
ックスからなる基体の表面に、気相合金ダイヤモンド被
覆層を形成してなる表面被覆切削工具において、
上記気相合成ダイヤモンド被覆層における基体表面との
界面部に、０．００１〜１μｓの範囲内の所定厚さに亘
って、Ｆｅ、Ｎｉ、およびＣｏのうちの１種以上からな
る鉄族金属を分布せしめてなる、気相合成ダイヤモンド
被覆層の付着性にすぐれた表面被覆切削工具に特徴を有
するものである。This invention was made based on the above research results, and provides a surface-coated cutting tool in which a vapor-phase alloy diamond coating layer is formed on the surface of a base made of WCC cemented carbide cermet or ceramics. An iron group metal consisting of one or more of Fe, Ni, and Co is applied over a predetermined thickness within the range of 0.001 to 1 μs at the interface with the substrate surface in the vapor-phase synthetic diamond coating layer. The present invention is characterized by a surface-coated cutting tool with excellent adhesion of a vapor-phase synthesized diamond coating layer.
なお、この発明の表面被覆切削工具においてζ気相合成
ダイヤモンド被覆層の基体表面との界面部における鉄族
金属の分布厚さを０．００１〜１應としたのは、その厚
さが０．００１ｕｌａ未満では付着性向上に著しい改善
が見られず、一方その厚さが１−を越えても、ダイヤモ
ンド被覆層の付着強度が急激に低下するようになるとい
う理由からである。In addition, in the surface-coated cutting tool of the present invention, the reason why the distribution thickness of the iron group metal at the interface between the ζ vapor-phase synthetic diamond coating layer and the substrate surface is set to 0.001 to 1. This is because if the thickness is less than 0.001 ura, no significant improvement in adhesion will be observed, while if the thickness exceeds 1.0 ula, the adhesion strength of the diamond coating layer will rapidly decrease.
また、この発明の表面被覆切削工具の製造に際して、ダ
イヤモンド被覆層は上記の公知の気相合成法によって形
成され、鉄族金属層は同じく公知のイオンブレーティン
グ法やスパッタリング法、さらに真空蒸着法やメツキ法
などによって形成される。In addition, when manufacturing the surface-coated cutting tool of the present invention, the diamond coating layer is formed by the above-mentioned known vapor phase synthesis method, and the iron group metal layer is formed by the similarly known ion blasting method, sputtering method, and vacuum evaporation method. It is formed by the Metsuki method.
つぎに、この発明の表面被覆切削工具を実施例により具
体的に説明する。Next, the surface-coated cutting tool of the present invention will be specifically explained using examples.
それぞれ第１表に示される組成をもち、かつ研削により
Ｓ Ｎ Ｇ Ｎ １２０３０ｇの形状とした基体の表面
に、まず通常の真空蒸着法にて同じく第１表に示される
厚さの鉄族金属層を形成し、引続いてこの基体を金属タ
ングステン製フィラメントを備えた直径＋１２０ｍｍの
石英製反応管内に装入し、熱フイラメント法にて、
基体温度二８００℃、
反応ガス： ＣＨ４／Ｈ２−０，０１、雰囲気圧カニ
３５ｔｏｒｒ。First, an iron group metal layer with a thickness also shown in Table 1 was deposited on the surface of the substrate, which had the composition shown in Table 1 and was ground into the shape of SN G N 12030 g, by a normal vacuum evaporation method. This substrate was then charged into a quartz reaction tube with a diameter of +120 mm equipped with a metallic tungsten filament, and the temperature of the substrate was 2800°C, reaction gas: CH4/H2-0, 01, atmospheric pressure crab
35 torr.
合成時間二３〜９時間、
の条件で第１表に示される気相合成ダイヤモンド被覆層
を形成することにより本発明表面被覆切削工具１〜１８
および比較表面被覆切削工具１〜７をそれぞれ製造した
。The surface-coated cutting tools 1 to 18 of the present invention were prepared by forming the vapor-phase synthetic diamond coating layer shown in Table 1 under the following conditions for a synthesis time of 23 to 9 hours.
and comparative surface-coated cutting tools 1 to 7 were manufactured, respectively.
なお、比較表面被覆切削工具１〜７は、いずれも気相合
成ダイヤモンド被覆層の基体表面との界面部における鉄
族金属の分布厚さがこの発明の範囲から外れたものであ
る。It should be noted that in all of Comparative Surface-Coated Cutting Tools 1 to 7, the distribution thickness of the iron group metal at the interface between the vapor-phase synthesized diamond coating layer and the substrate surface is outside the scope of the present invention.
また、比較の目的で、鉄族金属層の形成に代って、通常
の化学蒸着法および真空蒸着法にて同じく第１表に示さ
れる組成および厚さの中間層を形成する以外は同一の条
件で従来表面被覆切削工具１〜７を製造した。Also, for comparison purposes, the same material was used except that instead of forming the iron group metal layer, an intermediate layer having the composition and thickness shown in Table 1 was formed by conventional chemical vapor deposition and vacuum vapor deposition. Conventional surface-coated cutting tools 1 to 7 were manufactured under the following conditions.
つぎに、この結果得られた各種の表面被覆切削工具につ
いて、
被削材：Ａ１１−１８重量％Ｓｉ合金、切削速度： ２
００ｍ／１ｎ、
切込み：２ｒｎｎ％
１刃当りの送り：０．２ｍ＋ｓ／刃、
の条件でフライス切削試験を行ない、切刃の逃げ面摩耗
幅か０．３＋ｎｍに至るまでの切削時間を測定した。こ
れらの測定結果を第１表に示した。Next, regarding the various surface-coated cutting tools obtained as a result, Work material: A11-18 wt% Si alloy, Cutting speed: 2
A milling test was conducted under the following conditions: 00m/1n, depth of cut: 2rnn%, feed per tooth: 0.2m+s/tooth, and the cutting time until the flank wear width of the cutting edge reached 0.3+nm was measured. The results of these measurements are shown in Table 1.
第１表に示される結果から、本発明表面被覆切削工具１
〜】８は、いずれも界面部に分布する鉄族金属によって
ダイヤモンド被覆層の基体表面に対する付着強度が著し
く高められているので、苛酷な条件下での切削にもかか
わらず、ダイヤモンド被覆層に剥離は発生せず、長期に
亘ってすぐれた切削性能を発揮するのに対して、従来表
面被覆切削工具１〜７は、中間層の介在かあってもダイ
ヤモンド被覆層の基体表面に対する付着強度が十分でな
いために、ダイヤモンド被覆層の剥離か原因で、相対的
に短かい使用寿命しか示さないことが明らかである。From the results shown in Table 1, the surface-coated cutting tool 1 of the present invention
~ ] 8, the adhesion strength of the diamond coating layer to the substrate surface is significantly increased by the iron group metal distributed at the interface, so even when cutting under severe conditions, the diamond coating layer does not peel off. In contrast, conventional surface-coated cutting tools 1 to 7 have sufficient adhesion strength of the diamond coating layer to the substrate surface even with the intervention of an intermediate layer. It is clear that the diamond coating layer exhibits a relatively short service life due to delamination of the diamond coating layer.
また、比較表面被覆切削工具１〜７に見られるように、
ダイヤモンド被覆層の界面部における鉄族金属の分布厚
さがこの発明の範囲から外れて薄い場合や、鉄族金属の
分布が全くない場合は、従来表面被覆切削工具と同様に
、ダイヤモンド被覆層に剥離が発生し易く、また鉄族金
属の分布厚さがこの発明の範囲を越えて厚い場合もダイ
ヤモンド被覆層の付着強度が急激に低下し、さらに厚い
場合にはダイヤモンド被覆層の形成か不可能であること
が明らかである。In addition, as seen in comparative surface-coated cutting tools 1 to 7,
If the distribution thickness of the iron group metal at the interface of the diamond coating layer is thin beyond the scope of this invention, or if there is no distribution of the iron group metal at all, the diamond coating layer may be Peeling is likely to occur, and if the distribution thickness of the iron group metal is thicker than the scope of this invention, the adhesion strength of the diamond coating layer will drop rapidly, and if it is even thicker, it may be impossible to form a diamond coating layer. It is clear that
上述のように、この発明の表面被覆切削工具は、気相合
成ダイヤモンド被覆層の基体表面に対する付着性が著し
く高いものであるので、苛酷な条件下での切削でも気相
合成ダイヤモンド被覆層が剥離し難く、すぐれた切削性
能を長期に亘って発揮するのである。As mentioned above, in the surface-coated cutting tool of the present invention, the adhesion of the vapor-phase synthetic diamond coating layer to the substrate surface is extremely high, so that the vapor-phase synthetic diamond coating layer will not peel off even when cutting under severe conditions. It is difficult to cut and exhibits excellent cutting performance over a long period of time.
Claims (1)
いはセラミックスからなる基体の表面に、気相合成ダイ
ヤモンド被覆層を形成してなる表面被覆切削工具におい
て、 上記気相合成ダイヤモンド被覆層における基体表面との
界面部に、０．００１〜１μｍの範囲内の所定厚さで、
Ｆｅ、Ｎｉ、およびＣｏのうちの１種以上からなる鉄族
金属を分布せしめたことを特徴とする気相合成ダイヤモ
ンド被覆層の付着性にすぐれた表面被覆切削工具。(1) In a surface-coated cutting tool in which a vapor-phase synthetic diamond coating layer is formed on the surface of a substrate made of tungsten carbide-based cemented carbide, cermet, or ceramics, the relationship between the substrate surface and the vapor-phase synthetic diamond coating layer is At the interface part, with a predetermined thickness within the range of 0.001 to 1 μm,
A surface-coated cutting tool with excellent adhesion of a vapor-phase synthesized diamond coating layer, characterized in that an iron group metal consisting of one or more of Fe, Ni, and Co is distributed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24793190A JPH04129604A (en) | 1990-09-18 | 1990-09-18 | Surface covering cutting tool having excellent adhesion to gas phase synthetic diamond covering layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24793190A JPH04129604A (en) | 1990-09-18 | 1990-09-18 | Surface covering cutting tool having excellent adhesion to gas phase synthetic diamond covering layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04129604A true JPH04129604A (en) | 1992-04-30 |
Family
ID=17170685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24793190A Pending JPH04129604A (en) | 1990-09-18 | 1990-09-18 | Surface covering cutting tool having excellent adhesion to gas phase synthetic diamond covering layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04129604A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10298780A (en) * | 1997-02-20 | 1998-11-10 | Citizen Watch Co Ltd | Formation of coating film on insulating material |
-
1990
- 1990-09-18 JP JP24793190A patent/JPH04129604A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10298780A (en) * | 1997-02-20 | 1998-11-10 | Citizen Watch Co Ltd | Formation of coating film on insulating material |
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