JPH0412804B2 - - Google Patents
Info
- Publication number
- JPH0412804B2 JPH0412804B2 JP60182962A JP18296285A JPH0412804B2 JP H0412804 B2 JPH0412804 B2 JP H0412804B2 JP 60182962 A JP60182962 A JP 60182962A JP 18296285 A JP18296285 A JP 18296285A JP H0412804 B2 JPH0412804 B2 JP H0412804B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- signal
- light source
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296285A JPS6244615A (ja) | 1985-08-22 | 1985-08-22 | 距離測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296285A JPS6244615A (ja) | 1985-08-22 | 1985-08-22 | 距離測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244615A JPS6244615A (ja) | 1987-02-26 |
| JPH0412804B2 true JPH0412804B2 (US20080293856A1-20081127-C00150.png) | 1992-03-05 |
Family
ID=16127371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296285A Granted JPS6244615A (ja) | 1985-08-22 | 1985-08-22 | 距離測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244615A (US20080293856A1-20081127-C00150.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6412216A (en) * | 1987-07-06 | 1989-01-17 | Nissan Motor | Detection of position |
| JPH0711419B2 (ja) * | 1988-03-28 | 1995-02-08 | 岩崎通信機株式会社 | レーザ光を利用した変位計 |
| JPH01274010A (ja) * | 1988-04-26 | 1989-11-01 | Mitsubishi Electric Corp | 光学式変位測定装置 |
| JPH03148005A (ja) * | 1989-11-06 | 1991-06-24 | Aoki Seiki Seisakusho:Kk | オン・マシン計測用非接触式表面粗さ測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207852A (en) * | 1981-05-15 | 1982-12-20 | Siemens Ag | Method of detecting three-dimensional object |
| JPS6069539A (ja) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | 表面欠陥検査装置 |
-
1985
- 1985-08-22 JP JP18296285A patent/JPS6244615A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207852A (en) * | 1981-05-15 | 1982-12-20 | Siemens Ag | Method of detecting three-dimensional object |
| JPS6069539A (ja) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | 表面欠陥検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244615A (ja) | 1987-02-26 |
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