JPH04127982A - Laser marking machine - Google Patents

Abstract

PURPOSE:To execute the seal marking to plural marking objects by providing a galvanometer type optical scanner having a biaxial rotary mirror, and an image forming lens of a size which can make the deflected and scanned laser beam incident, on an optical path of the laser beam to irradiate them with a laser beam. CONSTITUTION:The laser marking machine is constituted of a laser oscillator 1 for oscillating a laser beam, a relay lens 2 for converging the laser beam, a biaxial galvanometer type optical scanner 4 having mirrors 4a, 4b for reflecting the converged laser beam at a prescribed angle in two directions being orthogonal to each other, and also, deflecting and scanning a sealing pattern, and an image forming lens 5 for making the reflected, and deflected and scanned laser beam incident, and forming an image on a marking object 6.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention is a laser marking machine that scans a laser beam onto the surface of an outer shell of a first electronic component of a semiconductor device to stamp a trademark, product name, lot number, etc.

[Conventional technology]

Conventionally, laser marking machines scan a laser beam on the marking surface of a semiconductor device (hereinafter simply referred to as IC) to stamp trademarks, product names, lot numbers, etc. in the same way as a brush stroke, and a font mask. It can be roughly divided into two methods: a mask method, in which a laser beam that selectively transmits a desired pattern from a group of patterns arranged above is deflected by a predetermined height, and is incident on an imaging lens to perform marking.

The first single-stroke laser marking machine feeds resin-sealed ICs piece by piece into each hole in a strip-shaped lead frame.
A laser marking machine that sequentially positions the ICs at predetermined positions and then scans the ICs with a laser beam at those positions to mark them; and a laser marking machine that cuts and separates the ICs from the optical lead frame and stamps these ICs one by one. There is a laser marking machine that sends it to a location, positions it, and then stamps it. In each printing machine, the index time, that is, the transport 1 positioning and printing time required 1.2 seconds/degree of fixation.

In addition, in the second mask-type laser marking machine, the lead frame is continuously fed at a constant speed, and the laser beam that has passed through the pattern on the mask toward phono 1 is deflected by a predetermined angle depending on the position of the lead frame. The laser beam was then applied to an imaging lens, and the lead frame was moved in a moving manner to irradiate the laser beam and make a mark. The index time of this laser marking machine is faster than the former, about 0.4 seconds 77
'It was of a firm level.

[Invention or problem to be solved]

In the above-mentioned conventional laser marking machine, - in the brush writing type laser marking machine, the IC is assembled into a lead frame and the lead frame is conveyed one pitch at a time, or the IC is individually cut, separated, and lead-formed. 1 in the state
Since the ICs are transported one by one, transport positioning time is required for each IC, making it difficult to shorten the index.

On the other hand, in the case of a mask-type laser marking machine, although the feed speed is limited by the laser beam irradiation range and the number of characters to be stamped, it is possible to stamp while moving, which eliminates the time required for positioning and stopping. It is advantageous for shortening. However, it costs a lot of money to manufacture the phono mask, and in order to selectively select only a specific pattern from the group of font mask-like cover patterns and allow the beam to pass through, it is necessary to elaborate a complicated mechanism and control section. However, there are drawbacks such as high equipment costs and poor mechanical reliability.

SUMMARY OF THE INVENTION In order to solve this problem, it is an object of the present invention to provide an inexpensive and highly reliable laser marking machine that can further shorten the index.

[Means to solve the problem]

The laser marking machine of the present invention includes a galvanometer-type photoski integer having two rotating mirrors whose axes are perpendicular to each other, which reflects a laser beam at a predetermined angle in two directions perpendicular to each other, and deflects and scans the marking pattern. It is characterized by comprising an imaging lens having a size that includes the laser beam incident area that is reflected and deflected and scanned.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a perspective view of the main parts of a laser marking machine showing an embodiment of the present invention. As shown in the figure, this laser marking machine includes a laser oscillator that emits a laser beam,
A two-axis galvanometer-type optical scan having a relay lens 2 that converges a laser beam, and mirrors 4a and 4b that reflect the converged laser beam at a predetermined angle in two directions orthogonal to each other and deflect and scan the imprint pattern. 4, and an imaging lens 5 which receives a reflected and deflected laser beam and forms an image on the object to be printed.

In this way, a galvanometer-type optical scanner 4 with a biaxially driven mirror is included in the laser beam optical path, and an imaging lens 5 of a size that includes a deflection scanning area of the laser beam.
By providing this, the mirrors 4a and 4b attached to this galvanometer-type optical scanner 4 are rotated by an angle proportional to the marking position of each marking object 6 by a control section (not shown). This causes the light to be reflected and incident on the imaging lens 5. This makes it possible to position and move the laser beam within a movable region within a two-dimensional plane. Then, the positioned laser beam is minutely deflected and scanned by each of the mirrors 4a and 4b, and a mark is made in the shape of a desired character or the like in the same manner as when writing with a brush.

Also, within the movable range of the laser beam, the object 6 to be stamped is placed.
If a plurality of stamps are positioned at once, a plurality of stamps can be simultaneously stamped by one positioning operation, and the time required for stamping each stamp can be shortened. For example, when nine objects to be stamped were lined up within the laser beam irradiation area, an index of about 0.9 seconds/piece could be achieved.

FIG. 2 is a perspective view of the main parts of a laser marking machine showing another embodiment of the present invention. This laser stamping machine is a main part of the laser stamping machine described above, and is provided with a mechanism section for transporting and positioning the IC. That is, the parts feeder 7 has a means for branching and supplying the ICs, which are the objects 6 to be imprinted, separated into individual pieces into two rows alternately, and a mechanism for positioning and releasing the positioning of the objects 6 to be imprinted, which are sent in the two rows. This is because a stamping stage 8 is provided. The operation of this laser marking machine is such that while one of the marking targets e16 on the marking stage 8 is being stamped, the other marking target part 6 is positioned, and when the laser marking of the previous marking target is completed, the laser marking is performed. The laser beam is deflected and moved to the object 6 to be marked, which has already been positioned. Then, the beam is scanned to imprint the mark. By repeating such scanning alternately to mark the object to be marked 6 positioned on the stage 8, it is possible to reduce the loss due to the time required for transporting and positioning the object to be marked 6.

〔Effect of the invention〕

As explained above, the present invention provides a galvanometer-type optical skinner having a biaxial rotating mirror that reflects a laser beam at a predetermined deflection angle in two directions orthogonal to each other and deflects and scans the laser beam, and By providing an imaging lens with a size that includes an area into which the laser beam can enter, multiple objects to be marked can be placed within the laser beam irradiation area without using a mechanical conveyance positioning mechanism. This has the effect that the index can be shortened and an inexpensive and highly reliable laser marking machine can be obtained.

[Brief explanation of drawings]

FIG. 1 is a perspective view of the main parts of a laser stamping machine showing one embodiment of the invention, and FIG. 2 is a perspective view of the main parts of a laser marking machine showing another embodiment of the invention. 1... Laser oscillator, 2... Relay lens, 3. Galvanometer type optical skin inner, 4a, 4b...
・Mirror, 5... Imaging lens, 6... Stamped object, 7
... Parts feeder, 8... stage.

Claims (1)

[Claims] a galvanometer-type photo scanner having two rotating mirrors whose axes are orthogonal to each other, which reflect the laser beam at a predetermined angle in two directions perpendicular to each other, and deflect and scan the marking pattern; A laser marking machine characterized by comprising an imaging lens having a size that includes a light region.