JPH04127581U - pogo pin - Google Patents

Abstract

(57) [Summary] [Structure] A spirally wound spiral torsion leaf spring is used as the contact side terminal 12 of the pogo pin. [Effect] If this pogo pin is used for inspecting and testing the electrical characteristics of semiconductor devices, it is possible to perform more accurate and stable measurements than with conventional pogo pins. It is possible to reduce the number of parts, and costs can be reduced compared to conventional ones.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention has an electrical wiring pattern on the surface of one board and an electric wiring pattern on the surface of the other board. Pogo pin for electrically connecting with the provided electrical wiring pattern by contact Regarding.

0002

[Conventional technology]

This type of pogo pin is used, for example, in the wafer state in the semiconductor device manufacturing process. Inspecting and testing the electrical characteristics of chips and completed semiconductor devices. It is used at times.

0003 Figure 2 shows the electrical connection relationship between the measuring device and the object to be measured in the above-mentioned inspection/test. is schematically represented with the pogo pins in the center.

0004 In the figure, electrical wiring 2 is printed on the surface of a movable substrate 1. This printed wiring is connected to the electric circuit of the IC tester 3.

[0005] On the other hand, electric wiring 5 is also printed on the surface of the fixed substrate 4. This program The lint-wired electrical wiring 5 is connected to the test target via a probe card 6, for example. It is electrically connected to an IC chip 7 which is a fixed object.

[0006] A through hole is provided in a portion of the electric wiring 5 of the fixed board 4. A metal socket 8 is fixed here with solder or the like. This metal A fixed side terminal 9 of a pogo pin is fitted into the socket 8. This fixed side terminal 9 is made of metal and has a tube-like shape.

[0007] Here, the structure of the conventional pogo pin consists of a metal needle-shaped contact terminal 10 and a compressed The coil spring 11 is housed inside the fixed terminal 9.

[0008] With such a configuration, when measuring the electrical characteristics of the IC chip 7, the movable side substrate 1 is lowered to bring the electrical wiring 2 into contact with the contact side terminal 10 of the pogo pin.

[0009] In this way, the electrical wiring 2 and the contact side terminal 10 are connected to the compression coil spring 11. The contact is maintained by the repulsive force, and the IC tester 3 and the IC chip 7 are electrically connected and tested. Examinations and tests can be conducted.

0010 Although only one pogo pin is shown in Figure 2 for simplicity, it is usually A large number of eel pogo pins are provided on one board. For example, 512 lines were installed. There are also examples of people being kicked out.

[0011] Therefore, in the pogo pins described above, each pogo pin and the electrical wiring 2 are not in contact with each other. It is very important that this is done reliably.

0012 For this reason, conventionally, pogo pins with various structures have been used to improve contact with the electrical wiring 2. has been devised, and the shape of the tip of the contact side terminal 10 is, for example, a multi-point mesh shape, There are 1-point conical shapes, 4-point conical shapes, etc.

[0013]

[Problem that the idea aims to solve]

As explained above, conventionally, the shape of the contact side terminal 10 of the pogo pin has been devised in various ways. In this way, attempts have been made to improve contact with the electrical wiring 2.

[0014] By the way, in the conventional pogo pin, what is the shape of the tip of the contact side terminal 10? Once a product has been manufactured, its shape cannot be changed. do not have. Moreover, even if the movable side substrate 4 is brought into contact with the contact side terminal 10 and pressure is applied, the contact side There is basically no change in the tip shape of the terminal 10 itself.

[0015] For this reason, even if the tip shape of the contact side terminal 10 is made into a multi-point mesh shape, the electrical wiring It should be in contact with line 2 at multiple points, and the contact surface should be flat, which is an advantageous condition for contact. However, depending on the inclination of the contact surface, contact may occur at only a small point. It happens.

[0016] In such a case, the contact resistance of the pogo pin contact part may be higher than the resistance of other parts in the measurement system. When the resistor becomes incomparably larger than the resistor, and when a large current flows, Contact resistance may change over time due to oxidation on the contact end surface of the pogo pin. Therefore, it becomes impossible to stably perform high-precision measurements.

[0017] In addition, the conventional pogo pin has a fixed side terminal 9, a contact side terminal 10, and a compression coil. Each of the springs 11 requires high processing precision, and assembly requires a lot of man-hours. Therefore, there was a problem in that it was difficult to reduce the cost per weight.

[0018]

[Means to solve the problem]

The pogo pin of this invention is made by winding a metal plate in a spiral to create a repulsive force in the direction of the center line. It is characterized in that the contact side terminal is inserted into and held within the metal fixed side terminal.

[0019]

【Example】

Next, a preferred embodiment of the present invention will be described with reference to the drawings. Figure 1(a) 1 is a perspective view of a pogo pin according to an embodiment of the present invention; FIG.

[0020] In this embodiment, the contact side terminal 12 of the pogo pin is a vortex made of a metal plate spirally wound. A coiled torsion leaf spring is used, and this is inserted into a metal fixed terminal 9.

[0021] It does not use the compression coil springs used in conventional pogo pins. This is the top When the contact side terminal 12 having the above-mentioned structure is compressed in the direction of the center line, it will expand by itself. This is because a repulsive force is generated.

[0022] FIG. 1(b) is a sectional view showing the pogo pin of this embodiment in use. Figure 1 Insert the entire pogo pin shown in (a) into the metal socket 8 and fix it to the fixed board 4. Ru.

[0023] Electrical wiring 5 is printed on the fixed side board 4 as in the conventional case, and the socket 8 is This electrical wiring 5 is soldered.

[0024] In this state, if the movable side board 1 is brought into contact with it from above and pressed, the contact side terminal 12 will be Second, it contracts, and electrical contact is established between it and the electrical wiring 2 on the surface of the movable substrate 1. this place In this case, the shape of the contact side terminal 12 changes depending on the magnitude of the compressive force and the degree of inclination of the contact surface. Therefore, the contact is always linear or planar, and good contact is maintained.

[0025]

[Effect of the idea]

As explained above, in the present invention, the pogo pin is wound spirally as the contact side terminal. Since a spiral torsion leaf spring is used, the end of the spring will not touch the moving board. The child itself changes its shape with respect to the contact surface, and the contact is linear or planar. Ru.

[0026] Therefore, if the present invention is used for inspecting and testing the electrical characteristics of semiconductor devices, etc., it will be possible to Compared to conventional pogo pins, the contact resistance in the measurement system is lower, and even when a large current is applied, High accuracy and stability as contact resistance is less likely to change over time due to oxidation of the contact end surface, etc. This has the advantage that accurate measurements can be made.

[0027] In addition, in this invention, the contact side terminal itself is different from the compression coil spring in the conventional pogo pin. Because it plays the role of a screw, it is possible to reduce the number of parts, compared to conventional ones. This has the effect of reducing costs.

[Brief explanation of drawings]

FIG. 1 is a perspective view and a sectional view of an embodiment of the present invention in use.

FIG. 2 is a schematic cross-sectional view of a conventional pogo pin in use.

[Explanation of symbols] 1 Movable side board 2,5 Electrical wiring 3 IC tester 4 Fixed side board 6 Probe card 7 IC chip 8 socket 9 Fixed side terminal 10, 12 Contact side terminal 11 Compression coil spring

Claims (1)

[Scope of utility model registration request] 1. A pogo pin characterized in that a contact side terminal made of a spirally wound metal plate to provide a repulsive force in the direction of a center line is inserted into and held within a metal fixed side terminal.