JPH0412646U - - Google Patents
Info
- Publication number
- JPH0412646U JPH0412646U JP5345790U JP5345790U JPH0412646U JP H0412646 U JPH0412646 U JP H0412646U JP 5345790 U JP5345790 U JP 5345790U JP 5345790 U JP5345790 U JP 5345790U JP H0412646 U JPH0412646 U JP H0412646U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- wafer
- holder
- arm
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000032258 transport Effects 0.000 claims 5
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345790U JPH0412646U (fr) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345790U JPH0412646U (fr) | 1990-05-22 | 1990-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412646U true JPH0412646U (fr) | 1992-01-31 |
Family
ID=31574658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5345790U Pending JPH0412646U (fr) | 1990-05-22 | 1990-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412646U (fr) |
-
1990
- 1990-05-22 JP JP5345790U patent/JPH0412646U/ja active Pending