JPH03117835U - - Google Patents
Info
- Publication number
- JPH03117835U JPH03117835U JP2715090U JP2715090U JPH03117835U JP H03117835 U JPH03117835 U JP H03117835U JP 2715090 U JP2715090 U JP 2715090U JP 2715090 U JP2715090 U JP 2715090U JP H03117835 U JPH03117835 U JP H03117835U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- cassette exchange
- wafers
- cassettes
- exchange mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2715090U JPH03117835U (fr) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2715090U JPH03117835U (fr) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03117835U true JPH03117835U (fr) | 1991-12-05 |
Family
ID=31530018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2715090U Pending JPH03117835U (fr) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03117835U (fr) |
-
1990
- 1990-03-19 JP JP2715090U patent/JPH03117835U/ja active Pending