JPH02116736U - - Google Patents
Info
- Publication number
- JPH02116736U JPH02116736U JP2174590U JP2174590U JPH02116736U JP H02116736 U JPH02116736 U JP H02116736U JP 2174590 U JP2174590 U JP 2174590U JP 2174590 U JP2174590 U JP 2174590U JP H02116736 U JPH02116736 U JP H02116736U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- processing
- section
- wafer transfer
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 14
- 230000032258 transport Effects 0.000 claims 7
- 238000004140 cleaning Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2174590U JP2541887Y2 (ja) | 1990-03-02 | 1990-03-02 | ウエハの表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2174590U JP2541887Y2 (ja) | 1990-03-02 | 1990-03-02 | ウエハの表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02116736U true JPH02116736U (fr) | 1990-09-19 |
| JP2541887Y2 JP2541887Y2 (ja) | 1997-07-23 |
Family
ID=31239247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2174590U Expired - Lifetime JP2541887Y2 (ja) | 1990-03-02 | 1990-03-02 | ウエハの表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2541887Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252126A (ja) * | 1993-02-26 | 1994-09-09 | Sugai:Kk | 基板洗浄方法および基板洗浄システム |
-
1990
- 1990-03-02 JP JP2174590U patent/JP2541887Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06252126A (ja) * | 1993-02-26 | 1994-09-09 | Sugai:Kk | 基板洗浄方法および基板洗浄システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2541887Y2 (ja) | 1997-07-23 |
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