JPH04119373U - Vacuum exhaust equipment - Google Patents

Abstract

(57) [Summary] [Purpose] This invention relates to a vacuum evacuation device.
The purpose is to reduce the size of the device and provide a flexible device with excellent operability. [Structure] A vacuum evacuation device according to the present invention includes at least two vacuum pumps each having an inlet and an outlet, connected in series and in parallel, and each pipe is provided with at least one valve.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention relates to a vacuum evacuation device used to exhaust gas to obtain a vacuum state. It is something that

0002

[Conventional technology]

In conventional vacuum pumping equipment, multiple pumps are used to improve the ultimate pressure. In order to increase the pumping speed, multiple pumps can be placed in parallel. It was being arranged.

0003

[Problem that the idea aims to solve]

With the conventional series-connected vacuum evacuation equipment described above, even if the ultimate pressure is good, the evacuation speed is low. Very slow. In addition, with parallel-connected vacuum pumping equipment, the pumping speed increases, but Ultimate pressure deteriorates. Therefore, in order to improve both the ultimate pressure and pumping speed, it is necessary to It is necessary to configure multiple devices together, and the device itself becomes large. There was a problem.

0004 Therefore, the purpose of this invention is to improve ultimate pressure performance and pumping speed without increasing the size of the device. The goal is to improve our abilities together.

[0005]

[Means to solve the problem]

The above purpose is to connect at least two vacuum pumps with suction and discharge ports in series. and parallel piping, each with at least one valve. will be accomplished. In addition, the valve can be opened or closed based on the pressure detection means and the detection data of the pressure detection means. The above objective can be achieved more effectively by providing a control means to perform the above.

[0006]

[Effect]

The vacuum evacuation equipment configured as described above has a large capacity due to the opening and closing of valves in the piping. When the pressure is close to atmospheric pressure, connect multiple vacuum pumps in parallel to reduce the pressure. Accordingly, the piping is operated in series in sequence. In addition, the pressure detection means detects the pressure in the piping, and the detected data controls the opening and closing of the valve. Valve opening/closing operations are automatically performed by sending the signal to the control means that controls the valve. It becomes like this.

[0007]

【Example】

Hereinafter, the present invention will be explained with reference to the drawings. FIG. 1 is a front sectional view showing an embodiment of the exhaust system of the present invention. First, under pressure close to atmospheric pressure, open valves 2a and 2c, close valve 2b, Connect vacuum pumps 1a and 1b in parallel, then operate vacuum pumps 1a and 1b. The air in the exhaust target device (not shown) is compressed and exhausted. After reaching a certain level of vacuum at high pumping speeds, leave the vacuum pump running. Well, close the valves 2a and 2c and open the valve 2b, so that the vacuum pumps 1a and 1b are turned on directly. Connect in rows and continue to exhaust air. This will help you reach your goals. You will be able to get pressure.

[0008] FIG. 2 is a front sectional view showing another embodiment of the exhaust system of the present invention. This is a three-stage evacuation device consisting of four vacuum pumps 1a to 1d. First, under pressure close to atmospheric pressure, all four vacuum pumps are connected in parallel. Open valves 2a, 2c, 2d, and 2f and close valves 2b and 2e to compress and exhaust the air. I care. After the reduced pressure reaches a certain level at high pumping speed, valves 2a and 2c are closed. Then, 2b is opened to compress and exhaust air as a two-stage vacuum evacuation device. When the pressure has further decreased, close valves 2d and 2f and open valve 2e. , compresses and exhausts air as a three-stage vacuum evacuation device to obtain the target ultimate pressure. I will do it.

[0009] FIG. 3 shows still another embodiment of the exhaust system of the present invention, in which the vacuum exhaust system shown in FIG. A pressure detection means 5 and a control means 6 are provided at the same position. When the exhaust system is activated, the pipes installed in front of the suction ports of pumps 1a and 1b The pressure signal value S detected by the pressure detection means 5 is sent to the control means 6. the control hand Stage 6 determines that the pressure signal value S in the pipe is lower than the set first pressure signal value. In this case, valves 2a and 2c are closed and valve 2b is opened after a certain period of time. control The vacuum state further progresses to a point where the pressure signal value S is lower than the first pressure signal value. 2, the control means 6 closes the valves 2d and 2f; The valve 2e is operated to close after a certain period of time.

0010

[Effect of the idea]

As detailed above, according to the present invention, a valve that can be opened and closed is provided in the piping. Vacuum pumps can be connected in series or parallel by opening and closing, making it compact and low cost. This makes it possible to provide a flexible vacuum evacuation system that can be used for a long time. Also, Compared to conventional vacuum evacuation equipment of the same level, lower ultimate pressure and higher evacuation You can get speed. Furthermore, the pressure detection means and the detection data of the pressure detection means Therefore, if a control means for opening and closing the valve is provided, operability will be improved. .

[Brief explanation of drawings]

FIG. 1 is a piping diagram showing an embodiment of the exhaust device of the present invention.

FIG. 2 is a piping diagram showing another embodiment of the exhaust system of the present invention.

FIG. 3 is a piping diagram showing another embodiment of the exhaust system of the present invention.

[Explanation of symbols]

1 is a vacuum pump, 2 is a valve, 5 is a pressure detection means, and 6 is a control means.

Claims (2)

[Scope of utility model registration request] 1. A vacuum evacuation device characterized in that at least two vacuum pumps each having an inlet and an outlet are arranged in series and in parallel, and each pipe is provided with at least one valve. 2. Pressure detection means provided in the piping;
2. The evacuation device according to claim 1, further comprising control means for controlling opening and closing of the valve based on data output from the external pressure detection means.