JPS63198783A - Vacuum exhaust device - Google Patents
Vacuum exhaust deviceInfo
- Publication number
- JPS63198783A JPS63198783A JP2963787A JP2963787A JPS63198783A JP S63198783 A JPS63198783 A JP S63198783A JP 2963787 A JP2963787 A JP 2963787A JP 2963787 A JP2963787 A JP 2963787A JP S63198783 A JPS63198783 A JP S63198783A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- motor
- vacuum pump
- control valve
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野］
本発明は、真空排気装置に係り、特に真空容器内を大気
内からある真空圧力に真空するための真空排気装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vacuum evacuation device, and particularly to a vacuum evacuation device for evacuating the inside of a vacuum container from the atmosphere to a certain vacuum pressure.
従来の真空排気装置は、第４図に示すように、真空容器
１．真空ポンプ２．真空配管３から成り、真空容器１内
の気体を真空ポンプ２によって容器外へ排気する。該真
空ポンプには種々の形式のものがあるが、モータによっ
て駆動される形式の真空ポンプ、例えば油回転ポンプの
場合、真空ポンプの吸気口圧力Ｐとモータの消費動力り
の間には。As shown in FIG. 4, a conventional vacuum evacuation device includes a vacuum container 1. Vacuum pump 2. It consists of a vacuum pipe 3, and the gas inside the vacuum container 1 is exhausted to the outside of the container by a vacuum pump 2. There are various types of vacuum pumps, but in the case of a type of vacuum pump driven by a motor, such as an oil rotary pump, there is a difference between the suction port pressure P of the vacuum pump and the power consumption of the motor.
第３図に示すような関係がある。吸気口圧力がある圧力
ＰＯ以下の範囲では、モータの消費動力は吸気口圧力Ｐ
に関係なくほぼ一定の値Ｌｏだが、圧力が２１以上にな
ると徐々に増加し、ある吸気口圧力Ｐｉで最大値Ｌｉと
なる。There is a relationship as shown in Figure 3. When the intake port pressure is below a certain pressure PO, the power consumption of the motor is equal to the intake port pressure P.
The value Lo is almost constant regardless of the pressure, but it gradually increases when the pressure exceeds 21, and reaches the maximum value Li at a certain intake port pressure Pi.
前記真空容器１の内部の圧力が最初大気圧Ｐ＆である場
合、真空ポンプ２の運転範囲はＰａ以下、真空ポンプの
到達圧力Ｐｕ以上のあらゆる範囲に渡るが、前述のＬ１
付近の出力で使用する時間が短い場合は、モータの定格
出力としてＬｏ以上。When the pressure inside the vacuum container 1 is initially atmospheric pressure P&, the operation range of the vacuum pump 2 ranges from below Pa to above the ultimate pressure Pu of the vacuum pump.
If you use a nearby output for a short time, use Lo or more as the motor's rated output.
Ｌｉ以上の値を選んでも問題はない。しかし、真空容器
１の大きさが大きいと、ＬＬ付近の出力で運転される時
間が長くなるため、モータは過負荷となってしまう、こ
れを避けるため、通常モータはＬｉ以上の定格出力のも
のを選定していた。There is no problem even if a value higher than Li is selected. However, if the size of the vacuum vessel 1 is large, the time spent operating at an output near LL will be longer, resulting in the motor being overloaded.To avoid this, the motor is usually designed with a rated output of Li or higher. was selected.
なお、この種の装置に使用される真空ポンプとして関連
するものには例えば特開昭６０−２０４９９７号などが
挙げられる。Incidentally, related vacuum pumps used in this type of apparatus include, for example, Japanese Patent Application Laid-Open No. 60-204997.
上記従来技術は、モータの定格出力についての配慮がさ
れておらず、吸気口圧力が低い状態で使用することの多
い場合には、必要以上に出力の大きなモータを組み合わ
せていることになり、真空ポンプ全体が大きくなるとい
う問題点があった。The above conventional technology does not take into account the rated output of the motor, and if it is often used with low intake port pressure, it ends up combining a motor with a larger output than necessary, and the vacuum There was a problem that the entire pump became large.
本発明の発明は、真空ポンプの小形化を図るようにした
真空排気装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum evacuation device in which the size of the vacuum pump is reduced.
上記目的は、真空ポンプ吸気口と真空容器の間に圧力制
御弁を設け、真空ポンプのモータの入口電流によって圧
力制御弁を操作し、真空ポンプ吸気口圧力を制御するこ
とにより達成される。The above object is achieved by providing a pressure control valve between the vacuum pump inlet and the vacuum vessel, and operating the pressure control valve by the inlet current of the vacuum pump motor to control the vacuum pump inlet pressure.
モータの入力電流値がある値以上にならないように、制
御器によって圧力制御弁を制御する。これによって真空
ポンプ吸気口圧力が常に低くなり、モータの定格出力を
越えない範囲で運転することができる。A pressure control valve is controlled by a controller so that the input current value of the motor does not exceed a certain value. As a result, the vacuum pump inlet pressure is always low, and the motor can be operated within a range that does not exceed its rated output.
以下１本発明装置の一実施例を、第１図によって説明す
る。An embodiment of the apparatus of the present invention will be described below with reference to FIG.
真空排気装置は、真空ポンプ２．真空配管３゜圧力制御
弁４．制御器６から構成され、これが真空容器１に接続
されている。真空ポンプ２は、モータ５によって駆動さ
れるが、とのモータ５の定格出力は、第２図に示すＬｚ
に設定されている。The vacuum evacuation device is a vacuum pump 2. Vacuum piping 3゜Pressure control valve 4. It consists of a controller 6, which is connected to the vacuum container 1. The vacuum pump 2 is driven by a motor 5, and the rated output of the motor 5 is Lz shown in FIG.
is set to .
また、制御器６は、モータ５の入力電流値を入力信号と
し、圧力制御弁４の制御信号を出力信号としている。Further, the controller 6 uses the input current value of the motor 5 as an input signal, and uses the control signal of the pressure control valve 4 as an output signal.
本装置の運転パターンは、以下の通りである。The operating pattern of this device is as follows.
まず、圧力制御弁４が全閉の状態で、モータ５を起動す
る。モータ５が定格回転数に達したら、圧力制御弁４を
徐々に開いていき、モータ５の入力電流値を制御器６へ
取り込む。この入力電値が、第２図に示すモータ５の消
費動力Ｌｘに相当する値に達したら、その時点で圧力制
御弁４の開度をホールドする。時間と共に真空容器１の
内部の圧 ・力は低下していき、それに伴なって真空ポ
ンプ吸気口圧力も低下し、モータ５の消費動力も少なく
なっていく。そこでモータ５の電流値により、モータ５
の消費動力がＬｍに近くなるように、制御器６から信号
を出して、圧力制御弁４の開度をあけていく、最終的に
は、真空容器１の内部圧力が十分に低くなると、圧力制
御弁４は全開となり。First, the motor 5 is started with the pressure control valve 4 fully closed. When the motor 5 reaches its rated rotational speed, the pressure control valve 4 is gradually opened and the input current value of the motor 5 is taken into the controller 6. When this input electric power value reaches a value corresponding to the power consumption Lx of the motor 5 shown in FIG. 2, the opening degree of the pressure control valve 4 is held at that point. As time passes, the pressure and force inside the vacuum container 1 decreases, and accordingly, the pressure at the vacuum pump inlet port also decreases, and the power consumption of the motor 5 also decreases. Therefore, depending on the current value of the motor 5, the motor 5
The controller 6 issues a signal to increase the opening of the pressure control valve 4 so that the power consumption approaches Lm.Finally, when the internal pressure of the vacuum vessel 1 becomes sufficiently low, the pressure Control valve 4 is fully open.
真空排気装置の到達圧力に達するまで排気を続ける。Continue evacuation until the ultimate pressure of the evacuation device is reached.
本実施例によれば、真空ポンプの吸気口圧力が常にモー
タの定格出力を越えないように制御されるので、真空容
器の容積が任意の大きさであっても、モータを過負荷に
しないで運転することが可能である。According to this embodiment, the inlet pressure of the vacuum pump is controlled so as not to always exceed the rated output of the motor, so even if the volume of the vacuum container is arbitrary, the motor will not be overloaded. It is possible to drive.
本発明によれば、真空ポンプのモータの定格出力を小さ
く設定することができるので、真空ポンプ全体の小形化
を図ることができるという効果がある。According to the present invention, since the rated output of the vacuum pump motor can be set to a small value, the vacuum pump as a whole can be made smaller.
第１図は本発明の真空排気装置の一実施例を示す系統図
、第２図および第３図は本発明装置における真空ポンプ
の駆動モータの消費動力特性を示す図、第４図は従来の
真空排気装置を示す系統図である。
１・・・真空容器、２・・・真空ポンプ、３・・・真空
配管、も ／ ロ
ロＦ！ｊ、坂ロ斥力Ｐ
も ３ 囚
帷気口斤力Ｐ
≠４ 固
３・真ヅに、、着Fig. 1 is a system diagram showing one embodiment of the vacuum evacuation device of the present invention, Figs. 2 and 3 are diagrams showing the power consumption characteristics of the drive motor of the vacuum pump in the device of the present invention, and Fig. 4 is a diagram showing the power consumption characteristics of the drive motor of the vacuum pump in the device of the present invention. It is a system diagram showing a vacuum evacuation device. 1...Vacuum container, 2...Vacuum pump, 3...Vacuum piping, too / Roro F! j, Sakaro's repulsive force P also 3 Prisoner's air force P ≠ 4 Arrived at solid 3, Madzu.
Claims (1)
大気圧から引くことのできる真空ポンプと、該真空容器
と該真空ポンプの吸気口を接続する配管とから成る真空
排気系において、前記真空容器と前記真空ポンプとの間
に圧力制御弁を設け、該圧力制御弁を真空ポンプのモー
タ入力電流値によつて制御することを特徴とする真空排
気装置。1. In a vacuum evacuation system consisting of a vacuum container of any size, a vacuum pump driven by a motor and capable of drawing from atmospheric pressure, and piping connecting the vacuum container and the inlet of the vacuum pump, the vacuum A vacuum evacuation device, characterized in that a pressure control valve is provided between the container and the vacuum pump, and the pressure control valve is controlled by a motor input current value of the vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963787A JPS63198783A (en) | 1987-02-13 | 1987-02-13 | Vacuum exhaust device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963787A JPS63198783A (en) | 1987-02-13 | 1987-02-13 | Vacuum exhaust device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63198783A true JPS63198783A (en) | 1988-08-17 |
Family
ID=12281596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2963787A Pending JPS63198783A (en) | 1987-02-13 | 1987-02-13 | Vacuum exhaust device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63198783A (en) |
-
1987
- 1987-02-13 JP JP2963787A patent/JPS63198783A/en active Pending
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