JPH04114992A - Method for controlling single crystal production device - Google Patents

Method for controlling single crystal production device

Info

Publication number
JPH04114992A
JPH04114992A JP23403090A JP23403090A JPH04114992A JP H04114992 A JPH04114992 A JP H04114992A JP 23403090 A JP23403090 A JP 23403090A JP 23403090 A JP23403090 A JP 23403090A JP H04114992 A JPH04114992 A JP H04114992A
Authority
JP
Japan
Prior art keywords
temperature
crucible
heater
input
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23403090A
Other languages
Japanese (ja)
Inventor
Hirobumi Harada
Kiyoshi Kojima
Takeshi Yamauchi
Satoshi Kato
Seiji Shinoyama
Original Assignee
Nippon Steel Corp
Nittetsu Denshi Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Nittetsu Denshi Kk filed Critical Nippon Steel Corp
Priority to JP23403090A priority Critical patent/JPH04114992A/en
Publication of JPH04114992A publication Critical patent/JPH04114992A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To uniform oxygen concentration, stabilize quality and improve yield of a single crystal by controlling electric power amounts of a bottom heater and side heater so as to coincide temperature of a crucible side part with temperature of a crucible bottom.
CONSTITUTION: An emitting light signal emitted from a side heater 4 for heating the side part of a crucible 3 is detected by the first temperature sensing member 26 provided opposite to through hole 4 opened in a heating chamber 2a and heat insulating cylinder 5 and the detected value is input to a temperature converter 27 to measure the temperature. On the one hand, the bottom of crucible 3 is heated with a bottom heater 22a and the temperature is detected with the second temperature sensing member 28 and input to a controller 30. Then signal from the converter 27 is operated in a operating device 29 and input to the controller 30. Electric powder amounts of the side heater 4 and bottom heater 22a are controlled so as to keep objective temperature of crucible bottom and temperature of crucible bottom measured by the sensing member 28 in a range previously set.
COPYRIGHT: (C)1992,JPO&Japio
JP23403090A 1990-09-04 1990-09-04 Method for controlling single crystal production device Pending JPH04114992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23403090A JPH04114992A (en) 1990-09-04 1990-09-04 Method for controlling single crystal production device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23403090A JPH04114992A (en) 1990-09-04 1990-09-04 Method for controlling single crystal production device

Publications (1)

Publication Number Publication Date
JPH04114992A true JPH04114992A (en) 1992-04-15

Family

ID=16964463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23403090A Pending JPH04114992A (en) 1990-09-04 1990-09-04 Method for controlling single crystal production device

Country Status (1)

Country Link
JP (1) JPH04114992A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3396029A1 (en) * 2017-04-26 2018-10-31 Toyota Jidosha Kabushiki Kaisha Sic single crystal production method and production apparatus
CN109750350A (en) * 2019-03-20 2019-05-14 丽江隆基硅材料有限公司 A kind of method and single crystal growing furnace adjusting single crystal furnace heater power

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3396029A1 (en) * 2017-04-26 2018-10-31 Toyota Jidosha Kabushiki Kaisha Sic single crystal production method and production apparatus
CN109750350A (en) * 2019-03-20 2019-05-14 丽江隆基硅材料有限公司 A kind of method and single crystal growing furnace adjusting single crystal furnace heater power

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