JPH04113926U - Vacuum pressure bonding device with rubber plate structure - Google Patents

Abstract

(57) [Abstract] [Purpose] This is an adhesive technology that allows a large area of adhesive surface to be adhered to a uniform adhesive layer with high precision.Therefore, the issue is whether uniform pressure can be applied to the flexible adhesive area. The purpose is to achieve a vacuum pressure bonding structure that provides uniform pressure. [Structure] From FIG. 1, the vacuum container 3 is integrated with a lower rubber plate 4 having a lattice-shaped protrusion on the inside, adhesive members 10 and 11 are placed on that part, and then the upper rubber plate A lid member 5, which is integrated with a lid member 5 having a grid-like protrusion on the inner surface of the container 1, is mounted and fixed via an O-ring 9.The vacuum container 3 is equipped with a vacuum exhaust pipe 8, a pressure gauge 6, and a vacuum pump 7. It has a connected configuration, and is characterized in that when it is evacuated, a uniformly distributed pressurizing force P is applied to the lattice-shaped vacuum evacuation space 2 formed on the upper and lower surfaces of the adhesive members 10 and 11. There is. [Effects] (1) By achieving uniform pressure, the thickness of the adhesive layer is maintained with high precision, making it possible to bond with high flatness. (2) Large-area bonding achieves flatness (20 μm/400 mm) and high precision, making it possible to manufacture bases for composite materials and reduce weight.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The precision structure that controls the large-area XY table with high precision is used for measuring equipment and semiconductor devices. The field of application is body manufacturing equipment, etc., and the trend is toward higher performance and control speed. As a means of achieving this goal, composite material structures using adhesive structures have been proposed. It is expected that the weight of the cable will be reduced and control speed will be increased.

0002

[Conventional technology]

FIG. 3 shows a conventional rubber plate structure vacuum pressure bonding device using a thick plate jig pressure method.

0003 As shown in the figure, the adhesive members 10 and 11 are attached to a vacuum container 3 having a pressure section on the lower surface of the lower rubber plate 4B. Set it on the thick plate jig 15 inside, place the thick plate jig 15 for upper pressure on it, Next, attach the lid member 5 having the upper surface pressure part of the upper rubber plate 1B via the O-ring 9 as shown in the figure. Fix it on the vacuum container 3.

0004 In addition, the vacuum container 3 is evacuated by the vacuum pump 7 through the vacuum exhaust pipe 8, and the pressure at that time is is displayed on the vacuum pressure gauge 6.

When vacuum evacuation is performed in the vacuum container 3 as described above, the pressure in the internal vacuum evacuation space 2 decreases, creating a pressure difference with the external atmosphere (atmospheric pressure), resulting in a pressure of P of 1 kg/kg. cm ² is applied to the rubber plates 1B and 4B as pressurizing force. Therefore, only the periphery of the thick plate jig 15 on the upper and lower surfaces, that is, only the rubber plates in the illustrated evacuation space 2 are strongly pressurized.

[0006] At this time, the upper and lower rubber plates 1B and 4B near the periphery of the thick plate jig 15 are in close contact with the thick plate. As a result, a contact area A area is created near the periphery, and as a result, the area closer to the center than the contact area A is The inside of the rubber plate is not evacuated and the pressure remains close to atmospheric pressure, so the central part No pressure will be applied at all.

[0007] Therefore, the pressure applied to the adhesive members 10 and 11 is the pressure applied around the thick plate jig 15. The force P is only applied as a divided pressing force p for the entire thick plate jig 15.

[0008] Therefore, a sufficient pressing force is not applied.

[0009]

[Problem that the idea aims to solve]

Figure 2 shows that there are parts that are not pressurized due to the airtight seal phenomenon in the pressurizing rubber plate. This shows an example.

According to the figure, when the ring 13 is placed in the center of the disk 12 and covered with a rubber plate 14 and evacuated as shown by the arrow, the evacuated space 2 around the disk has a pressure difference from atmospheric pressure. On ^the other hand, at the area of surface contact between the disc 12 and the rubber plate 14, the rubber plate 14 is pressed by the pressing force around the disc 12, and the area near the periphery of the ring 13 is applied. In this state, the rubber plate 14 is pushed up by the ring 13 and the space formed is not evacuated and has a pressure P ₀ close to atmospheric pressure.

[0011] In other words, since no pressure difference occurs, no pressing force is applied.

0012 Therefore, the present invention enables uniform pressing force to be applied to the disk 12 and ring 13. In order to achieve this, we devised a pressurizing part structure that can form a uniformly distributed vacuum exhaust space 2. Creates a pressure difference with the external atmospheric pressure, resulting in a uniformly distributed pressurizing force. The purpose is to

[0013]

[Means to solve the problem]

The pressurizing surface of the adhesive member is expected to be flat or uneven; A lattice-shaped protrusion is placed on the inside of the rubber plate that serves as the pressure member, that is, on the side that contacts the pressure surface of the adhesive member. The vacuum evacuation space must be distributed and formed between the pressurized surface of the rubber plate and the adhesive member. We adopted a vacuum pressure bonding method using a rubber plate structure with lattice-like protrusions.

[0014]

[Effect]

In order to apply uniform and sufficient pressure to the bonded parts, it is necessary to apply uniform pressure to the entire bonded part. Create a dispersed vacuum evacuation space such that the It is necessary to create a structure that allows this to occur.

[0015] That is, according to the embodiment shown in FIG. By providing the shaped protrusion, when the inside of the vacuum container 3 is evacuated, the adhesive member A vacuum exhaust space 2 distributed in a grid pattern is formed between 10 and 11 and the upper and lower rubber plates 1 and 4. , a pressurizing force P due to the pressure difference between that part and the outside air pressure is applied to the entire adhesive member, creating an effective vacuum. A pressure bonding method is achieved.

[0016]

【Example】

Figure 1 shows an example of a vacuum pressure bonding device with grid-like protrusions on the inner surface of the rubber plate. A structural diagram is shown.

[0017] As shown in the figure, the adhesive members 10 and 11 are integral with the lower rubber plate 4 having a lattice-like protrusion. Set it in the empty container 3 and insert the lid member 5 integrated with the upper rubber plate 1 with the protrusion from above in the same way. Set it on the vacuum container 3 as shown in the figure through the sealing O-ring 9, and connect it to the external atmosphere and the machine. It is made of a secretly sealed item.

[0018] The vacuum container 3 with the adhesive members 10 and 11 set therein is connected to the vacuum pump through the vacuum exhaust pipe 8. The pressure reached at that time is displayed on the pressure gauge 6.

[0019] As shown in the figure, when the three parts of the vacuum container are evacuated, the adhesive members 10 and 11 are A vacuum exhaust space 2 is formed in the lattice-like protrusions of the rubber plates 1 and 4 that are in contact with the surrounding and upper and lower surfaces. This creates a pressure difference between the atmospheric pressure of the external atmosphere and the distributed pressurizing force as shown in the figure. P is applied as a pressing pressure depending on the size of the spatial cross section of the vacuum evacuation space 2 formed. That's what happens.

[0020] That is, the lattice-shaped protrusions are in contact with the entire upper and lower surfaces of the adhesive members 10 and 11, so that the adhesive members 10 and 11 are uniformly coated. By dispersing the vacuum evacuation space 2, a uniform pressurizing force can be applied. ing.

[0021] Therefore, a highly accurate and uniform adhesive layer can be achieved especially when bonding a large area.

[0022]

[Effect of the idea]

The effects of this invention are shown below.

[0023] (1) Achieving uniform pressure force allows for flat bonding of large areas (20 μm/400 mm) and high precision (2) High-precision bases, XY tables, etc. made of different materials can be achieved by achieving high-precision adhesion. Can be manufactured.

[0024] (3) The use of composite adhesives made from a combination of different materials reduces weight and speeds up motion control. It can be expected to be more efficient and economical.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a vacuum pressurizing type bonding device having a grid-like protrusion on the inner surface of a rubber plate according to the present invention.

FIG. 2 is a diagram illustrating an example in which a portion of the pressurizing rubber plate portion is not pressurized due to an airtight seal phenomenon.

FIG. 3 is a diagram showing a conventional vacuum pressure bonding device for rubber plate structures using a thick plate jig.

[Explanation of symbols]

1...Top rubber plate, 2...Evacuation space, 3...Vacuum container, 4...
Lower rubber plate, 5...lid member, 6...pressure gauge, 7...vacuum pump,
8... Exhaust pipe, 9... O ring, 10, 11... Adhesive member, 12
... Disc, 13... Ring, 14... Rubber plate, 15... Thick plate jig, 1B... Upper rubber plate, 4B... Lower rubber plate, A... Close contact part, P
...Applying force (atmospheric pressure), P ₀ ... Weak pressing force, p... Divided pressure.

Claims (1)

[Scope of utility model registration request] Claim 1: In a vacuum pressure bonding device having a rubber plate structure, a lattice-shaped protrusion is provided on the inner surface of the rubber plate, so that the protrusion forms a lattice in the contact area with the upper and lower surfaces of the adhesive member. 1. A vacuum pressure bonding device having a rubber plate structure, which is characterized in that a vacuum evacuation space is formed in the form of a vacuum evacuation space, and as a result, a bonding member can be uniformly pressurized due to the pressure difference between the evacuation space portion and external atmospheric pressure.