JPH0410998U - - Google Patents
Info
- Publication number
- JPH0410998U JPH0410998U JP5114990U JP5114990U JPH0410998U JP H0410998 U JPH0410998 U JP H0410998U JP 5114990 U JP5114990 U JP 5114990U JP 5114990 U JP5114990 U JP 5114990U JP H0410998 U JPH0410998 U JP H0410998U
- Authority
- JP
- Japan
- Prior art keywords
- concentric circles
- electric field
- permanent magnets
- polar directions
- vector due
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005684 electric field Effects 0.000 claims 3
- 230000004907 flux Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5114990U JPH0633680Y2 (ja) | 1990-05-16 | 1990-05-16 | 電子サイクロトロン共鳴プラズマ発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5114990U JPH0633680Y2 (ja) | 1990-05-16 | 1990-05-16 | 電子サイクロトロン共鳴プラズマ発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0410998U true JPH0410998U (fr) | 1992-01-29 |
| JPH0633680Y2 JPH0633680Y2 (ja) | 1994-08-31 |
Family
ID=31570327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5114990U Expired - Lifetime JPH0633680Y2 (ja) | 1990-05-16 | 1990-05-16 | 電子サイクロトロン共鳴プラズマ発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0633680Y2 (fr) |
-
1990
- 1990-05-16 JP JP5114990U patent/JPH0633680Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0633680Y2 (ja) | 1994-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |