JPH04109542A - High frequency induction coupled plasma mass spectrometer - Google Patents

High frequency induction coupled plasma mass spectrometer

Info

Publication number
JPH04109542A
JPH04109542A JP2227109A JP22710990A JPH04109542A JP H04109542 A JPH04109542 A JP H04109542A JP 2227109 A JP2227109 A JP 2227109A JP 22710990 A JP22710990 A JP 22710990A JP H04109542 A JPH04109542 A JP H04109542A
Authority
JP
Japan
Prior art keywords
flow rate
gas flow
mass spectrometer
coupled plasma
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2227109A
Other languages
Japanese (ja)
Inventor
Keiichi Terashi
寺師 景一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP2227109A priority Critical patent/JPH04109542A/en
Publication of JPH04109542A publication Critical patent/JPH04109542A/en
Pending legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To prevent detection sensitivity lowering at the time of analysis by providing a controller making a gas flow rate at the time of analysis smaller by a fixed value alpha than that at the time of sensitivity adjustment. CONSTITUTION:The adjustment of detection sensitivity is made so as to make the signal strength of an argon dimer become maximum. After such a sensitivity adjustment is finished, the analysis of a specimen is made at a gas flow rate B smaller than that A used in the sensitivity adjustment. Here the relation, B=A-alpha, exists between the gas flow rates A and B, and the value of alpha is previously determined from data obtained by experiments, etc., to be memorized in a memory within a controller 21. Thereupon a gas flow rate supplied to ICP-MS is made the same flow rate A as at the time of sensitivity adjustment. Consequently the maximum signal can be obtained when a specimen is vaporized in a heat vaporization induction device, and sensitivity lowering can be prevented.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、高周波誘導結合プラズマ質量分析計(以下、
ICP−MSと略す)に関し、更に詳しくは、加熱気化
導入装置で試料を気化させるときに最大信号が得られる
ようにしたICP−MSに関する。
[Detailed Description of the Invention] <Industrial Application Field> The present invention is directed to a high frequency inductively coupled plasma mass spectrometer (hereinafter referred to as
The present invention relates to ICP-MS (abbreviated as ICP-MS), and more specifically relates to ICP-MS in which the maximum signal is obtained when a sample is vaporized with a heating vaporization introduction device.

〈従来の技術〉 ICP−MSは高性能元素分析装置として広く知られて
おり、高周波誘導結合プラズマを用いて試料を励起させ
、生じたイオンをノズルとスキマからなるインターフェ
イスを介して質量分析計に導いて電気的に検出し該イオ
ン量を精密に測定することにより、試料中の被測定元素
を高精度に分析するように構成されている。
<Conventional technology> ICP-MS is widely known as a high-performance elemental analyzer, and uses high-frequency inductively coupled plasma to excite a sample, and the generated ions are sent to a mass spectrometer through an interface consisting of a nozzle and a gap. The device is configured to analyze the element to be measured in the sample with high precision by electrically detecting the ions and precisely measuring the amount of the ions.

Claims (1)

【特許請求の範囲】[Claims] 高周波誘導結合プラズマを用いて試料を励起させ、生じ
たイオンをノズルとスキマーからなるインターフェイス
を介して質量分析計に導いて電気的に検出し該イオン量
を精密に測定することにより、試料中の被測定元素を高
精度に分析する高周波誘導結合プラズマ質量分析計にお
いて、分析時のガス流量を感度調整時のガス流量よりも
一定値αだけ小とするコントローラを設けたことを特徴
とする高周波誘導結合プラズマ質量分析計。
The sample is excited using high-frequency inductively coupled plasma, and the generated ions are guided to a mass spectrometer through an interface consisting of a nozzle and skimmer, where they are electrically detected and the amount of ions precisely measured. A high-frequency inductively coupled plasma mass spectrometer that analyzes elements to be measured with high precision, characterized by being equipped with a controller that makes the gas flow rate during analysis smaller by a fixed value α than the gas flow rate during sensitivity adjustment. Coupled plasma mass spectrometer.
JP2227109A 1990-08-29 1990-08-29 High frequency induction coupled plasma mass spectrometer Pending JPH04109542A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2227109A JPH04109542A (en) 1990-08-29 1990-08-29 High frequency induction coupled plasma mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2227109A JPH04109542A (en) 1990-08-29 1990-08-29 High frequency induction coupled plasma mass spectrometer

Publications (1)

Publication Number Publication Date
JPH04109542A true JPH04109542A (en) 1992-04-10

Family

ID=16855621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2227109A Pending JPH04109542A (en) 1990-08-29 1990-08-29 High frequency induction coupled plasma mass spectrometer

Country Status (1)

Country Link
JP (1) JPH04109542A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2537914A (en) * 2015-04-30 2016-11-02 Thermo Fisher Scient (Bremen) Gmbh Flow reduction system for isotope ratio measurements

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2537914A (en) * 2015-04-30 2016-11-02 Thermo Fisher Scient (Bremen) Gmbh Flow reduction system for isotope ratio measurements
JP2016212101A (en) * 2015-04-30 2016-12-15 サーモ フィッシャー サイエンティフィック (ブレーメン) ゲーエムベーハー Flow reduction system for isotope ratio measurement
GB2537914B (en) * 2015-04-30 2019-03-20 Thermo Fisher Scient Bremen Gmbh Flow reduction system for isotope ratio measurements

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