JPH0410737B2 - - Google Patents

Info

Publication number
JPH0410737B2
JPH0410737B2 JP59261467A JP26146784A JPH0410737B2 JP H0410737 B2 JPH0410737 B2 JP H0410737B2 JP 59261467 A JP59261467 A JP 59261467A JP 26146784 A JP26146784 A JP 26146784A JP H0410737 B2 JPH0410737 B2 JP H0410737B2
Authority
JP
Japan
Prior art keywords
layer
silicon
alkaline solution
bonded
silicon wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59261467A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61139032A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59261467A priority Critical patent/JPS61139032A/ja
Publication of JPS61139032A publication Critical patent/JPS61139032A/ja
Publication of JPH0410737B2 publication Critical patent/JPH0410737B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
JP59261467A 1984-12-11 1984-12-11 シリコン・エツチング法 Granted JPS61139032A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59261467A JPS61139032A (ja) 1984-12-11 1984-12-11 シリコン・エツチング法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59261467A JPS61139032A (ja) 1984-12-11 1984-12-11 シリコン・エツチング法

Publications (2)

Publication Number Publication Date
JPS61139032A JPS61139032A (ja) 1986-06-26
JPH0410737B2 true JPH0410737B2 (Direct) 1992-02-26

Family

ID=17362304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59261467A Granted JPS61139032A (ja) 1984-12-11 1984-12-11 シリコン・エツチング法

Country Status (1)

Country Link
JP (1) JPS61139032A (Direct)

Also Published As

Publication number Publication date
JPS61139032A (ja) 1986-06-26

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