JPH0410687Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of a sample stage moving device used for electron beam exposure and the like.

[Prior Art] A conventional example of a sample stage moving device used for electron beam exposure etc. is shown in FIGS. 4 and 5. FIG. 5 is a sectional view taken along line A-A' in FIG. In FIGS. 4 and 5, reference numeral 1 denotes a screw-like rotating shaft, and the screw-like rotating shaft 1 is rotated via a motor 2 and a coupling 3. In FIG. 4 is a movement axis for moving the sample stage 6 within the chamber 5. A nut 7 screwed onto the threaded rotating shaft 1 is fixed to the moving shaft 4. 8 is a block fixed to the moving shaft 4, and an L-shaped leaf spring 9 is attached to the block 8 as shown in FIG.
A roller 10 and a roller 11 are attached to the block 8 and the L-shaped leaf spring 9, respectively. Reference numeral 12 denotes a U-shaped guide fixed to the case 13, and the roller 1 is placed in the concave portion of the guide 12.
0 and 11 are inserted. The L-shaped leaf spring 9 prevents play between the roller and the guide when the roller hits the guide to restrict rotation of the moving shaft 4, as will be described later. Reference numeral 14 denotes a spring that always presses the moving shaft 4 in one direction to eliminate backlash of the nut 7 that is threadedly engaged with the screw-like rotating shaft 1. 1
Reference numeral 5 designates the upper lid of the case 13, and the interior of the case is kept vacuumed by an O-ring.

In the device configured in this manner, since the rollers 10 and 11 are in contact with the guide 12, rotation of the moving shaft 4 is restricted. Therefore, the screw-like rotating shaft 1
When rotates, the moving shaft 4 moves in the horizontal direction, and as a result, the sample stage 6 can be moved.

[Problems to be solved by the present invention] In the device configured as described above, the moving shaft 4 has a spring 1 for preventing back crash.
However, as the moving shaft 4 moves, the length of the spring 14 changes, so the elastic force also changes. Therefore, when the rollers 10 and 11 press and move the concave portion of the guide 12 while rotating, the guide 12 of the rollers 10 and 11
The pressing force on will also change. Therefore, if the L-shaped leaf spring 9, which prevents play between the guide and the rollers, becomes fatigued and the moving shaft is restricted from rotating left and right, play will occur between the rollers 11 and the guides 8, causing the sample stage to move. It had the drawback of not being able to move accurately.

An object of the present invention is to provide an apparatus that can move a sample stage with high precision by keeping the elastic force of a spring constant when a moving axis moves and eliminating play between a guide and a roller.

[Means for Solving the Problem] The configuration of the present invention for solving the problem is such that the rotational movement of a screw-like rotating shaft coupled to a rotating shaft of a motor, etc. is screwed into the screw-like rotating shaft. A moving shaft that is transmitted through a nut, a roller provided on the moving shaft for regulating the rotational motion of the moving shaft, and a roller that regulates the rotational motion of the moving shaft and converts it into linear motion. The device is characterized in that it includes a spring that applies a constant pressing force to the threaded portion of the screw-like rotating shaft and the nut.

[Examples] Examples of the present invention will be described below in detail based on the accompanying drawings.

FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a sectional view taken along line B-B' of the embodiment of the device shown in FIG. Incidentally, the same parts as in the conventional example shown in FIG. 4 are given the same numbers, and the explanation thereof will be omitted. In FIGS. 1 and 2, 20 is a moving shaft for moving the sample stage 6, and a spring 2 is used to prevent the moving shaft 20 and the nut 7 from collapsing.
1 is placed between the moving shaft 20 and the nut 22. Reference numeral 23 denotes a block to which the moving shaft 20 is fixed, and rollers 24 and 25 are attached to the block 23 with their positions slightly shifted, as shown in FIG. 26 and 27 are fixing screws 2
The rollers 24 and 25 are inserted into the gap W formed by the guide plates 26 and 27. . 32 and 33 are pins for preventing the nut 22 from loosening;
34 is the upper lid of the case 13.

In the device configured as described above, a spring 21 is provided between the nut 7 and the nut 22 that are screwed together with the screw-like rotating shaft 1 to prevent back crushing.
is arranged, and since the spring 21 always has a constant length even when the moving shaft 20 moves, the pressing force remains constant. Further, the gap W between the guide plates 27 and 28 can be adjusted by loosening the fixing screws 28, 29, 30, and 31 as appropriate, so that they can be installed while maintaining accurate parallelism. Therefore, the moving shaft 20 is
4 and 25, but as shown in Fig. 3, the rollers 24 and 25 are installed with their respective positions slightly shifted, so the moving axis moves horizontally while being subject to rotation from side to side. Eliminates looseness between the case guide plate and roller.

[Effects of the invention] As described in detail above, according to the invention, by keeping the elastic force of the spring constant to eliminate backlash when the moving shaft moves, it is possible to improve the elastic force of the spring when the moving shaft is restricted from rotating. Provided is a device that moves a sample stage with high precision by eliminating backlash that occurs between a guide and a roller.

[Brief explanation of the drawing]

Fig. 1 is a configuration diagram of an embodiment of the present invention, Fig. 2 is a sectional view taken along line B-B' of the embodiment device of Fig. 1, and Fig. 3 explains the main parts of the embodiment device of Fig. 1. diagram for,
FIG. 4 is a diagram for explaining a conventional example, and FIG. 5 is a diagram for explaining a cross-sectional view taken along line A-A' of the conventional device in FIG. DESCRIPTION OF SYMBOLS 1...Threaded rotating shaft, 2...Motor, 3...Coupling, 5...Chamber, 6...Sample stage, 7...Nut, 13...Case, 15...
Upper lid, 20...Moving axis, 21...Spring, 2
2...Natsuto, 23...Brock, 24, 25...
...Roller, 26, 27...Guide plate, 28, 2
9, 30, 31...Fixing screw, 32, 33...Pin, 34...Top lid.

Claims (1)

[Scope of utility model registration request] a screw-like rotating shaft coupled to a rotating shaft of a motor or the like; a moving shaft through which the rotational motion of the screw-like rotating shaft is transmitted via a nut screwed onto the screw-like rotating shaft;
A device comprising: a roller provided on a moving shaft for regulating the rotational motion of the moving shaft; and a guide plate for regulating the rotational motion of the moving shaft via the roller and converting it into linear motion, A sample stage moving device for electron beam exposure, comprising a spring that applies a constant pressing force to the threaded rotating shaft and the threaded part of the nut.