JPH04106621U - Clean room filter duct unit - Google Patents

Abstract

(57) [Summary] [Purpose] This invention not only makes it possible to raise the indoor ceiling without requiring a ceiling chamber or filter chamber, but also allows for uniform laminar flow of clean air by using a rectifying member. It is an object of the present invention to provide a filter duct unit for a clean room, which is easy to produce, easy to install, and can be manufactured at low cost. [Structure] A duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction, a filter, and a connecting flange having a curved portion on at least one side, and at least one side in the longitudinal direction of the filter. is curved and attached to a duct having a U-shaped cross section, connecting flanges are attached to both longitudinal ends of the duct having a U-shaped cross section, and the filter is installed within the connecting flanges.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a filter duct unit used in a clean room.

0002

[Conventional technology]

For example, in a clean room where semiconductor wafers are manufactured, the indoor air A high degree of cleanliness is required.

0003 Conventionally, as this type of clean room, for example, a full laminar nerf as shown in Fig. 9 has been used. Low (full ceiling airflow) method and conventional (partial ceiling airflow) method shown in Figure 10. ) method is used.

0004 In the above-mentioned full-surface laminar flow method, the upper part of the clean room R is A ceiling chamber Tc is fully provided, and an air supply duct Ds is connected to the ceiling chamber Tc. At the same time, HEPA (High Efficiency Particulate Airfilter) is installed and the circulating air is supplied through the air supply duct Ds. By passing the air a through this filter H, its cleanliness is increased and the cleanliness is increased. A descending laminar flow is blown into the room R.

[0005] In addition, in the conventional method, as shown in Figure 10, the upper part of the clean room R A filter chamber with filters H provided on the bottom surface at required locations on a ceiling plate Tb stretched over the By installing multiple Hc and guiding the air supply duct Ds that branches to each, a clean loop is installed. Clean air a with increased cleanliness is blown out partially downward into the room R.

[0006]

[Problem that the idea aims to solve]

However, in the case of the full laminar flow system, the clean air flow is uniform. Although the flow is laminar, it requires a ceiling chamber and a filter is installed throughout the room, so it cannot be used indoors. Not only will the ceiling be lower, but materials and facility construction costs will also be expensive. .

[0007] In addition, in the conventional type, the filter part of the filter chamber is It protrudes from the bottom surface of the plate, and clean air can only be blown out in one direction, downwards. , a vortex is generated on the side of the protruding part and stagnates, preventing a circulating airflow, making it difficult to clean. The disadvantage is that it cannot be done.

[0008] This invention was devised to solve these conventional problems, and its purpose is to: No ceiling chamber or filter chamber is required, allowing for higher indoor ceilings. Not only that, but also a uniform laminar flow of clean air can be obtained by using a rectifying member, further improving the efficiency of the work. A filter duct for clean rooms that is easy to construct and install, reducing costs. The aim is to provide the following units.

[0009]

[Means to solve the problem]

Claim 1 is a duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction. and a filter, and a connecting flange having a curved portion on at least one side, At least one longitudinal side of the filter is curved and installed in a duct having a U-shaped cross section. At the same time, connect flanges are installed at both longitudinal ends of the duct, which has a U-shaped cross section. It consists of a filter installed within a flange for attachment and connection.

0010 Claim 2 provides a duct having a U-shaped cross section, with flanges attached to both ends in the longitudinal direction. , a filter, and a connecting flange having a curved part on one side, One longitudinal side is curved and attached to the flange, and the fitting is inserted into the flange for connection. erect the end of the router, place a plate on the part facing the curved part of the filter, and A reinforcing plate is placed on top of the board, and a duct with a U-shaped cross section is placed on the reinforcing plate. It is constructed by attaching.

[0011] Claim 3 provides a duct having a U-shaped cross section, with flanges attached to both ends in the longitudinal direction. , a filter, and a connecting flange having curved portions on both sides, Curve both sides of the longitudinal direction and attach it to the flange to fit the fitting inside the flange for connection. erect the end of the filter, place the reinforcing plate on top of the filter, and place the reinforcing plate on top of the filter. It is constructed by attaching a duct with a U-shaped cross section.

0012

[Effect]

In this invention, a filter duct of a predetermined length is formed via a connecting flange. This filter duct can be cleaned through a duct with a U-shaped cross section. It can be installed on the ceiling of the room.

[0013] When clean air is sent into the filter duct, the flat part of the filter The air blows out towards the clean room floor, and at the curved part of the filter it blows out 18 degrees below the ceiling surface. Clean air can be blown out in the 0 degree or 90 direction.

[0014]

【Example】

Hereinafter, embodiments of the present invention will be described based on the drawings. Figures 1 to 3 show the first implementation of the present invention applied to a ceiling corner filter duct unit. An example is shown, and 21 is a filter duct unit for the corner of the ceiling.

[0015] This ceiling corner filter duct unit 21 has flanges 23 on both ends in the longitudinal direction. A duct 22 with a U-shaped cross section, a filter 24, and a curved part 2 on one side. 6, and one longitudinal side of the filter 24. Curve it, attach it to the connection flange 25, and pack it inside the connection flange 25. The end of the filter 24 is installed through the tube 30, and is paired with the curved part 24a of the filter 24. A plate body 27 is arranged at a portion facing the filter 24 and a reinforcing plate is placed on the top of the plate body 27. 28, 29, and place the duct 22, which has a U-shaped cross section, on the reinforcing plates 28, 29. After attaching the reinforcing plates 28 and 29, fix them with screws 31. It has become.

[0016] Additionally, the flanges 23 and 25 have holes for countersunk screws for attaching countersunk screws 33 for connection. A plurality of holes 32 are bored at appropriate intervals. The ceiling corner filter duct unit 21 configured in this way is At the same time, the flanges 23 and 25 are joined to each other, and connected by countersunk screws 33. For example, it is possible to form a ceiling corner duct 10 of a predetermined length as shown in FIG. can.

[0017] 4 to 6 show examples of the ceiling filter duct unit 41. . This ceiling filter duct unit 41 has flanges 43 on both longitudinal ends. An attached duct 42 with a U-shaped cross section, a filter 44, and curved parts 47 on both sides It has a connecting flange 46 having a Bend it and attach it to the connection flange 46, and insert the packing inside the connection flange 46. The end of the filter 44 is installed through the filter 44, and an appropriate space is placed on the side of the upper part of the filter 44. Reinforcement plates 48 and 49 with a plurality of countersunk screw mounting holes 52 drilled at intervals are placed and reinforced. After installing the duct 42 having a U-shaped cross section on the plates 48 and 49, the reinforcing plate The parts 48 and 49 are fixed with screws 53.

[0018] Additionally, the flanges 43 and 46 have holes 54 for countersunk screws for attaching connecting countersunk screws. A plurality of holes are drilled at appropriate intervals. The ceiling filter duct unit 41 configured in this way is The flanges 43 and 47 are joined together and connected by countersunk screws, For example, a ceiling duct 20 having a predetermined length as shown in FIG. 7 can be formed.

[0019] FIG. 7 shows a ceiling corner filter duct unit formed according to FIGS. 1 to 4. A clean room R consisting of a duct 21 and a ceiling filter duct unit 41 is constructed. show.

[0020] First, install the required number of filter duct units for the corners of the ceiling according to the dimensions of the clean room R. The knit 21 and ceiling filter duct unit 41 are connected to each other for ceiling corner use. Assemble the filter duct 10 and the ceiling filter duct 20, and install the air supply duct Ds. The cover plates 9 and 19 having the connection ports 9a and 19a for connecting the branch duct Db of the above-mentioned At both ends of the assembled ceiling corner filter duct 10 and ceiling filter duct 20 After installing and closing them, and placing them at the designated positions on the ceiling Rt of clean room R. , the branch duct Db is connected to each connection port 9a, 19a. Next, install the ceiling corner fixing. The rectifying member S is placed between the router duct 10 and the ceiling filter duct 20. Installed on the ceiling Rt surface.

[0021] Thereby, a clean room R shown in FIG. 7 can be formed. In the clean room R configured in this way, there is a branch duct Db of the air supply duct Ds. Circulating air is then sent to these ceiling corner filter ducts 10 and ceiling filter ducts 20. When A is sent in, as shown in FIG. 8, in the clean room R, the filter 24 The clean air a blown out from 44 is blown out in the horizontal direction by the rectifying member S. The direction of movement is guided downward, and the air that blows out diagonally downward merges from both directions and flows downward. The things that blow out towards the other side and downwards continue towards the floor, and these are combined. The flow becomes a descending laminar flow, and no vortex flow that stagnates near the ceiling Rt is generated.

[0022] Note that a pair of ceiling corner filter duct units 21 can be connected back to back. Therefore, it can be used in place of the ceiling filter duct unit 41. Also, when installing a filter duct in clean room R, use a ceiling corner flap. A ceiling corner filter without being assembled to the filter duct 10 and the ceiling filter duct 20. Install the filter duct unit 21 and ceiling filter duct unit 41 in turn. Finally, connect the filter duct 10 for the ceiling corner and the ceiling filter. It is also possible to make the router duct 20, so the parts handled at one time are small. Since it is lightweight, installation work becomes faster and easier.

[0023] This clean room R has a cross section because the ducts 22 and 42 have a box cross section. The product becomes larger, making it possible to supplement the specified air volume, and the longer longitudinal direction increases the air volume. Suitable for many types of products.

[0024] In addition, according to this embodiment, the filter portion that hangs below the ceiling is made as short as possible. ducts 22, 42 can be formed by placing them in the ceiling. Ru.

[0025]

[Effect of the idea]

As explained above, the present invention provides a cut-off filter having at least one side curved. Since it is configured to be combined with a U-shaped duct, it is possible to not only form the outer shell but also to form the filter. It is extremely easy to assemble and can even be installed in a clean room. Since the work can be carried out efficiently, not only can costs be reduced, but ceiling chimes can also be There is no need to provide a chamber, a filter chamber, an air supply duct installation section, etc. This allows you to raise the ceiling in your room.

[0026] Also, when blowing clean air into the room, the blowing area should be expanded horizontally, diagonally, and downward. It can be expanded, and the horizontal blowout can be changed to a downward flow using a rectifying member. , cleanliness is increased by supplying laminar flow without causing vortex flow to remain under the ceiling. They are expensive.

[0027] Furthermore, the duct with a U-shaped cross section makes it possible to increase the cross-sectional area, making it possible to A clean room with a long longitudinal direction and a high air volume can supplement the fixed air volume. Suitable for

[Brief explanation of drawings]

FIG. 1 is a perspective view of a ceiling corner filter duct unit according to an embodiment of the present invention.

FIG. 2 is an exploded view of the ceiling corner filter duct unit in FIG. 1;

FIG. 3 is an enlarged view of the joint part of the ceiling corner filter duct unit in FIG. 1;

FIG. 4 is a perspective view of a ceiling filter duct unit that is an embodiment of the present invention.

5 is an exploded view of the ceiling filter duct unit in FIG. 4. FIG.

6 is an enlarged view of the joint portion of the ceiling filter duct unit in FIG. 4. FIG.

FIG. 7 is a transparent perspective view of a clean room showing a state in which the present embodiment is used.

8 is a front view showing the flow of clean air in the clean room shown in FIG. 7. FIG.

FIG. 9 is a front view showing the general configuration of a clean room using a conventional full-surface laminar flow system.

FIG. 10 is a front view showing the general configuration of a conventional clean room.

[Explanation of symbols]

21 Ceiling corner filter duct unit 41 Ceiling filter duct unit 22,42 duct 23, 25, 45, 46 flange 24,44 filter 24a, 44a curved part 27 Board 28, 29, 48, 49 Reinforcement plate

Claims (3)

[Scope of utility model registration request] Claim 1: A duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction, a filter, and a connecting flange having a curved portion on at least one side, the duct having a duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction; The filter is constructed by curving the sides and attaching it to a duct with a U-shaped cross section, attaching connecting flanges to both longitudinal ends of the duct having a U-shaped cross section, and installing a filter within the connecting flange. Features of clean room filter duct unit. 2. A duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction, a filter, and a connecting flange having a curved portion on one side, the duct having one side in the longitudinal direction of the filter. The filter is curved and attached to the flange, the end of the filter is installed within the connecting flange, a plate is placed on the part facing the curved part of the filter, and a reinforcing plate is placed on top of the filter and the plate. 2. The clean room filter duct unit according to claim 1, further comprising a duct having a U-shaped cross section attached to a reinforcing plate. 3. A duct having a U-shaped cross section with flanges attached to both ends in the longitudinal direction, a filter, and a connecting flange having curved portions on both sides, wherein both longitudinal sides of the filter are curved. The filter is attached to a flange, the end of the filter is installed within the connecting flange, a reinforcing plate is placed on top of the filter, and a duct having a U-shaped cross section is attached to the reinforcing plate. The clean room filter duct unit according to claim 1.