JPH0397607U

JPH0397607U -

Info

Publication number: JPH0397607U
Application number: JP460890U
Authority: JP
Priority date: 1990-01-24
Filing date: 1990-01-24
Publication date: 1991-10-08
Anticipated expiration: 2005-01-24
Also published as: JPH0738806Y2

Description

[Brief explanation of the drawing]

第１図は本考案にかかる干渉計の一部分を切断
して示す正面図、第２図は従来の干渉計の筺体の
天板を取除いてその内部を示す平面図、第３図は
従来の干渉計の一部を切断して示す正面図である
。Ｘ……干渉計、８６……被検査体、１０……基
台、２０……筒状支柱、３０……アーム状支柱、
４０……筺体、５０……レーザー光用光学系、６
０……干渉縞結像用光学系、７０……撮像部、８
０……レーザー光射出用筒体、９０……レーザー
発振器。 Fig. 1 is a front view showing a part of the interferometer according to the present invention cut away, Fig. 2 is a plan view showing the inside of the conventional interferometer with the top plate removed, and Fig. 3 is a plan view of the conventional interferometer. FIG. 2 is a partially cutaway front view of the interferometer. X... Interferometer, 86... Test object, 10... Base, 20... Cylindrical support, 30... Arm-shaped support,
40... Housing, 50... Laser beam optical system, 6
0... Optical system for interference fringe imaging, 70... Imaging unit, 8
0...Cylinder for laser beam emission, 90...Laser oscillator.

補正平２．１２．７考案の名称を次のように補正する。考案の名称干渉計実用新案登録請求の範囲、図面の簡単な説明を
次のように補正する。Amendment 2.12.7 The name of the invention is amended as follows. Title of the invention: Interferometer The scope of the claims for utility model registration and the brief description of the drawings are amended as follows.

【実用新案登録請求の範囲】基台上に樹立した筒状支柱にアーム付き支柱の
筒状基部を外嵌し、筒状支柱に沿つて上下方向に
移動、かつ固定可能となしたアーム付き支柱にお
けるアームの自由端側には、レーザー光用光学系
と撮像系とが内蔵せしめられた筺体より垂設され
、レーザー光をコリメータレンズと基準原器とを
通して被検体に照射するレーザー光射出用筒体を
固定する一方、前記筒状支柱の内部には、前記筺
体のレーザー光用光学系へのレーザー光発振用の
レーザー発振器を配装せしめてなることを特徴と
する干渉計。[Claim for Utility Model Registration] An arm-equipped column in which the cylindrical base of the arm-equipped column is fitted onto a cylindrical column established on a base, so that it can move vertically along the cylindrical column and be fixed. On the free end side of the arm , a laser beam optical system and an imaging system are installed perpendicularly from the housing.
A laser beam emitting cylinder is fixed , which irradiates the specimen with laser beam through a collimator lens and a reference standard. for oscillation
An interferometer characterized by being equipped with a laser oscillator.

【図面の簡単な説明】第１図は本考案にかかる干渉計の一部分を切断
して示す正面図、第２図は従来の干渉計の筺体の
天板を取除いてその内部を示す平面図、第３図は
従来の干渉計の一部を切断して示す正面図である
。Ｘ……干渉計、１０……基台、２０……筒状支
柱、３０……アーム付き支柱、４０……筺体、５
０……レーザー光用光学系、６０……干渉縞結像
用光学系、７０……撮像部、８０……レーザー光
射出用筒体、８６……被検体、９０……レーザー
発振器。[Brief Description of the Drawings] Fig. 1 is a partially cutaway front view of the interferometer according to the present invention, and Fig. 2 is a plan view showing the interior of the conventional interferometer housing with the top plate removed. , FIG. 3 is a partially cutaway front view of a conventional interferometer. X... Interferometer, 10... Base, 20... Cylindrical support, 30... Support with arm, 40... Housing, 5
0... Optical system for laser light, 60... Optical system for interference fringe imaging, 70... Imaging section, 80... Cylindrical body for laser beam emission, 86... Subject, 90... Laser oscillator.

Claims

[Scope of utility model registration request]

The cylindrical base of an arm-shaped support fitted onto a cylindrical support erected on a base can be moved vertically and fixed, and the free end side of the arm-shaped support is equipped with a laser beam optical system and an imaging system. A laser beam emitting cylinder is connected to the lower part of the housing in which the system is built, and the laser beam is irradiated to the object to be inspected below through the collimator lens and the reference standard. An interferometer characterized in that an upper end thereof is connected to the housing, and a laser oscillator for emitting a laser beam is inserted into the optical system for laser beam.