JPS6265546U - - Google Patents
Info
- Publication number
- JPS6265546U JPS6265546U JP15669985U JP15669985U JPS6265546U JP S6265546 U JPS6265546 U JP S6265546U JP 15669985 U JP15669985 U JP 15669985U JP 15669985 U JP15669985 U JP 15669985U JP S6265546 U JPS6265546 U JP S6265546U
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- mounting member
- substrate
- light
- irradiated light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案の一実施例を示す概略図、第２
図はその上面図である。
１……検体、２……ツメ、３……試料台、４…
…投光機、５……拡大鏡。
Figure 1 is a schematic diagram showing one embodiment of the present invention;
The figure is a top view. 1... Specimen, 2... Claw, 3... Sample stage, 4...
...Floodlight, 5...Magnifying glass.
Claims (1)
れた中空体と、上記開放面に被観測透明基板を取
付ける取付け部材と、コリメートされた照射光を
上記取付部材により取付けられた基板表面に対し
斜め上方より照射する手段と、該照射光の反射光
軸と異なる光軸を有し、上記照射光の照射点を俯
瞰するデフエクト観察用の拡大鏡とを有する基板
表面検査機。 A hollow body with an open surface on one side and an anti-reflection treatment applied to the inner surface, a mounting member for attaching a transparent substrate to be observed to the open surface, and a collimated irradiation light directed toward the surface of the substrate mounted by the mounting member. A substrate surface inspection machine comprising means for emitting light from diagonally above, and a magnifying glass for defect observation that has an optical axis different from the reflected optical axis of the irradiated light and overlooks the irradiation point of the irradiated light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15669985U JPS6265546U (en) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15669985U JPS6265546U (en) | 1985-10-14 | 1985-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6265546U true JPS6265546U (en) | 1987-04-23 |
Family
ID=31078562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15669985U Pending JPS6265546U (en) | 1985-10-14 | 1985-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265546U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184116A (en) * | 1982-04-21 | 1983-10-27 | Matsushita Electric Ind Co Ltd | Examining method of defect on surface of light-transmittable object |
-
1985
- 1985-10-14 JP JP15669985U patent/JPS6265546U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58184116A (en) * | 1982-04-21 | 1983-10-27 | Matsushita Electric Ind Co Ltd | Examining method of defect on surface of light-transmittable object |
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