JPH0395654U - - Google Patents
Info
- Publication number
- JPH0395654U JPH0395654U JP297090U JP297090U JPH0395654U JP H0395654 U JPH0395654 U JP H0395654U JP 297090 U JP297090 U JP 297090U JP 297090 U JP297090 U JP 297090U JP H0395654 U JPH0395654 U JP H0395654U
- Authority
- JP
- Japan
- Prior art keywords
- side plates
- protrusions
- grooves
- wafer carrier
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
Description
第１図は本考案の一実施例を示し、第１図ａは
その上面図、第１図ｂはその側板の分解図である
。第２図ａ，ｂは従来例を示す。
１１ａ，１１ｂ，１２ａ，１２ｂ……側板、２
１ａ，２１ｂ，２２ａ，２２ｂ……突条、３１ａ
，３１ｂ，３２ａ，３２ｂ……溝。
Fig. 1 shows an embodiment of the present invention, Fig. 1a is a top view thereof, and Fig. 1b is an exploded view of its side plate. FIGS. 2a and 2b show a conventional example. 11a, 11b, 12a, 12b...Side plate, 2
1a, 21b, 22a, 22b...projection, 31a
, 31b, 32a, 32b... groove.
Claims (1)
する半導体ウエハキヤリアにおいて、 前記４つの側板は各々取り外し可能にし、かつ
側板のいずれかの２枚は突条を有し、他の２枚は
該突条を受容する溝を有し、該溝に突条を嵌合す
ることにより組立て可能とした半導体ウエハキヤ
リア。[Claims for Utility Model Registration] A semiconductor wafer carrier having four side plates and storing semiconductor wafers therein, each of the four side plates being removable, and any two of the side plates having a protrusion. However, the other two have grooves for receiving the protrusions, and the semiconductor wafer carrier can be assembled by fitting the protrusions into the grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297090U JPH0395654U (en) | 1990-01-17 | 1990-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297090U JPH0395654U (en) | 1990-01-17 | 1990-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395654U true JPH0395654U (en) | 1991-09-30 |
Family
ID=31506813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP297090U Pending JPH0395654U (en) | 1990-01-17 | 1990-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395654U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007082944A (en) * | 2005-09-26 | 2007-04-05 | Combi Wellness Corp | Training apparatus |
| JP2007082945A (en) * | 2005-09-26 | 2007-04-05 | Combi Wellness Corp | Training apparatus |
-
1990
- 1990-01-17 JP JP297090U patent/JPH0395654U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007082944A (en) * | 2005-09-26 | 2007-04-05 | Combi Wellness Corp | Training apparatus |
| JP2007082945A (en) * | 2005-09-26 | 2007-04-05 | Combi Wellness Corp | Training apparatus |
| JP4545670B2 (en) * | 2005-09-26 | 2010-09-15 | コンビウェルネス株式会社 | Training equipment |