JPH0394753U - - Google Patents
Info
- Publication number
- JPH0394753U JPH0394753U JP213290U JP213290U JPH0394753U JP H0394753 U JPH0394753 U JP H0394753U JP 213290 U JP213290 U JP 213290U JP 213290 U JP213290 U JP 213290U JP H0394753 U JPH0394753 U JP H0394753U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- anode
- magnetic field
- cover plate
- cusp magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP213290U JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP213290U JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0394753U true JPH0394753U (ru) | 1991-09-26 |
JPH0720838Y2 JPH0720838Y2 (ja) | 1995-05-15 |
Family
ID=31506012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP213290U Expired - Lifetime JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720838Y2 (ru) |
-
1990
- 1990-01-11 JP JP213290U patent/JPH0720838Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0720838Y2 (ja) | 1995-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006093076A1 (ja) | イオン源 | |
RU2006113516A (ru) | Вакуумная нейтронная трубка | |
JPH0394753U (ru) | ||
JPS6250941B2 (ru) | ||
JP3127636B2 (ja) | イオン源 | |
JPS62193660U (ru) | ||
JPH0295148U (ru) | ||
RU2003116203A (ru) | Ионный источник с холодным катодом | |
JPS62193659U (ru) | ||
JPH0366142U (ru) | ||
JPH02110166U (ru) | ||
JPH0339882Y2 (ru) | ||
JPH0616395Y2 (ja) | 液体用タ−ゲツトボツクス | |
JPS62193656U (ru) | ||
JPH03109258U (ru) | ||
JPS6328243U (ru) | ||
JPS5974659U (ja) | イオン注入装置のイオン発生装置 | |
JPS6240756U (ru) | ||
JPS6269363U (ru) | ||
JPH07211275A (ja) | イオン源 | |
JPH0298451U (ru) | ||
JPH0449447U (ru) | ||
JPS63112745U (ru) | ||
JPH01158573U (ru) | ||
JPH0537959U (ja) | イオンプレーテイング装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |