JPH039436B2 - - Google Patents

Info

Publication number
JPH039436B2
JPH039436B2 JP60094818A JP9481885A JPH039436B2 JP H039436 B2 JPH039436 B2 JP H039436B2 JP 60094818 A JP60094818 A JP 60094818A JP 9481885 A JP9481885 A JP 9481885A JP H039436 B2 JPH039436 B2 JP H039436B2
Authority
JP
Japan
Prior art keywords
arm
vacuum container
image guide
vacuum
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60094818A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61251785A (ja
Inventor
Kenjiro Obara
Tetsuya Abe
Hiroshi Takeshita
Atsushi Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60094818A priority Critical patent/JPS61251785A/ja
Publication of JPS61251785A publication Critical patent/JPS61251785A/ja
Publication of JPH039436B2 publication Critical patent/JPH039436B2/ja
Granted legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

Landscapes

  • Spray Control Apparatus (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP60094818A 1985-04-30 1985-04-30 真空容器内壁補修装置 Granted JPS61251785A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60094818A JPS61251785A (ja) 1985-04-30 1985-04-30 真空容器内壁補修装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60094818A JPS61251785A (ja) 1985-04-30 1985-04-30 真空容器内壁補修装置

Publications (2)

Publication Number Publication Date
JPS61251785A JPS61251785A (ja) 1986-11-08
JPH039436B2 true JPH039436B2 (ko) 1991-02-08

Family

ID=14120633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60094818A Granted JPS61251785A (ja) 1985-04-30 1985-04-30 真空容器内壁補修装置

Country Status (1)

Country Link
JP (1) JPS61251785A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249191A (ja) * 1988-04-27 1990-02-19 Japan Atom Energy Res Inst ダイバータ表面の保守修理装置とその方法
CN102877028A (zh) * 2011-07-13 2013-01-16 圆益Ips股份有限公司 蒸镀装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102498A (ja) * 1981-12-15 1983-06-18 日本原子力研究所 真空装置の内部観察装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103597U (ko) * 1979-01-16 1980-07-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58102498A (ja) * 1981-12-15 1983-06-18 日本原子力研究所 真空装置の内部観察装置

Also Published As

Publication number Publication date
JPS61251785A (ja) 1986-11-08

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