JPH0392766U - - Google Patents
Info
- Publication number
- JPH0392766U JPH0392766U JP15294889U JP15294889U JPH0392766U JP H0392766 U JPH0392766 U JP H0392766U JP 15294889 U JP15294889 U JP 15294889U JP 15294889 U JP15294889 U JP 15294889U JP H0392766 U JPH0392766 U JP H0392766U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- shutter
- vapor
- deposited
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図はこの考案の実施例のシヤツタをハース
と共に示す断面図である。第２図は従来のシヤツ
タをハースと共に示す断面図である。
１……ソース、１ａ……蒸発物質、１ｂ……蒸
着物質層、２……ハース、４……シヤツタ、５…
…多孔体。
FIG. 1 is a sectional view showing a shutter according to an embodiment of this invention together with a hearth. FIG. 2 is a sectional view showing a conventional shutter together with a hearth. 1... Source, 1a... Evaporated substance, 1b... Evaporated material layer, 2... Hearth, 4... Shutter, 5...
...Porous body.
Claims (1)
れるシヤツタにおいて、 下面を凹凸面に形成したことを特徴とする蒸着
装置用シヤツタ。[Claims for Utility Model Registration] A shutter for a vapor deposition apparatus, which is arranged movably between a hearth and an object to be vapor-deposited, and is characterized in that the lower surface is formed with an uneven surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294889U JPH0392766U (en) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294889U JPH0392766U (en) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392766U true JPH0392766U (en) | 1991-09-20 |
Family
ID=31699184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15294889U Pending JPH0392766U (en) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392766U (en) |
-
1989
- 1989-12-28 JP JP15294889U patent/JPH0392766U/ja active Pending