JPH0211157U - - Google Patents
Info
- Publication number
- JPH0211157U JPH0211157U JP8766688U JP8766688U JPH0211157U JP H0211157 U JPH0211157 U JP H0211157U JP 8766688 U JP8766688 U JP 8766688U JP 8766688 U JP8766688 U JP 8766688U JP H0211157 U JPH0211157 U JP H0211157U
- Authority
- JP
- Japan
- Prior art keywords
- source
- hearth
- evaporation
- housed
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の蒸発源の断面図
である。第２図は従来の蒸発源の断面図である。
１……ハース、２……凹部、４……ハースライ
ナ、５……ソース、８……リング。
FIG. 1 is a sectional view of an evaporation source according to an embodiment of this invention. FIG. 2 is a cross-sectional view of a conventional evaporation source. 1... Hearth, 2... Recess, 4... Hearth liner, 5... Source, 8... Ring.
Claims (1)
されたハースライナと、このハースライナ内に収
容されたソースとを備えてなる蒸発源において、 前記ハースライナの内壁に沿つてソースよりも
高融点のリングを介在したことを特徴とする蒸着
装置の蒸発源。[Claims for Utility Model Registration] In an evaporation source comprising a hearth having a recessed portion on the upper surface, a hearth liner housed in the recessed portion, and a source housed within the hearth liner, the source is placed along an inner wall of the hearth liner. An evaporation source for an evaporation device characterized by interposing a ring with a higher melting point than that of the evaporation source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8766688U JPH0211157U (en) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8766688U JPH0211157U (en) | 1988-06-30 | 1988-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0211157U true JPH0211157U (en) | 1990-01-24 |
Family
ID=31312267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8766688U Pending JPH0211157U (en) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0211157U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744171B2 (en) * | 1979-01-29 | 1982-09-20 | ||
| JPS6346461B2 (en) * | 1980-07-24 | 1988-09-14 | Fujitsu Ltd |
-
1988
- 1988-06-30 JP JP8766688U patent/JPH0211157U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744171B2 (en) * | 1979-01-29 | 1982-09-20 | ||
| JPS6346461B2 (en) * | 1980-07-24 | 1988-09-14 | Fujitsu Ltd |