JPH0392031U - - Google Patents

Info

Publication number
JPH0392031U
JPH0392031U JP15315289U JP15315289U JPH0392031U JP H0392031 U JPH0392031 U JP H0392031U JP 15315289 U JP15315289 U JP 15315289U JP 15315289 U JP15315289 U JP 15315289U JP H0392031 U JPH0392031 U JP H0392031U
Authority
JP
Japan
Prior art keywords
shaft body
vapor phase
phase growth
rotating shaft
regular polygon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15315289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15315289U priority Critical patent/JPH0392031U/ja
Publication of JPH0392031U publication Critical patent/JPH0392031U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP15315289U 1989-12-28 1989-12-28 Pending JPH0392031U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15315289U JPH0392031U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15315289U JPH0392031U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0392031U true JPH0392031U (enrdf_load_stackoverflow) 1991-09-19

Family

ID=31699376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15315289U Pending JPH0392031U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0392031U (enrdf_load_stackoverflow)

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